Uncovering mechanism and wafer detection device

Abstract

The utility model relates to a cover opening mechanism and a wafer detection device. The uncovering mechanism is applied to the wafer detection device and is used for opening a cover door of the material box; the cover opening mechanism comprises a fixing frame, a cover opening piece and a first moving assembly. The cover opening piece is arranged on the fixing frame and used for adsorbing the cover door. The first moving assembly comprises a first driving part, the first driving part comprises a first air cylinder, a first piston and a sliding table, the first air cylinder extends in the first direction, the first piston is movably arranged in the first air cylinder, the sliding table is slidably arranged on the periphery of the first air cylinder in a sleeving mode and connected with the uncovering part, and the first piston is in linkage with the sliding table; the number of the first driving parts is two, the two first driving parts are arranged in the second direction in a spaced mode, the two first driving parts are matched to be used for driving the uncovering part to move in the first direction, and the first direction intersects with the second direction. The cover opening mechanism has high stability when driving the cover door to move in the first direction, and abrasion to other parts or influence on material detection caused by shaking can be avoided.

Description

Technical Field

[0001] The present application relates to the field of wafer detection technology, and in particular to a cover opening mechanism and a wafer detection device. Background Art

[0002] Wafers are key materials in the semiconductor industry and are silicon chips used to manufacture silicon semiconductor circuits. Specifically, various circuit element structures are processed on silicon wafers to become electronic devices with specific electrical functions, and then quality inspection is performed using wafer inspection equipment. Before testing, wafers are often loaded in a material box, and the opening of the material box is covered with a cover door to prevent the wafer from falling. When the robotic arm needs to grab or store the wafer, the material box needs to be separated from the cover door so that the robotic arm can reach into the material box from the opening to grab the wafer. However, in the existing solution, the opening mechanism has a relatively large shaking amplitude during the process of opening the cover door and lifting the cover door, which may cause wear on the opening mechanism or affect the detection accuracy of the wafer inspection device. Utility Model Content

[0003] In view of this, the present application provides a cover opening mechanism and a wafer detection device, wherein the cover opening mechanism has high stability when driving the cover door to move along the first direction, thereby avoiding wear on other components or affecting the detection of materials due to shaking.

[0004] The present application provides a cover opening mechanism, which is applied to a wafer detection device, wherein the wafer detection device includes a material box and a cover door, wherein the cover door closes the material box, and the cover opening mechanism is used to open the cover door; the cover opening mechanism includes a fixed frame, a cover opening member and a first moving component, wherein the cover opening member is arranged on the fixed frame and is used to adsorb the cover door; the first moving component includes a first driving member, wherein the first driving member includes a first cylinder, a first piston and a sliding table, wherein the first cylinder extends along a first direction, the first piston is movably arranged in the first cylinder, the sliding table is slidably sleeved on the outer periphery of the first cylinder and connected to the cover opening member, the first piston is linked to the sliding table, and when the first piston slides in the first direction in the first cylinder, the sliding table is driven to move along the first direction, thereby driving the cover opening member to move along the first direction; the number of the first driving members is two, the two first driving members are arranged at intervals along the second direction, and the two first driving members cooperate to drive the cover opening member to move along the first direction, wherein the first direction intersects with the second direction.

[0005] Furthermore, the first driving member also includes a first solenoid valve and a second solenoid valve, the first solenoid valve is arranged at one end of the first cylinder close to the cover opening member, and the second solenoid valve is arranged at one end of the first cylinder away from the cover opening member; the first solenoid valve has a first air inlet valve and a first air outlet valve, and the second solenoid valve has a second air inlet valve and a second air outlet valve; when the first air inlet valve and the second air outlet valve are opened at the same time, gas enters the first cylinder from the first air inlet valve, and pushes the first piston to drive the sliding platform together with the cover opening member to move along the first direction toward the direction away from the material box, so as to separate the material box from the cover door.

[0006] Furthermore, the cover opening mechanism also includes a first supporting plate and a second supporting plate, the first supporting plate is connected to the sliding platform, the second supporting plate is slidably connected to the first supporting plate along a third direction, and the cover opening member is connected to the second supporting plate, wherein the first direction, the second direction and the third direction intersect with each other respectively.

[0007] Furthermore, the cover opening mechanism also includes a second moving component, which includes a track component and a sliding component. The track component is arranged on the first supporting plate and extends along a third direction. The sliding component can be slidably connected to the track component and the second supporting plate along the third direction. When the sliding component moves relative to the track component along the third direction, it drives the second supporting plate and the cover opening component to move along the third direction.

[0008] Furthermore, the second moving assembly also includes a second driving member, which includes a second cylinder, a second piston, a first piston rod and a third solenoid valve. The second cylinder extends along a third direction and is arranged on the first supporting plate. The second piston is movably arranged on the second cylinder. The opposite ends of the first piston rod are respectively connected to the second piston and the second supporting plate; the second cylinder includes a first sub-cylinder and a second sub-cylinder arranged at intervals, and the first sub-cylinder has the first piston rod; the third solenoid valve has a first air vent, a second air vent, a third air inlet valve and a third air outlet valve. The first air vent is connected to the first sub-cylinder, and the second air vent is connected to the second sub-cylinder. When the third air inlet valve is connected to the first air vent and the third air outlet valve is connected to the second air vent, gas enters the first sub-cylinder from the first air vent and pushes the second piston and the first piston rod to move along the third direction in a direction away from the material box, so as to drive the second supporting plate and the cover opening member to move along the third direction.

[0009] Furthermore, the cover opening mechanism also includes a sensor assembly, which includes a first sensor, a second sensor and a sensing sheet. The first sensor and the second sensor are arranged on the first supporting plate at intervals along a third direction, and the sensing sheet is arranged on the second supporting plate. The first sensor, the second sensor and the sensing sheet cooperate to detect the relative position of the first supporting plate and the second supporting plate.

[0010] Furthermore, the cover opening mechanism also includes a positioning component, the positioning component includes a third driving member and a positioning member, the third driving member is arranged on one side of the cover opening member, the third driving member is connected to the positioning member, and is used to drive the positioning member to rotate, and the positioning member can be rotatably penetrated on the side of the cover opening member away from the third driving member; the positioning member is used to penetrate the cover door to limit the relative position of the cover opening member and the cover door.

[0011] Further, the third driving member includes a third cylinder, a third piston, a second piston rod and a fourth solenoid valve, the third piston is movably arranged in the third cylinder, one end of the second piston rod is connected to the third piston, and the end of the second piston rod away from the third piston is rotatably connected to the positioning member, the third cylinder includes a third sub-cylinder and a fourth sub-cylinder arranged at intervals, the third sub-cylinder has the second piston rod; the fourth solenoid valve has a third air vent, a fourth air vent, a fourth air inlet valve and a fourth air outlet valve, the third air vent is connected to the third sub-cylinder, and the fourth air vent is connected to the fourth sub-cylinder, when the fourth air inlet valve is connected to the third air vent and the fourth air outlet valve is connected to the fourth vent, gas enters the third sub-cylinder from the third vent, and pushes the third piston and the second piston rod to move in a direction away from the positioning member, so as to drive the positioning member to rotate, thereby allowing the positioning member to penetrate the cover door.

[0012] Furthermore, the cover opening mechanism further comprises a suction member, and the suction member and the positioning member are arranged at a same side of the cover opening member with a spacing therebetween, and are used for suctioning the cover door.

[0013] The present application provides a wafer inspection device, which includes: a material box, a cover door, an opening mechanism provided in the present application, a robotic arm and a probe inspection station, wherein the material box is used to store materials, and the material box has an opening; the cover door closes the opening of the material box; the opening mechanism is used to open the cover door of the material box; the robotic arm is used to take out or place materials from the opening of the material box; the probe inspection station carries the materials and inspects the materials.

[0014] In the present application, the first driving member is a rodless cylinder, the first piston can be movably arranged in the first cylinder along the first direction, and the first piston and the sliding table are linked, so that the first piston can drive the sliding table to slide along the first direction to connect the first cylinder, and then drive the cover opening member to move along the first direction. When the cover opening member absorbs the cover door and moves in the first direction away from the material box, the cover door is separated from the material box, which is convenient for the robot arm to take out or place materials from the opening of the material box. When the cover opening member absorbs the cover door and moves in the first direction toward the direction close to the material box until the cover door and the material box are arranged oppositely, the cover opening member stops the cover door, so that the cover door is separated from the cover opening member, and the opening of the material box is closed to prevent the material in the material box from falling. In the present application, the first driving member is a rodless cylinder. Compared with the solution of setting a rod cylinder to drive the sliding table, the solution provided by the present application can save the height of the cover opening mechanism along the first direction, facilitate the miniaturization design of the cover opening mechanism, and thus facilitate the miniaturization design of the wafer detection device. Furthermore, the number of the first driving members is two, and the two first driving members are spaced apart along the second direction. The two first driving members cooperate with each other to avoid the cover opening member from tilting during the movement along the first direction, thereby reducing the shaking amplitude of the cover opening mechanism used to open the cover door and drive the cover door to move along the first direction, thereby avoiding wear on other components in the wafer detection device due to shaking, and avoiding the impact of shaking on material detection, thereby improving the service life of the cover opening mechanism when applied to the wafer detection device, and also improving the detection accuracy of the wafer detection device for materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the implementation will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 This is a schematic structural diagram of a wafer inspection device according to an embodiment of the present application;

[0017] Figure 2 A schematic diagram of a top view of a wafer inspection device according to an embodiment of the present application;

[0018] Figure 3 This is a schematic diagram of the explosion structure of a wafer inspection device according to an embodiment of the present application;

[0019] Figure 4 This is a schematic structural diagram of a cover opening mechanism according to an embodiment of the present application;

[0020] Figure 5 is a schematic cross-sectional structural diagram of a first driving member according to an embodiment of the present application;

[0021] Figure 6 This is a structural schematic diagram of a cover opening mechanism according to another embodiment of the present application;

[0022] Figure 7 for Figure 4 A is an enlarged view of the dotted box in center A;

[0023] Figure 8 is a schematic cross-sectional structural diagram of a second driving member according to an embodiment of the present application;

[0024] Fig. 9 for Figure 4 A magnified image of the dashed box in middle B;

[0025] Fig.10 for Figure 6 The enlarged view of the dashed box in C;

[0026] Fig.11 Schematic diagram of the cross-sectional structure of a second driving member according to an embodiment of the present application.

[0027] Description of reference numerals:

[0028] 100-opening mechanism, 110-fixed frame, 120-opening member, 130-first moving assembly, 131-first driving member, 1311-first cylinder, 1312-first piston, 1313-sliding table, 132-first solenoid valve, 1321-first air inlet valve, 1322-first air outlet valve, 133-second solenoid valve, 1331-second air inlet valve, 1332-second air outlet valve, 134-first guide member, 135-second guide member, 140-first bearing plate, 150-second bearing plate, 160-second moving assembly, 161-track member, 162-sliding member, 163-second driving member, 1631-second cylinder, 1632-second piston, 1633-first piston rod, 1634-first sub-cylinder, 1635-second sub-cylinder, 164-third solenoid valve, 1641-first ventilation port, 1642-second vent, 1643-third inlet valve, 1644-third outlet valve, 1645-fifth outlet valve, 170-sensor assembly, 171-first sensor, 172-second sensor, 173-sensor sheet, 180-positioning assembly, 181-third drive member, 1811-third cylinder, 1812-third piston, 1813-second piston rod, 1814-third sub-cylinder , 1815-fourth sub-cylinder, 182-fourth solenoid valve, 1821-third air vent, 1822-fourth air vent, 1823-fourth air inlet valve, 1824-fourth air outlet valve, 1825-sixth air outlet valve, 183-positioning piece, 190-adsorption piece, 200-wafer detection device, 210-material box, 211-opening, 220-cover door, 230-robotic arm, 240-probe detection table. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0030] The terms "first", "second", etc. in the specification and claims of this application and the above-mentioned drawings are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but optionally includes steps or units that are not listed, or optionally includes other steps or units inherent to these processes, methods, products or devices.

[0031] Reference to "embodiment" or "implementation" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiment or implementation may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0032] Wafers are key materials in the semiconductor industry and are silicon chips used to manufacture silicon semiconductor circuits. Specifically, various circuit element structures are processed on silicon wafers to become electronic devices with specific electrical functions, and then quality inspection is carried out through wafer detection devices. Before testing, wafers are often loaded in material boxes, and the opening of the material box is covered with a cover door to prevent the wafers from falling. When the robotic arm needs to grab or store the wafer, it is necessary to separate the material box from the cover door so that the robotic arm can reach into the material box from the opening to grab the wafer. However, in existing solutions, the cover opening mechanism is often driven by a single cylinder, so that the cover opening mechanism shakes a lot during the process of opening the cover door and lifting the cover door, which may cause wear of the cover opening mechanism, shorten the service life of the wafer detection device, and may also affect the detection accuracy of the wafer detection device due to shaking.

[0033] See also Figures 1 to 3 The present application provides a wafer inspection device 200, which includes: a material box 210, a cover door 220, an opening mechanism 100 provided in the present application, a robotic arm 230 and a probe detection platform 240, wherein the material box 210 is used to store materials, and the material box 210 has an opening 211; the cover door 220 closes the opening 211 of the material box 210; the opening mechanism 100 is used to open the cover door 220 of the material box 210; the robotic arm 230 is used to take out or place materials from the opening 211 of the material box 210; the probe detection platform 240 carries the materials and detects the materials.

[0034] In this embodiment, when the cover door 220 is connected to the material box 210, the cover door 220 closes the opening 211 of the material box 210 to prevent the material placed in the material box 210 from falling, and facilitates the transportation or replacement of the material box 210. When the cover opening mechanism 100 opens the opening 211 of the material box 210, the robot arm 230 can take out or place the material from the opening 211 of the material box 210, so that the robot arm 230 can transfer the material to the probe detection station 240 for detection. In this embodiment, the cover opening mechanism 100 can open the cover door 220 and separate the material box 210 and the cover door 220, and the cover door 220 can be prevented from shaking during the cover opening process to prevent the wear of other components in the wafer detection device 200 due to shaking during the cover opening process, and to prevent the shaking from affecting the detection process of the material carried on the probe detection station 240. The wafer inspection device 200 has a long service life and has a high accuracy in inspecting the material.

[0035] It can be understood that the material is a wafer.

[0036] It can be understood that the probe detection station 240 is used to detect the material. Specifically, the probe detection station 240 performs optical detection, electrical detection and metallographic detection on the wafer; wherein, optical detection is to detect defects, contamination, cracks and morphology problems on the surface of the wafer, electrical detection is to detect the electrical properties of the wafer such as resistance, capacity, current and other parameters, and metallographic detection is to detect metal and semiconductor materials in the wafer to detect impurities in the wafer.

[0037] See also Figures 4 to 6 The present application provides a cover opening mechanism 100, which is applied to a wafer inspection device 200. The wafer inspection device 200 includes a material box 210 and a cover door 220. The cover door 220 closes the material box 210, and the cover opening mechanism 100 is used to open the cover door 220; the cover opening mechanism 100 includes a fixed frame 110, a cover opening member 120 and a first moving component 130. The cover opening member 120 is arranged on the fixed frame 110 and is used to adsorb the cover door 220; the first moving component 130 includes a first driving member 131, and the first driving member 131 includes a first cylinder 1311, a first piston 1312 and a sliding table 1313. The first cylinder 1311 moves along a first direction (such as Figure 4The first piston 1312 is movably arranged in the first cylinder 1311, and the sliding platform 1313 is slidably mounted on the outer periphery of the first cylinder 1311 and connected to the cover opening member 120. The first piston 1312 is linked with the sliding platform 1313. When the first piston 1312 slides in the first cylinder 1311 along the first direction, the sliding platform 1313 is driven to move along the first direction, thereby driving the cover opening member 120 to move along the first direction; the number of the first driving members 131 is two, and the two first driving members 131 move in the second direction (as shown in the X direction). Figure 4 The two first driving members 131 are arranged at intervals (as shown in the Y direction), and the two first driving members 131 are used to drive the cover opening member 120 to move along the first direction, wherein the first direction intersects with the second direction.

[0038] In this embodiment, the first driving member 131 is a rodless cylinder, the first piston 1312 is movably disposed in the first cylinder 1311 along the first direction, and the first piston 1312 and the sliding platform 1313 are linked, so that the first piston 1312 can drive the sliding platform 1313 to slide along the first direction to connect to the first cylinder 1311, and then drive the cover opening member 120 to move along the first direction. When the cover opening member 120 absorbs the cover door 220 and moves in the first direction away from the material box 210, the cover door 220 is separated from the material box 210, so that the robot arm 230 can take out or place materials from the opening 211 of the material box 210. When the cover opening member 120 absorbs the cover door 220 and moves along the first direction toward the direction close to the material box 210 until the cover door 220 is arranged opposite to the material box 210, the cover opening member 120 stops the cover door 220, so that the cover door 220 is separated from the cover opening member 120, and the opening 211 of the material box 210 is closed to prevent the material in the material box 210 from falling. In this embodiment, the first driving member 131 is a rodless cylinder. Compared with the solution of providing a rod cylinder to drive the sliding table 1313, the solution provided in the embodiment of the present application can save the height of the cover opening mechanism 100 along the first direction, facilitate the miniaturized design of the cover opening mechanism 100, and thus facilitate the miniaturized design of the wafer inspection device 200. Furthermore, the number of the first driving members 131 is two, and the two first driving members 131 are spaced apart along the second direction. The two first driving members 131 cooperate with each other to prevent the cover opening member 120 from tilting during the movement along the first direction, thereby reducing the shaking amplitude of the cover opening mechanism 100 used to open the cover door 220 and drive the cover door 220 to move along the first direction, thereby preventing the shaking from causing wear to other components in the wafer detection device 200, and also preventing the shaking from affecting the detection of materials, thereby improving the service life of the cover opening mechanism 100 when applied to the wafer detection device 200, and also improving the detection accuracy of the wafer detection device 200 for detecting materials.

[0039] Optionally, the first piston 1312 is linked to the sliding platform 1313 , and the first piston 1312 and the sliding platform 1313 are connected in a manner including but not limited to magnetic connection or mechanical connection.

[0040] In some embodiments, the first driving member 131 also includes a first solenoid valve 132 and a second solenoid valve 133, the first solenoid valve 132 is arranged at one end of the first cylinder 1311 close to the cover opening member 120, and the second solenoid valve 133 is arranged at one end of the first cylinder 1311 away from the cover opening member 120; the first solenoid valve 132 has a first air inlet valve 1321 and a first air outlet valve 1322, and the second solenoid valve 133 has a second air inlet valve 1331 and a second air outlet valve 1332; when the first air inlet valve 1321 and the second air outlet valve 1332 are opened at the same time, the gas enters the first cylinder 1311 from the first air inlet valve 1321, and pushes the first piston 1312 to drive the sliding platform 1313 together with the cover opening member 120 to move along the first direction toward the direction away from the material box 210, so as to separate the material box 210 from the cover door 220.

[0041] It can be understood that the first solenoid valve 132 and the second solenoid valve 133 are disposed at opposite ends of the first cylinder 1311 and are communicated with the first cylinder 1311 respectively.

[0042] It can be understood that, along the first direction, the first solenoid valve 132 and the second solenoid valve 133 are arranged at intervals.

[0043] In this embodiment, the first solenoid valve 132 and the second solenoid valve 133 cooperate to control the air intake and exhaust directions of the first cylinder 1311, thereby controlling the moving direction of the first piston 1312 in the first cylinder 1311. Specifically, the first solenoid valve 132 is arranged closer to the material box 210 than the second solenoid valve 133. When the first air intake valve 1321 and the second air outlet valve 1332 are opened at the same time, the first air outlet valve 1322 and the second air intake valve 1331 are closed, and the gas enters the first cylinder 1311 from the first air intake valve 1321 to push the first piston 1312 to drive the sliding platform 1313 to connect with the cover opening member 120 to move in the first direction away from the material box 210, and the gas in the first cylinder 1311 is discharged from the second air outlet valve 1332 to the first cylinder 1311, so as to separate the material box 210 from the cover door 220. On the contrary, when the first air outlet valve 1322 and the second air inlet valve 1331 are opened at the same time, the first air inlet valve 1321 and the second air outlet valve 1332 are closed, and the gas enters the first cylinder 1311 from the second air inlet valve 1331 to push the first piston 1312 to drive the sliding platform 1313 connected to the cover opening member 120 to move along the first direction toward the material box 210, and discharge the gas in the first cylinder 1311 from the first air outlet valve 1322 to the first cylinder 1311, so as to reset the cover door 220 and realize that the cover door 220 closes the material box 210 to prevent the material in the material box 210 from falling. In this embodiment, the scheme of controlling the sliding of the sliding table 1313 together with the cover opening member 120 by the first solenoid valve 132 and the second solenoid valve 133 is simple, efficient, highly accurate and highly reliable, and is convenient for improving the efficiency of the cover opening mechanism 100 in moving the cover opening member 120 and the cover door 220, and can accurately move the cover opening member 120 and the cover door 220 to a specific position to avoid the cover opening member 120 and the cover door 220 interfering with the position of other devices in the wafer detection device 200.

[0044] It can be understood that both the first solenoid valve 132 and the second solenoid valve 133 are two-position three-way reversing valves.

[0045] Optionally, the first moving component 130 also includes a first guide member 134 and a second guide member 135, and the first guide member 134 and the second guide member 135 are arranged on the fixed frame 110 at intervals along the second direction, and the first guide member 134 and the second guide member 135 both extend along the first direction; the sliding platform 1313 can be slidably connected to the first guide member 134 and the second guide member 135 respectively, and the first guide member 134 and the second guide member 135 are used to guide the cover opening member 120.

[0046] In this embodiment, the first guide member 134 and the second guide member 135 both extend in the first direction, and the sliding platform 1313 is slidably connected to the first guide member 134 and the second guide member 135, and the first guide member 134 and the second guide member 135 guide the sliding of the sliding platform 1313 in the first direction. Further, the cover opening member 120 is sequentially connected to the second carrier plate 150, the first carrier plate 140 and the sliding platform 1313, and the first guide member 134 and the second guide member 135 can guide the sliding of the cover opening member 120 in the first direction, so as to improve the accuracy of the sliding of the cover opening member 120 and the cover door 220 in the first direction, avoid the tilt of the cover opening member 120 and the cover door 220 during the sliding process and interfere with the position of other devices in the wafer detection device 200, and reduce the shaking amplitude of the cover opening mechanism 100 in the process of opening the material box 210.

[0047] Optionally, in some embodiments, along the second direction, the first guide member 134 and the second guide member 135 are located between the two first driving members 131. In other embodiments, along the second direction, the first driving member 131 is located between the first guide member 134 and the second guide member 135.

[0048] In some embodiments, the cover opening mechanism 100 further includes a first carrier plate 140 and a second carrier plate 150, wherein the first carrier plate 140 is connected to the sliding platform 1313, and the second carrier plate 150 is connected to the sliding platform 1313 along the third direction (eg Figure 4 As shown in FIG. 2 , the first carrier plate 140 can be slidably connected to the first carrier plate 140, and the cover opening member 120 is connected to the second carrier plate 150, wherein the first direction, the second direction and the third direction intersect with each other.

[0049] It can be understood that along the first direction, the second supporting plate 150 and the first supporting plate 140 are arranged in sequence.

[0050] In this embodiment, the first carrier plate 140 is connected to the sliding platform 1313. When the sliding platform 1313 moves along the first direction toward a direction away from the material box 210 or toward a direction close to the material box 210, the first carrier plate 140 will drive the second carrier plate 150, the cover opening member 120 and the cover door 220 to move along the first direction toward a direction away from the material box 210 or toward a direction close to the material box 210, so as to achieve the separation or reset of the cover door 220 from the material box 210 in the first direction. In addition, the second carrier plate 150 can be slidably connected to the first carrier plate 140 along a third direction, and the second carrier plate 150 is connected to the cover opening member 120, so that the second carrier plate 150 can drive the cover opening member 120 and the cover door 220 to move along the third direction toward a direction away from the material box 210 or toward a direction close to the material box 210, so as to achieve the separation or reset of the cover door 220 from the material box 210 in the third direction. In other words, in the cover opening mechanism 100, the cover opening member 120 can be used to adsorb the cover door 220, and the movement of the cover opening member 120 and the cover door 220 in the third direction is realized by the sliding connection between the second supporting plate 150 and the first supporting plate 140 along the third direction. Furthermore, the movement of the first supporting plate 140, the second supporting plate 150, the cover opening member 120 and the cover door 220 in the first direction is realized by the sliding connection between the sliding table 1313 and the first cylinder 1311, so as to realize the separation of the cover door 220 and the material box 210, so as to facilitate the robot arm 230 to extend from the opening 211 of the material box 210 into the material box 210 to take out or place materials. The relative movement of the first supporting plate 140 and the second supporting plate 150 in the third direction can increase the gap between the material box 210 and the cover door 220 in the third direction, so that when the cover door 220 moves along the first direction, it can avoid interference between the cover door 220 and the material box 210 or other devices in the wafer detection device 200, reduce the shaking amplitude of the opening mechanism 100 in the process of opening the material box 210, avoid wear of other components in the wafer detection device 200 due to shaking, and avoid the influence of shaking on the detection of materials, thereby improving the service life of the opening mechanism 100 when applied to the wafer detection device 200, and also improving the detection accuracy of the wafer detection device 200 for detecting materials.

[0051] See also Figure 7In some embodiments, the cover opening mechanism 100 also includes a second moving component 160, the second moving component 160 includes a track member 161 and a sliding member 162, the track member 161 is arranged on the first supporting plate 140 and extends along the third direction, the sliding member 162 can be slidably connected to the track member 161 and connected to the second supporting plate 150 along the third direction, when the sliding member 162 moves relative to the track member 161 along the third direction, it drives the second supporting plate 150 and the cover opening component 120 to move along the third direction.

[0052] In this embodiment, the track member 161 is disposed on the first carrier plate 140 and extends along the third direction, the sliding member 162 is slidably connected to the track member 161 along the third direction, and the track member 161 and the sliding member 162 provide guidance for the relative sliding of the first carrier plate 140 and the second carrier plate 150. When the second carrier plate 150 carries the cover opening member 120 and the cover opening member 120 absorbs the cover door 220, when the sliding member 162 is slidably connected to the track member 161 along the third direction in a direction away from the material box 210, the second carrier plate 150, the cover opening member 120 and the cover door 220 move along the third direction in a direction away from the material box 210 to achieve separation of the material box 210 from the cover door 220. When the sliding member 162 slides along the third direction toward the direction close to the material box 210 to connect with the track member 161, the second carrying plate 150, the cover opening member 120 and the cover door 220 move along the third direction toward the direction close to the material box 210 to achieve the reset of the cover door 220. The sliding member 162 and the track member 161 provided in this embodiment improve the accuracy of the cover opening mechanism 100 in driving the cover door 220 to move along the third direction, avoid the cover opening member 120 and the cover door 220 from tilting during the sliding process and interfering with the positions of other devices in the wafer inspection device 200, and reduce the shaking amplitude of the cover opening mechanism 100 in the process of opening the material box 210.

[0053] See also Figure 8In some embodiments, the second moving assembly 160 further includes a second driving member 163, the second driving member 163 includes a second cylinder 1631, a second piston 1632, a first piston rod 1633 and a third solenoid valve 164, the second cylinder 1631 extends along the third direction and is disposed on the first supporting plate 140, the second piston 1632 is movably disposed on the second cylinder 1631, and the opposite ends of the first piston rod 1633 are respectively connected to the second piston 1632 and the second supporting plate 150; the second cylinder 1631 includes a first sub-cylinder 1634 and a second sub-cylinder 1635 which are spaced apart, the first sub-cylinder 1634 has the first piston rod 1633; the third solenoid valve 164 The first air vent 1641 has a first air vent 1642, a third air inlet valve 1643 and a third air outlet valve 1644, wherein the first air vent 1641 is connected to the first sub-cylinder 1634, and the second air vent 1642 is connected to the second sub-cylinder 1635. When the third air inlet valve 1643 is connected to the first air vent 1641 and the third air outlet valve 1644 is connected to the second air vent 1642, gas enters the first sub-cylinder 1634 from the first air vent 1641, and pushes the second piston 1632 and the first piston rod 1633 to move along the third direction away from the material box 210, so as to drive the second carrying plate 150 and the cover opening member 120 to move along the third direction.

[0054] It can be understood that the second driving member 163 is a cylinder with a rod.

[0055] In this embodiment, the second cylinder 1631 extends along the third direction and is disposed on the first bearing plate 140, the second piston 1632 is movably disposed in the second cylinder 1631 and connected to the first piston rod 1633, and one end of the first piston rod 1633 away from the second piston 1632 is connected to the second bearing plate 150, so when the second piston 1632 moves along the third direction in the second cylinder 1631, it will drive the first piston rod 1633 to move along the third direction, thereby driving the second bearing plate 150 to slide relative to the first bearing plate 140 along the third direction. In this embodiment, the third solenoid valve 164 controls the air intake direction and the exhaust direction in the second cylinder 1631, thereby controlling the moving direction of the second piston 1632 in the second cylinder 1631. Specifically, the first air vent 1641 is connected to the first sub-cylinder 1634, and the second air vent 1642 is connected to the second sub-cylinder 1635. When the third air inlet valve 1643 is connected to the first air vent 1641 and the third air outlet valve 1644 is connected to the second air vent 1642, gas enters the first sub-cylinder 1634 from the first air vent 1641, and pushes the second piston 1632 to move along the third direction away from the material box 210, thereby driving the first piston rod 1633, the second supporting plate 150, the cover opening member 120 and the cover door 220 to move along the third direction away from the material box 210, so as to realize the separation of the cover door 220 from the material box 210. In this embodiment, the solution of controlling the direction of the movable setting of the second piston 1632 in the second cylinder 1631 by the third solenoid valve 164 is simple, efficient, highly accurate and has high reliability, which is convenient for improving the efficiency of the cover opening mechanism 100 in moving the cover opening member 120 and the cover door 220, and can accurately move the cover opening member 120 and the cover door 220 to a specific position to avoid the cover opening member 120 and the cover door 220 interfering with the position of other components in the wafer detection device 200, thereby improving the service life of the cover opening mechanism 100 and the wafer detection device 200.

[0056] Furthermore, the third solenoid valve 164 also includes a fifth air outlet valve 1645. When the third air inlet valve 1643 is connected to the second air vent 1642, the fifth air outlet valve 1645 is connected to the first air vent 1641, and the gas enters the second sub-cylinder 1635 from the second air vent 1642, and pushes the second piston 1632 and the first piston rod 1633 to move along the third direction toward the direction close to the material box 210, so as to drive the supporting plate and the cover opening member 120 to move along the third direction.

[0057] In the third solenoid valve 164 provided in the present embodiment, the third outlet valve 1644 can be connected to the second air vent 1642, the third inlet valve 1643 can be connected to the first air vent 1641 and the second air vent 1642, and the fifth outlet valve 1645 can be connected to the first air vent 1641. By regulating the third solenoid valve 164, the first air vent 1641 can be connected to one of the third inlet valve 1643 or the fifth outlet valve 1645, and the second air vent 1642 can be connected to one of the third outlet valve 1644 or the fifth outlet valve 1645, so that the second piston 1632 can move in the second sub-cylinder 1635 along the third direction toward or away from or toward the material box 210.

[0058] It can be understood that the third solenoid valve 164 is a two-position five-way reversing valve.

[0059] In some embodiments, the cover opening mechanism 100 also includes a sensor assembly 170, and the sensor assembly 170 includes a first sensor 171, a second sensor 172 and a sensing sheet 173. The first sensor 171 and the second sensor 172 are arranged on the first supporting plate 140 at intervals along a third direction, and the sensing sheet 173 is arranged on the second supporting plate 150. The first sensor 171, the second sensor 172 and the sensing sheet 173 cooperate to detect the relative position of the first supporting plate 140 and the second supporting plate 150.

[0060] In this embodiment, the second carrier plate 150 can move along the third direction relative to the first carrier plate 140, and the second carrier plate 150 has a first position and a second position relative to the first carrier plate 140. The sensing sheet 173 is disposed on the second carrier plate 150, and during the movement of the second carrier plate 150, the relative position of the sensing sheet 173 and the first carrier plate 140 also changes. The first sensor 171 and the second sensor 172 are disposed on the first carrier plate 140 at intervals along the third direction, and when the second carrier plate 150 moves to the first position, the sensing sheet 173 moves to the sensing range of the first sensor 171, and the first sensor 171 can sense the position of the sensing sheet 173 and the second carrier plate 150. When the second carrier plate 150 moves to the second position, the sensing sheet 173 moves to the sensing range of the second sensor 172, and the second sensor 172 can sense the position of the sensing sheet 173 and the second carrier plate 150. The first sensor 171 , the second sensor 172 , and the sensing sheet 173 cooperate to sense the relative position of the second supporting plate 150 and the first supporting plate 140 , so as to provide guidance for the movement of the cover door 220 in the third direction.

[0061] See also Figures 9 to 11 In some embodiments, the cover opening mechanism 100 further includes a positioning assembly 180, and the positioning assembly 180 includes a third driving member 181 and a positioning member 183. The third driving member 181 is arranged on one side of the cover opening member 120, and the third driving member 181 is connected to the positioning member 183 to drive the positioning member 183 to rotate. The positioning member 183 can be rotatably penetrated on the side of the cover opening member 120 away from the third driving member 181; the positioning member 183 is used to penetrate the cover door 220 to limit the relative positions of the cover opening member 120 and the cover door 220.

[0062] It can be understood that the positioning member 183 has a first state and a second state relative to the cover opening member 120. When the positioning member 183 is in the first state, the positioning member 183 can penetrate into the cover door 220 to limit the relative position of the cover opening member 120 and the cover door 220.

[0063] It can be understood that the positioning member 183 and the third driving member 181 are disposed on opposite sides of the cover opening member 120 .

[0064] It can be understood that one end of the third driving member 181 is connected to the cover opening member 120 , and the other end of the third driving member 181 is connected to the positioning member 183 .

[0065] In this embodiment, the third driving member 181 and the positioning member 183 are arranged on opposite sides of the cover opening member 120, and the third driving member 181 is connected to the positioning member 183. The third driving member 181 can drive the positioning member 183 to rotate so that the positioning member 183 can be transformed between the first state and the second state, so that when the positioning member 183 is transformed from the second state to the first state, the positioning member 183 can penetrate into the cover door 220 to limit the relative position of the cover opening member 120 and the cover door 220, so as to facilitate the further adsorption of the cover door 220 by the cover opening member 120, thereby improving the efficiency and accuracy of the cover opening member 120 in adsorbing the cover door 220.

[0066] In some embodiments, the third driving member 181 includes a third cylinder 1811, a third piston 1812, a second piston rod 1813 and a fourth solenoid valve 182, the third piston 1812 is movably arranged in the third cylinder 1811, one end of the second piston rod 1813 is connected to the third piston 1812, and the end of the second piston rod 1813 away from the third piston 1812 is rotatably connected to the positioning member 183, the third cylinder 1811 includes a third sub-cylinder 1814 and a fourth sub-cylinder 1815 arranged at intervals, the third sub-cylinder 1814 has the second piston rod 1813; the fourth solenoid valve 182 has a third vent 1821, a third sub-cylinder 1814 and a fourth sub-cylinder 1815 arranged at intervals, the third sub-cylinder 1814 has the second piston rod 1813; the fourth solenoid valve 182 has a third vent 1821, a third sub-cylinder 1814 and a fourth sub-cylinder 1815. There are four air vents 1822, a fourth air inlet valve 1823 and a fourth air outlet valve 1824, the third air vent 1821 is connected to the third sub-cylinder 1814, and the fourth air vent 1822 is connected to the fourth sub-cylinder 1815. When the fourth air inlet valve 1823 is connected to the third air vent 1821 and the fourth air outlet valve 1824 is connected to the fourth air vent 1822, gas enters the third sub-cylinder 1814 from the third air vent 1821, and pushes the third piston 1812 and the second piston rod 1813 to move in a direction away from the positioning member 183, so as to drive the positioning member 183 to rotate, thereby allowing the positioning member 183 to penetrate the cover door 220.

[0067] It can be understood that the third driving member 181 is a cylinder with a rod.

[0068] In this embodiment, the third piston 1812 is movably disposed in the third cylinder 1811 and connected to the second piston rod 1813. The end of the second piston rod 1813 away from the third piston 1812 is rotatably connected to the positioning member 183. When the third piston 1812 moves in the third cylinder 1811, it will drive the second piston rod 1813 to move, thereby driving the positioning member 183 to rotate, so as to achieve the conversion of the positioning member 183 between the first state and the second state, so as to achieve the positioning member 183 to penetrate the cover door 220, so as to limit the relative position of the cover opening member 120 and the cover door 220. In this embodiment, the fourth solenoid valve 182 controls the air intake direction and the exhaust direction in the third cylinder 1811, thereby controlling the movement direction of the third piston 1812 in the third cylinder 1811. Specifically, the third air vent 1821 is connected to the third sub-cylinder 1814, and the fourth air vent 1822 is connected to the fourth sub-cylinder 1815. When the fourth air inlet valve 1823 is connected to the third air vent 1821 and the fourth air outlet valve 1824 is connected to the fourth air vent 1822, gas enters the third sub-cylinder 1814 from the third air vent 1821, and pushes the third piston 1812 to move in the third cylinder 1811, so that the space of the third sub-cylinder 1814 becomes larger and the space of the fourth sub-cylinder 1815 becomes smaller, thereby driving the second piston rod 1813 to move toward the direction close to the fourth sub-cylinder 1815, and the positioning member 183 is rotated during the movement of the second piston rod 1813, so that the positioning member 183 is transformed into the first state, and then the positioning member 183 penetrates the cover door 220, and the cover opening member 120 and the cover door 220 are positioned. In this embodiment, the solution of controlling the direction in which the third piston 1812 is movable in the third cylinder 1811 by the fourth solenoid valve 182 is simple, efficient, highly accurate and highly reliable, and is convenient for improving the limitation of the relative position of the cover opening member 120 and the cover door 220 by the cover opening mechanism 100, so that the cover opening member 120 can further absorb the cover door 220 and drive the cover door 220 to move along the first direction and / or the third direction, thereby avoiding interference of the cover opening member 120 and the cover door 220 with the position of other components in the wafer detection device 200 during movement, thereby improving the service life of the cover opening mechanism 100 and the wafer detection device 200.

[0069] Furthermore, the fourth solenoid valve 182 also includes a sixth air outlet valve 1825. When the fourth air inlet valve 1823 is connected to the fourth air vent 1822, the sixth air outlet valve 1825 is connected to the third air vent 1821, and the gas enters the fourth sub-cylinder 1815 from the fourth air vent 1822, and pushes the third piston 1812 and the second piston rod 1813 to move in the direction of compressing the third sub-cylinder 1814, so as to drive the positioning member 183 to rotate relative to the cover opening member 120.

[0070] It can be understood that the third piston 1812 and the second piston rod 1813 move in the direction of compressing the third sub-cylinder 1814, that is, the third piston 1812 and the second piston rod 1813 move in the direction close to the third sub-cylinder 1814, and during the movement, the space of the third sub-cylinder 1814 becomes smaller and the space of the fourth sub-cylinder 1815 becomes larger.

[0071] In the fourth solenoid valve 182 provided in the present embodiment, the fourth outlet valve 1824 can be connected to the fourth air port 1822, the fourth inlet valve 1823 can be connected to the third air port 1821 and the fourth air port 1822, and the sixth outlet valve 1825 can be connected to the third air port 1821. By regulating the fourth solenoid valve 182, the third air port 1821 can be connected to one of the fourth inlet valve 1823 or the sixth outlet valve 1825, and the fourth air port 1822 can be connected to one of the fourth outlet valve 1824 or the sixth outlet valve 1825, so that the third piston 1812 can move in the fourth sub-cylinder 1815 in the direction of compressing the third sub-cylinder 1814 or compressing the fourth sub-cylinder 1815, and the second piston rod 1813 drives the positioning member 183 to rotate during the movement, so as to realize the transition of the positioning member 183 between the first state and the second state.

[0072] It can be understood that the fourth solenoid valve 182 is a two-position five-way reversing valve.

[0073] In some embodiments, the cover opening mechanism 100 further includes a suction member 190 , and the suction member 190 and the positioning member 183 are arranged at a same side of the cover opening member 120 to suction the cover door 220 .

[0074] In this embodiment, the adsorption member 190 and the positioning member 183 are arranged at intervals on the same side of the cover opening member 120. When the positioning member 183 limits the relative positions of the cover opening member 120 and the cover door 220, the adsorption member 190 is used to adsorb the cover door 220 and the adsorption member 190 adsorbs the surface of the cover door 220 facing the cover opening member 120, so as to connect the cover opening member 120 and the cover door 220 into an integrated structure, which is convenient for separating the cover door 220 and the material box 210 by moving the cover opening member 120.

[0075] Optionally, the adsorption member 190 is a vacuum suction cup, and the vacuum suction cup is evacuated so that the adsorption member 190 can adsorb the surface of the cover door 220 facing the cover opening member 120 .

[0076] Mentioning "embodiment" and "implementation method" in this application means that the specific features, structures or characteristics described in conjunction with the embodiment may be included in at least one embodiment of the present application. The appearance of the phrases in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described in this application can be combined with other embodiments. In addition, it should also be understood that the features, structures or characteristics described in the various embodiments of the present application can be arbitrarily combined to form another embodiment that does not deviate from the spirit and scope of the technical solution of the present application, provided that there is no contradiction between them.

[0077] Finally, it should be noted that the above implementation modes are only used to illustrate the technical solution of the present application and are not intended to limit it. Although the present application has been described in detail with reference to the above preferred implementation modes, a person of ordinary skill in the art should understand that the technical solution of the present application may be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the present application.

Claims

1. A cover opening mechanism, applied to a wafer inspection device, the wafer inspection device comprising a material box and a cover door, the cover door sealing the material box, characterized in that: The cover opening mechanism is used to open the cover door; the cover opening mechanism comprises: Fixed frame; A cover opening member, the cover opening member is disposed on the fixing frame and is used for adsorbing the cover door; and A first moving assembly, the first moving assembly includes a first driving member, the first driving member includes a first cylinder, a first piston and a sliding platform, the first cylinder extends along a first direction, the first piston is movably disposed in the first cylinder, the sliding platform is slidably sleeved on the outer circumference of the first cylinder and connected to the cover opening member, the first piston is linked with the sliding platform, when the first piston slides in the first direction in the first cylinder, the sliding platform is driven to move along the first direction, thereby driving the cover opening member to move along the first direction; There are two first driving members, which are spaced apart along the second direction, and cooperate with each other to drive the cover opening member to move along the first direction, wherein the first direction intersects with the second direction.

2. The cover opening mechanism according to claim 1, characterized in that: The first driving member also includes a first solenoid valve and a second solenoid valve, the first solenoid valve is arranged at one end of the first cylinder close to the cover opening member, and the second solenoid valve is arranged at one end of the first cylinder away from the cover opening member; the first solenoid valve has a first air inlet valve and a first air outlet valve, and the second solenoid valve has a second air inlet valve and a second air outlet valve; when the first air inlet valve and the second air outlet valve are opened at the same time, gas enters the first cylinder from the first air inlet valve, and pushes the first piston to drive the sliding platform together with the cover opening member to move along the first direction toward the direction away from the material box, so as to separate the material box from the cover door.

3. The cover opening mechanism according to claim 1, characterized in that: The cover opening mechanism also includes a first supporting plate and a second supporting plate, wherein the first supporting plate is connected to the sliding platform, the second supporting plate is slidably connected to the first supporting plate along a third direction, and the cover opening member is connected to the second supporting plate, wherein the first direction, the second direction and the third direction intersect with each other respectively.

4. The cover opening mechanism according to claim 3, characterized in that: The cover opening mechanism also includes a second moving component, which includes a track component and a sliding component. The track component is arranged on the first supporting plate and extends along the third direction. The sliding component can be slidably connected to the track component and the second supporting plate along the third direction. When the sliding component moves relative to the track component along the third direction, the second supporting plate and the cover opening component are driven to move along the third direction.

5. The cover opening mechanism according to claim 4, characterized in that: The second moving assembly further includes a second driving member, the second driving member includes a second cylinder, a second piston, a first piston rod and a third solenoid valve, the second cylinder extends along a third direction and is disposed on the first bearing plate, the second piston is movably disposed on the second cylinder, and opposite ends of the first piston rod are respectively connected to the second piston and the second bearing plate; the second cylinder includes a first sub-cylinder and a second sub-cylinder disposed at intervals, and the first sub-cylinder has the first piston rod; The third solenoid valve has a first air vent, a second air vent, a third air inlet valve and a third air outlet valve. The first air vent is connected to the first sub-cylinder, and the second air vent is connected to the second sub-cylinder. When the third air inlet valve is connected to the first air vent and the third air outlet valve is connected to the second air vent, gas enters the first sub-cylinder from the first air vent and pushes the second piston and the first piston rod to move along the third direction away from the material box, so as to drive the second supporting plate and the cover opening member to move along the third direction.

6. The cover opening mechanism according to claim 3, characterized in that: The cover opening mechanism also includes a sensor assembly, which includes a first sensor, a second sensor and a sensing sheet. The first sensor and the second sensor are arranged on the first supporting plate at intervals along a third direction, and the sensing sheet is arranged on the second supporting plate. The first sensor, the second sensor and the sensing sheet cooperate to detect the relative position of the first supporting plate and the second supporting plate.

7. The cover opening mechanism according to claim 1, characterized in that: The cover opening mechanism also includes a positioning component, which includes a third driving member and a positioning member. The third driving member is arranged on one side of the cover opening member, and the third driving member is connected to the positioning member to drive the positioning member to rotate. The positioning member can be rotatably penetrated on the side of the cover opening member away from the third driving member; the positioning member is used to penetrate the cover door to limit the relative position of the cover opening member and the cover door.

8. The cover opening mechanism according to claim 7, characterized in that: The third driving member comprises a third cylinder, a third piston, a second piston rod and a fourth solenoid valve, the third piston is movably arranged in the third cylinder, one end of the second piston rod is connected to the third piston, and the end of the second piston rod away from the third piston is rotatably connected to the positioning member, the third cylinder comprises a third sub-cylinder and a fourth sub-cylinder arranged at intervals, and the third sub-cylinder has the second piston rod; The fourth solenoid valve has a third air vent, a fourth air vent, a fourth air inlet valve and a fourth air outlet valve. The third air vent is connected to the third sub-cylinder, and the fourth air vent is connected to the fourth sub-cylinder. When the fourth air inlet valve is connected to the third air vent and the fourth air outlet valve is connected to the fourth air vent, gas enters the third sub-cylinder from the third air vent and pushes the third piston and the second piston rod to move in a direction away from the positioning member to drive the positioning member to rotate, thereby allowing the positioning member to penetrate the cover door.

9. The cover opening mechanism according to claim 8, characterized in that: The cover opening mechanism further comprises a suction member, and the suction member and the positioning member are arranged at a same side of the cover opening member with a spacing therebetween, and are used for suctioning the cover door.

10. A wafer inspection device, characterized in that: The wafer detection device comprises: A material box, the material box is used to store materials, and the material box has an opening; A cover door, the cover door closes the opening of the material box; The cover opening mechanism according to any one of claims 1 to 9, wherein the cover opening mechanism is used to open the cover door of the material box; A mechanical arm, the mechanical arm is used to take out or place materials from the opening of the material box; and A probe detection platform is used to carry the material and detect the material.

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