Self-leveling high-temperature pressure measuring device

Abstract

The utility model provides a self-leveling high-temperature pressure measuring device. The self-leveling high-temperature pressure measuring device comprises a heating module, an insulating plate, a self-leveling module and a pressure measuring module, the heating module is arranged on the self-leveling module through an insulating plate, and the self-leveling module is arranged on the pressure measuring module. According to the utility model, through mutual cooperation of the heating module, the insulating plate, the self-leveling module and the pressure measuring module, the stress uniformity of the bottom surface can be realized after the crimping type IGBT device is stressed, and the pressure value is fed back in real time, so that the mechanical pressure on the surface of a chip is reasonably distributed, and the mechanical damage of the internal area of the device is prevented.

Description

Technical Field

[0001] The utility model relates to the field of power semiconductor testing, in particular to a self-leveling high-temperature pressure measuring device. Background Art

[0002] It is very difficult to purchase and match IGBT process equipment in China. IGBT device testing, as a post-process, is also an indispensable link. IGBT devices can be mainly divided into two types according to the packaging process: welding type and crimping type. Crimping-type IGBT devices apply pressure to make the internal chip form an electrical connection with the external electrode, which can realize parallel crimping packaging of multiple chips. Compared with welding-type IGBT devices, crimping-type IGBT devices are easy to package chips in parallel and use in series on a large scale, and have the advantages of low thermal resistance, double-sided heat dissipation, and failure short circuit.

[0003] The test of press-fit IGBT devices is often accompanied by high-temperature testing and surface pressure distribution testing of IGBT devices. The existing test of IGBT devices cannot reflect the pressure and temperature changes in real time. When pressure is applied to the IGBT device, it may become unbalanced, resulting in uneven force on the device surface and mechanical damage inside the device, which ultimately leads to test failure. Utility Model Content

[0004] The technical problem to be solved by the utility model is how to keep the IGBT device in a balanced state all the time.

[0005] The utility model solves the above technical problems through the following technical means:

[0006] A self-leveling high-temperature pressure measuring device comprises a heating module (1), an insulating plate (2), a self-leveling module (3), and a pressure measuring module (4); the heating module (1) is arranged on the self-leveling module (3) through the insulating plate (2), and the self-leveling module (3) is arranged on the pressure measuring module (4).

[0007] Beneficial effect: Through the cooperation of the heating module, the insulating plate, the self-leveling module and the pressure measuring module, the uniformity of the force on the bottom surface of the crimped IGBT device can be achieved after the force is applied, and the pressure value can be fed back in real time, so that the mechanical pressure on the chip surface is reasonably distributed, preventing mechanical damage to the internal area of ​​the device.

[0008] Furthermore, the self-leveling module (3) comprises a base plate (31), a support shaft (32), a second spring (33), a connecting seat (34), and a steel ball (35); a plurality of through holes (311) are provided on the base plate (31), the number of the support shaft (32) and the second spring (33) being consistent with the number of the through holes (311), the vertical section of the support shaft (32) being T-shaped, each of the support shafts (32) passing through each of the second springs (33) and the through holes (311) of the base plate (31) in sequence, and the spring being compressed between the top of the support shaft (32) and the base plate (31); a mounting hole (312) is provided through the middle of the base plate (31), the top of the connecting seat (34) is threadedly connected to the mounting hole (312) of the base plate (31), and a steel ball (35) is provided at the bottom of the connecting seat (34).

[0009] Beneficial effect: through the mutual cooperation of the base plate, support shaft, spring, connecting seat and steel ball, the connecting seat and the base plate are threadedly connected, the connecting seat presses the steel ball, the downward force of the spring is limited, and the upward force is limited by the step surface of the support shaft. The four springs are in a compressed but not fully compressed state inside. The middle steel ball is equivalent to the fulcrum of the seesaw. If there is other force at any position on the entire plane of the base plate, it will also tilt in other directions through the fulcrum. The springs at the four corners can ensure the force balance and the whole will not tip over.

[0010] Furthermore, through holes (311) are provided at four corners of the bottom plate (31), and four of the support shafts (32) and the second springs (33) are provided.

[0011] Furthermore, the vertical cross-section of the connecting seat (34) is in an inverted T-shape, and a first hemispherical groove is provided at the bottom of the connecting seat (34), and a steel ball (35) is placed in the first hemispherical groove.

[0012] Furthermore, the pressure measuring module (4) comprises a base (41) and a weighing sensor (42); a weighing sensor (42) is fixed in the middle of the base (41); a second hemispherical groove is provided at the top of the weighing sensor (42) near the steel ball (35); and the free end of the steel ball (35) is placed in the second hemispherical groove.

[0013] Beneficial effect: Through the setting of the weighing sensor, the real-time pressure can be displayed.

[0014] Furthermore, the heating module (1) comprises a heating plate (11), a heater quartz tube (12), a heater (13), a first spring (14), and a sealing plate (17); a plurality of heater quartz tubes (12) are fixedly inserted through the heating plate (11) at intervals along the X-axis; a heater (13) is installed in each of the heater quartz tubes (12); a first spring (14) is fixed at both left and right ends of each of the heaters (13), and the heaters (13) are clamped and fixed by the sealing plates (17) on the left and right sides.

[0015] Beneficial effects: Through the cooperation of the heating plate, heater quartz tube, heater, spring, and sealing plate, the heaters in the heating module are evenly distributed, ensuring uniform heat distribution on the entire plane during heating. Springs are installed at both ends of the heater to clamp the heater so that the heater is in a stable and centered state to achieve temperature uniformity; the heater and the thermocouple are covered with a quartz tube to increase the pressure resistance and ensure stable operation under high voltage conditions.

[0016] Furthermore, the heating module (1) also includes a thermocouple quartz tube (15) and a thermocouple (16); the thermocouple quartz tube (15) is fixed on both sides of the left and right sides of the heating plate (11); and the thermocouple (16) is fixed in the thermocouple quartz tube (15); the thermocouple (16) is electrically connected to the host computer, the temperature controller, and the heater (13).

[0017] Beneficial effect: through the setting of thermocouple quartz tube and thermocouple, the thermocouple detects the temperature and sends the data to the host computer. The host computer receives the temperature and issues instructions to debug the thermostat. The thermostat controls the heater to realize temperature control.

[0018] Furthermore, a thermocouple quartz tube (15) is installed on the left side of the heating plate (11), and two thermocouple quartz tubes (15) are installed on the right side of the heating plate (11), and a thermocouple (16) is fixed in each of the thermocouple quartz tubes (15).

[0019] Furthermore, the heating module (1) further comprises a fixing plate (18), two fixing plates (18) are provided and are respectively fixed on the front and rear sides of the heating plate (11).

[0020] Furthermore, the insulating plate (2) is fixed to the bottom of the heating plate (11).

[0021] Beneficial effects: Through the setting of the insulating plate, the insulating plate has a heat-insulating effect. After the upper part is heated, it can prevent heat from being transferred to the bottom; in addition, the device testing process requires high voltage and large current, and the insulating plate can prevent voltage and current from reaching the device.

[0022] The advantages of the utility model are:

[0023] The utility model can achieve uniformity of the force on the bottom surface of the crimped IGBT device after the force is applied through the mutual cooperation of the heating module, the insulating plate, the self-leveling module and the pressure measuring module, and can provide real-time feedback of the pressure value, so that the mechanical pressure on the chip surface is reasonably distributed, thereby preventing mechanical damage to the internal area of ​​the device.

[0024] The utility model cooperates with the bottom plate, the support shaft, the spring, the connecting seat and the steel ball. The connecting seat and the bottom plate are threadedly connected. The connecting seat presses the steel ball, the downward force of the spring is limited, and the upward force is limited by the step surface of the support shaft. The four springs are in a compressed but not fully compressed state inside. The middle steel ball is equivalent to the fulcrum of the seesaw. If there is other force at any position on the entire plane of the bottom plate, it will also tilt in other directions through the fulcrum. The springs at the four corners can ensure force balance and the whole will not tip over.

[0025] The utility model can display real-time pressure by setting a weighing sensor.

[0026] The utility model achieves uniform distribution of heaters in a heating module through the cooperation of a heating plate, a heater quartz tube, a heater, a spring and a sealing plate, thereby ensuring uniform heat distribution on the entire plane during heating; springs are installed at both ends of the heater to clamp the heater so that the heater is in a stable and centered state, thereby achieving temperature uniformity; the heater and the thermocouple are covered with a quartz tube to increase the pressure resistance and ensure stable operation under high voltage conditions.

[0027] The utility model realizes temperature control by setting a thermocouple quartz tube and a thermocouple, wherein the thermocouple detects temperature and sends data to a host computer, and the host computer receives the temperature and issues instructions to debug the temperature controller, and the temperature controller controls the heater.

[0028] The utility model provides an insulating plate which has a heat-insulating effect, and after the upper part is heated, heat can be prevented from being transferred to the bottom; in addition, the device testing process requires high voltage and high current, and the insulating plate can prevent the voltage and current from being transmitted to the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 This is a three-dimensional diagram of a self-leveling high-temperature pressure measuring device according to a first embodiment of the utility model;

[0030] Figure 2 This is an exploded view of a heating module in a self-leveling high-temperature pressure measuring device according to a first embodiment of the utility model;

[0031] Figure 3 This is an exploded view of a self-leveling module (less steel balls) in a self-leveling high-temperature pressure measuring device according to a first embodiment of the utility model;

[0032] Figure 4 It is a three-dimensional diagram of a pressure measuring module (multiple steel balls) in a self-leveling high-temperature pressure measuring device according to a first embodiment of the utility model. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution in the embodiments of the utility model will be clearly and completely described below in combination with the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0034] Embodiment 1

[0035] like Figure 1 As shown, this embodiment provides a self-leveling high-temperature pressure measuring device, including a heating module 1, an insulating plate 2, a self-leveling module 3, and a pressure measuring module 4.

[0036] like Figure 1 As shown, the heating module 1 is fixed on the self-leveling module 3 through the insulating plate 2, the self-leveling module 3 is fixed on the pressure measuring module 4, and a device 5 is placed on the top of the heating module 1.

[0037] like Figure 1 , Figure 2 As shown, the heating module 1 includes a heating plate 11, a heater quartz tube 12, a heater 13, a first spring 14, a thermocouple quartz tube 15, a thermocouple 16, a sealing plate 17, and a fixing plate 18; a plurality of heater quartz tubes 12 are fixedly inserted through the heating plate 11 along the X-axis, and a heater 13 is installed in each heater quartz tube 12. The left and right ends of each heater 13 are fixed with a first spring 14, which is clamped and fixed by the sealing plates 17 on the left and right sides to squeeze the heater 13; the heaters 13 in the heating module 1 are evenly distributed to ensure that the heat distribution of the entire plane is even during heating, and the first springs 14 are installed at both ends of the heater 13 to clamp the heater 13 so that the heater 13 is in a stable centered state to achieve temperature uniformity; the heater 13 and the thermocouple 16 are covered with a quartz tube to increase the pressure resistance and ensure stable operation under high voltage conditions;

[0038] like Figure 1 , Figure 2 As shown, thermocouple quartz tubes 15 are fixed in the left and right sides of the heating plate 11, and thermocouples 16 are fixed in the thermocouple quartz tubes 15. In this embodiment, a thermocouple quartz tube 15 is installed on the left side of the heating plate 11, and two thermocouple quartz tubes 15 are installed on the right side of the heating plate 11, and thermocouples 16 are fixed in each thermocouple quartz tube 15; the thermocouple 16, the host computer (not shown), the temperature controller (not shown), and the heater 13 are electrically connected, the thermocouple 16 detects the temperature, sends data to the host computer, and the host computer receives the temperature and issues instructions to debug the thermostat, and the thermostat controls the heater 13 to achieve temperature control;

[0039] like Figure 1 , Figure 2 As shown, two fixing plates 18 are provided and are fixed to the front and rear sides of the heating plate 11 respectively.

[0040] like Figure 1 , Figure 2 As shown, the insulating plate 2 is fixed to the bottom of the heating plate 11; the insulating plate 2 has a heat-insulating effect, and after the upper part is heated, it can prevent heat from being transferred to the bottom; in addition, the device 5 testing process requires high voltage and high current, and the insulating plate 2 can prevent voltage and current from reaching the device.

[0041] like Figure 1 , Figure 3 , Figure 4 As shown, the self-leveling module 3 includes a base plate 31, a support shaft 32, a second spring 33, a connecting seat 34, and a steel ball 35; through holes 311 are opened at the four corners of the base plate 31, and four support shafts 32 and second springs 33 are provided. The vertical section of the support shaft 32 is T-shaped, and each support shaft 32 passes through each second spring 33 and the through hole 311 of the base plate 31 in turn, and the spring is compressed between the top of the support shaft 32 and the base plate 31; a mounting hole 312 is opened through the middle of the base plate 31, and the vertical section of the connecting seat 34 is an inverted T-shape, and the top of the connecting seat 34 is threadedly connected to the mounting hole 312 of the base plate 31, A first hemispherical groove (not shown) is provided at the bottom of the connecting seat 34, and a steel ball 35 is placed in the first hemispherical groove; the connecting seat 34 and the bottom plate 31 are threadedly connected, and the connecting seat 34 presses the steel ball 35, so that the downward force of the second spring 33 is limited, and the upward force is limited by the step surface of the support shaft 32. The four second springs 33 are in a compressed but not fully compressed state inside, and the middle steel ball 35 is equivalent to the fulcrum of the seesaw. If there are other forces at any position on the entire plane of the bottom plate 31, it will also tilt in other directions through the fulcrum. The second springs 33 at the four corners can ensure force balance and the whole will not tip over.

[0042] like Figure 1 , Figure 3 , Figure 4 As shown, the pressure measuring module 4 includes a base 41 and a weighing sensor 42; a weighing sensor 42 is fixed in the middle of the base 41, a second hemispherical groove (not shown) is opened in the middle of the top wall of the weighing sensor 42, and the steel ball 35 is placed in the second hemispherical groove, and the steel ball 35 is placed between the weighing sensor 42 and the connecting seat 34.

[0043] When in use, the device 5 is placed on the top of the heating module 1, and the heating module 1 is fixed on the bottom plate 31 as a whole through the insulating plate 2, and the support shafts 32 at the four corners of the self-leveling module 3 are fixed on the base 41; the heating module 1 can heat the device 5, and after the upper surface of the device 5 receives external pressure, it is transmitted to the weighing sensor 42 in turn. When the pressure is unbalanced, the steel ball 35 moves and deviates. Since the second spring 33 has been compressed and a margin has been left during the installation of the support shaft 32, the second spring 33 is compressed or released again, and the force is balanced, so that the device 5 is evenly stressed; the thermocouple 16 displays the real-time temperature, and the weighing sensor 42 displays the real-time pressure.

[0044] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A self-leveling high temperature pressure measuring device, characterized in that: It comprises a heating module (1), an insulating plate (2), a self-leveling module (3), and a pressure measuring module (4); The heating module (1) is arranged on the self-leveling module (3) via an insulating plate (2), and the self-leveling module (3) is arranged on the pressure measuring module (4).

2. A self-leveling high temperature pressure measuring device according to claim 1, characterized in that: The self-leveling module (3) comprises a base plate (31), a support shaft (32), a second spring (33), a connecting seat (34), and a steel ball (35); a plurality of through holes (311) are provided on the base plate (31); the number of the support shaft (32) and the second spring (33) is consistent with the number of the through holes (311); the vertical section of the support shaft (32) is T-shaped; each of the support shafts (32) passes through each of the second springs (33) and the through holes (311) of the base plate (31) in sequence, and the spring is compressed between the top of the support shaft (32) and the base plate (31); a mounting hole (312) is provided through the middle of the base plate (31); the top of the connecting seat (34) is threadedly connected to the mounting hole (312) of the base plate (31); and a steel ball (35) is provided at the bottom of the connecting seat (34).

3. A self-leveling high temperature pressure measuring device according to claim 2, characterized in that: The bottom plate (31) has through holes (311) at four corners, and four of the support shafts (32) and the second springs (33) are provided.

4. A self-leveling high temperature pressure measuring device according to claim 2, characterized in that: The vertical cross section of the connecting seat (34) is in an inverted T shape. A first hemispherical groove is provided at the bottom of the connecting seat (34), and a steel ball (35) is placed in the first hemispherical groove.

5. A self-leveling high temperature pressure measuring device according to claim 2, characterized in that: The pressure measuring module (4) comprises a base (41) and a weighing sensor (42); a weighing sensor (42) is fixed in the middle of the base (41); a second hemispherical groove is provided at the top of the weighing sensor (42) near the steel ball (35); and the free end of the steel ball (35) is placed in the second hemispherical groove.

6. The self-leveling high temperature pressure measuring device according to claim 1, characterized in that: The heating module (1) comprises a heating plate (11), a heater quartz tube (12), a heater (13), a first spring (14), and a sealing plate (17); a plurality of heater quartz tubes (12) are fixedly inserted through the heating plate (11) at intervals along the X-axis; a heater (13) is installed in each of the heater quartz tubes (12); a first spring (14) is fixed at both left and right ends of each of the heaters (13), and the heaters (13) are clamped and fixed by the sealing plates (17) on the left and right sides.

7. A self-leveling high temperature pressure measuring device according to claim 6, characterized in that: The heating module (1) further comprises a thermocouple quartz tube (15) and a thermocouple (16); the thermocouple quartz tube (15) is fixed in the left and right sides of the heating plate (11); and the thermocouple (16) is fixed in the thermocouple quartz tube (15); the thermocouple (16) is electrically connected to the host computer, the temperature controller, and the heater (13).

8. A self-leveling high temperature pressure measuring device according to claim 7, characterized in that: A thermocouple quartz tube (15) is installed on the left side of the heating plate (11), and two thermocouple quartz tubes (15) are installed on the right side of the heating plate (11), and a thermocouple (16) is fixed in each of the thermocouple quartz tubes (15).

9. The self-leveling high temperature pressure measuring device according to claim 6, characterized in that: The heating module (1) further comprises a fixing plate (18), two fixing plates (18) are provided and are respectively fixed on the front and rear sides of the heating plate (11).

10. The self-leveling high temperature pressure measuring device according to claim 6, characterized in that: The insulating plate (2) is fixed on the bottom of the heating plate (11).

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