Carrier and section passivation equipment

Abstract

The utility model provides a carrier, relates to the field of photovoltaic or semiconductor material processing, and solves the technical problem that back contact battery pieces in a traditional material box are abraded after being stacked. The carrier is used for bearing a sheet material and comprises a body, and the at least one first spacer is arranged on the body, the first spacer is provided with a first surface and a second surface which are oppositely arranged, the first surface of the first spacer is in contact with one sheet material, and the second surface of the first spacer is in contact with the other sheet material. According to the structure, in the adjacent sheet materials, the lower surface of the upper sheet material and the upper surface of the lower sheet material are in contact with the first spacer instead of being in direct contact with the first spacer, so that the sheet materials can be stacked and cannot be in contact with each other to be abraded.

Description

Technical Field

[0001] The utility model relates to the field of photovoltaic or semiconductor material processing, and in particular to a carrier and cross-section passivation equipment. Background Art

[0002] After using photovoltaic equipment to process the cell, the cell is usually split. After the split, the cross section of the two halves of the cell is exposed, which will affect the performance of the photovoltaic cell. Therefore, after the cell is split, the cross section needs to be passivated.

[0003] In the related art, the front of the back contact (BC) cell is a smooth surface without grid lines, so if the BC cells are stacked together, the front of the BC cells will be damaged. If the individual BC cells are placed in a material box, the yield will be greatly reduced. Therefore, there is an urgent need for a carrier that can process BC cells in batches without damaging the surface of the BC cells. Utility Model Content

[0004] In order to solve the above technical problems, the present application is proposed. The embodiments of the present application provide a carrier and a cross-section passivation device.

[0005] In a first aspect, an embodiment of the present application provides a carrier for carrying a sheet material, comprising: a main body; at least one first spacer, arranged on the main body, the first spacer having a first surface and a second surface arranged opposite to each other, the first surface of the first spacer contacts one of the sheet materials, and the second surface of the first spacer contacts the other sheet material.

[0006] In some embodiments, the material of the first separator is polytetrafluoroethylene or fluororubber.

[0007] In some embodiments, the first separator has a thickness ranging from 0.5 mm to 5 mm.

[0008] In some embodiments, the first surface of the first spacer contacts the first surface of one of the sheet materials, and the second surface of the first spacer contacts the second surface of another sheet material, wherein the first surface of the sheet material is a smooth surface without grid lines, the second surface of the sheet material is a surface with grid lines, and the second surface of the first spacer is provided with a groove for accommodating the grid lines of the sheet material.

[0009] In some embodiments, the body is configured to shield an upper surface of the top sheet material, a lower surface of the bottom sheet material, and sides of the sheet material that are not to be passivated, and to expose sides of the sheet material that are to be passivated.

[0010] In some embodiments, the main body includes: a box body having a accommodating cavity, the accommodating cavity is configured to accommodate the sheet material, and a first opening is provided above the box body, the first opening is connected to the accommodating cavity; a box cover is connected to the box body, configured to close or open the first opening and cover the upper surface of the sheet material on the top.

[0011] In some embodiments, the carrier further includes: a second spacer disposed in the accommodating cavity; wherein, when the accommodating cavity accommodates the sheet material, the second spacer is disposed between the sheet material at the bottom and the box body.

[0012] In some embodiments, the box cover has a first threaded hole and also includes: a false sheet, which is arranged in the accommodating cavity and is configured to shield the upper surface of the sheet material on the top and apply downward pressure to the sheet material on the top; a stud, which is screwed to the first threaded hole of the box cover and abuts against the false sheet.

[0013] In some embodiments, there are multiple studs, and the multiple studs are symmetrically arranged relative to the vertical symmetry plane of the box cover.

[0014] In some embodiments, the carrier further includes: a third spacer, disposed in the accommodating cavity; wherein, when the accommodating cavity accommodates the sheet material, the third spacer is disposed between the top sheet material and the dummy sheet.

[0015] In some embodiments, the box body includes: a first side panel; a second side panel, arranged opposite to the first side panel; a third side panel, connected to the first side panel and the second side panel; and a bottom panel, connected to the first side panel, the second side panel and the third side panel; wherein the first side panel, the second side panel and the third side panel are configured to shield the side surfaces of the sheet material that are not to be passivated, and the bottom panel is configured to shield the lower surface of the sheet material at the bottom.

[0016] In a second aspect, an embodiment of the present application provides a cross-section passivation device, which is applied to the passivation process of sheet materials, including: a reaction furnace having a process chamber; any one of the carriers in the above-mentioned first aspect, which is arranged in the process chamber and is configured to carry the sheet material.

[0017] The carrier and cross-section passivation device proposed in the embodiments of the present application enable the sheet materials to be stacked without contacting and abrading each other, because the lower surface of the upper sheet material and the upper surface of the lower sheet material in adjacent sheet materials are both in contact with the first spacer, rather than in direct contact. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0019] Figure 1 Shown is a schematic structural diagram of a carrier provided by an exemplary embodiment of the present application.

[0020] Figure 2 Shown is a schematic structural diagram of a first spacer, a second spacer, a third spacer and a sheet material provided by an exemplary embodiment of the present application.

[0021] Figure 3 Shown is a schematic structural diagram of a main body, a dummy piece and a stud provided by an exemplary embodiment of the present application.

[0022] Figure 4 Shown is a schematic structural diagram of a first spacer provided by an exemplary embodiment of the present application.

[0023] Figure 5 Shown is an exploded view of a carrier provided by an exemplary embodiment of the present application.

[0024] Figure 6 Shown is a schematic structural diagram of a cross-section passivation device provided by an exemplary embodiment of the present application.

[0025] Reference numerals:

[0026] 100, carrier; 110, main body; 111, box body; 1111, first side plate; 1112, second side plate; 1113, third side plate; 1114, bottom plate; 1115, second opening; 1116, accommodating cavity; 1117, first opening; 112, box cover; 120, first spacer; 121, groove; 130, second spacer; 140, third spacer; 150, dummy sheet; 160, stud; 200, sheet material; 300, cross-section passivation equipment; 310, reactor. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0028] Application Overview

[0029] In a traditional cross-section passivation material box, multiple battery cells are stacked together, but the back contact (BC) battery cell is single-sided, and the front of the battery cell is a smooth surface. Therefore, after the texturing process, if the BC battery cells are stacked, the front of the battery cell will be damaged. If the single BC battery cells are passivated separately, the production capacity will be far from meeting the requirements, and the number of equipment required will also be greatly increased, which will increase the cost.

[0030] In view of this, the present application proposes a carrier and a cross-section passivation device, the carrier, used for carrying sheet materials, comprising: a body; at least one first spacer, arranged on the body, the first spacer having a first surface and a second surface arranged opposite to each other, the first surface contacts one sheet material, and the second surface contacts another sheet material. With this structure, since the lower surface of the upper sheet material and the upper surface of the lower sheet material in adjacent sheet materials are both in contact with the first spacer, but not in direct contact, the sheet materials can be stacked and placed without contacting each other and being worn.

[0031] Exemplary Devices

[0032] Figure 1 FIG. 1 is a schematic diagram of a structure of a carrier provided by an exemplary embodiment of the present application. Figure 2 Shown is a schematic structural diagram of a first spacer, a second spacer, a third spacer and a sheet material provided by an exemplary embodiment of the present application.

[0033] like Figure 1 and Figure 2 As shown, an embodiment of the present application provides a carrier 100 for carrying a sheet material 200, comprising: a main body 110; at least one first separator 120, arranged on the main body 110, the first separator 120 having a first surface and a second surface arranged opposite to each other, the first surface of the first separator 120 contacts one of the sheet materials 200, and the second surface of the first separator 120 contacts the other sheet material 200.

[0034] Specifically, the body 110 is used to place the sheet material 200 and the first separator 120. When at least two sheet materials 200 are placed in the body 110, the first separator 120 can be placed between adjacent sheet materials 200, so that the lower surface of the upper sheet material 200 and the upper surface of the lower sheet material 200 in the adjacent sheet materials 200 are in contact with the first separator 120, but not in direct contact. In this way, the sheet materials 200 can be stacked and placed in the body 110 without contacting each other and being worn. In addition, since multiple sheet materials 200 can be stacked and placed in the carrier 100, the carrier 100 also has a higher yield, and there is no need to process multiple sheet materials 200 separately, thereby increasing process equipment and saving costs.

[0035] The sheet material 200 is exemplarily a cell or a silicon wafer, such as a back contact (BC) cell or a tunnel oxide passivated contact (TOPCon) cell. The first separator 120 may be a material with a smooth surface and a relatively soft texture, so that it contacts the surface of the sheet material 200 and can prevent the sheet material 200 from being worn.

[0036] Figure 3 Shown is a schematic structural diagram of a main body, a dummy piece and a stud provided by an exemplary embodiment of the present application.

[0037] In some embodiments, Figure 1 and Figure 3 As shown, the carrier 200 can be used as a cross-section passivation material box to passivate the sheet material 200. Specifically, the body 110 is configured to shield the upper surface of the top sheet material 200, the lower surface of the bottom sheet material 200, and the side of the sheet material 200 that is not to be passivated, and expose the side of the sheet material 200 that is to be passivated.

[0038] Among them, any sheet material 200 includes a side to be passivated, a side not to be passivated, and an upper surface and a lower surface not to be passivated, and the side to be passivated is exemplarily a cross section after the split. If the body 110 only carries two sheet materials 200, the top sheet material 200 and the bottom sheet material 200 are the only two sheet materials 200. The body 110 can be a rectangular parallelepiped structure with an opening.

[0039] With this structure, during the passivation process, the process gas can only contact and passivate the side of the sheet material 200 to be passivated, and cannot contact the upper surface, lower surface and side that are not to be passivated, thereby avoiding wrap-around plating.

[0040] Figure 4 Shown is a schematic structural diagram of a first spacer provided by an exemplary embodiment of the present application.

[0041] In some embodiments, Figure 2 and Figure 4 As shown, the first surface of the first separator 120 contacts the first surface of one sheet material 200, and the second surface of the first separator 120 contacts the second surface of another sheet material 200, wherein the first surface of the sheet material 200 is a smooth surface without grid lines, and the second surface of the sheet material 200 is a surface with grid lines, and the second surface of the first separator 120 is provided with a groove 121, and the groove 121 is used to accommodate the grid lines of the sheet material 200. The sheet material 200 is exemplarily a BC battery sheet.

[0042] In some embodiments, the material of the first spacer 120 is polytetrafluoroethylene or fluororubber. The fluororubber may be fluororubber with a fluorine content of 66%. Since polytetrafluoroethylene and fluororubber are both resistant to high temperatures and do not volatilize in a vacuum environment, the use of these two materials will not pollute the environment in a vacuum and high temperature environment of the cross-section passivation equipment.

[0043] In some embodiments, the thickness of the first spacer 120 ranges from 0.5 mm to 5 mm. If the first spacer 120 is too thin, it will be difficult to take and place. If the first spacer 120 is too thick, the amount of the carrier 100 will be reduced. Preferably, the thickness of the first spacer 120 is 2 mm.

[0044] Figure 5 Shown is an exploded view of a carrier provided by an exemplary embodiment of the present application.

[0045] In some embodiments, Figure 1 , Figure 3 and Figure 5 As shown, the body 110 includes: a box body 111, having a receiving cavity 1116, the receiving cavity 1116 is configured to receive the sheet material 200, and a first opening 1117 is provided above the box body 111, the first opening 1117 is communicated with the receiving cavity 1116; a box cover 112, connected to the box body 111, configured to close or open the first opening 1117, and shield the upper surface of the sheet material 200 at the top. Here, the first opening 1117 is used to take and place the sheet material 200, the first separator 120, the second separator 130 and the third separator 140, and the second separator 130 and the third separator 140 are described in detail later.

[0046] In some embodiments, when the main body 110 is used as a cross-section passivation material box, the box body 111 also has a second opening 1115, which is connected to the accommodating cavity 1116 and is configured to expose the side of the sheet material 200 to be passivated (ie, the cross section when cracked).

[0047] In some embodiments, the box body 111 has a second threaded hole, the box cover 112 has a through hole, and the carrier 100 further includes: a screw connection member, which passes through the through hole and is screwed to the second threaded hole. The screw connection member can be, for example, a screw or a bolt.

[0048] In some embodiments, the depth of the box body 111 ranges from 10 to 500 mm, such as the depth of the box body 111 may be 50 mm.

[0049] In some embodiments, the material of the box body 111 is aluminum or steel, and the material of the box cover 112 is aluminum or steel.

[0050] In some embodiments, Figure 1 and Figure 2 As shown, the carrier 100 further includes: a second spacer 130 disposed in the accommodating cavity 1116 ; wherein, when the accommodating cavity 1116 accommodates the sheet material 200 , the second spacer 130 is disposed between the sheet material 200 at the bottom and the box body 111 .

[0051] Specifically, the box body 111 is usually made of a hard material. If the sheet material 200 is directly placed on the box body 111, the contact surface between the sheet material 200 and the box body 111 may be worn. Therefore, a second spacer 130 is provided between the bottom sheet material 200 and the box body 111 to protect the lower surface of the bottom sheet material 200. Here, the second spacer 130 can be provided between the bottom plate 1114 and the bottom sheet material 200. The second spacer 130 can be the same as the first spacer 120, such as the second spacer 130 can be made of polytetrafluoroethylene or fluororubber, and the thickness of the second spacer 130 can range from 0.5 mm to 5 mm.

[0052] In some embodiments, Figure 1 As shown, the box cover 112 has a first threaded hole, and the carrier 100 also includes: a fake sheet 150, which is arranged in the accommodating cavity 1116 and is configured to shield the upper surface of the top sheet material 200 and apply downward pressure to the top sheet material 200; a stud 160, which is screwed to the first threaded hole of the box cover 112 and abuts against the fake sheet 150.

[0053] In practical applications, the threaded connection depth between the stud 160 and the first threaded hole can be adjusted to make the dummy piece 150 abut against the sheet material 200 , and the pressure applied by the dummy piece 150 to the sheet material 200 can be adjusted.

[0054] Through this structure, the dummy sheet 150 can cover the upper surface of the top sheet material 200, and the stud 160 applies downward pressure to the dummy sheet 150, and the dummy sheet 150 can press the sheet material 200, the first spacer 120, the second spacer 130 and the third spacer 140 (the third spacer 140 will be described in detail later). This can reduce the gap between the upper and lower surfaces of the sheet material 200 and other materials, so as to reduce the contact between the upper and lower surfaces of the sheet material 200 that are not to be passivated and the process gas, thereby reducing the occurrence of the wrap-around plating phenomenon.

[0055] In some embodiments, the thickness of the dummy sheet 150 is 5 mm.

[0056] In some embodiments, the material of the dummy piece 150 is aluminum or steel.

[0057] In some embodiments, the first threaded hole is disposed in the central area of ​​the box cover 112 .

[0058] In some embodiments, Figure 1 As shown, there are multiple studs 160, and the multiple studs 160 are symmetrically arranged relative to the vertical symmetry plane of the box cover 112. By arranging multiple symmetrical studs 160, pressure can be uniformly applied to the dummy sheet 150, so that the dummy sheet can uniformly squeeze the sheet material 200, the first spacer 120, the second spacer 130 and the third spacer 140, narrow the gap between the sheet material 200 and the first spacer 120, the second spacer 130 and the third spacer 140, reduce the process gas entering the gap, and thus reduce the plating phenomenon. Exemplary, Figure 1 Two studs 160 are symmetrically arranged in the middle.

[0059] In some embodiments, Figure 1 and Figure 2 As shown, the carrier 100 further includes: a third spacer 140 disposed in the accommodating cavity 1116 ; wherein, when the accommodating cavity 1116 accommodates the sheet material 200 , the third spacer 140 is disposed between the top sheet material 200 and the dummy sheet 150 .

[0060] Specifically, if the fake sheet 150 directly contacts the upper surface of the top sheet material 200, the upper surface of the top sheet material 200 may also be worn, so a third spacer 140 may be provided between the top sheet material 200 and the fake sheet 150 to protect the upper surface of the top sheet material 200. The third spacer 140 may be the same as the first spacer 120, such as the material of the third spacer 140 may be polytetrafluoroethylene or fluororubber, and the thickness of the third spacer 140 may range from 0.5 mm to 5 mm.

[0061] In some embodiments, the carrier 100 may include at least one of the first spacer 120 , the second spacer 130 , and the third spacer 140 described above.

[0062] In the above embodiment, if the first spacer 120, the second spacer 130, and the third spacer 140 are provided at the same time, the upper surface and the lower surface of each sheet material 200 can be covered by the spacers, thereby avoiding wear on the upper and lower surfaces of the sheet material 200. If the sheet material 200 is a BC battery cell, the smooth surface of the sheet material 200 without the grid line can be placed upward or downward.

[0063] In some embodiments, the horizontal cross-sectional dimensions of the first separator 120 , the second separator 130 , and the third separator 140 may be larger than the horizontal cross-sectional dimensions of the sheet material 200 , so as to better cover the upper and lower surfaces of the sheet material 200 .

[0064] In some embodiments, Figure 1 , Figure 3 and Figure 5As shown, the box body 111 includes: a first side plate 1111; a second side plate 1112, which is arranged opposite to the first side plate 1111; a third side plate 1113, which is connected to the first side plate 1111 and the second side plate 1112; a bottom plate 1114, which is connected to the first side plate 1111, the second side plate 1112 and the third side plate 1113; wherein the first side plate 1111, the second side plate 1112 and the third side plate 1113 are configured to shield the side surfaces of the sheet material 200 that are not to be passivated, and the bottom plate 1114 is configured to shield the lower surface of the sheet material 200 at the bottom.

[0065] At least one of the first side plate 1111, the second side plate 1112, and the third side plate 1113 may have the second threaded hole. Specifically, the sheet material 200 is usually a thin rectangular parallelepiped structure, through which the first side plate 1111, the second side plate 1112, and the third side plate 1113 can respectively shield the three non-passivated side edges of the sheet material 200, while the lower surface of the bottom sheet material 200 contacts the bottom plate 1114, and the upper surface of the top sheet material 200 is shielded by the dummy sheet 150, thereby reducing the passivation of the upper surface, lower surface, and side edges that are not to be passivated.

[0066] In some embodiments, the size of the horizontal cross-section of the box body 111 can be slightly larger than the size of the horizontal cross-section of the sheet material 200, so that the side walls of the box body 111 (i.e., the first side plate 1111, the second side plate 1112, and the third side plate 1113) can be closer to the side of the sheet material 200 that is not to be passivated, thereby reducing the process gas from entering between the side of the sheet material 200 that is not to be passivated and the side walls of the box body 111.

[0067] In practical applications, when assembling a plurality of sheet materials 200 into the carrier 100 , the following steps 1 to 8 may be performed.

[0068] Step 1: Place the second spacer 130 on the bottom plate 1114 .

[0069] Step 2: Place a sheet of material 200 on the second separator 130 .

[0070] Step 3: Place a first spacer 120 on the topmost sheet material 200 in the current receiving cavity 1116 .

[0071] Step 4: Place a sheet of material 200 on the topmost first partition 120 in the current receiving cavity 1116 .

[0072] Steps 3 and 4 are repeatedly performed until all sheet materials 200 are placed in the receiving cavity 1116 .

[0073] Step 5: Place the third separator 140 on the top sheet material 200 .

[0074] Step 6: Place the dummy sheet 150 on the third spacer 140 .

[0075] Step 7: Connect the box cover 112 to the box body 111.

[0076] Step 8: Screw the stud 160 into the first threaded hole on the box cover 112 so that the stud 160 squeezes the dummy piece 150 .

[0077] Based on the same concept, the embodiment of the present application also provides a cross-section passivation device 300 . Figure 6 FIG. 1 is a schematic diagram of the structure of a cross-section passivation device provided by an exemplary embodiment of the present application. Figure 6 As shown, the cross-section passivation device 300 provided in the embodiment of the present application is applied to the passivation process of the sheet material 200, including: a reaction furnace 310, having a process chamber; a carrier 100 of any of the above embodiments, disposed in the process chamber, and configured to carry the sheet material 200.

[0078] Specifically, after the carrier 100 is placed in the process chamber, the process chamber can be heated to a high temperature state and process gas can be introduced. The process gas can enter the accommodating cavity 1116 from the second opening 1115 and contact the side of the sheet material 200 to be passivated, thereby passivating the side of the sheet material 200 to be passivated.

[0079] Since the cross-section passivation device 300 includes the carrier 100 , the cross-section passivation device 300 includes all technical features and technical effects of the carrier 100 , which will not be described in detail herein.

[0080] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0081] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.

[0082] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0083] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0084] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A carrier, characterized in that: Used to carry sheet materials, including: ontology; At least one first separator is arranged on the body, the first separator has a first surface and a second surface arranged opposite to each other, the first surface of the first separator contacts one of the sheet materials, and the second surface of the first separator contacts the other sheet material.

2. The carrier according to claim 1, characterized in that: The material of the first spacer is: PTFE or FKM.

3. The carrier according to claim 1 or 2, characterized in that: The thickness of the first separator is in the range of 0.5 mm to 5 mm.

4. The carrier according to claim 1 or 2, characterized in that: The first surface of the first spacer contacts the first surface of one of the sheet materials, and the second surface of the first spacer contacts the second surface of the other sheet material, wherein the first surface of the sheet material is a smooth surface without grid lines, and the second surface of the sheet material is a surface with grid lines, and the second surface of the first spacer is provided with a groove, and the groove is used to accommodate the grid lines of the sheet material.

5. The carrier according to claim 1 or 2, characterized in that: The body is configured to shield an upper surface of the top sheet material, a lower surface of the bottom sheet material, and a side of the sheet material that is not to be passivated, and expose a side of the sheet material that is to be passivated.

6. The carrier according to claim 1 or 2, characterized in that: The body comprises: A box body, having a receiving cavity, the receiving cavity being configured to receive the sheet material, the box body having a first opening on the top, the first opening being communicated with the receiving cavity; The box cover is connected to the box body and is configured to close or open the first opening and cover the upper surface of the sheet material at the top.

7. The carrier according to claim 6, characterized in that: Also includes: A second septum is disposed in the accommodating cavity; Wherein, when the accommodating cavity accommodates the sheet material, the second spacer is arranged between the sheet material at the bottom and the box body; The material of the second separator is polytetrafluoroethylene or fluororubber.

8. The carrier according to claim 6, characterized in that: The box cover has a first threaded hole and further comprises: a false sheet, disposed in the accommodating cavity, configured to shield the upper surface of the sheet material at the top and apply downward pressure to the sheet material at the top; A stud, screwed to the first threaded hole of the box cover and abutting against the false piece; There are a plurality of studs, and the plurality of studs are symmetrically arranged relative to a vertical symmetric plane of the box cover.

9. The carrier according to claim 8, characterized in that: Also includes: A third septum is disposed in the accommodating cavity; Wherein, when the accommodating cavity accommodates the sheet material, the third spacer is arranged between the sheet material at the top and the dummy sheet; The material of the third spacer is polytetrafluoroethylene or fluororubber.

10. The carrier according to claim 6, characterized in that: The box body comprises: first side panel; a second side panel, arranged opposite to the first side panel; a third side panel connected to the first side panel and the second side panel; A bottom plate connected to the first side plate, the second side plate and the third side plate; The first side plate, the second side plate and the third side plate are configured to shield the side surfaces of the sheet material that are not to be passivated, and the bottom plate is configured to shield the lower surface of the sheet material at the bottom.

11. A cross-section passivation device, characterized in that: Passivation processes for sheet materials include: A reaction furnace having a process chamber; The carrier described in any one of claims 1 to 10 is disposed in the process chamber and is configured to carry the sheet material.

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