Anti-explosion cleaning type wet cleaning machine

Abstract

The utility model discloses an anti-explosion cleaning type wet cleaning machine which comprises a wet machine cabinet and further comprises an anti-explosion air purification assembly, an anti-explosion cleaning assembly, a wet cleaning assembly, an anti-explosion cleaning assembly and an anti-explosion cleaning assembly, and the anti-explosion cleaning assembly is arranged on a wet machine cabinet body. The explosion-proof lamp is arranged at the top of the wet-process cabinet and is isolated from an operation area of the wet-process cabinet by adopting transparent explosion-proof glass; the fire extinguishing assembly is used for detecting the smoke condition in the operation area and extinguishing fire according to the smoke condition; the cleaning type assembly is used for ensuring that the operation area is clean in the cleaning type process; waste liquid flows into the waste liquid barrel through the table top waste liquid hole funnel and a pipeline to be collected, and the waste liquid barrel is provided with a liquid fullness alarm device. By arranging the anti-explosion air purification assembly, the anti-explosion lamp, the fire extinguishing assembly, the cleaning type assembly, the waste liquid barrel and other parts in the wet process cabinet, explosion is avoided in the operation process, the personal safety of workers in organic cleaning or testing work is guaranteed, controllable risks and property losses of enterprises are reduced, and the economic benefits of enterprises are improved. And a safe and comfortable operation environment is provided for workers.

Description

Technical Field

[0001] The utility model relates to the technical field of wet cleaning, in particular to an explosion-proof cleaning type wet cleaning machine. Background Art

[0002] At present, domestic chemical, chemical synthesis, infrared refrigeration and detector industries, wafer foundry companies and scientific research institutes use a large amount of organic solvents in the process of wafer wet etching and cleaning. The steam, flammable gas, solid powder, etc. produced are easily mixed with air to produce sparks and cause combustion or explosion; at the same time, because the original cleaning technology does not have clean fresh air filtering and supply measures, the harmful gases and substances produced by cleaning or experiments corrode the human body from time to time, endangering the health of operators, and samples or finished products, semi-finished products, etc. are seriously contaminated during the test, affecting the experimental results and many other factors.

[0003] Hereby, the utility model provides an explosion-proof cleaning type wet cleaning machine, which combines the original backward technical nodes to optimize and improve the safety function and clean working environment of the cleaning table. Utility Model Content

[0004] Purpose of the utility model: To solve the problem that the steam, flammable gas, solid powder, etc. generated in the cleaning process of the prior art are easily mixed with air to produce sparks and cause combustion or explosion; at the same time, because the original cleaning technology does not have clean fresh air filtering and supply measures, the harmful gases and substances generated by cleaning or experiments constantly corrode the human body and endanger the health of the operators, and the samples or finished products, semi-finished products, etc. are seriously contaminated during the test, affecting the experimental results.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] An explosion-proof cleaning type wet cleaning machine, comprising a wet cleaning cabinet, and further comprising:

[0007] An explosion-proof purified air component, which is arranged on the main body of the wet process cabinet and includes an ultra-high efficiency clean air flow filter, and a built-in explosion-proof control box for docking with the wet process cabinet PLC controller and a visual LCD interface;

[0008] A fire extinguishing component, which is arranged on the top of the operating area and is used to detect the smoke condition inside the operating area and extinguish the fire according to the smoke condition;

[0009] A cleaning component, which is arranged inside the operating area and is used to ensure that the operating area is clean during the cleaning process;

[0010] The waste liquid bucket is used to collect waste liquid generated by the cleaning work in the operation area. The waste liquid flows through the waste liquid hole funnel on the table and then flows into the waste liquid bucket through the pipeline for collection. The waste liquid bucket is equipped with a liquid full alarm device.

[0011] Furthermore, the fire extinguishing assembly includes a smoke detector and a fire extinguishing spray device installed on the left and right sides of the top of the operating area. The smoke detector is linked to an alarm device, and when the smoke exceeds the maximum limit concentration, the linked spray device sprays foam to extinguish the fire; the fire extinguishing assembly also includes an annular water inlet pipe column arranged on the left and right sides and the inner side of the operating area, and a plurality of spiral spray nozzles are arranged on the water inlet pipe column, and the spray nozzles are installed at different angles.

[0012] Furthermore, the cleaning components include ultra-pure anti-corrosion faucets, sinks, ultra-pure water guns, and nitrogen guns arranged in the operation area. Furthermore, the human facade control area of ​​the wet process cabinet is equipped with an explosion-proof LCD screen, explosion-proof sockets, explosion-proof pressure gauges and alarms, and explosion-proof cables are used to connect the explosion-proof controller and the explosion-proof LCD screen.

[0013] Furthermore, an explosion-proof lamp is arranged on the top of the wet process cabinet and is isolated from the operation area of ​​the wet process cabinet by transparent explosion-proof glass.

[0014] Furthermore, the lower cabinet of the wet process cabinet is provided with a negative pressure exhaust fan for extracting the chemical smell and harmful substances generated during the operation through pipelines to the spray integrated tower or activated carbon device for pollution-free external discharge treatment.

[0015] Furthermore, the wet process cabinet operation area adopts explosion-proof glass, and the explosion-proof glass is manufactured by a laminated metal grid sheet process.

[0016] Furthermore, a leak-proof tray is used at the bottom of the wet process table, and a leakage alarm is installed.

[0017] Compared with the prior art, the beneficial effects of the utility model are:

[0018] By installing explosion-proof air purification components, explosion-proof lamps, fire extinguishing components, cleaning components, waste liquid barrels and other components in the wet process cabinet, explosions can be avoided during operation, ensuring the personal safety of workers during organic cleaning or testing work, reducing controllable risks and property losses of the company, and providing workers with a safe and comfortable operating environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a perspective schematic diagram of the overall structure of the utility model.

[0020] In the figure: 1. Wet process cabinet; 2. Explosion-proof purified air component; 3. Waste liquid barrel; 401. Smoke detector; 402. Fire extinguishing spray device; 403. Water inlet pipe column; 404. Fire extinguisher; 5. Ultra-high efficiency clean air flow filter; 6. Noiseless negative pressure exhaust fan; 7. Explosion-proof glass; 8. Leak-proof tray. DETAILED DESCRIPTION

[0021] In the following description, a large number of specific details are given to provide a more thorough understanding of the utility model. However, it is obvious to those skilled in the art that the utility model can be implemented without one or more of these details. In other examples, in order to avoid confusion with the utility model, some technical features known in the art are not described.

[0022] The applicant believes that the steam, flammable gases, solid powders, etc. generated during the cleaning process of the prior art can easily generate sparks and cause combustion or explosion when mixed with air; at the same time, because the original cleaning technology does not have clean fresh air filtering and supply measures, the harmful gases and substances generated by cleaning or experiments constantly corrode the human body and endanger the health of operators. In the process of graded tests, samples or finished products, semi-finished products, etc. are seriously contaminated, affecting the experimental results.

[0023] To this end, the applicant designed Figure 1 The explosion-proof cleaning type wet cleaning machine shown includes a wet cleaning cabinet 1 and further includes:

[0024] Explosion-proof purified air component 2, which is arranged on the main body of the wet process cabinet 1, includes an ultra-high efficiency clean air flow filter 5, and a self-contained explosion-proof control box connected to the wet process cabinet 1 PLC controller and a visual LCD interface. The ultra-high efficiency clean air flow filter 5 is installed on the top of the operating area and adopts a high-end anti-corrosion light resistance filter;

[0025] A fire extinguishing component is arranged on the top of the operation area and is used to detect the smoke condition inside the operation area and extinguish the fire according to the smoke condition;

[0026] Cleaning components, which are arranged inside the operating area to ensure that the operating area is clean during the cleaning process;

[0027] The waste liquid barrel 3 is used to collect the waste liquid generated by the cleaning work in the operation area. The waste liquid flows through the waste liquid hole funnel on the table and then flows to the waste liquid barrel 3 through the pipeline for collection. The waste liquid barrel 3 is equipped with a liquid full alarm device.

[0028] The explosion-proof cleaning wet cleaning machine of this embodiment has a fire extinguishing component including smoke detectors 401 and fire extinguishing spray devices 402 installed on the left and right sides of the top of the operating area. Multiple smoke detectors 401 and fire extinguishing spray devices 402 are arranged on the left and right sides of the top of the operating area. The smoke detector 401 is linked to an alarm device. When the smoke exceeds the maximum limit concentration, the linked spray device sprays foam to extinguish the fire; the fire extinguishing component also includes an annular water inlet column 403 arranged on the left and right sides and the inner side of the operating area. Multiple spiral spray nozzles (not shown in the drawings) are arranged on the water inlet column 403, and the spray nozzles are installed at different angles.

[0029] The explosion-proof cleaning wet cleaning machine of this embodiment, the cleaning components include an ultra-pure anti-corrosion faucet, a sink, an ultra-pure water gun, and a nitrogen gun (the specific positions are not marked in the figure) arranged in the operation area.

[0030] In the explosion-proof cleaning wet cleaning machine of this embodiment, an explosion-proof LCD screen, explosion-proof sockets, explosion-proof pressure gauge and alarm (specific positions are not marked in the figure) are set in the one-person vertical control area of ​​the wet cabinet, and explosion-proof cables are used to connect the explosion-proof controller and explosion-proof LCD screen.

[0031] In the explosion-proof cleaning type wet cleaning machine of this embodiment, an explosion-proof lamp is arranged on the top of the wet cabinet 1 (the specific position is not marked in the figure), and is isolated from the operating area of ​​the wet cabinet 1 by transparent explosion-proof glass 7.

[0032] In the explosion-proof cleaning type wet cleaning machine of this embodiment, the lower cabinet of the wet machine cabinet 1 is provided with a noiseless negative pressure exhaust fan 6 for extracting the chemical smell and harmful substances generated during the operation through pipelines to the spray integrated tower or activated carbon device for pollution-free external discharge treatment.

[0033] In the explosion-proof cleaning type wet cleaning machine of this embodiment, the operation area of ​​the wet cabinet 1 adopts explosion-proof glass 7, and the explosion-proof glass 7 is made by the process of laminated rubber and metal grid sheets.

[0034] In the explosion-proof cleaning type wet cleaning machine of this embodiment, a leak-proof tray 8 is used at the bottom of the wet cleaning table, and a liquid leakage alarm is additionally installed (not shown in the drawings).

[0035] The explosion-proof cleaning type wet cleaning machine of this embodiment has a main frame of a wet cabinet 1 that is made of metal and is coated with fluoroplastics. The main structure has a strong strength to resist explosion-proof impact and has a dual effect of resisting strong acids and alkalis.

[0036] The explosion-proof cleaning wet cleaning machine of this embodiment is equipped with a one-touch emergency start-stop explosion-proof button switch, which is used when a serious fault occurs.

[0037] Working principle of this application: During operation, smoke detector 401 is used to detect smoke in the operation area. When the smoke concentration is higher than a certain proportion or a fire occurs, smoke detector 401 sends a signal to the alarm to alarm, and fire extinguishing spray device 402 sprays foam to extinguish the fire. At the same time, annular water inlet pipe columns 403 are installed on the left and right sides and the inner side of the operation area, and multiple spiral spray nozzles are set on the water inlet pipe. The spray nozzles are installed at different angles to cover a large area of ​​the operation area. When a fire occurs, water is sprayed to cool down and extinguish the fire. At the same time, a carbon dioxide fire extinguisher 404 is configured on the main structure of the wet bench, and the operator can manually operate the control equipment and the expansion of the fire around the equipment to reduce the disaster;

[0038] The operation area is equipped with ultra-pure anti-corrosion faucets and sinks, ultra-pure water, nitrogen guns and other accessories. An ultra-high-efficiency clean airflow filter 5 is set on the top of the operation area to blow vertically downward. When the harmful airflow and particulate matter generated during the cleaning work rises, they are pressed down by the pressure of the clean airflow blowing vertically downward, and the harmful gases are sucked away from the bottom of the porous table and the suction holes in the inner low area to prevent the rebound of harmful gases and particulate matter, and to ensure the clean air environment of the operation area to the greatest extent. After the cleaning work is completed, use a water gun and a nitrogen gun to check and purge the residual water marks, stains and particulate matter on the surface of the wafer or silicon wafer again. To ensure that the surface of the wafer and silicon wafer is clean and free of pollution, residue and particulate matter. The washed wafer or sheet samples can be temporarily stored on a basket rack not far from the downwind outlet of the clean airflow in the operation area to ensure clean environment protection;

[0039] The waste liquid generated by the cleaning work in the operation area flows through the waste liquid hole funnel on the table and then flows to the waste liquid barrel 3 in the lower cabinet for collection. The waste liquid barrel 3 is equipped with a full liquid alarm device to prompt the replacement of the barrel for treatment. A noiseless negative pressure exhaust fan 6 is set on the top of the wet bench to extract the chemical smell and harmful substances in the drug storage room in the lower cabinet through the pipeline to the spray integrated tower or activated carbon device for treatment and pollution-free discharge.

[0040] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. An explosion-proof cleaning type wet cleaning machine, comprising a wet cleaning cabinet (1), characterized in that: Also includes: An explosion-proof purified air component (2), the explosion-proof purified air component (2) being arranged on the main body of the wet process cabinet (1), the explosion-proof purified air component (2) comprising an ultra-high efficiency clean air flow filter (5), and a self-contained explosion-proof control box connected to the PLC controller and visual liquid crystal interface of the wet process cabinet (1); A fire extinguishing component, which is arranged on the top of the operating area and is used to detect the salt fog condition inside the operating area and extinguish the fire according to the smoke condition; A cleaning component, which is arranged inside the operating area and is used to ensure that the operating area is clean during the cleaning process; A waste liquid bucket (3) is used to collect waste liquid generated during cleaning work in the operation area. The waste liquid flows through a waste liquid hole funnel on the table and then flows through a pipeline to the waste liquid bucket (3) for collection. The waste liquid bucket (3) is equipped with a full liquid alarm device.

2. The explosion-proof cleaning type wet cleaning machine according to claim 1, characterized in that: The fire extinguishing assembly comprises a smoke detector (401) and a fire extinguishing spray device (402) installed on the left and right sides of the top of the operating area. The smoke detector (401) is linked to an alarm device. When the smoke exceeds a maximum limit concentration, the linked spray device sprays foam to extinguish the fire. The fire extinguishing assembly also comprises an annular water inlet column (403) arranged on the left and right sides and the inner side of the operating area. A plurality of spiral spray nozzles are arranged on the water inlet column (403), and the spray nozzles are installed at different angles.

3. The explosion-proof cleaning type wet cleaning machine according to claim 1, characterized in that: The cleaning components include an ultrapure anti-corrosion faucet, a sink, an ultrapure water gun, and a nitrogen gun which are arranged in the operating area.

4. The explosion-proof cleaning type wet cleaning machine according to claim 1, characterized in that: The human-level control area of ​​the wet process cabinet (1) is provided with an explosion-proof LCD screen, an explosion-proof socket, an explosion-proof pressure gauge and an alarm, and an explosion-proof cable is used to connect the explosion-proof controller and the explosion-proof LCD screen.

5. The explosion-proof cleaning type wet cleaning machine according to claim 1, characterized in that: An explosion-proof lamp is arranged on the top of the wet process cabinet (1), and is isolated from the operation area of ​​the wet process cabinet (1) by transparent explosion-proof glass (7).

6. The explosion-proof cleaning type wet cleaning machine according to claim 1, characterized in that: The top of the wet process cabinet (1) is provided with a noiseless negative pressure exhaust fan (6) for extracting chemical odors and harmful substances generated during the operation through pipelines to a spray integrated tower or an activated carbon device for pollution-free external discharge treatment.

7. The explosion-proof cleaning type wet cleaning machine according to claim 1, characterized in that: The operation area of ​​the wet process cabinet (1) adopts explosion-proof glass (7), and the explosion-proof glass (7) is manufactured by using a laminated rubber and metal grid sheet process.

8. The explosion-proof cleaning type wet cleaning machine according to claim 1, characterized in that: A leak-proof tray (8) is used at the bottom of the wet process table and a liquid leakage alarm is installed.

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