Tail gas treatment system and tail gas treatment mechanism

Abstract

The utility model relates to the technical field of polycrystalline silicon preparation, in particular to a tail gas treatment system and a tail gas treatment mechanism. The tail gas treatment system comprises: a buffer tank comprising a gas inlet, a liquid return port, a first liquid outlet and a discharge port; the condenser comprises a feed port, a gas outlet, a liquid inlet, a second liquid outlet and a third liquid outlet, the feed port is connected with the discharge port, the gas outlet is configured to be connected with a tail gas recovery system, the liquid inlet is configured to allow cooling liquid to flow in, the second liquid outlet is configured to allow the cooling liquid to flow out, and the third liquid outlet is connected with the liquid return port; and the recovery pipeline is connected with the first liquid outlet of the buffer tank. The liquid chlorosilane in the tail gas does not enter the tail gas recovery system, the liquid chlorosilane does not damage a compressor in the tail gas recovery system, the material internal circulation amount of the tail gas recovery system is reduced, and the operation load of the tail gas recovery system is reduced. And the liquid chlorosilane can be recycled or retreated after flowing out of the recycling pipeline, so that the production cost of polycrystalline silicon is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of polysilicon preparation, and in particular to an exhaust gas treatment system and an exhaust gas treatment mechanism. Background Art

[0002] Polysilicon is a key raw material for integrated circuits and photovoltaic power generation, and is a basic material for the development of new energy. The process for preparing polysilicon in the polysilicon production system mainly adopts the modified Siemens method, which usually uses a distillation tower to obtain high-purity trichlorosilane through distillation, and the tail gas of the distillation tower is sent to the recovery system for treatment to reduce production costs.

[0003] At present, the tail gas from the distillation tower enters the buffer tank to buffer the pressure before entering the tail gas recovery system. The tail gas recovery system is equipped with a compressor to increase the tail gas pressure. If there is chlorosilane condensate in the buffer tank, in order not to damage the compressor in the tail gas recovery system, the chlorosilane condensate will be discharged directly, resulting in a waste of raw materials and an increase in production costs. Utility Model Content

[0004] Based on this, the present application provides an exhaust gas treatment system and an exhaust gas treatment mechanism to solve the deficiencies of the related technology.

[0005] In one aspect, the present application provides an exhaust gas treatment system, comprising:

[0006] The buffer tank comprises an air inlet, a liquid return port, a first liquid outlet and a material outlet, wherein the air inlet is used for introducing tail gas;

[0007] The condenser comprises a feed inlet, an air outlet, a liquid inlet, a second liquid outlet and a third liquid outlet, wherein the feed inlet is connected to the feed outlet, the air outlet is configured to be connected to a tail gas recovery system, the liquid inlet is configured to allow coolant to flow in, the second liquid outlet is configured to allow coolant to flow out, and the third liquid outlet is connected to the liquid return port;

[0008] A recovery pipeline is connected to the first liquid outlet of the buffer tank.

[0009] In a possible implementation, the condenser is a shell-and-tube condenser, a coil-and-spool condenser, or a fin condenser.

[0010] In one possible implementation, the recovery pipeline includes a main recovery route, a first recovery branch and a second recovery branch. One end of the main recovery route is connected to the first liquid outlet, and the other end of the main recovery route is respectively connected to the first recovery branch and the second recovery branch. The end of the first recovery branch away from the main recovery route is configured to be connected to a raw material tank, and the end of the second recovery branch away from the main recovery route is configured to be connected to a separation tower.

[0011] In a possible implementation, a first switch valve is provided on the first recovery branch, and a second switch valve is provided on the inlet of the separation tower connected to the second recovery branch.

[0012] In a possible implementation, a driving unit is provided on the main recovery line, and the driving unit is configured to drive the liquid in the buffer tank to flow out through the first liquid outlet and the recovery pipeline.

[0013] In a possible implementation, the drive unit includes two drive components, and the two drive components are arranged in parallel.

[0014] In a possible implementation, the driving assembly includes a driving pump and a third switching valve, and the third switching valve is located upstream of the driving pump.

[0015] In a possible implementation, the drive assembly further includes a filter, and the filter is disposed between the third switch valve and the drive pump.

[0016] In a possible implementation, the recovery pipeline further includes a drainage branch, and the drainage branch is arranged in parallel with the two driving assemblies.

[0017] On the other hand, the present application also provides an exhaust gas treatment mechanism, including an exhaust gas recovery system and the above-mentioned exhaust gas treatment system, and the exhaust gas recovery system is connected to the gas outlet of the buffer tank in the exhaust gas treatment system.

[0018] The tail gas treatment system and tail gas treatment mechanism provided by the present application, tail gas such as tail gas from a distillation tower can enter the interior of a buffer tank from the air inlet of a buffer tank to buffer the pressure. The discharge port of the buffer tank is connected to the feed port of the condenser, that is, the tail gas in the buffer tank flows out of the buffer tank and enters the condenser. The coolant can enter the interior of the condenser from the liquid inlet of the condenser and flow out from the second liquid outlet of the condenser. The tail gas and the coolant are heat exchanged in the condenser, and the chlorosilane in the tail gas is condensed into a liquid and separated from the non-condensable gas. The liquid chlorosilane flows back to the buffer tank from the third liquid outlet of the condenser, and the non-condensable gas can flow from the air outlet of the condenser to the tail gas recovery system. The liquid chlorosilane flowing back to the buffer tank from the condenser can flow out of the buffer tank through the recovery pipeline. In this way, the liquid chlorosilane in the tail gas will not enter the tail gas recovery system, and the liquid chlorosilane will not damage the compressor in the tail gas recovery system, reducing the amount of material internal circulation in the tail gas recovery system and reducing the operating load of the tail gas recovery system. Liquid chlorosilane can be recovered or reprocessed after flowing out of the recovery pipeline, avoiding the waste of raw materials caused by direct discharge of liquid chlorosilane and reducing the production cost of polysilicon. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 It is a structural schematic diagram of an exhaust gas treatment system in the related art;

[0021] Figure 2 A schematic diagram of the structure of the exhaust gas treatment system provided in an embodiment of the present application.

[0022] Description of reference numerals:

[0023] 100-buffer tank; 110-air inlet; 120-liquid return port; 130-first liquid outlet; 140-discharge port;

[0024] 200-condenser; 210-feed port; 220-gas outlet; 230-liquid inlet; 240-second liquid outlet; 250-third liquid outlet;

[0025] 300-recovery pipeline; 310-recovery main line; 320-first recovery branch; 321-first switch valve; 330-second recovery branch; 340-driving assembly; 341-driving pump; 342-third switch valve; 343-filter; 350-drainage branch;

[0026] 410 - air intake pipe; 420 - first branch pipe; 430 - second branch pipe. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical scheme and advantages of the present application clearer, the technical scheme in the embodiment of the present application will be described in more detail below in conjunction with the drawings in the preferred embodiments of the present application. In the drawings, the same or similar reference numerals throughout represent the same or similar parts or parts with the same or similar functions. The described embodiments are part of the embodiments of the present application, not all of the embodiments. The embodiments described below with reference to the drawings are exemplary and are intended to be used to explain the present application, and should not be construed as limitations on the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present application. The embodiments of the present application are described in detail below in conjunction with the drawings.

[0028] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, or it can be an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0029] In the description of the present application, it should be understood that the terms "upper", "lower", "front", "back", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are orientations or positional relationships based on the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0030] The terms "first", "second" and "third" (if any) in the specification and claims of this application and the above drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence.

[0031] In addition, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, for example, a process, method, system, product, or display comprising a series of steps or elements is not necessarily limited to those steps or elements explicitly listed, but may include other steps or elements not explicitly listed or inherent to such process, method, product, or display.

[0032] In the prior art, such as Figure 1 As shown, the tail gas of the distillation tower can enter the buffer tank 100 through the air inlet line 410 to buffer the pressure, and the tail gas can flow to the tail gas recovery system through the second branch pipe 430 after flowing out of the buffer tank 100. However, the temperature of the tail gas when it flows out of the distillation tower is relatively high, and the temperature of the tail gas inside the buffer tank 100 and in the second branch pipe 430 gradually decreases, so that the tail gas in the second branch pipe 430 contains chlorosilane condensate. In order to prevent the chlorosilane condensate from damaging the compressor in the tail gas recovery system, the chlorosilane condensate in the second branch pipe 430 will be directly discharged, resulting in a waste of raw materials and an increase in production costs.

[0033] After repeated thinking and verification, the inventor found that if a condenser is set between the buffer tank and the tail gas recovery system, the tail gas is condensed by the condenser before the tail gas enters the tail gas recovery system. The chlorosilane in the tail gas is condensed into liquid and separated from the non-condensable gas by the condenser. The separated chlorosilane liquid can flow back to the buffer tank, and the separated non-condensable gas enters the tail gas recovery system. The chlorosilane liquid entering the buffer tank can flow out of the buffer tank through the recovery pipeline for recovery or reprocessing. In this way, the chlorosilane liquid in the tail gas will not enter the tail gas recovery system and affect the tail gas recovery system. At the same time, the chlorosilane liquid will not be directly discharged to cause waste of raw materials, thereby reducing the production cost of polysilicon.

[0034] In view of this, the inventors have designed an exhaust gas treatment system and an exhaust gas treatment mechanism. The exhaust gas treatment system is provided with a condenser between the buffer tank and the exhaust gas recovery system. The chlorosilane liquid separated from the exhaust gas in the condenser can flow back to the buffer tank, the non-condensable gas separated from the exhaust gas in the condenser can enter the exhaust gas recovery system, and the chlorosilane liquid entering the buffer tank from the condenser can flow out of the buffer tank from the recovery pipeline. The chlorosilane liquid in the exhaust gas will not enter the exhaust gas recovery system, and the chlorosilane liquid can be utilized to reduce the production cost of polysilicon.

[0035] The technical solutions of the exhaust gas treatment system and the exhaust gas treatment mechanism provided in the embodiments of the present application are described in detail below in conjunction with the accompanying drawings.

[0036] Reference Figure 2 As shown, the tail gas treatment system provided by the embodiment of the present application includes a buffer tank 100, a condenser 200 and a recovery pipeline 300. The buffer tank 100 includes an air inlet 110, a liquid return port 120, a first liquid outlet 130 and a discharge port 140, and the air inlet 110 is used to pass the tail gas. The condenser 200 includes an inlet 210, an air outlet 220, a liquid inlet 230, a second liquid outlet 240 and a third liquid outlet 250, the inlet 210 is connected to the discharge port 140, the air outlet 220 is configured to connect to the tail gas recovery system, the liquid inlet 230 is configured to pass the coolant, the second liquid outlet 240 is configured to flow out the coolant, and the third liquid outlet 250 is connected to the liquid return port 120. The recovery pipeline 300 is connected to the first liquid outlet 130 of the buffer tank 100.

[0037] Schematically, the air inlet 110 of the buffer tank 100 can be connected to the air inlet pipeline 410, and the tail gas, such as the tail gas of the distillation tower, can enter the interior of the buffer tank 100 through the air inlet pipeline 410 and the air inlet 110 of the buffer tank 100 to buffer the pressure. Among them, the discharge port 140 of the buffer tank 100 and the feed port 210 of the condenser 200 can be connected by a pipeline, and the tail gas can enter the interior of the condenser 200 after flowing out of the buffer tank 100. The liquid inlet 230 and the second liquid outlet 240 of the condenser 200 can be connected to the coolant circulation system, and the coolant can enter the interior of the condenser 200 from the liquid inlet 230 of the condenser 200 and flow out of the condenser 200 from the second liquid outlet 240 of the condenser 200.

[0038] It is understandable that the tail gas entering the condenser 200 from the buffer tank 100 is heat exchanged with the coolant, so that the chlorosilane in the tail gas is condensed into liquid and separated from the non-condensable gas. Among them, the non-condensable gas includes but is not limited to hydrogen chloride gas and hydrogen, which are not limited here. The third liquid outlet 250 of the condenser 200 can be connected to the liquid return port 120 of the buffer tank 100 through a pipeline, and the chlorosilane liquid separated from the tail gas can flow back to the inside of the buffer tank 100.

[0039] In one possible implementation, the air outlet 220 of the condenser 200 can be connected to an air outlet pipeline, which is provided with a first branch pipe 420 and a second branch pipe 430. The non-condensable gas separated from the exhaust gas can enter the exhaust gas treatment system via the first branch pipe 420, and the non-condensable gas separated from the exhaust gas can also enter the exhaust gas recovery system via the second branch pipe 430 for recovery.

[0040] Optionally, one end of the recovery pipeline 300 is connected to the buffer tank 100, and the other end of the recovery pipeline 300 can be connected to the raw material tank, that is, the chlorosilane liquid separated from the tail gas can flow out of the buffer tank 100 and enter the raw material tank through the recovery pipeline 300 for storage, so as to be used in the polysilicon production process, thereby avoiding waste of raw materials and reducing the production cost of polysilicon.

[0041] In the tail gas treatment system provided in this embodiment, tail gas such as tail gas from a distillation tower can enter the interior of the buffer tank 100 from the air inlet 110 of the buffer tank 100 to buffer the pressure. The discharge port 140 of the buffer tank 100 is connected to the feed port 210 of the condenser 200, that is, the tail gas in the buffer tank 100 flows out of the buffer tank 100 and enters the condenser 200. The coolant can enter the interior of the condenser 200 from the liquid inlet 230 of the condenser 200 and flow out from the second liquid outlet 240 of the condenser 200. The tail gas and the coolant are heat exchanged in the condenser 200, and the chlorosilane in the tail gas is condensed into liquid and separated from the non-condensable gas. The liquid chlorosilane flows back to the buffer tank 100 from the third liquid outlet 250 of the condenser 200, and the non-condensable gas can flow from the air outlet 220 of the condenser 200 to the tail gas recovery system. The liquid chlorosilane flowing back to the buffer tank 100 from the condenser 200 can flow out of the buffer tank 100 through the recovery pipeline 300. In this way, the liquid chlorosilane in the tail gas will not enter the tail gas recovery system, and the liquid chlorosilane will not damage the compressor in the tail gas recovery system, thereby reducing the amount of material internal circulation in the tail gas recovery system and reducing the operating load of the tail gas recovery system. The liquid chlorosilane can be recovered or reprocessed after flowing out of the recovery pipeline 300, avoiding the waste of raw materials caused by direct discharge of liquid chlorosilane, thereby reducing the production cost of polysilicon.

[0042] In one embodiment, the condenser 200 is a shell and tube condenser, a coiled tube condenser or a finned condenser.

[0043] It is understandable that the shell-and-tube condenser has a relatively simple, compact and inexpensive structure, which is conducive to reducing the layout cost of the exhaust treatment system. The coil-wound condenser or the fin-type condenser can achieve a larger contact area between the exhaust gas and the coolant, which is conducive to improving the cooling effect of the exhaust gas and further avoiding the influence of the chlorosilane liquid in the exhaust gas on the exhaust gas recovery system. The present embodiment does not limit the specific structure of the shell-and-tube condenser, the coil-wound condenser or the fin-type condenser, and those skilled in the art can select a suitable condenser 200 as needed.

[0044] In one embodiment, Figure 2 As shown, the recovery pipeline 300 includes a recovery main path 310, a first recovery branch 320 and a second recovery branch 330. One end of the recovery main path 310 is connected to the first liquid outlet 130, and the other end of the recovery main path 310 is respectively connected to the first recovery branch 320 and the second recovery branch 330. One end of the first recovery branch 320 away from the recovery main path 310 is configured to be connected to the raw material tank, and one end of the second recovery branch 330 away from the recovery main path 310 is configured to be connected to the separation tower.

[0045] Specifically, when the distillation tower just starts to operate, the chlorosilane liquid separated from the tail gas mainly includes STC (Silicon Tetrachloride). The chlorosilane liquid separated from the tail gas can enter the raw material tank via the main recovery path 310 and the first recovery branch 320, and the STC stored in the raw material tank can be used in the polysilicon production process. After the distillation tower has been running for a period of time, the chlorosilane liquid separated from the tail gas mainly includes TCS (Trichlorosilane) and DCS (Dichlorosilane). The chlorosilane liquid separated from the tail gas can enter the separation tower via the main recovery path 310 and the second recovery branch 330 to separate and utilize TCS and DCS.

[0046] This structure can separate the components of the chlorosilane liquid according to the tail gas so that the chlorosilane liquid can enter the raw material tank or separation tower for utilization, thereby avoiding the waste of raw materials.

[0047] In a specific embodiment, Figure 2 As shown, a first switch valve 321 is provided on the first recovery branch 320, and a second switch valve (not shown) is provided on the inlet connecting the separation tower and the second recovery branch 330.

[0048] Exemplarily, the first switch valve 321 and the second switch valve can be a ball valve or a butterfly valve, etc., which are not limited here. The connectivity of the first recovery branch 320 can be controlled by controlling the first switch valve 321, and the connectivity of the second recovery branch 330 can be controlled by controlling the second switch valve. When the chlorosilane liquid separated from the tail gas mainly includes STC, the staff can control the first switch valve 321 to open and the second switch valve to close, and the chlorosilane liquid enters the raw material tank via the recovery main road 310 and the first recovery branch 320; when the chlorosilane liquid separated from the tail gas mainly includes TCS and DCS, the staff can control the first switch valve 321 to close and the second switch valve to open, and the chlorosilane liquid enters the separation tower via the recovery main road 310 and the second recovery branch 330.

[0049] In other embodiments, the second switch valve may also be disposed on the second recovery branch 330 , which is not limited here.

[0050] This structure can control the flow direction of the chlorosilane liquid in the recovery pipeline 300 by controlling the first switch valve 321 and the second switch valve, and further control the chlorosilane liquid to enter the raw material tank or the separation tower according to the main components of the chlorosilane liquid.

[0051] like Figure 2 As shown, a driving unit is disposed on the recovery main path 310 , and the driving unit is configured to drive the liquid in the buffer tank 100 to flow out through the first liquid outlet 130 and the recovery pipeline 300 .

[0052] Illustratively, the driving unit includes a driving pump 341 , and the chlorosilane liquid in the buffer tank 100 can flow to the raw material tank or the separation tower via the first liquid outlet 130 of the buffer tank 100 and the recovery pipeline 300 under the drive of the driving pump 341 .

[0053] In one possible implementation, Figure 2 As shown, the driving unit includes two driving assemblies 340, and the two driving assemblies 340 are arranged in parallel.

[0054] Specifically, each driving assembly 340 is provided with a driving pump 341, and one or two driving pumps 341 can drive the chlorosilane liquid to flow in the recovery pipeline 300. Exemplarily, the recovery main line 310 includes a first main pipe, a second main pipe and two driving assemblies 340, one end of the first main pipe is connected to the first liquid outlet 130, the other end of the first main pipe is respectively connected to one end of the two driving assemblies 340, the other end of the two driving assemblies 340 is respectively connected to one end of the second main pipe, and the other end of the second main pipe is respectively connected to the first recovery branch 320 and the second recovery branch 330.

[0055] In this structure, the two drive components 340 can back up each other, that is, when one of the drive components 340 is damaged, the other drive component 340 can still drive the chlorosilane liquid to flow in the recovery pipeline 300, thereby ensuring the reliable operation of the exhaust gas treatment system.

[0056] Figure 2 As shown, the driving assembly 340 includes a driving pump 341 and a third switching valve 342 , and the third switching valve 342 is located upstream of the driving pump 341 .

[0057] Specifically, the driving assembly 340 also includes a driving pipeline, and the driving pump 341 and the third switch valve 342 are respectively installed on the driving pipeline, and the third switch valve 342 is located upstream of the driving pump 341. It should be noted that the third switch valve 342 is located upstream of the driving pump 341, that is, the chlorosilane liquid first flows through the third switch valve 342 and then flows through the driving pump 341 in the driving assembly 340. Among them, the third switch valve 342 can be a ball valve or a butterfly valve, etc., which is not limited here.

[0058] In this embodiment, the driving pump 341 of the driving assembly 340 can drive the chlorosilane liquid to flow in the recovery pipeline 300. The working state of the driving assembly 340 can be controlled by controlling the third switch valve 342. When the driving pump 341 of one driving assembly 340 is damaged, the staff can control the third switch valve 342 of the driving assembly 340 to close and control the third switch valve 342 of another driving assembly 340 to open, so as to ensure the normal operation of the exhaust gas treatment system.

[0059] In one possible implementation, Figure 2 As shown, the driving assembly 340 further includes a filter 343 , and the filter 343 is disposed between the third switch valve 342 and the driving pump 341 .

[0060] Illustratively, a shielded pump can be used as the driving pump 341, and the chlorosilane liquid first flows through the third switch valve 342, then flows through the filter 343, and finally flows through the driving pump 341 in the driving assembly 340. A filter 343 is provided between the third switch valve 342 and the driving pump 341, and the filter 343 can be used to filter the particle impurities of the chlorosilane liquid, so as to prevent the particle impurities of the chlorosilane liquid from entering the driving pump 341 and causing damage to the driving pump 341, which is beneficial to improving the service life of the driving pump 341.

[0061] In one embodiment, Figure 2 As shown, the recovery pipeline 300 further includes a drainage branch 350 , and the drainage branch 350 is arranged in parallel with the two driving assemblies 340 .

[0062] Schematically, a fourth switch valve is provided on the drainage branch 350, and the connectivity state of the drainage branch 350 can be controlled by the fourth switch valve. When the recovery main path 310 includes a first main pipe, a second main pipe and two drive components 340, one end of the first main pipe is connected to the first liquid outlet 130, and the other end of the first main pipe is respectively connected to the two drive components 340 and the drainage branch 350, and the end of the drainage branch 350 away from the first main pipe can be connected to the waste liquid tank. When the chlorosilane liquid just starts to enter the recovery pipeline 300, the chlorosilane liquid may carry more impurities in the pipeline. The staff can control the third switch valve 342 of each drive component 340 to close. At this time, the chlorosilane liquid with more impurities can enter the waste liquid tank to prevent the chlorosilane liquid from affecting the drive pump 341, the raw material tank and the separation tower.

[0063] The present application also provides an exhaust gas treatment mechanism, including an exhaust gas recovery system and the above-mentioned exhaust gas treatment system, wherein the exhaust gas recovery system is connected to the gas outlet 220 of the buffer tank 100 in the exhaust gas treatment system.

[0064] The air outlet 220 of the condenser 200 may be connected to an air outlet pipeline, the air outlet pipeline is provided with a first branch pipe 420 and a second branch pipe 430 , and the exhaust gas recovery system may be connected to the second branch pipe 430 .

[0065] The tail gas treatment mechanism provided in this embodiment adopts the above-mentioned tail gas treatment system, so that the tail gas flowing out of the buffer tank 100 will not carry chlorosilane liquid into the tail gas recovery system, causing damage to the compressor in the tail gas recovery system, reducing the internal circulation amount of the material in the tail gas recovery system, and reducing the operating load of the tail gas recovery system. Liquid chlorosilane can be recovered or reprocessed after flowing out of the recovery pipeline 300, avoiding the waste of raw materials caused by direct discharge of liquid chlorosilane, and reducing the production cost of polysilicon.

[0066] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A tail gas treatment system, characterized in that: include: A buffer tank, comprising an air inlet, a liquid return port, a first liquid outlet and a material outlet, wherein the air inlet is used to introduce tail gas; A condenser, comprising a feed inlet, an air outlet, a liquid inlet, a second liquid outlet and a third liquid outlet, wherein the feed inlet is connected to the feed outlet, the air outlet is configured to be connected to a tail gas recovery system, the liquid inlet is configured to allow coolant to flow in, the second liquid outlet is configured to allow coolant to flow out, and the third liquid outlet is connected to the liquid return port; A recovery pipeline is connected to the first liquid outlet of the buffer tank.

2. The exhaust gas treatment system according to claim 1, characterized in that: The condenser is a shell and tube condenser, a coiled tube condenser or a finned condenser.

3. The exhaust gas treatment system according to claim 1, characterized in that: The recovery pipeline includes a recovery main line, a first recovery branch and a second recovery branch. One end of the recovery main line is connected to the first liquid outlet, and the other end of the recovery main line is respectively connected to the first recovery branch and the second recovery branch. The end of the first recovery branch away from the recovery main line is configured to be connected to a raw material tank, and the end of the second recovery branch away from the recovery main line is configured to be connected to a separation tower.

4. The exhaust gas treatment system according to claim 3, characterized in that: The first recovery branch is provided with a first switch valve, and the inlet of the separation tower connected to the second recovery branch is provided with a second switch valve.

5. The exhaust gas treatment system according to claim 3, characterized in that: The main recovery line is provided with a driving unit, and the driving unit is configured to drive the liquid in the buffer tank to flow out through the first liquid outlet and the recovery pipeline.

6. The exhaust gas treatment system according to claim 5, characterized in that: The driving unit comprises two driving components, and the two driving components are arranged in parallel.

7. The exhaust gas treatment system according to claim 6, characterized in that: The driving assembly includes a driving pump and a third switching valve, and the third switching valve is located upstream of the driving pump.

8. The exhaust gas treatment system according to claim 7, characterized in that: The driving assembly further includes a filter, and the filter is arranged between the third switching valve and the driving pump.

9. The exhaust gas treatment system according to claim 7, characterized in that: The recovery pipeline also includes a drainage branch, and the drainage branch is arranged in parallel with the two driving components.

10. An exhaust gas treatment mechanism, characterized in that: It comprises a tail gas recovery system and the tail gas treatment system according to any one of claims 1 to 9, wherein the tail gas recovery system is connected to the gas outlet of the buffer tank in the tail gas treatment system.

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