Solar cell production equipment and cell piece off-line hydrogen reduction treatment device

Abstract

The utility model relates to solar cell production equipment and a cell offline hydrogen reduction processing device. The solar cell production equipment comprises a TCO deposition chamber, a hydrogen reduction chamber and a PVD copper plating chamber which are communicated in sequence. The off-line hydrogen reduction treatment device for the battery piece comprises a feeding vacuum chamber, a hydrogen reduction chamber and a cooling discharging chamber which are communicated in sequence. According to the solar cell production equipment and the cell off-line hydrogen reduction treatment device, the hydrogen reduction chamber is arranged to carry out hydrogen reduction treatment on the blue membrane, through hydrogen reduction treatment, the content of divalent tin ions in the TCO layer is increased, the divalent tin ions have better conductivity, and the contact resistance of the cell is reduced. In addition, hydrogen atoms can react with impurities in the sediment to form a gas-phase product, the content of the impurities is reduced, organic matter and other impurities on the surface can be removed, a very strong cleaning effect on the metal and nonmetal surfaces is achieved, and a clean surface condition is provided for the subsequent PVD seed copper process.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic production equipment, in particular to a solar cell production equipment and a cell sheet off-line hydrogen reduction treatment device. Background Art

[0002] The manufacturing of heterojunction solar cells (HJT cells) includes processes such as cleaning and texturing, silicon-based thin film deposition, transparent conductive film (TCO) deposition, and electrode preparation. Among them, the transparent conductive film deposition process usually uses physical vapor deposition PVD, and the transparent conductive film generally uses indium tin oxide (ITO). When conventional low-indium cell pieces are coated with PVD blue film, the process gases introduced include argon and hydrogen. Among them, argon gas is ionized into Ar+, forming plasma, bombarding the target material, and the atoms on the surface of the target material escape from the original lattice. The sputtered particles are deposited on the substrate surface and react with oxygen atoms to form an oxide film. Hydrogen is used to increase the carrier concentration, make up for defects, improve the blue film square resistance, and improve battery efficiency.

[0003] However, for copper electrodes based on TCO layers, the addition of hydrogen during TCO layer plating will increase their contact resistance, thereby increasing the series resistance (Rs) and reducing the fill factor (FF). After analysis, this may be because the ratio of divalent tin to tetravalent tin in the TCO layer has not reached a good critical point. After PVD blue film, tetravalent tin ions account for 60%-80%, and divalent tin ions account for 20%-40%. Divalent tin ions have good conductivity and poor permeability, while tetravalent tin has poor conductivity and good permeability. The high proportion of tetravalent tin ions leads to poor conductivity of the TCO layer and poor bonding between the PVD seed copper and the TCO layer, which increases the contact resistance of the battery cell, indirectly making the efficiency of the silicon wafer lower. Utility Model Content

[0004] Based on this, it is necessary to provide a solar cell production equipment and a cell offline hydrogen reduction treatment device to solve the problems of high cell series resistance and low fill factor.

[0005] A solar cell production device comprises a TCO deposition chamber, a hydrogen reduction chamber and a PVD copper plating chamber which are connected in sequence;

[0006] The TCO deposition chamber is used to plate a TCO layer on a substrate to obtain a blue film;

[0007] The hydrogen reduction chamber is provided with a hydrogenation device, which is used to introduce hydrogen to perform hydrogen reduction treatment on the blue film to obtain a hydrogen-reduced battery cell;

[0008] The PVD electrode chamber is used for plating a metal layer on the hydrogen reduction cell.

[0009] When using the above-mentioned solar cell production equipment for production, the substrate passes through the TCO deposition chamber to plate the TCO layer, and then passes through the hydrogen reduction chamber for hydrogen reduction treatment. After the hydrogen reduction treatment, the content of divalent tin ions in the TCO layer is increased. The divalent tin ions have better conductivity, reduce the contact resistance of the cell, reduce the series resistance, and improve the fill factor. In addition, hydrogen atoms can react with impurities in the sediment to form gas phase products, reduce the content of impurities, remove organic matter and other impurities on the surface, have a strong cleaning effect on metal and non-metal surfaces, and provide clean surface conditions for the subsequent PVD seed copper process.

[0010] In one embodiment, the solar cell production equipment also includes a preheating buffer chamber, which is located between the TCO deposition chamber and the hydrogen reduction chamber and is connected to the TCO deposition chamber and the hydrogen reduction chamber. The preheating buffer chamber is provided with a heating device, and the heating device is used to heat the blue film.

[0011] In one of the embodiments, the solar cell production equipment further includes a feed vacuum chamber, wherein the feed vacuum chamber is located upstream of the TCO deposition chamber and communicates with the TCO deposition chamber.

[0012] In one of the embodiments, the solar cell production equipment further includes a cooling buffer chamber, which is located between the hydrogen reduction chamber and the PVD copper plating chamber and is connected to the hydrogen reduction chamber and the PVD copper plating chamber.

[0013] In one of the embodiments, the solar cell production equipment further includes a cooling discharge chamber, which is located downstream of the PVD copper plating chamber and is communicated with the PVD copper plating chamber.

[0014] A battery cell offline hydrogen reduction treatment device comprises a feed vacuum chamber, a hydrogen reduction chamber and a cooling and discharging chamber, wherein the hydrogen reduction chamber is located between the feed vacuum chamber and the cooling and discharging chamber, and the hydrogen reduction chamber is provided with a hydrogenation device for introducing hydrogen to perform hydrogen reduction treatment on a blue film.

[0015] The above-mentioned off-line hydrogen reduction treatment device for the battery cell is provided with a hydrogen reduction chamber to perform hydrogen reduction treatment on the blue film sheet. After the hydrogen reduction treatment, the content of divalent tin ions in the TCO layer is increased. The divalent tin ions have better conductivity, which reduces the contact resistance of the battery cell, reduces the series resistance, and improves the fill factor. In addition, hydrogen atoms can react with impurities in the sediment to form gas phase products, reduce the content of impurities, remove organic matter and other impurities on the surface, and have a strong cleaning effect on metal and non-metal surfaces, providing clean surface conditions for the subsequent PVD seed copper process. The hydrogen reduction treatment adopts an offline method. After the fault shutdown, it does not affect the production capacity of the PVD blue film and PVD seed copper equipment, and the number of defective products is reduced.

[0016] In one embodiment, the feed vacuum chamber includes a first feed vacuum sub-chamber and a second feed vacuum sub-chamber which are connected in sequence, the second feed vacuum sub-chamber is connected to the hydrogen reduction chamber, the first feed vacuum sub-chamber transitions from an atmospheric pressure state to a vacuum state, and the vacuum degree of the second feed vacuum sub-chamber is higher than the vacuum degree of the first feed vacuum sub-chamber.

[0017] In one embodiment, the cooling and discharging chamber includes a first cooling and discharging sub-chamber and a second cooling and discharging sub-chamber which are connected in sequence, the first cooling and discharging sub-chamber is connected to the hydrogen reduction chamber, the vacuum degree of the second cooling and discharging sub-chamber is lower than the vacuum degree of the first cooling and discharging sub-chamber, and the second cooling and discharging sub-chamber transitions from a vacuum state to an atmospheric pressure state.

[0018] In one of the embodiments, the battery cell offline hydrogen reduction processing device also includes a preheating buffer chamber, which is located between the feed vacuum chamber and the hydrogen reduction chamber and is connected to the feed vacuum chamber and the hydrogen reduction chamber. The preheating buffer chamber is provided with a heating device, which is used to heat the blue film.

[0019] A solar cell production device, comprising a TCO deposition chamber, a cell offline hydrogen reduction treatment device as described in any of the above embodiments, and a PVD copper plating chamber;

[0020] The TCO deposition chamber is used to plate a TCO layer on a substrate to obtain a blue film;

[0021] The PVD electrode chamber is used for plating a metal layer on the hydrogen reduction cell.

[0022] The solar cell production equipment mentioned above has the off-line hydrogen reduction treatment device for the cell described in any of the above embodiments, thereby being able to obtain corresponding beneficial effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] FIG1 is a schematic structural diagram of a solar cell production device according to an embodiment;

[0024] FIG2 is a schematic structural diagram of an off-line hydrogen reduction treatment device for battery cells according to an embodiment of the present invention. DETAILED DESCRIPTION

[0025] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0026] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0027] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0028] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, "plurality" means at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0029] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0030] The present invention provides a solar cell production device, which can be used to produce solar cells such as HJT cells.

[0031] As shown in Fig. 1, a solar cell production device 100 of an embodiment includes a TCO deposition chamber 110, a hydrogen reduction chamber 120 and a PVD copper plating chamber 130 which are connected in sequence. The TCO deposition chamber 110, the preheating buffer chamber 140, the hydrogen reduction chamber 120 and the PVD copper plating chamber 130 are all vacuum chambers.

[0032] Among them, the TCO deposition chamber 110 is used to plate a TCO layer on a substrate, and the substrate includes a silicon wafer, and a passivation layer and a doping layer respectively located on both sides of the silicon wafer, that is, the TCO deposition chamber 110 is used to deposit a TCO layer on the doping layer on both sides of the substrate. The material of the TCO layer can be but is not limited to indium tin oxide (ITO) and the like. The hydrogen reduction chamber 120 is provided with a hydrogenation device, which is used to introduce hydrogen to perform hydrogen reduction treatment on the blue film to obtain a hydrogen-reduced battery cell. The PVD electrode chamber is used to plate a metal layer on the hydrogen-reduced battery cell to obtain a copper-plated battery cell.

[0033] When the solar cell production equipment 100 is used for production, the substrate is plated with a TCO layer in the TCO deposition chamber 110, and then is subjected to a hydrogen reduction treatment in the hydrogen reduction chamber 120. After the hydrogen reduction treatment, the content of divalent tin ions in the TCO layer is increased, and the divalent tin ions have better conductivity, which reduces the contact resistance of the cell, reduces the series resistance, and improves the fill factor. In addition, hydrogen atoms can react with impurities in the deposit to form gas phase products, reduce the content of impurities, remove organic matter and other impurities on the surface, have a strong cleaning effect on metal and non-metal surfaces, and provide clean surface conditions for the subsequent PVD seed copper process.

[0034] Optionally, the power source of the hydrogen reduction chamber 120 may be a DC power source, an RF power source, or the like.

[0035] As shown in FIG1 , in one example, the solar cell production equipment 100 further includes a preheating buffer chamber 140. The preheating buffer chamber 140 is located between the TCO deposition chamber 110 and the hydrogen reduction chamber 120, and is connected to the TCO deposition chamber 110 and the hydrogen reduction chamber 120. The preheating buffer chamber 140 is provided with a heating device, and the heating device is used to heat the blue film.

[0036] When the solar cell production equipment 100 is used for production, the substrate passes through the TCO deposition chamber 110 to be plated with a TCO layer, then passes through the preheating buffer chamber 140 to be heated to a suitable temperature for the subsequent hydrogen ion reduction process, and then passes through the hydrogen reduction chamber 120 for hydrogen reduction treatment. The preheating buffer chamber 140 can also serve as a buffer for the blue film (i.e., the substrate after the TCO layer is grown). When an abnormality occurs in the downstream process, the blue film is buffered in the preheating buffer chamber 140 to ensure process stability.

[0037] As shown in Fig. 1, in one example, the solar cell production equipment 100 further includes a feed vacuum chamber 150. The feed vacuum chamber 150 is located upstream of the TCO deposition chamber 110 and communicates with the TCO deposition chamber 110. The feed vacuum chamber 150 is used to transition the substrate from an atmospheric pressure state to a vacuum state.

[0038] In one example, the feed vacuum chamber 150 includes a first feed vacuum sub-chamber 151 and a second feed vacuum sub-chamber 152 which are connected in sequence. The second feed vacuum sub-chamber 152 is connected to the TCO deposition chamber 110. The first feed vacuum sub-chamber 151 is a transition chamber that transports the substrate from the atmospheric pressure state to the vacuum state. The vacuum degree of the second feed vacuum sub-chamber 152 is higher than the vacuum degree of the first feed vacuum sub-chamber 151. The second feed vacuum sub-chamber 152 and the TCO deposition chamber 110 are in a high vacuum state.

[0039] As shown in FIG1 , in one example, the solar cell production equipment 100 further includes a cooling buffer chamber 160 . The cooling buffer chamber 160 is located between the hydrogen reduction chamber 120 and the PVD copper plating chamber 130 , and is in communication with the hydrogen reduction chamber 120 and the PVD copper plating chamber 130 .

[0040] On the one hand, the cooling buffer chamber 160 cools the hydrogen-reduced battery cells. On the other hand, the cooling buffer chamber 160 can also be used as a buffer chamber in downstream processes such as when an abnormality occurs in the PVD seed copper section to ensure the stability of the hydrogen reduction process and the PVD seed copper process.

[0041] Optionally, the number of cooling cache chambers 160 is not limited to only one, and there may be multiple, for example, 2 to 5. When there are multiple cooling cache chambers 160, the multiple cooling cache chambers 160 are connected in sequence. In the specific example shown in FIG. 1, there are 3 cooling cache chambers 160.

[0042] As shown in FIG1 , in one example, the solar cell production equipment 100 further includes a cooling discharge chamber 170. The cooling discharge chamber 170 is located downstream of the PVD copper plating chamber 130 and is connected to the PVD copper plating chamber 130. The cooling discharge chamber 170 is used for cooling and discharging the copper-plated solar cells.

[0043] In one example, the cooling discharge chamber 170 includes a first cooling discharge sub-chamber 171 and a second cooling discharge sub-chamber 172 which are connected in sequence. The first cooling discharge sub-chamber 171 is connected to the PVD copper plating chamber 130. Among them, the first cooling discharge sub-chamber 171 is a vacuum chamber, which is used to cool the copper-plated battery cells in a vacuum environment to prevent the copper-plated battery cells from contacting with air when the temperature is too high, thereby causing oxidation of the seed copper. The vacuum degree of the second cooling discharge sub-chamber 172 is lower than the vacuum degree of the first cooling discharge sub-chamber 171, and the cooled copper-plated battery cells are discharged from the vacuum state to the atmospheric pressure state through the second cooling discharge sub-chamber 172.

[0044] In one example, the solar cell production equipment 100 further includes a loading mechanism (not shown in the figure). The loading mechanism is used to load the substrate, and the loading mechanism travels through the above chambers, including the TCO deposition chamber 110, the preheating buffer chamber 140, the hydrogen reduction chamber 120, and the PVD copper plating chamber 130.

[0045] The present invention also provides an off-line hydrogen reduction treatment device for battery cells.

[0046] As shown in Fig. 2, an off-line hydrogen reduction treatment device 200 for a battery cell in one embodiment includes a feed vacuum chamber 210, a hydrogen reduction chamber 220, and a cooling and discharging chamber 230. The hydrogen reduction chamber 220 is located between the feed vacuum chamber 210 and the cooling and discharging chamber 230, and the hydrogen reduction chamber 220 is provided with a hydrogenation device, which is used to introduce hydrogen to perform hydrogen reduction treatment on the blue film.

[0047] The above-mentioned battery cell offline hydrogen reduction treatment device 200 is provided with a hydrogen reduction chamber 220 to perform hydrogen reduction treatment on the blue film. After the hydrogen reduction treatment, the content of divalent tin ions in the TCO layer is increased. The divalent tin ions have better conductivity, which reduces the contact resistance of the battery cell, reduces the series resistance, and improves the fill factor. In addition, hydrogen atoms can react with impurities in the sediment to form gas phase products, reduce the content of impurities, remove organic matter and other impurities on the surface, have a strong cleaning effect on metal and non-metal surfaces, and provide clean surface conditions for subsequent PVD seed copper processes. The hydrogen reduction treatment adopts an offline method. After the failure shutdown, it does not affect the production capacity of the TCO deposition equipment and the PVD seed copper equipment, and the number of defective products is reduced.

[0048] Optionally, the power source of the hydrogen reduction chamber 220 may be a DC power source, an RF power source, or the like.

[0049] In one example, the feed vacuum chamber 210 includes a first feed vacuum sub-chamber 211 and a second feed vacuum sub-chamber 212 which are connected in sequence. The second feed vacuum sub-chamber 212 is connected to the hydrogen reduction chamber 220. The first feed vacuum sub-chamber 211 is a transition chamber, and the first feed vacuum sub-chamber 211 transitions from an atmospheric pressure state to a vacuum state, and transports the silicon wafer from an atmospheric pressure state to a vacuum state. The vacuum degree of the second feed vacuum sub-chamber 212 is higher than the vacuum degree of the first feed vacuum sub-chamber 211. The second feed vacuum sub-chamber 212 and the hydrogen reduction chamber 220 are in a high vacuum state.

[0050] In one example, the cooling and discharging chamber 230 includes a first cooling and discharging sub-chamber 231 and a second cooling and discharging sub-chamber 232 which are connected in sequence. The first cooling and discharging sub-chamber 231 is connected to the hydrogen reduction chamber 220. Among them, the first cooling and discharging sub-chamber 231 is a vacuum chamber, which is used to cool the copper-plated battery cells in a vacuum environment to prevent the copper-plated battery cells from coming into contact with air when the temperature is too high, thereby causing oxidation of the seed copper. The vacuum degree of the second cooling and discharging sub-chamber 232 is lower than the vacuum degree of the first cooling and discharging sub-chamber 231, and the second cooling and discharging sub-chamber 232 transitions from a vacuum state to an atmospheric pressure state. The cooled copper-plated battery cells are discharged through the second cooling and discharging sub-chamber 232, transitioning from a vacuum state to an atmospheric pressure state.

[0051] As shown in FIG2 , in one example, the battery cell offline hydrogen reduction treatment device 200 further includes a preheating buffer chamber 240. The preheating buffer chamber 240 is located between the feed vacuum chamber 210 and the hydrogen reduction chamber 220, and is connected to the feed vacuum chamber 210 and the hydrogen reduction chamber 220. The preheating buffer chamber 240 is provided with a heating device, which is used to heat the blue film.

[0052] In the above example, the blue diaphragm is heated to a suitable temperature for the subsequent hydrogen ion reduction process by the preheating buffer chamber 240, and then undergoes hydrogen reduction treatment by the hydrogen reduction chamber 220. The preheating buffer chamber 240 can also serve as a buffer for the blue diaphragm. When an abnormality occurs in the downstream process, the blue diaphragm is buffered in the preheating buffer chamber 240 to ensure process stability.

[0053] In one example, the solar cell production equipment further includes a loading mechanism (not shown in the figure) for loading substrates, and the loading mechanism travels through the above chambers, including the feed vacuum chamber 210, the hydrogen reduction chamber 220, and the cooling and discharging chamber 230.

[0054] Furthermore, the present invention also provides a solar cell production device, comprising a TCO deposition chamber, a cell offline hydrogen reduction treatment device 200 of any of the above examples, and a PVD copper plating chamber.

[0055] The TCO deposition chamber is used to plate a TCO layer on a substrate to obtain a blue film.

[0056] The PVD electrode chamber is used to plate metal layers on hydrogen reduction cells.

[0057] The above-mentioned continuous production solar cell production equipment does not require offline loading and unloading automation, PVD blue film automatic unloading, and PVD seed copper loading length is shorter than the offline solution, which is shortened by about 20m, and the equipment manufacturing cost is lower.

[0058] The above-mentioned off-line hydrogen reduction solar cell production equipment uses an off-line method for hydrogen reduction treatment. Compared with the continuous production solution, after a fault shutdown, it does not affect the production capacity of the PVD blue film and PVD seed copper equipment, and the number of defective products is reduced.

[0059] The solar cell production equipment 100 of the specific example shown in FIG1 was used to produce cells. The hydrogen reduction chamber 120 was processed at a power of 800 W for 30 seconds to produce a group of cells, and a group of cells was produced without the hydrogen reduction chamber 120 working as a control. The series resistance (Rs) and fill factor (FF) of each group of cells produced were tested, and the results are shown in Table 1.

[0060] Table 1

[0061]

[0062] From the results in Table 1, it can be seen that after the blue film is treated with hydrogen reduction, the series resistance is significantly reduced and the fill factor is significantly improved compared with the case without hydrogen reduction treatment.

[0063] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0064] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims, and the description can be used to interpret the content of the claims.

Claims

1. A solar cell production device, characterized in that: It includes a TCO deposition chamber, a hydrogen reduction chamber and a PVD copper plating chamber which are connected in sequence; The TCO deposition chamber is used to plate a TCO layer on a substrate to obtain a blue film; The hydrogen reduction chamber is provided with a hydrogenation device, which is used to introduce hydrogen to perform hydrogen reduction treatment on the blue film to obtain a hydrogen-reduced battery cell; The PVD copper plating chamber is used to plate a metal layer on the hydrogen reduction cell.

2. The solar cell production equipment according to claim 1, characterized in that: The solar cell production equipment also includes a preheating buffer chamber, which is located between the TCO deposition chamber and the hydrogen reduction chamber and is connected to the TCO deposition chamber and the hydrogen reduction chamber. The preheating buffer chamber is provided with a heating device, which is used to heat the blue film.

3. The solar cell production equipment according to claim 1 or 2, characterized in that: The solar cell production equipment further includes a feed vacuum chamber, which is located upstream of the TCO deposition chamber and communicates with the TCO deposition chamber.

4. The solar cell production equipment according to claim 1 or 2, characterized in that: The solar cell production equipment also includes a cooling buffer chamber, which is located between the hydrogen reduction chamber and the PVD copper plating chamber and is communicated with the hydrogen reduction chamber and the PVD copper plating chamber.

5. The solar cell production equipment according to claim 1 or 2, characterized in that: The solar cell production equipment further comprises a cooling discharge chamber, which is located downstream of the PVD copper plating chamber and communicated with the PVD copper plating chamber.

6. A battery cell off-line hydrogen reduction treatment device, characterized in that: It includes a feed vacuum chamber, a hydrogen reduction chamber and a cooling and discharging chamber. The hydrogen reduction chamber is located between the feed vacuum chamber and the cooling and discharging chamber. The hydrogen reduction chamber is provided with a hydrogenation device, which is used to introduce hydrogen to perform hydrogen reduction treatment on the blue membrane to obtain a hydrogen-reduced battery cell.

7. The off-line hydrogen reduction treatment device for battery cells according to claim 6, characterized in that: The feed vacuum chamber includes a first feed vacuum sub-chamber and a second feed vacuum sub-chamber which are connected in sequence, the second feed vacuum sub-chamber is connected to the hydrogen reduction chamber, the first feed vacuum sub-chamber transitions from an atmospheric pressure state to a vacuum state, and the vacuum degree of the second feed vacuum sub-chamber is higher than the vacuum degree of the first feed vacuum sub-chamber.

8. The off-line hydrogen reduction treatment device for battery cells according to claim 6, characterized in that: The cooling and discharging chamber includes a first cooling and discharging sub-chamber and a second cooling and discharging sub-chamber which are connected in sequence, the first cooling and discharging sub-chamber is connected to the hydrogen reduction chamber, the vacuum degree of the second cooling and discharging sub-chamber is lower than the vacuum degree of the first cooling and discharging sub-chamber, and the second cooling and discharging sub-chamber transitions from a vacuum state to an atmospheric pressure state.

9. The off-line hydrogen reduction treatment device for battery cells according to any one of claims 6 to 8, characterized in that: The battery cell off-line hydrogen reduction processing device also includes a preheating buffer chamber, which is located between the feed vacuum chamber and the hydrogen reduction chamber and is connected to the feed vacuum chamber and the hydrogen reduction chamber. The preheating buffer chamber is provided with a heating device, which is used to heat the blue film.

10. A solar cell production device, characterized in that: It comprises a TCO deposition chamber, a battery cell offline hydrogen reduction treatment device as claimed in any one of claims 6 to 9, and a PVD copper plating chamber; The TCO deposition chamber is used to plate a TCO layer on a substrate to obtain a blue film; The PVD copper plating chamber is used to plate a metal layer on the hydrogen reduction cell.

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