Polishing device and negative pressure suction head thereof

Abstract

The utility model relates to the technical field of polishing, and particularly discloses a negative pressure suction head of a polishing device, which comprises an outer cylinder, an inner cylinder and a bearing. The outer cylinder is provided with a containing groove used for installing the inner cylinder and a negative pressure source connector used for being externally connected with a negative pressure source. The inner cylinder body is rotatably arranged in the containing groove, the inner cylinder body is provided with a mounting groove for mounting a polishing clamp, the side wall of the mounting groove is provided with a sealing structure used for being sealed with the polishing clamp, the groove bottom of the mounting groove is provided with a first through hole used for being communicated with a pipe cavity of the polishing clamp, and the first through hole is communicated with the negative pressure source connector; the bearing comprises an inner ring and an outer ring which are hermetically connected, the inner ring is hermetically and fixedly connected with the inner barrel, and the outer ring is hermetically and fixedly connected with the outer barrel. According to the negative pressure suction head, stable rotation of the polishing clamp and reliable connection between the polishing clamp and a negative pressure source can be kept, meanwhile, use of lubricating oil is avoided, and the stability and safety of the whole polishing process are guaranteed. The utility model further discloses a polishing device which also has the technical effects.

Description

Technical Field

[0001] The utility model relates to the technical field of polishing, and more specifically to a polishing device and a negative pressure suction head thereof. Background Art

[0002] Polishing refers to a processing method that uses mechanical or chemical effects to reduce the surface roughness of a workpiece to obtain a bright and smooth surface. During the polishing process, a polishing fixture is usually required to be used in conjunction with a negative pressure suction head to fix and drive the workpiece. A groove is provided on the working surface of the polishing fixture to form a suction cup. The wafer can be directly mounted on the suction cup or first glued to a glass plate (or ceramic plate), and the glass plate (or ceramic plate) is mounted on the suction cup. The negative pressure provided by the suction cup adsorbs the workpiece to maintain its relative position with the working surface of the polishing fixture. The negative pressure suction head is used to provide negative pressure during the working process of the fixture. When the polishing process is completed, the entire fixture is turned upside down. The negative pressure suction head can also provide support. After the negative pressure is unloaded, the workpiece can be safely removed.

[0003] See also Figure 1 During the workpiece polishing process, the workpiece 4 is adsorbed on the polishing fixture 2, and the polishing fixture 2 rotates on the polishing disk 3 and swings back and forth along the radial direction of the polishing disk 3 at the same time. Since the negative pressure suction head 1 needs to be connected to the diaphragm pump with an external hose, the negative pressure suction head 1 does not rotate with the polishing fixture 2, but swings synchronously with the polishing fixture 2. At present, the negative pressure suction head 1 is rotatably connected to the polishing fixture 2, and a sealing ring is set between the two to seal, and lubricating oil is set. While preventing gas leakage to ensure negative pressure, the friction of the sealing ring on the negative pressure suction head 1 is reduced to prevent the negative pressure suction head 1 from rotating with the polishing fixture 2. However, as the use time increases, the friction gradually increases, and the polishing fixture 2 will drive the negative pressure suction head 1 to rotate. In addition, too much lubricating oil will cause the inner hole to be blocked, and the lubricating oil is easy to cause the polishing cloth to be contaminated when the polishing fixture 2 is taken out. Utility Model Content

[0004] In view of this, the purpose of the utility model is to provide a polishing device and a negative pressure suction head thereof, the structural design of the polishing device and the negative pressure suction head thereof can

[0005] In order to achieve the above object, the utility model provides the following technical solutions:

[0006] A negative pressure suction head for a polishing device, comprising:

[0007] The outer cylinder is provided with a receiving groove for mounting the inner cylinder and a negative pressure source interface for connecting an external negative pressure source;

[0008] An inner cylinder is rotatably disposed in the accommodating groove, and the inner cylinder has a mounting groove for mounting a polishing fixture, a side wall of the mounting groove is provided with a sealing structure for sealing with the polishing fixture, a bottom of the mounting groove is provided with a first through hole for communicating with the lumen of the polishing fixture, and the first through hole is communicated with the negative pressure source interface;

[0009] The bearing comprises an inner ring and an outer ring which are sealed and connected, wherein the inner ring is sealed and fixedly connected to the inner cylinder, and the outer ring is sealed and fixedly connected to the outer cylinder.

[0010] Optionally, in the negative pressure suction head of the above-mentioned polishing device, the bearing is arranged between the end of the inner cylinder away from the polishing fixture and the outer cylinder, and the end surface of the inner cylinder facing the bearing is provided with a protrusion, the protrusion is fixedly connected to the inner ring, there is a gap between the end surface and the bearing, and there is a gap between the outer peripheral surface of the inner cylinder and the inner wall surface of the accommodating groove.

[0011] Optionally, the negative pressure suction head of the polishing device further includes a sealing gasket arranged on the end surface of the bearing, and the sealing gasket at least covers the portion between the inner ring and the outer ring to seal the inner ring and the outer ring.

[0012] Optionally, in the negative pressure suction head of the above-mentioned polishing device, the bearing is arranged between the outer circumferential surface of the inner cylinder and the inner circumferential surface of the outer cylinder.

[0013] Optionally, in the negative pressure suction head of the above-mentioned polishing device, the bearing is a double-row bearing provided with a sealing cover.

[0014] Optionally, in the negative pressure suction head of the above-mentioned polishing device, the side wall of the mounting groove is provided with at least one circle of groove, and the sealing structure includes a sealing ring arranged in the groove, and the thickness of the sealing ring is greater than the depth of the groove.

[0015] Optionally, in the negative pressure suction head of the above-mentioned polishing device, one end of the outer cylinder away from the notch of the accommodating groove is flat, and the negative pressure source interface is arranged on the side wall of the outer cylinder.

[0016] Optionally, the negative pressure suction head of the above-mentioned polishing device further includes an end cover, which is arranged outside the outer cylinder, and the end cover is provided with a second through hole for the polishing fixture to pass through, and the second through hole is used to fit with the polishing fixture in a clearance.

[0017] Optionally, in the negative pressure suction head of the above-mentioned polishing device, the end cover is threadedly connected to the outer cylinder.

[0018] The negative pressure suction head of the polishing device provided by the utility model comprises an outer cylinder, an inner cylinder and a bearing. The outer cylinder is provided with a receiving groove for installing the inner cylinder and a negative pressure source interface for connecting an external negative pressure source; the inner cylinder is rotatably arranged in the receiving groove, and the inner cylinder has a mounting groove for mounting a polishing fixture, the side wall of the mounting groove is provided with a sealing structure for sealing with the polishing fixture, the bottom of the mounting groove is provided with a first through hole for communicating with the lumen of the polishing fixture, and the first through hole is communicated with the negative pressure source interface; the bearing comprises an inner ring and an outer ring which are sealed and connected, the inner ring is sealed and fixedly connected with the inner cylinder, and the outer ring is sealed and fixedly connected with the outer cylinder.

[0019] The negative pressure suction head of the polishing device provided by the utility model is used. When in use, the polishing fixture is installed in the mounting groove of the inner cylinder. The negative pressure source interface is connected to the tubular cavity of the polishing fixture through the first through hole, and the air tightness between the inner cylinder and the outer cylinder is maintained through the bearing. The negative pressure source interface is connected to the negative pressure source to provide negative pressure, thereby forming a negative pressure in the tubular cavity of the polishing fixture to adsorb the workpiece. When the polishing fixture rotates, the inner cylinder rotates with the polishing fixture, and because the inner cylinder and the outer cylinder are connected by a bearing, the outer cylinder can remain stable and not rotate under very small friction. In summary, the negative pressure suction head provided by the present application can not only maintain the stable rotation of the polishing fixture, but also ensure a reliable connection with the negative pressure source to maintain a stable negative pressure. In addition, the use of lubricating oil is avoided, reducing the risk of pipe clogging and polishing cloth contamination. The use of the negative pressure suction head in conjunction with the polishing fixture ensures the stability and safety of the entire polishing process.

[0020] Furthermore, when the negative pressure suction head is connected to the negative pressure source through a hose, the hose does not need to be fixed, and no radial tension will be caused to the polishing fixture during the swinging of the polishing fixture. At the same time, the risk of hose entanglement is avoided, further ensuring the stability and safety of the entire polishing process.

[0021] In order to achieve the above purpose, the utility model also provides a polishing device, which includes any of the above negative pressure suction heads. Since the above negative pressure suction heads have the above technical effects, the polishing device with the negative pressure suction heads should also have corresponding technical effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 This is a schematic diagram of common polishing principles;

[0024] Figure 2 This is a schematic diagram of the connection between a common negative pressure suction head and a polishing fixture;

[0025] Figure 3 This is a schematic diagram of the connection between a negative pressure suction head and a polishing fixture according to a specific embodiment of the utility model;

[0026] Figure 4 for Figure 3 The corresponding perspective diagram of the bearing interior;

[0027] Figure 5 for Figure 3 Schematic diagram of the structure of the middle and outer cylinders.

[0028] The following are marked in the accompanying drawings:

[0029] Negative pressure suction head 1, polishing fixture 2, polishing disc 3, workpiece 4;

[0030] Sealing rubber ring 11, polishing fixture tail pipe 21;

[0031] Outer cylinder 100, inner cylinder 200, bearing 300, sealing gasket 400, end cover 500;

[0032] Accommodating tank 110, negative pressure source interface 120, negative pressure channel 130;

[0033] The mounting groove 210, the sealing structure 220, the first through hole 230, the protrusion 240,

[0034] The second through hole 510 . DETAILED DESCRIPTION

[0035] The embodiment of the utility model discloses a polishing device and a negative pressure suction head thereof, which can greatly eliminate the rotational friction force generated between the negative pressure suction head and a polishing fixture, and provide a stable polishing environment for the polishing fixture.

[0036] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0037] Conventional polishing fixtures and vacuum tips are assembled using vacuum tip openings. Figure 2, the tail pipe 21 of the polishing fixture 2 is directly inserted into the deep hole, and a sealing rubber ring 11 is provided between the tail pipe 21 and the hole wall for sealing. The inner cavity of the tail pipe 21 is connected to the hole to provide negative pressure. Since the tail pipe 21 of the polishing fixture 2 and the negative pressure suction head are sealed by the sealing rubber ring 11, there is friction between the sealing rubber ring 11 and the tail pipe 21 of the polishing fixture 2 and the negative pressure suction head. During use, the friction will drive the negative pressure suction head to rotate with the polishing fixture 2, so the negative pressure hose connected to the negative pressure suction head will be entangled with the polishing fixture 2, causing unnecessary risks. In order to reduce friction, lubricating oil can be applied to the inner wall of the hole and near the sealing rubber ring 11. Although the lubricating oil can reduce friction to a certain extent, the friction gradually increases with the increase of use time, which will cause the same problem. In addition, when this structure is used for polishing, the hose needs to be fixed. During the swinging process of the polishing fixture 2, when the friction between the polishing fixture 2 and the negative pressure suction head is large, the hose generates radial tensile stress on the tail end of the polishing fixture 2, resulting in a decrease in the stability of the polishing fixture 2 on the polishing disk 3, affecting the polishing effect. In addition, there will be friction between the tail pipe of the polishing fixture and the inner wall of 1, which will also cause the effect of rubber ring friction.

[0038] The negative pressure suction head provided by the utility model is different from the conventional integrated structure, and adopts a nested split structure, and the inner cylinder 200 and the outer cylinder 100 are connected by a bearing 300, which can ensure the airtightness between the two and prevent air leakage, while reducing the friction between the inner cylinder 200 and the outer cylinder 100. Therefore, by connecting the inner cylinder 200 and the outer cylinder 100 to the polishing fixture 2 and the negative pressure source respectively, the influence of the rotation of the polishing fixture 2 on the negative pressure environment can be avoided.

[0039] In a specific embodiment, see Figure 3-Figure 5The negative pressure suction head of the polishing device provided by the utility model includes an outer cylinder 100, an inner cylinder 200 and a bearing 300. Among them, the outer cylinder 100 is provided with a receiving groove 110 for installing the inner cylinder 200 and a negative pressure source interface 120 for connecting an external negative pressure source. It can be understood that the shape and size of the receiving groove 110 should meet the installation of the inner cylinder 200 and the bearing 300. The form of the negative pressure source interface 120 is not specifically limited here, and a conventional joint such as a pagoda joint can be used, or it can be an opening on the wall of the outer cylinder 100 that is connected to the receiving groove 110. The inner cylinder 200 is rotatably arranged in the receiving groove 110, and the inner cylinder 200 has an installation groove 210 for installing the polishing fixture 2, and the side wall of the installation groove 210 is provided with a sealing structure 220 for sealing with the polishing fixture 2. The shape of the mounting groove 210 is set according to the structure of the polishing fixture 2, and can be set according to the tail pipeline 21 of the polishing fixture 2, so that the tail pipeline 21 can be fixed to the mounting groove 210. The side wall of the mounting groove 210 is provided with a sealing structure 220 to seal the polishing fixture 2 and the inner cylinder 200 to prevent air leakage. The form of the sealing structure 220 is not specifically limited here. The bottom of the mounting groove 210 is provided with a first through hole 230 for communicating with the lumen of the polishing fixture 2, and the first through hole 230 is connected to the negative pressure source interface 120. It can be understood that the communication between the first through hole 230 and the negative pressure source interface 120 here includes both indirect communication between the two through other cavity structures, such as communication through the channel between the inner ring and the outer ring of the bearing, and also includes the two communicating through the accommodating groove 110, that is, the first through hole 230 is connected to the accommodating groove 110, and the negative pressure source interface 120 is also connected to the accommodating groove 110. The bearing 300 includes an inner ring and an outer ring which are sealed and connected. The inner ring is sealed and fixedly connected to the inner cylinder 200, and the outer ring is sealed and fixedly connected to the outer cylinder 100. The inner cylinder 200 and the outer cylinder 100 are rotatably connected through the bearing 300, and the friction force generated is small. Therefore, when the inner cylinder 200 rotates with the polishing fixture 2, it will not drive the outer cylinder 100 to rotate, so that the outer cylinder 100 can maintain a reliable connection with the negative pressure source. In addition, the sealed bearing 300 is used and is sealed and connected to the inner cylinder 200 and the outer cylinder 100 respectively, which ensures the sealing between the first through hole 230 and the negative pressure source interface 120 and prevents air leakage.

[0040] The negative pressure suction head of the polishing device provided by the utility model is used. When in use, the polishing fixture 2 is installed in the mounting groove 210 of the inner cylinder 200, the negative pressure source interface 120 is connected to the tubular cavity of the polishing fixture 2 through the first through hole 230, and the air tightness between the inner cylinder 200 and the outer cylinder 100 is maintained through the bearing 300, and the negative pressure source interface 120 is connected to the negative pressure source to provide negative pressure, thereby forming a negative pressure in the tubular cavity of the polishing fixture 2 to adsorb the workpiece 4. When the polishing fixture 2 rotates, the inner cylinder 200 rotates with the polishing fixture 2, and since the inner cylinder 200 and the outer cylinder 100 are connected by the bearing 300, the outer cylinder 100 can remain stable and not rotate under very small friction. In summary, the negative pressure suction head provided by the present application can not only maintain the stable rotation of the polishing fixture 2, but also ensure a reliable connection with the negative pressure source to maintain a stable negative pressure. In addition, the use of lubricating oil is avoided, reducing the risk of pipe clogging and polishing cloth contamination. The negative pressure suction head is used in combination with the polishing fixture 2 to ensure the stability and safety of the entire polishing process.

[0041] In addition, when the negative pressure suction head is connected to the negative pressure source through a hose, the hose does not need to be fixed, and no radial tension will be caused to the polishing fixture 2 during the swinging of the polishing fixture 2. At the same time, the risk of hose entanglement is avoided, thereby ensuring the stability and safety of the entire polishing process.

[0042] In some embodiments, the bearing 300 is disposed between the end of the inner cylinder 200 away from the polishing fixture 2 and the outer cylinder 100, and the end surface of the inner cylinder 200 facing the bearing 300 is provided with a protrusion 240, the protrusion 240 is fixedly connected to the inner ring, there is a gap between the end surface and the bearing 300, and there is a gap between the outer peripheral surface of the inner cylinder 200 and the inner wall surface of the accommodating groove 110. By arranging the bearing 300 between the end of the inner cylinder 200 away from the polishing fixture 2 and the outer cylinder 100, the radial space is not occupied, and it can be better adapted to the conventional polishing fixture 2 and the polishing machine. And by arranging the protrusion 240 on the inner cylinder 200 to be fixedly connected with the inner ring, and making a gap between the end surface of the inner cylinder 200 facing the bearing 300 and the bearing 300, specifically between the outer ring, when the inner cylinder 200 drives the inner ring of the bearing 300 to rotate, the inner cylinder 200 will not contact the outer ring of the bearing 300, thereby avoiding friction between the two. In addition, there is also a gap between the outer peripheral surface of the inner cylinder 200 and the inner wall surface of the accommodating groove 110, so when the inner cylinder 200 rotates with the polishing fixture 2, it will not contact the inner wall of the outer cylinder 100, avoiding the friction between the two. The bearing 300 is axially arranged between the inner cylinder 200 and the outer cylinder 100, and the outer diameter of the negative pressure suction head is small, which is convenient for spatial layout. In this embodiment, the first through hole 230 is connected to the negative pressure source interface 120 through the channel between the inner ring and the outer ring.

[0043] Specifically, the bearing 300 is disposed between the end of the inner cylinder 200 away from the polishing fixture 2 and the outer cylinder 100, the bottom of the accommodating groove 110 is provided with a negative pressure channel 130, the channel between the inner ring and the outer ring is connected to the negative pressure channel 130, and the negative pressure channel 130 is connected to the negative pressure source interface 120, thereby forming an overall negative pressure path consisting of the negative pressure source interface 120, the negative pressure channel 130, the channel between the inner ring and the outer ring, the first through hole 230, and the polishing fixture tail pipeline 21. The negative pressure source interface 120 adopts a pagoda connector and is disposed on the side wall of the outer cylinder 100. The pagoda connector can be connected to a diaphragm pump through a hose, and starting the diaphragm pump will provide negative pressure to the polishing fixture 2 through the above-mentioned connecting structure.

[0044] In some embodiments, the negative pressure suction head further includes a sealing gasket 400 disposed on the end surface of the bearing 300, and the sealing gasket 400 at least covers the portion between the inner ring and the outer ring to seal the inner ring and the outer ring. The sealing gasket 400 is provided to assist the sealing between the inner ring and the outer ring of the bearing 300 as a safety structure. When the sealing component of the sealed bearing leaks, such as when the sealing cover leaks, the sealing gasket 400 will be tightly attached between the inner ring of the bearing 300 and the outer ring of the bearing 300 under the action of negative pressure to maintain the internal vacuum. And because the contact area between the sealing gasket 400 and the outer ring of the bearing 300 is small under the action of negative pressure, it usually fits with the edge of the outer ring, so the friction generated is small, and even if the sealing gasket 400 rotates with the inner cylinder 200, it will not drive the outer cylinder 100 to rotate. It is understandable that when the sealing gasket 400 is provided, there is a gap between the end surface of the inner cylinder 200 facing the bearing 300 and the outer ring, which means there is a gap between the end surface of the inner cylinder 200 facing the bearing 300 and the sealing gasket 400. The sealing gasket 400 can be a soft polytetrafluoroethylene sealing gasket.

[0045] Furthermore, the sealing gasket 400 is annular, and the protrusion 240 of the inner cylinder 200 is inserted into the sealing gasket 400. Specifically, the inner cylinder 200 and the sealing gasket 400 are interference fit, so when the inner cylinder 200 rotates with the polishing fixture 2, the sealing gasket 400 is driven to rotate. In the case where the bearing 300 adopts a sealed bearing, the sealing gasket 400 is arranged above the sealing cover of the bearing 300, that is, the end face of the above-mentioned bearing 300 includes the end face of the sealing cover. During assembly, the protrusion 240 of the inner cylinder 200 is directly inserted into the sealing gasket 400 and then inserted into the inner ring of the bearing 300, and then the outer ring of the bearing 300 is directly inserted into the receiving groove 110 of the outer cylinder 100.

[0046] In some embodiments, the bearing 300 is disposed between the outer circumference of the inner cylinder 200 and the inner circumference of the outer cylinder 100. Specifically, the outer ring of the bearing 300 is fixedly connected to the side wall of the receiving groove 110, and the inner ring is fixedly connected to the outer wall of the inner cylinder 200, so that when the inner cylinder 200 rotates with the polishing fixture 2, it will not contact the inner wall of the outer cylinder 100, thereby avoiding the friction between the two.

[0047] In some embodiments, the bearing 300 is a double-row bearing provided with a sealing cover. Due to the structure of the inner and outer rows of rolling elements, the double-row bearing can withstand greater radial and axial loads. Compared with single-row bearings, double-row bearings have advantages in load-bearing capacity, long service life, high rigidity, and convenient installation and adjustment. The sealing cover can maintain the airtightness between the inner ring and the outer ring. When the bearing 300 is arranged between the end of the inner cylinder 200 away from the polishing fixture 2 and the outer cylinder 100, the double-row bearing connects the inner cylinder 200 to the pipeline connected to the bottom of the accommodating groove 110 and the negative pressure source interface 120 to maintain good sealing. Specifically, the double-row bearing can adopt a double-row angular bearing.

[0048] In some embodiments, the side wall of the mounting groove 210 is provided with at least one circle of grooves, and the sealing structure 220 includes a sealing ring arranged in the groove, and the thickness of the sealing ring is greater than the depth of the groove. Therefore, when the polishing fixture 2 is inserted into the mounting groove 210, the sealing ring is squeezed between the polishing fixture 2 and the inner cylinder 200 to achieve reliable sealing between the two. The sealing structure 220 adopts a sealing ring, which has a simple structure and reliable sealing. In other embodiments, the sealing structure 220 can also adopt other settings such as the labyrinth seal. Specifically, the side wall of the mounting groove 210 is provided with at least two circles of grooves and sealing rings are respectively provided. By providing at least two layers of sealing rings, air leakage caused by structural tilt is prevented.

[0049] In some embodiments, the notch end of the outer cylinder 100 away from the receiving groove 110 is flat, and the negative pressure source interface 120 is arranged on the side wall of the outer cylinder 100. By setting the notch end of the outer cylinder 100 away from the receiving groove 110 to a plane, and one end of the notch is used to connect the polishing fixture 2, when the polishing fixture 2 is installed, the negative pressure suction head is inverted, and the above-mentioned plane setting of the outer cylinder 100 can provide reliable support, so that the polishing fixture 2 is installed in the installation groove 210. And the negative pressure source interface 120 is arranged on the side wall of the outer cylinder 100, and the inversion of the negative pressure suction head will not affect the assembly of the negative pressure source interface 120 and the negative pressure source. After the polishing fixture 2 is installed in place, the negative pressure suction head is turned over as a whole to facilitate the subsequent polishing process. In other embodiments, the notch end of the outer cylinder 100 away from the receiving groove 110 can also be in other shapes. The negative pressure source interface 120 can also be arranged at the bottom of the groove of the receiving groove 110 as needed.

[0050] In some embodiments, the negative pressure suction head further includes an end cap 500, which is disposed outside the outer cylinder 100, and the end cap 500 is provided with a second through hole 510 for the polishing fixture 2 to pass through, and the second through hole 510 is used to fit with the polishing fixture 2. That is, the polishing fixture 2 can pass through the second through hole 510 to connect with the inner cylinder 200, and by providing the end cap 500, a protective effect can be played. And the second through hole 510 is used to fit with the polishing fixture 2, so as to avoid friction between the polishing fixture 2 and the end cap 500 when the polishing fixture 2 rotates.

[0051] Furthermore, the end cover 500 is threadedly connected to the outer cylinder 100. The threaded connection is convenient for assembly and disassembly, and can seal the end cover 500 and the outer cylinder 100 while achieving fixed connection between the two.

[0052] Based on the negative pressure suction head provided in the above embodiments, the utility model also provides a polishing device, which includes any one of the negative pressure suction heads in the above embodiments. Since the polishing device adopts the negative pressure suction head in the above embodiments, please refer to the above embodiments for the beneficial effects of the polishing device.

[0053] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0054] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A negative pressure suction head for a polishing device, characterized in that: include: The outer cylinder (100) is provided with a receiving groove (110) for installing the inner cylinder (200) and a negative pressure source interface (120) for connecting to an external negative pressure source; An inner cylinder (200) is rotatably disposed in the accommodating groove (110), and the inner cylinder (200) has a mounting groove (210) for mounting the polishing fixture (2), a side wall of the mounting groove (210) is provided with a sealing structure (220) for sealing with the polishing fixture (2), and a bottom of the mounting groove (210) is provided with a first through hole (230) for communicating with the lumen of the polishing fixture (2), and the first through hole (230) is communicated with the negative pressure source interface (120); The bearing (300) comprises an inner ring and an outer ring which are sealed and connected, wherein the inner ring is sealed and fixedly connected to the inner cylinder (200), and the outer ring is sealed and fixedly connected to the outer cylinder (100).

2. The negative pressure suction head of the polishing device according to claim 1, characterized in that: The bearing (300) is arranged between one end of the inner cylinder (200) away from the polishing fixture (2) and the outer cylinder (100), and a protrusion (240) is provided on the end surface of the inner cylinder (200) facing the bearing (300), and the protrusion (240) is fixedly connected to the inner ring, and there is a gap between the end surface and the bearing (300), and there is a gap between the outer peripheral surface of the inner cylinder (200) and the inner wall surface of the accommodating groove (110).

3. The negative pressure suction head of the polishing device according to claim 2, characterized in that: The invention also comprises a sealing gasket (400) arranged on the end surface of the bearing (300), wherein the sealing gasket (400) at least covers a portion between the inner ring and the outer ring to seal the inner ring and the outer ring.

4. The negative pressure suction head of the polishing device according to claim 1, characterized in that: The bearing (300) is disposed between the outer circumferential surface of the inner cylinder (200) and the inner circumferential surface of the outer cylinder (100).

5. The negative pressure suction head of the polishing device according to claim 1, characterized in that: The bearing (300) is a double-row bearing provided with a sealing cover.

6. The negative pressure suction head of the polishing device according to claim 1, characterized in that: The side wall of the installation groove (210) is provided with at least one circle of groove, and the sealing structure (220) comprises a sealing ring arranged in the groove, and the thickness of the sealing ring is greater than the depth of the groove.

7. The negative pressure suction head of the polishing device according to claim 1, characterized in that: One end of the outer cylinder (100) away from the notch of the accommodating groove (110) is flat, and the negative pressure source interface (120) is arranged on the side wall of the outer cylinder (100).

8. The negative pressure suction head of the polishing device according to any one of claims 1 to 6, characterized in that: It also includes an end cover (500), the end cover (500) is arranged outside the outer cylinder (100), and the end cover (500) is provided with a second through hole (510) for the polishing fixture (2) to pass through, and the second through hole (510) is used to fit with the polishing fixture (2) in a clearance.

9. The negative pressure suction head of the polishing device according to claim 8, characterized in that: The end cover (500) is threadedly connected to the outer cylinder (100).

10. A polishing device, comprising a polishing fixture (2), characterized in that: It also comprises the negative pressure suction head (1) as claimed in any one of claims 1 to 9, and one end of the polishing fixture (2) is sealed and fixedly connected to the inner cylinder (200).

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