Photomask cassette capable of preventing scratch during transportation

Abstract

The utility model discloses an anti-scratch photomask cassette during transportation, which relates to the technical field of photomask packaging and comprises a cassette body, a cassette cover and a frame body. One side of the box body is open, a containing cavity is formed in the box body, and a positioning structure is arranged in the containing cavity; the box cover covers the opening side of the box body; the frame body is placed in the containing cavity, the frame body is connected with the box body through a positioning structure and keeps relatively static, the frame body is of a frame structure, the side, facing the opening of the box body, of the frame body is a placing side, and a plurality of placing positions used for placing the photomasks are arranged on the inner side of the frame body. According to the photomask cassette capable of preventing scraping during transportation, the boxing efficiency of a plurality of photomasks can be improved, and the possibility that foreign matters appear in the cassette is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of photomask packaging, in particular to a photomask dark box which is scratch-resistant during transportation. Background Art

[0002] A photomask is a photomask that is used as a graphic master in the photolithography process. The pattern is transferred from the photomask to the substrate. A photomask is a transparent substrate made of materials such as metal or glass, on which a pattern generated by software is printed.

[0003] During transportation, the photomask needs to be placed in a dedicated box or container to avoid external shock or vibration during transportation. The box or container should have sufficient strength and cushioning performance to resist possible collisions and bumps. Therefore, in general, the photomask is clamped in the box or container, and the two remain relatively still. The clamping structure in the box or container corresponds to the size of the photomask.

[0004] However, in order to improve transportation efficiency, multiple photomasks are packed in one packaging box; in order to protect the photomasks, the packaging box is relatively closed, so it is inconvenient to place multiple photomasks and the efficiency is low. When placing multiple photomasks, the packaging box is in an open state. The longer the photomasks are placed, the easier it is for foreign objects to fall into the opened packaging box. Utility Model Content

[0005] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a transport scratch-resistant photomask cassette, which can improve the efficiency of cassette loading of multiple photomasks and reduce the possibility of foreign matter appearing in the cassette.

[0006] The transport scratch-resistant photomask cassette according to the embodiment of the utility model comprises: a cassette body, one side of which is open, the interior of which has a receiving cavity, and the receiving cavity is provided with a positioning structure;

[0007] A box cover, the box cover is arranged on the opening side of the box body;

[0008] The frame is placed in the accommodating cavity, the frame is connected to the box body through the positioning structure and remains relatively still, the frame is a frame structure, the side of the frame facing the box body opening is the placement side, and the inner side of the frame is provided with a plurality of placement positions for placing photomasks.

[0009] The scratch-resistant transport photomask cassette according to the embodiment of the utility model has at least the following beneficial effects: the frame is placed in the accommodating cavity of the cassette, and the frame can be taken out of the cassette; the photomask is placed in the placement position of the frame, and after the frame is filled with photomasks, the frame can be placed in the cassette at one time, and the lid is closed to complete the packaging of multiple photomasks. The efficiency of packing multiple photomasks is high, and the lid does not need to be removed from the cassette for a long time when the photomasks are packed, which reduces the possibility of foreign matter entering the cassette. The frame is designed as a frame structure, and when multiple photomasks are placed in the placement position, there is little interference with the side walls of the frame, and no foreign matter will be retained in the frame when the photomasks are placed.

[0010] According to some embodiments of the utility model, a convex portion is provided on the side wall of the accommodating cavity, and a concave portion is provided on the outer side of the frame body, the concave portion extends in a direction away from the placement side, and the convex portion fits with the concave portion.

[0011] According to some embodiments of the utility model, an end of the convex portion facing the opening of the box body is provided with an oblique angle, and an end of the concave portion close to the placement side is provided with an inclined surface.

[0012] According to some embodiments of the utility model, a group of opposite sides of the frame are respectively provided with a plurality of card slots, and the card slots extend from the placement side toward the bottom of the frame, and the plurality of card slots on each side of the frame are arranged along the side length, and two opposite card slots form a placement position.

[0013] According to some embodiments of the present invention, the side wall of the card slot forms an angle with the bottom surface of the card slot, and the distance between the two side walls of the card slot gradually decreases along the opening of the card slot toward the bottom surface of the card slot.

[0014] According to some embodiments of the present invention, an end of the slot close to the placement side is provided with an oblique chamfer.

[0015] According to some embodiments of the present invention, the placement side of the frame body extends to the outside of the opening side of the box body.

[0016] According to some embodiments of the present invention, a pressing component is provided on the inner side of the box cover, and the pressing component is used to contact the photomask extending out of the opening side of the box body.

[0017] According to some embodiments of the utility model, the pressing assembly includes a connecting block and a plurality of pressing grooves, the connecting block is connected to the box cover, the plurality of pressing grooves are arranged on the connecting block, and the arrangement direction of the plurality of pressing grooves is consistent with the arrangement direction of the placement positions.

[0018] According to some embodiments of the utility model, a connecting seat is provided on the inner side of the box cover, the connecting seat is provided with a connecting groove, the connecting block is provided with an elastic connecting column, the outer diameter of the connecting column is larger than the width of the connecting groove, so that the connecting column can be pressed into the connecting groove.

[0019] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0021] Figure 1 This is a schematic structural diagram of a transport scratch-resistant photomask cassette according to an embodiment of the utility model;

[0022] Figure 2 This is a schematic diagram of the internal structure of the transport scratch-resistant photomask cassette according to an embodiment of the utility model;

[0023] Figure 3 It is a schematic diagram of the structure of the convex part and the concave part of an embodiment of the utility model;

[0024] Figure 4 It is an enlarged schematic diagram of the internal structure of an embodiment of the utility model;

[0025] Figure 5 This is a schematic structural diagram of a pressing component according to an embodiment of the utility model;

[0026] Figure 6 This is a schematic structural diagram of a second type of transport scratch-resistant photomask cassette according to an embodiment of the utility model.

[0027] Figure Number:

[0028] The box body 100 , the protrusion 110 , the bevel 111 , the box cover 200 , the connecting seat 210 , the frame body 300 , the recess 310 , the bevel 311 , the slot 320 , the bevel chamfer 321 , the pressing assembly 400 , the connecting block 410 , the connecting column 411 , and the pressing groove 420 . DETAILED DESCRIPTION

[0029] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0030] In the description of the present invention, it should be understood that the descriptions involving orientation, such as the orientation or positional relationship indicated as up, down, etc., are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0031] In the description of the present utility model, "a plurality" means more than two. If there is a description of "first" or "second", it is only for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0032] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0033] The photomask needs to be placed in a dedicated packaging box during transportation to avoid external shock or vibration during transportation. The packaging box should have sufficient strength and cushioning performance to withstand possible collisions and bumps. Therefore, in general, the photomask is clamped in the packaging box, and the two remain relatively still. The clamping structure in the packaging box corresponds to the size of the photomask. In order to improve transportation efficiency, multiple photomasks will be placed in a packaging box; in order to protect the photomask, the packaging box is relatively closed, so it is inconvenient to operate when placing multiple photomasks, and the efficiency is low. When placing multiple photomasks, the packaging box is in an open state. The longer the photomask is placed, the easier it is for foreign objects to fall into the open packaging box.

[0034] Reference Figure 1 , Figure 2 and Figure 6 As shown, a transport scratch-resistant photomask cassette according to an embodiment of the utility model comprises a cassette body 100, a cassette cover 200 and a frame body 300. One side of the cassette body 100 is open, and the interior of the cassette body 100 has a receiving cavity, and the receiving cavity is provided with a positioning structure; the cassette cover 200 is provided on the open side of the cassette body 100; the frame body 300 is placed in the receiving cavity, and the frame body 300 is connected to the cassette body 100 through the positioning structure and remains relatively still. The frame body 300 is a frame structure, and the side of the frame body 300 facing the opening of the cassette body 100 is the placement side, and the inner side of the frame body 300 is provided with a plurality of placement positions for placing photomasks. The transport scratch-resistant photomask cassette according to the utility model can improve the efficiency of packing multiple photomasks and reduce the possibility of foreign matter in the cassette.

[0035] The frame 300 is placed in the accommodating cavity of the box 100, that is, the frame 300 can be taken out of the box 100, and multiple photomasks are first placed in the frame 300, and then the frame 300 is placed in the box 100, and the photomask packaging can be completed by covering the box cover 200. Specifically, the frame 300 is provided with multiple placement positions, one side of the frame 300 is open and is the placement side, and the photomask is moved into the frame 300 from the placement side and placed on the placement position of the frame 300. After the frame 300 is fully filled with photomasks, the frame 300 and the multiple photomasks can be placed in the box 100 at one time, and the box cover 200 is covered to complete the packaging of the multiple photomasks.

[0036] By packing multiple photomasks in the above manner, the packing efficiency is higher, because the frame 300 is designed as a frame structure, and when multiple photomasks are placed in the placement position, there is less interference with the side wall of the frame 300, so there is no need to make too many adjustments for each photomask, and when packing, the frame 300 can be directly placed in the box 100, and the packing of multiple photomasks is completed in one step. Therefore, when the photomask is packed, the box cover 200 does not need to be removed from the box 100 for a long time, reducing the possibility of foreign matter entering the box 100. The frame 300 is a frame structure, and when the photomask is placed, no foreign matter will be retained in the frame 300, and no foreign matter will be carried into the box 100, which prevents foreign matter from moving in the box 100 and scratching the photomask.

[0037] After the frame 300 is placed in the box 100, the positioning structure in the accommodating cavity keeps the frame 300 and the box 100 relatively still, which can reduce the shaking of the photomask during transportation and avoid scratches between the photomask and the frame 300 or other parts.

[0038] Reference Figure 3 As shown, it can be understood that in some embodiments, the positioning structure is a convex portion 110, and correspondingly, the frame body 300 is also provided with a concave portion 310 adapted thereto. For example, the side wall of the accommodating cavity is provided with a convex portion 110, and the outer side of the frame body 300 is provided with a concave portion 310, and the concave portion 310 extends in a direction away from the placement side, and the convex portion 110 and the concave portion 310 fit together.

[0039] The frame body 300 is put into the box body 100 , and the convex part 110 is embedded in the concave part 310 . The convex part 110 and the concave part 310 abut against each other to prevent the frame body 300 from sliding relatively in the box body 100 .

[0040] It can be understood that an end of the convex portion 110 facing the opening of the box body 100 is provided with an angled corner 111 , and an end of the concave portion 310 close to the placement side is provided with an inclined surface 311 .

[0041] When the frame body 300 is placed from the open side of the box body 100 to the accommodating cavity, the frame body 300 first contacts the end of the protrusion 110 facing the opening of the box body 100. Therefore, an angle 111 is provided at the end of the protrusion 110 facing the opening of the box body 100, which can guide the frame body 300 and facilitate the alignment of the concave portion 310 of the frame body 300 with the protrusion 110 and the matching of the protrusion 110 and the concave portion 310.

[0042] Reference Figure 4 As shown, it can be understood that a group of opposite sides of the frame 300 are respectively provided with multiple card slots 320, and the card slots 320 extend from the placement side toward the bottom of the frame 300. The multiple card slots 320 on each side of the frame 300 are arranged along the side length, and two opposite card slots 320 form a placement position.

[0043] The photomask is placed in the placement position, which is actually the side of the photomask being inserted into a set of oppositely arranged slots 320. Preferably, the width of the slots 320 is equivalent to the thickness of the photomask, and after the photomask is inserted into the slots 320, it can remain stationary with the frame 300 in the normal direction of the photomask surface. The distance between the two opposite slots 320 is equivalent to the width of the photomask, and the photomask can also remain stationary with the frame 300 in the direction parallel to the surface.

[0044] It is understandable that the side wall of the slot 320 forms an angle with the bottom surface of the slot 320 , and the distance between the two side walls of the slot 320 gradually decreases along the opening of the slot 320 toward the bottom surface of the slot 320 .

[0045] After the side wall of the slot 320 forms an angle with the bottom surface of the slot 320, the side edge of the photomask is inserted into the slot 320, and in fact, the side edge of the photomask contacts the side wall of the slot 320. The above structure and the way of clamping the photomask can minimize the contact of the slot 320 with the photomask, and avoid friction damage to the surface of the photomask.

[0046] It is understandable that an end of the slot 320 close to the placement side is provided with an oblique chamfer 321 .

[0047] The photomask is placed from the placement side of the frame 300 toward the inside of the frame 300. An oblique chamfer 321 is provided at one end of the slot 320 close to the placement side, which facilitates the photomask to be aligned with the center line of the slot 320 and inserted into the slot 320, thereby avoiding excessive force on one side of the photomask and severe wear.

[0048] It is understandable that the placement side of the frame 300 extends to the outside of the opening side of the box body 100. That is to say, the height of the frame 300 is greater than the height of the box body 100, so that the top of the frame 300 can exceed the top of the box body 100. In this way, it can be ensured that when the frame 300 is taken out from the box body 100, it is convenient to grasp the protruding part of the frame 300 and take the frame 300 out of the box body 100. If the placement side of the frame 300 is on the inner side of the box body 100, then when taking out the frame 300, it is also necessary to reach into the box body 100 to operate, and the placement operation is relatively inconvenient. It should be understood that although the placement side of the frame 300 extends to the outside of the opening side of the box body 100, it is still possible to establish a closed space for the photomask by covering the box cover 200 for protection.

[0049] Reference Figure 5 As shown, it can be understood that a pressing assembly 400 is provided on the inner side of the box cover 200 , and the pressing assembly 400 is used to contact the photomask extending out of the opening side of the box body 100 .

[0050] The pressing assembly 400 can further stabilize the photomask to prevent the photomask from shaking during transportation, thereby protecting the photomask from being scratched and damaged due to shaking.

[0051] It can be understood that the pressing assembly 400 includes a connecting block 410 and a plurality of pressing grooves 420, the connecting block 410 is connected to the box cover 200, the plurality of pressing grooves 420 are arranged on the connecting block 410, and the arrangement direction of the plurality of pressing grooves 420 is consistent with the arrangement direction of the placement position.

[0052] For example, in some embodiments, a pressing groove 420 and a group of clamping grooves 320 are in the same plane, that is, a photomask can be fixed by both the clamping groove 320 and the pressing groove 420. The pressing groove 420 is fixed in the box cover 200 through the connecting block 410, and the pressing groove 420 will contact the photomask only when the box cover 200 is covered on the opening side of the box body 100. Therefore, the photomask is not interfered by the pressing groove 420 when it is placed.

[0053] It is understandable that a connecting seat 210 is provided on the inner side of the box cover 200, the connecting seat 210 is provided with a connecting groove, and the connecting block 410 is provided with an elastic connecting column 411, the outer diameter of the connecting column 411 is larger than the width of the connecting groove, so that the connecting column 411 can be pressed into the connecting groove.

[0054] In the above structure, the connecting column 411 can be taken out from the connecting groove of the connecting seat 210 to realize the disassembly and replacement of the connecting block 410. Therefore, a suitable pressing assembly 400 can be selected according to different models of the frame 300. The spacing between the placement positions of different models of the frame 300 will be different, so to adapt to the spacing of the placement positions, the spacing of the pressing grooves 420 on the pressing assembly 400 needs to be adjusted synchronously. Compared with moving the pressing grooves 420 to change the spacing, directly replacing a new pressing assembly 400 is more efficient.

[0055] It should be understood that the connecting post 411 is elastic, and the width of the connecting groove only needs to be slightly smaller than the outer diameter of the connecting post 411, so that the connecting post 411 can be inserted into the connecting groove and tightly connected. In order to make the pressing assembly 400 more secure, a clamping structure can also be provided in the connecting groove to clamp the connecting post 411 into the connecting groove.

[0056] It should be understood that in order to further enhance the structural strength of the box cover 200, a plurality of reinforcing ribs may be provided inside the box cover 200. A plurality of wear-resistant blocks may be provided on the outer surfaces of the box cover 200 and the box body 100. The wear-resistant blocks are more protruding than the plane of the side wall, and the contact between the box body 100 or the box cover 200 and the outside world is transferred from the side wall surface to the wear-resistant blocks, thereby reducing the wear of the box body 100 and the box cover 200. Preferably, the wear-resistant blocks are the parts of the box body 100 or the box cover 200 that protrude outward.

[0057] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A transport scratch-resistant photomask cassette, characterized in that: include: A box body (100), one side of the box body (100) is open, the box body (100) has a receiving cavity inside, and the receiving cavity is provided with a positioning structure; A box cover (200), the box cover (200) being arranged to cover the opening side of the box body (100); A frame body (300), the frame body (300) being placed in the accommodating cavity, the frame body (300) being connected to the box body (100) via the positioning structure and remaining relatively still, the frame body (300) being a frame structure, the side of the frame body (300) facing the opening of the box body (100) being a placement side, and a plurality of placement positions for placing photomasks being arranged on the inner side of the frame body (300); A convex portion (110) is provided on the side wall of the accommodating cavity, and the convex portion (110) constitutes the positioning structure. A concave portion (310) is provided on the outer side of the frame body (300), and the concave portion (310) extends in a direction away from the placement side, and the convex portion (110) fits with the concave portion (310).

2. The scratch-resistant transport photomask cassette according to claim 1, characterized in that: An end of the convex portion (110) facing the opening of the box body (100) is provided with an oblique angle (111), and an end of the concave portion (310) close to the placement side is provided with an inclined surface (311).

3. The scratch-resistant transport photomask cassette according to claim 1, characterized in that: A group of opposite sides of the frame (300) are respectively provided with a plurality of slots (320), the slots (320) extending from the placement side toward the bottom of the frame (300), the plurality of slots (320) on each side of the frame (300) being arranged along the side length, and two opposite slots (320) forming a placement position.

4. The scratch-resistant transport photomask cassette according to claim 3, characterized in that: The side wall of the card slot (320) forms an angle with the bottom surface of the card slot (320), and the distance between the two side walls of the card slot (320) gradually decreases along the opening of the card slot (320) towards the bottom surface of the card slot (320).

5. The scratch-resistant transport photomask cassette according to claim 4, characterized in that: An end of the slot (320) close to the placement side is provided with an oblique chamfer (321).

6. The scratch-resistant transport photomask cassette according to claim 5, characterized in that: The placement side of the frame body (300) extends to the outside of the opening side of the box body (100).

7. The scratch-resistant transport photomask cassette according to claim 1, characterized in that: A pressing component (400) is provided on the inner side of the box cover (200), and the pressing component (400) is used to contact the photomask extending out of the opening side of the box body (100).

8. The scratch-resistant transport photomask cassette according to claim 7, characterized in that: The pressing assembly (400) comprises a connecting block (410) and a plurality of pressing grooves (420); the connecting block (410) is connected to the box cover (200); the plurality of pressing grooves (420) are arranged on the connecting block (410); and the arrangement direction of the plurality of pressing grooves (420) is consistent with the arrangement direction of the placement positions.

9. The scratch-resistant transport photomask cassette according to claim 8, characterized in that: A connecting seat (210) is provided on the inner side of the box cover (200), the connecting seat (210) is provided with a connecting groove, the connecting block (410) is provided with an elastic connecting column (411), the outer diameter of the connecting column (411) is greater than the width of the connecting groove, so that the connecting column (411) can be pressed into the connecting groove.

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