Semiconductor intelligent cleaning equipment

Abstract

The semiconductor intelligent cleaning equipment comprises a base, a cleaning pool, a timing module and a controller, the controller and the timing module are both fixed to the outer side wall of the base, a cylindrical containing groove is formed in the front face of the base, an opening is formed in the inner top of the containing groove, and the cleaning pool is arranged in the containing groove. The cleaning pool is fixedly embedded in the inner bottom of the storage tank, a storage basket is placed in the cleaning pool, a plurality of supporting rods are fixedly connected to the upper end of the storage basket, a supporting plate is arranged above the cleaning pool, and the upper ends of the supporting rods penetrate through the storage basket and the cleaning pool and are fixedly connected with the lower end of the supporting plate; a supporting ring is fixedly connected to the position, close to the top, in the storage groove, and a movable disc is rotationally connected to the upper end of the supporting ring. According to the semiconductor cleaning device, through the arrangement of the movable disc, the storage basket and other mechanisms, semiconductors can move in cleaning liquid while being intelligently cleaned, and therefore cleaning dead angles are reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of cleaning equipment, in particular to a semiconductor intelligent cleaning equipment. Background Art

[0002] Semiconductor cleaning is a key process link in the semiconductor industry chain. Its main purpose is to remove impurities such as particles, natural oxide layers, metal pollution, organic matter, sacrificial layers, polishing residues, etc. generated in the semiconductor manufacturing process to prevent these impurities from affecting the yield and performance of the chip. When cleaning semiconductor crystals, a variety of chemical reagents and water are used for cleaning.

[0003] Currently, when a semiconductor is placed in a cleaning tank for cleaning, since the semiconductor is in a static and inactive state, some cleaning liquid cannot penetrate into the narrow gaps of the semiconductor, thereby causing certain cleaning dead corners. Utility Model Content

[0004] The utility model aims to provide a semiconductor intelligent cleaning device to solve the problem that part of the cleaning liquid cannot penetrate into the slits of the semiconductor due to the semiconductor being in a static and inactive state, thereby generating certain cleaning dead angles.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A semiconductor intelligent cleaning device comprises a base, a cleaning tank, a timing module and a controller, wherein the controller and the timing module are both fixed on the outer side wall of the base, a cylindrical storage slot is provided on the front of the base, an opening is provided on the inner top of the storage slot, the cleaning tank is fixedly embedded in the inner bottom of the storage slot, a storage basket is placed in the cleaning tank, a plurality of support rods are fixedly connected to the upper end of the storage basket, a support plate is provided above the cleaning tank, the upper end of the support rod passes through the storage basket and the cleaning tank and is fixedly connected to the lower end of the support plate, a support ring is fixedly connected to a position in the storage tank and near the top, and the upper end of the support ring rotates A movable disk is connected, and two electric push rods are fixedly inserted at the lower end of the movable disk, the upper end of the electric push rod passes through the movable disk and the opening, the lower end of the electric push rod passes through the support ring and is fixedly connected to the upper end of the support plate, the upper end of the movable disk is provided with a ring-shaped groove, and a ring-shaped rack is fixedly connected to the inner side wall of the groove, a gear meshing with the rack is provided in the groove, the upper end of the gear passes through the groove, and a servo motor is fixedly connected to the upper end of the base, the output shaft end of the servo motor passes downward through the base and is fixedly connected to the upper end of the gear, and the output shaft of the servo motor is rotatably connected to the base.

[0007] Preferably, the upper fixing sleeve of the electric push rod is provided with two fixing rings, and the two fixing rings are respectively fixed on two sides of the movable disk.

[0008] Preferably, a drain pipe communicating with the cleaning pool is fixedly inserted on the outer side wall of the base, and a valve is installed on the drain pipe.

[0009] Preferably, the rack and the gear are both made of metal.

[0010] Preferably, a rubber pad is fixedly connected to the lower end of the base.

[0011] Preferably, the model of the controller is 80S51.

[0012] Beneficial effects:

[0013] 1. Through the setting of the cleaning tank, the storage basket, the support rod, the support plate and the electric push rod, it is convenient for users to put the semiconductor into or take it out of the cleaning tank, thereby improving convenience. Through the setting of the servo motor, the gear, the rack and the movable plate, the storage basket and the semiconductor can be rotated in the cleaning tank, so that the cleaning liquid can fully penetrate into the slit of the semiconductor, thereby improving the cleaning effect;

[0014] 2. Through the setting of the timing module and the controller, the user can conveniently control the start and stop time of the servo motor, thereby improving the intelligence level during cleaning; the utility model can intelligently clean the semiconductor while making the semiconductor move in the cleaning liquid through the setting of mechanisms such as the movable plate and the storage basket, thereby reducing the cleaning dead angle. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a front view structural diagram of a semiconductor intelligent cleaning device proposed by the utility model;

[0016] Figure 2 This is a partial top view structural diagram of a movable disk of a semiconductor intelligent cleaning device proposed by the utility model;

[0017] Figure 3 This is a schematic diagram of the control system structure of a semiconductor intelligent cleaning device proposed by the utility model.

[0018] In the figure: 1-base, 2-support ring, 3-electric push rod, 4-support plate, 5-support rod, 6-storage basket, 7-sink, 8-servo motor, 9-movable plate, 10-timing module, 11-controller, 12-rack, 13-gear. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0020] Reference Figure 1-3A semiconductor intelligent cleaning device includes a base 1, a cleaning tank 7, a timing module 10 and a controller 11. The model of the controller 11 is 80S51. The output end of the controller 11 is electrically connected to the input end of the electric push rod 3 and the servo motor 8 respectively. The model of the timing module 10 is DS12C887. The output end of the timing module 10 is electrically connected to the input end of the controller 11. The controller 11 and the timing module 10 are both fixed to the outer wall of the base 1. The lower end of the base 1 is fixedly connected with a rubber pad for reducing the wear of the lower end of the base 1.

[0021] In this embodiment, a cylindrical storage groove is provided on the front of the base 1, and an opening is provided on the inner top of the storage groove. The cleaning pool 7 is fixedly embedded in the inner bottom of the storage groove. A drain pipe communicating with the cleaning pool 7 is fixedly inserted on the outer wall of the base 1, which is used to cooperate with a valve to facilitate users to discharge waste water in the cleaning pool 7. A valve is installed on the drain pipe. A storage basket 6 is placed in the cleaning pool 7 for placing semiconductors. A plurality of support rods 5 are fixedly connected to the upper end of the storage basket 6 for supporting the storage basket 6. A support plate 4 is provided above the cleaning pool 7 for supporting the support rod 5. The upper end of the support rod 5 passes through the storage basket 6 and the cleaning pool 7 and is fixedly connected to the lower end of the support plate 4.

[0022] In this embodiment, a support ring 2 is fixedly connected in the storage groove and near the top, which is used to support the movable disk 9. The upper end of the support ring 2 is rotatably connected to the movable disk 9, which is used to drive the storage basket 6 to rotate. Two electric push rods 3 are fixedly inserted at the lower end of the movable disk 9 to drive the storage basket 6 to rise and fall. The upper end of the electric push rod 3 passes through the movable disk 9 and the opening, and the lower end of the electric push rod 3 passes through the support ring 2 and is fixedly connected to the upper end of the support plate 4. Two fixing rings are fixedly sleeved on the electric push rod 3 to improve the firmness between the electric push rod 3 and the movable disk 9. The two fixing rings are respectively fixed on both sides of the movable disk 9;

[0023] In this embodiment, a ring-shaped groove is provided at the upper end of the movable disk 9, and a ring-shaped rack 12 is fixedly connected to the inner side wall of the groove, which is used to drive the movable disk 9 to rotate. A gear 13 meshing with the rack 12 is provided in the groove, which is used to drive the rack 12 to rotate. The upper end of the gear 13 passes through the groove, and a servo motor 8 is fixedly connected to the upper end of the base 1 to drive the gear 13 to rotate. The output shaft end of the servo motor 8 passes through the base 1 downward and is fixedly connected to the upper end of the gear 13. The output shaft of the servo motor 8 is rotatably connected to the base 1. The rack 12 and the gear 13 are both made of metal, which can improve strength and service life compared with ordinary plastics.

[0024] In this embodiment, the semiconductor is first placed in the storage basket 6, and then the electric push rod 3 is started to drive the support plate 4 to descend. The support plate 4 drives the storage basket 6 to descend into the cleaning tank 7 through the support rod 5 for cleaning. At the same time, the servo motor 8 is started to drive the gear 13 to rotate, and the sliding 9 is driven to rotate through the meshing action of the gear 13 and the rack 12. The storage basket 6 and the semiconductor are driven to rotate through the movable disk 9, so that the semiconductor is movable and rotated in the cleaning tank 7, and the cleaning liquid can penetrate into the slits of the semiconductor, thereby improving the cleaning effect and reducing the cleaning dead angle. The timing module 10 and the controller 8 can facilitate the user to control the rotation time of the servo motor 8. When the servo motor 8 drives the storage basket 6 to rotate to the specified time, the servo motor 8 is turned off through the controller 11, thereby improving the intelligence of the cleaning work.

[0025] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A semiconductor intelligent cleaning device, comprising a base (1), a cleaning tank (7), a timing module (10) and a controller (11), characterized in that: The controller (11) and the timing module (10) are both fixed on the outer wall of the base (1); a cylindrical storage groove is provided on the front of the base (1); an opening is provided on the inner top of the storage groove; the cleaning pool (7) is fixedly embedded in the inner bottom of the storage groove; a storage basket (6) is placed in the cleaning pool (7); a plurality of support rods (5) are fixedly connected to the upper end of the storage basket (6); a support plate (4) is provided above the cleaning pool (7); the upper ends of the support rods (5) penetrate the storage basket (6) and the cleaning pool (7) and are fixedly connected to the lower end of the support plate (4); a support ring (2) is fixedly connected in the storage groove and near the top; the upper end of the support ring (2) is rotatably connected to a movable disk (9); the lower end of the movable disk (9) is Two electric push rods (3) are fixedly inserted, the upper ends of the electric push rods (3) pass through the movable disk (9) and the opening, the lower ends of the electric push rods (3) pass through the support ring (2) and are fixedly connected to the upper end of the support plate (4), the upper end of the movable disk (9) is provided with an annular groove, the inner side wall of the groove is fixedly connected with an annular rack (12), the groove is provided with a gear (13) meshing with the rack (12), the upper end of the gear (13) passes through the groove, the upper end of the base (1) is fixedly connected with a servo motor (8), the output shaft end of the servo motor (8) passes through the base (1) downward and is fixedly connected to the upper end of the gear (13), and the output shaft of the servo motor (8) is rotatably connected to the base (1).

2. The semiconductor intelligent cleaning equipment according to claim 1, characterized in that: The electric push rod (3) is provided with two fixing rings on the fixing sleeve, and the two fixing rings are respectively fixed on the two sides of the movable plate (9).

3. The semiconductor intelligent cleaning equipment according to claim 1, characterized in that: A drainage pipe communicating with the cleaning pool (7) is fixedly inserted on the outer wall of the base (1), and a valve is installed on the drainage pipe.

4. The semiconductor intelligent cleaning equipment according to claim 1, characterized in that: The rack (12) and the gear (13) are both made of metal.

5. The semiconductor intelligent cleaning equipment according to claim 1, characterized in that: A rubber pad is fixedly connected to the lower end of the base (1).

6. The semiconductor intelligent cleaning equipment according to claim 1, characterized in that: The model of the controller (11) is 80S51.

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