Ingot furnace

Abstract

The utility model discloses an ingot furnace. The ingot furnace comprises a crucible, a heater and a suspension arm. Wherein the crucible is used for being filled with silicon materials, the heaters are distributed on the peripheral side of the crucible, the suspension arm is provided with an adjusting mechanism, and the adjusting mechanism is connected with the heaters so as to adjust the heights of the heaters. According to the ingot furnace, the adjusting mechanism is arranged on the suspension arm and connected with the heater, the height of the heater is adjusted through the adjusting mechanism to adapt to the crucible size, the silicon material filling height and the process requirement, and therefore the silicon material on the lower middle portion of the crucible is fully heated in the silicon material dehydrogenation process; and thus, sufficient dehydrogenation of the silicon material at each position in the crucible is ensured.

Description

Technical Field

[0001] The present application relates to the technical field of ingot casting furnaces, and more specifically, to an ingot casting furnace. Background Art

[0002] An ingot furnace is a smelting equipment that melts silicon material and directionally solidifies it to produce polysilicon. In recent years, due to the cooling of the polysilicon market, idle ingot furnaces have begun to be put into use for the dehydrogenation of granular silicon. The heaters of the ingot furnace are distributed on the top and sides of the crucible containing granular silicon, and the side heaters are located close to the top of the crucible, which is conducive to continuous heating of the molten silicon material at the top after the molten silicon flows to the bottom. However, in the process of heating granular silicon for dehydrogenation in the ingot furnace, the temperature of the granular silicon needs to be kept below the melting point. If the position of the heater is too high, it will easily lead to uneven heating of the granular silicon, which will lead to insufficient dehydrogenation of the granular silicon at the bottom and lower sides. Utility Model Content

[0003] The embodiment of the present application provides an ingot casting furnace, and is at least used to solve the problem of uneven heating of granular silicon.

[0004] The ingot casting furnace of the embodiment of the present application comprises a crucible, a heater and a suspension arm, wherein the crucible is used to fill silicon material, the heater is distributed on at least one side of the crucible, and the suspension arm is provided with an adjustment mechanism connected to the heater to adjust the height of the heater.

[0005] The ingot casting furnace of the embodiment of the present application is provided with an adjusting mechanism on the boom, and the adjusting mechanism is connected to the heater. The height of the heater is adjusted by the adjusting mechanism to adapt to the crucible size, silicon material filling height and process requirements, thereby adjusting the position of the heater during the dehydrogenation of granular silicon, fully heating the silicon material in the lower part of the crucible, and thereby ensuring that the silicon material at each position in the crucible is fully dehydrogenated.

[0006] In some embodiments, the adjustment mechanism adjusts the height range of the heater to be less than or equal to 200 mm.

[0007] In this way, the height of the heater can be adjusted within 200 mm through the adjustment mechanism, so that the area where the heat generated by the heater can radiate downward becomes larger, thereby fully heating the granular silicon in the lower part of the crucible and obtaining a more ideal granular silicon dehydrogenation effect.

[0008] In some embodiments, the adjustment mechanism includes a plurality of adjustment holes arranged along the length direction of the suspension arm, and the adjustment holes are opened on the suspension arm and used for installing the heater.

[0009] In this way, the heater is installed at different positions in the length direction of the boom through a plurality of adjustment holes, thereby achieving height adjustment of the heater.

[0010] In some embodiments, the adjustment hole is disposed at one end of the suspension arm close to the heater along the length direction of the suspension arm.

[0011] In this way, the adjustment hole is set at one end of the boom close to the heater along the length direction of the boom, so that the heater is connected to the end of the boom close to the heater, thereby shortening the distance between the center of gravity of the boom and the heater, which is beneficial to structural stability.

[0012] In some embodiments, the plurality of adjustment holes are arranged at intervals along the length direction of the boom.

[0013] In this way, multiple adjustment holes are arranged at intervals along the length direction of the boom, and the heater can be adjusted to a preset height by selectively fixing the heater on a specific adjustment hole, which simplifies the process of adjusting the heater height by the adjustment mechanism and ensures accurate height positioning of the heater.

[0014] In some embodiments, along the length direction of the boom, the number of the adjustment holes is 4-8 and the distance between two adjacent adjustment holes ranges from 10 mm to 30 mm.

[0015] In this way, by properly setting the spacing distance and number of the adjustment holes, the position of the heater can be adjusted within a reasonable height range.

[0016] In some embodiments, the adjustment holes are formed into two spaced-apart rows along the width direction of the boom, the number of adjustment holes in each row is 4, and the interval between two adjacent adjustment holes in the same row is 10 mm.

[0017] Thus, setting two rows of adjustment holes can improve the balance of the structure and ensure the stability of the position of the heater suspended by the boom. By setting four adjustment holes in each row with a hole spacing of 10 mm, a high-precision height adjustment range is obtained.

[0018] In some embodiments, the adjustment mechanism includes a slide groove formed on the suspension arm and a slider matched with the slide groove, the slider can slide in the slide groove, and the slider is connected to the heater.

[0019] In this way, the slider cooperates with the slide groove to achieve stepless adjustment of the heater height and simplify the operation process.

[0020] In some embodiments, the heater includes a top heater located at the top of the crucible and a side heater located at the side wall of the crucible, the number of the side heaters is an even number, and the even number of side heaters are opposite to each other in the radial direction of the crucible.

[0021] In this way, an even number of side heaters are arranged opposite to each other in the radial direction of the crucible, so that the side heaters are distributed more evenly relative to the crucible, which is conducive to uniform and sufficient heating.

[0022] In some embodiments, the heater is a curved tube structure with multiple bends, the length direction of the suspension arm forms an angle with the extension direction of the heater, and the suspension arm is connected at a middle position in the extension direction of the heater.

[0023] In this way, the heater is a curved tube structure with multiple bends, which can increase the heating area within a limited space; the boom is connected to the middle position of the extension direction of the heater, which can enable the boom to maintain a good balance when suspending the heater, contribute to the stability of the overall structure, and reduce swinging or shaking.

[0024] Additional aspects and advantages of the embodiments of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the embodiments of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0026] Figure 1 is a schematic structural diagram of an ingot casting furnace according to certain embodiments of the present application;

[0027] Figure 2 It is a schematic diagram of the combination of a boom and a heater in certain embodiments of the present application.

[0028] Figure Number:

[0029] Ingot casting furnace 100 , furnace wall 110 , furnace chamber 120 , crucible 10 , side wall 11 , heater 20 , top heater 21 , side heater 22 , hanging arm 30 , adjustment mechanism 31 , adjustment hole 311 . DETAILED DESCRIPTION

[0030] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals represent the same or similar elements or elements having the same or similar functions from beginning to end. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the embodiments of the present application, and cannot be understood as limiting the embodiments of the present application.

[0031] In the description of the present application, it should be understood that the terms "thickness", "upper", "top", "bottom", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0032] In the description of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. In an example, it can be a fixed connection, or a detachable connection, or an integral connection; it can be a mechanical connection, or an electrical connection, or they can communicate with each other; it can be a direct connection, or an indirect connection through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements.

[0033] In the embodiments of the present application, a first feature being “above” or “below” a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being “above”, “above”, and “above” a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0034] See also Figure 1 and Figure 2 The ingot casting furnace 100 of the embodiment of the present application includes a crucible 10, a heater 20 and a suspension arm 30. The crucible 10 is used to fill silicon materials, the heater 20 is distributed on at least one side of the crucible 10, and the suspension arm 30 is provided with an adjustment mechanism 31, which is connected to the heater 20 to adjust the height of the heater 20.

[0035] Specifically, the ingot casting furnace 100 is a smelting device for melting silicon materials and directionally solidifying them to generate polycrystalline silicon. In some embodiments, the ingot casting furnace 100 includes a furnace wall 110, which is arranged outside the crucible 10 and forms a furnace chamber 120, and the heater 20 is located in the furnace chamber 120 and can be arranged above the crucible 10 and / or on the side wall 11.

[0036] The heater 20 may be disposed above the crucible 10 and / or on the side wall 11, including the following three situations: (1) the heater 20 is disposed above the crucible 10; (2) the heater 20 is disposed on the side wall 11 of the crucible 10; (3) the heater 20 is disposed on both the top and the side wall 11 of the crucible 10. For example, Figure 1 As shown, heaters 20 are provided on the upper part and the side of the crucible 10, so that the crucible 10 can reach a higher heating temperature more quickly, making the granular silicon dehydrogenation more thorough and shortening the dehydrogenation process time. The number of heaters 20 provided in the present application is not limited here, and the number of heaters 20 can be set according to needs.

[0037] The crucible 10 may be not filled with or filled with undehydrogenated granular silicon. The undehydrogenated granular silicon is heated for dehydrogenation to generate hydrogen. The generated hydrogen can be fully contacted with the flowing argon gas and discharged from the exhaust hole to the exhaust port together, so that the hydrogen generated during the heating process is discharged to the outside, achieving the effect of heating and dehydrogenating the undehydrogenated granular silicon in the crucible 10. The crucible 10 can contain 300kg to 600kg of granular silicon. The adjustment mechanism 31 can adjust the height of the heater 20 to match the size of the crucible 10 and the height of the granular silicon filled in the crucible 10.

[0038] The crucible 10 may be a rectangular parallelepiped (such as Figure 1 As shown), a cube or a round-bottomed cylinder. The crucible 10 of the embodiment of the present application has various shapes and is not limited to one. Among them, when the crucible 10 is in the shape of a rectangular parallelepiped or a cube, it can be filled with relatively full granular silicon, which is convenient for processing more non-dehydrogenated granular silicon at one time. When the crucible 10 is in the shape of a rectangular parallelepiped or a cube, the side wall 11 of the crucible 10 includes four wall surfaces: the front side, the rear side, the left side, and the right side, and each side wall 11 is respectively provided with a side heater 22.

[0039] In the related art, the heater is fixedly arranged on the top and / or side wall of the crucible, and it is difficult for heat to radiate to the granular silicon in the middle and lower parts of the crucible, resulting in the temperature in the middle and lower parts of the crucible being lower than other positions. After heating for the same time, the hydrogen content of the granular silicon in the middle and lower parts of the crucible is still relatively high, and the dehydrogenation of the granular silicon in the entire crucible is not complete, affecting subsequent use.

[0040] The heater 20 may be a resistive heating device made of graphite material as a resistor, and may heat the granular silicon in the crucible 10 to at least 1100°C. The suspension arm 30 may be a high temperature resistant rigid part to withstand the high temperature of the heater 20 and the dynamic load during operation. The adjustment mechanism 31 may adjust the height of the heater 20 by at least one of a limiting and locking device, a nut adjustment, a rotating screw, a hydraulic cylinder, a pneumatic cylinder or an air pump, an adjustment counterweight, a gear rack, a belt or a chain drive, etc., wherein the limiting and locking device includes but is not limited to a screw hole and a bolt, a slide groove and a slide block, a sleeve and a travel block, etc.

[0041] The ingot casting furnace 100 of the embodiment of the present application is provided with an adjusting mechanism 31 on the boom 30, and the adjusting mechanism 31 is connected to the heater 20 to adjust the height of the heater 20, so that the heater 20 can adjust the height according to the size of the crucible 10, the height of the silicon material in the crucible 10 and the process requirements, so as to fully heat the silicon material in the lower part of the crucible 10 during the dehydrogenation of the silicon material, thereby ensuring that the silicon material at various positions in the crucible 10 is fully dehydrogenated.

[0042] In some embodiments, the adjustment mechanism 31 adjusts the height range of the heater 20 to be less than or equal to 200 mm.

[0043] Specifically, the height range of the heater 20 adjusted by the adjustment mechanism 31 refers to the height difference between the highest position and the lowest position of the heater 20 connected to the suspension arm 30 through the adjustment mechanism 31. The height range of the heater 20 adjusted by the adjustment mechanism 31 is less than or equal to 200 mm, that is, the height difference between the highest position and the lowest position of the heater 20 connected to the suspension arm 30 through the adjustment mechanism 31 is less than or equal to 200 mm. For example, the distance between the heater 20 and the bottom furnace wall 110 can be adjusted within the range of ±100 mm of 135 mm. For another example, the height range of the heater 20 adjusted by the adjustment mechanism 31 can be 30 mm, 48 mm, 60 mm, 120 mm, 180 mm, 198 mm, etc.

[0044] In this way, the height of the heater 20 is adjusted within 200 mm by the adjusting mechanism 31, so that the area where the heat generated by the heater 20 can radiate downward becomes larger, thereby fully heating the granular silicon in the lower part of the crucible 10 and obtaining a more ideal granular silicon dehydrogenation effect.

[0045] See also Figure 1 and Figure 2 In some embodiments, the adjustment mechanism 31 includes a plurality of adjustment holes 311 arranged along the length direction of the suspension arm 30 . The adjustment holes 311 are opened on the suspension arm 30 and used for installing the heater 20 .

[0046] Specifically, the position of the hanging arm 30 relative to the crucible 10 is fixed, and the length direction of the hanging arm 30 is the same as the direction of gravity when the ingot furnace 100 is placed on the ground, that is, the direction from top to bottom in the ingot furnace 100. The adjustment hole 311 passes through the hanging arm 30 along the thickness direction of the hanging arm 30 toward at least one surface of the side wall 11 or the side furnace wall 110.

[0047] The heater 20 is detachably connected to the adjustment mechanism 31. Exemplarily, the adjustment hole 311 can be a screw hole. The boom 30 is provided with a plurality of screw holes arranged along the length direction of the boom 30. The heater 20 is installed at different positions along the length direction of the boom 30 by means of bolts and screw holes.

[0048] In this way, the heater 20 is installed at different positions in the length direction of the suspension arm 30 through the plurality of adjustment holes 311 , thereby achieving height adjustment of the heater 20 .

[0049] See also Figure 1 In some embodiments, the adjustment hole 311 is disposed at one end of the suspension arm 30 close to the heater 20 along the length direction of the suspension arm 30 .

[0050] Specifically, the heater 20 includes a top heater 21 located at the top of the crucible 10 and a side heater 22 located at the side wall 11 of the crucible. The arm 30 connected to the side heater 22 is vertically arranged in the furnace chamber 120 and can be located above the side of the crucible 10. There are multiple arms 30 connected to the top heater 21, and at least part of them are located outside the furnace chamber 120. The arm 30 has two ends along the length direction of the arm 30, one of which is close to the heater 20 and is detachably connected to the heater 20 through the adjustment mechanism 31, and the other end is away from the heater 20 and can be fixedly installed on the furnace wall 110. The arm 30 suspends the heater 20 in the furnace chamber 120 and is located on the side of the crucible 10. The adjustment hole 311 is opened at the end of the arm 30 close to the heater 20 along the length direction, and the adjustment hole 311 passes through the front and rear surfaces of the arm 30 along the thickness direction of the arm 30.

[0051] In this way, the adjustment hole 311 is set at one end of the arm 30 close to the heater 20 along the length direction of the arm 30, so that the heater 20 is connected to the end of the arm 30 close to the heater 20, thereby shortening the distance between the center of gravity of the arm 30 and the heater 20, which is conducive to structural stability.

[0052] See also Figure 1 and Figure 2 In some embodiments, the plurality of adjustment holes 311 are arranged at intervals along the length direction of the boom 30 .

[0053] Specifically, there are multiple adjustment holes 311, the length direction of the suspension arm 30 is consistent with the height direction of the heater 20, and multiple adjustment holes 311 are arranged at intervals along the length direction of the suspension arm 30. When the heater 20 is fixed to the adjustment hole 311 closer to the bottom of the suspension arm 30, the heater 20 is also relatively closer to the bottom of the crucible 10. The height adjustment density of the heater 20 is equivalent to the distance between two adjacent adjustment holes 311 along the length direction of the suspension arm 30. It can be understood that when the heater 20 is replaced from one of the two interval adjustment holes 311 to the other, the height change value of the heater 20 is the distance between the two adjustment holes 311.

[0054] The heater 20 can be connected to different adjustment holes 311 according to the temperature required for dehydrogenation of granular silicon. During the heating and dehydrogenation process, the position of the heater 20 relative to the crucible 10 is relatively fixed. After dehydrogenation, it can be determined whether the height of the heater 20 needs to be further adjusted based on the dehydrogenation results.

[0055] In this way, multiple adjustment holes 311 are arranged at intervals along the length direction of the boom 30. The heater 20 can be adjusted to a preset height by selectively fixing the heater 20 on a specific adjustment hole 311, which simplifies the process of adjusting the height of the heater 20 by the adjustment mechanism 31 and ensures that the height positioning of the heater 20 is accurate.

[0056] See also Figure 1 In some embodiments, along the length direction of the boom 30 , the number of the adjustment holes 311 is 4-8 and the distance between two adjacent adjustment holes 311 ranges from 10 mm to 30 mm.

[0057] Specifically, the number of the adjustment holes 311 along the length direction of the boom 30 is 4-8, which means that there are 4-8 adjustment holes 311 at different positions along the length direction of the boom 30. In some embodiments, the adjustment holes 311 are arranged in rows along the width direction of the boom 30, and the total number of the adjustment holes 311 is the product of the number along the length direction of the boom 30 and the number of rows along the width direction of the boom 30.

[0058] Exemplarily, along the length direction of the boom 30, the number of the adjustment holes 311 can be 4, 5, 6, 7 or 8, and the distance between two adjacent adjustment holes 311 can range from 10mm-20mm, 13mm-21mm, 14.5mm-25mm, 18mm-29mm, 20mm-30mm, or 10mm, 11mm, 16mm, 22mm, 25.6mm, 27mm, 30mm. The distance between two adjacent adjustment holes 311 can be equal or unequal. The positions of the adjustment holes 311 arranged in the length direction of the boom 30 correspond one-to-one to the height position of the heater 20 when it is connected to the boom 30 through the adjustment holes 311. For example, along the length direction of the boom 30, the number of the adjustment holes 311 is 5, and the distance between two adjacent adjustment holes 311 is 12mm, then the heater 20 can be fixed at 5 different height positions every 12cm within a height range of 48mm.

[0059] In this way, by properly setting the spacing distance and number of the adjustment holes 311 , the position of the heater 20 can be adjusted within a reasonable height range.

[0060] See also Figure 2 In some embodiments, the adjustment holes 311 are formed into two spaced columns along the width direction of the boom 30 , the number of adjustment holes 311 in each column is 4, and the interval between two adjacent adjustment holes 311 in the same column of adjustment holes 311 is 10 mm.

[0061] Specifically, the number of the adjustment holes 311 is 8 in total, and the length of the suspension arm 30 is 460 mm, which is 30 mm longer than that of the conventional suspension arm 30, so as to provide sufficient space for opening the adjustment holes 311, and to expand the height of the heater 20 when it is connected to the end of the suspension arm 30 by 30 mm relative to the height range in which the crucible 10 can be lowered. The heater 20 can be fixed at 4 different height positions every 10 cm within the height range of 30 mm.

[0062] Thus, providing two rows of adjustment holes 311 can improve the structural balance and ensure the stability of the position of the suspension arm 30 suspending the heater 20. By providing four adjustment holes 311 in each row with a hole spacing of 10 mm, a high-precision height adjustment range is obtained.

[0063] In some embodiments, the adjustment mechanism 31 includes a slide groove (not shown) formed on the suspension arm 30 and a slider (not shown) cooperating with the slide groove, the slider can slide in the slide groove, and the slider is connected to the heater 20.

[0064] Specifically, the slide groove extends along the length direction of the arm 30, and the slider slides to different positions in the slide groove along the length direction of the arm 30, driving the heater 20 to move to different heights along the length direction of the arm 30. The distance that the slide groove extends along the length direction of the arm 30 is less than or equal to 200 mm.

[0065] In this way, the slider cooperates with the slide groove to achieve stepless adjustment of the height of the heater 20 and simplify the operation process.

[0066] In some embodiments, the heater 20 includes a top heater 21 located on the top of the crucible 10 and a side heater 22 located on the side wall 11 of the crucible. The number of the side heaters 22 is an even number, and the even number of side heaters 22 are opposite to each other in the radial direction of the crucible 10 .

[0067] Specifically, the crucible 10 may be a rectangular parallelepiped (such as Figure 1 The crucible 10 may be in the shape of a rectangular parallelepiped or a cube, and the present application does not limit this. When the crucible 10 is in the shape of a rectangular parallelepiped or a cube, the side wall 11 of the crucible 10 includes four wall surfaces: the front side, the rear side, the left side, and the right side, and each side wall 11 is provided with a side heater 22. When the crucible 10 is in the shape of a round-bottomed cylinder, the number of the side heaters 22 may be four, and the four side heaters 22 surround the side wall 11 of the crucible 10 and are opposite to each other in the radial direction of the crucible 10.

[0068] In this way, an even number of side heaters 22 are arranged opposite to each other in the radial direction of the crucible 10 , so that the side heaters 22 are distributed more evenly relative to the crucible 10 , which is conducive to uniform and sufficient heating.

[0069] See also Figure 1 In some embodiments, the heater 20 is a curved tube structure with multiple bends, the length direction of the suspension arm 30 forms an angle with the extension direction of the heater 20, and the suspension arm 30 is connected at the middle position of the extension direction of the heater 20.

[0070] Specifically, the heater 50 can be a graphite resistance heater, and current is provided to the heater 50 through the graphite electrode, so that the heater 50 heats the crucible 10. The graphite electrode is in the shape of a curved tube with multiple bends and extends in the same plane. The suspension arm 30 is vertically arranged, and the heater 20 can extend in the lateral direction of the ingot furnace 100, and the extension direction of the heater 20 is perpendicular to the length direction of the suspension arm 30. The extension path of the heater 20 is tortuous for many times, and the two ends of the heater 20 can be aligned with the two sides of the side wall 11 of the crucible 10 corresponding to the heater 20, so that the heating range of the heater 20 is sufficient to cover the corresponding side wall 11 of the crucible 10.

[0071] The heater 20 extends a certain distance along a path perpendicular to the length direction of the arm 30, then bends and continues to extend upward or downward along the length direction of the arm 30. After extending a preset distance, it bends again in the opposite direction and extends along the length direction of the arm 30 to the same height as the previous bending interval. This is repeated many times to form a bent pipe, thereby increasing the heating area within a limited space.

[0072] The suspension arm 30 is connected to the middle position of the extension direction of the heater 20 and is also located in the middle position in the width direction of the side wall 11 of the crucible 10 corresponding to the heater 20. This allows the suspension arm 30 to maintain a good balance when suspending the heater 20, which helps to stabilize the overall structure and reduce swinging or shaking.

[0073] In the description of this specification, the description with reference to the terms "certain embodiments", "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiments or examples are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0074] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one feature. In the description of this application, the meaning of "plurality" is at least two, such as two, three, unless otherwise clearly and specifically defined.

[0075] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application. The scope of the present application is defined by the claims and their equivalents.

Claims

1. An ingot casting furnace, characterized in that: include: A crucible, wherein the crucible is used to fill silicon material; a heater, the heater being distributed on at least one side of the crucible; and The suspension arm is provided with an adjustment mechanism, and the adjustment mechanism is connected to the heater to adjust the height of the heater.

2. The ingot casting furnace according to claim 1, characterized in that: The adjustment mechanism adjusts the height of the heater to a range less than or equal to 200 mm.

3. The ingot casting furnace according to claim 1, characterized in that: The adjustment mechanism comprises a plurality of adjustment holes arranged along the length direction of the suspension arm, and the adjustment holes are opened on the suspension arm and used for installing the heater.

4. The ingot casting furnace according to claim 3, characterized in that: The adjustment hole is disposed at one end of the suspension arm close to the heater along the length direction of the suspension arm.

5. The ingot casting furnace according to claim 3, characterized in that: The plurality of adjustment holes are arranged at intervals along the length direction of the boom.

6. The ingot casting furnace according to claim 5, characterized in that: Along the length direction of the boom, the number of the adjustment holes is 4-8 and the distance between two adjacent adjustment holes ranges from 10mm to 30mm.

7. The ingot casting furnace according to claim 6, characterized in that: The adjustment holes form two spaced rows along the width direction of the boom, the number of the adjustment holes in each row is 4, and the interval between two adjacent adjustment holes in the same row is 10 mm.

8. The ingot casting furnace according to claim 1, characterized in that: The adjusting mechanism comprises a slide groove formed on the suspension arm and a slider matched with the slide groove, the slider can slide in the slide groove, and the slider is connected to the heater.

9. The ingot casting furnace according to claim 1, characterized in that: The heater comprises a top heater located at the top of the crucible and a side heater located at the side wall of the crucible. The number of the side heaters is an even number, and the even number of the side heaters are opposite to each other in the radial direction of the crucible.

10. The ingot casting furnace according to claim 1, characterized in that: The heater is a curved tube structure with multiple bends, the length direction of the suspension arm forms an angle with the extension direction of the heater, and the suspension arm is connected to the middle position of the extension direction of the heater.

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