Feeding device and photoresist production system

Abstract

The utility model provides a feeding device and a photoresist production system, relates to the technical field of photoresist production equipment, and aims to optimize the structure of the feeding device, reduce the size of the feeding device and improve the feeding precision to a certain extent. The utility model provides a feeding device which comprises a hopper, an elastic piece, a baffle assembly and a pushing assembly. The elastic piece is arranged in the hopper, a feeding port and a discharging port are formed in the hopper, the baffle assembly comprises a first baffle, a second baffle and a connecting rod, one end of the elastic piece is connected with the bottom of the hopper, the other end of the elastic piece is connected with the first baffle, and the two ends of the connecting rod are connected with the first baffle and the second baffle respectively. The area of the second baffle plate is matched with that of the feeding hole; the discharging port is located in the side wall of the hopper, the height of the discharging port is not lower than the horizontal height of the first baffle when the elastic piece is compressed to the limit state, and the pushing assembly is arranged corresponding to the discharging port and can reciprocate in the radial direction of the hopper.

Description

Technical Field

[0001] The utility model relates to the technical field of photoresist production equipment, in particular to a feeding device and a photoresist production system. Background Art

[0002] At present, the feeding operation of photoresist raw materials is mostly carried out according to the chamber volume of the sealed feeding device according to the maximum amount required for production. For example, the maximum amount of single solid feeding in photoresist production is 800 kg, and the chamber volume of the sealed feeding device usually needs to be set at 1000 liters. Such a large-capacity feeding chamber not only has a large amount of residue during the feeding process, but also the production of the chamber as well as the cleaning and maintenance process after feeding are extremely difficult.

[0003] Therefore, there is an urgent need to provide a feeding device and a photoresist production system to solve the problems existing in the prior art to a certain extent. Utility Model Content

[0004] The utility model aims to provide a feeding device and a photoresist production system, so as to optimize the structure of the feeding device to a certain extent, reduce the size of the feeding device and improve the feeding accuracy.

[0005] The utility model provides a feeding device, including a hopper, an elastic member, a baffle assembly and a pushing assembly; the elastic member is arranged in the hopper, the hopper is formed with a feed port and a discharge port, the baffle assembly includes a first baffle, a second baffle and a connecting rod, one end of the elastic member is connected to the bottom of the hopper, and the other end is connected to the first baffle, the two ends of the connecting rod are respectively connected to the first baffle and the second baffle, the area of ​​the second baffle is adapted to the area of ​​the feed port, and before the elastic member is compressed to the limit state, the second baffle and the feed port have a feed gap; the discharge port is located on the side wall of the hopper, and the height of the discharge port is not lower than the horizontal height of the first baffle when the elastic member is compressed to the limit state, the pushing assembly is arranged corresponding to the discharge port, and the pushing assembly can reciprocate radially along the hopper.

[0006] Wherein, the elastic member is a spring, and the pressure of compressing the spring to a limit state is greater than the weight of a single feed.

[0007] Specifically, the feeding device provided by the utility model further includes a counterweight, which is arranged on the second baffle plate and is used to increase the pressure on the elastic member.

[0008] Furthermore, the hopper includes a funnel portion and a column portion, one end of the funnel portion forms the feed port, the other end of the funnel portion is connected to the column portion, the discharge port is formed on the side wall of the column portion, and the first baffle is always located in the column portion.

[0009] Furthermore, two ends of the connecting rod are respectively connected to the center of the first baffle plate and the center of the second baffle plate to form a structure with an I-shaped cross section.

[0010] Wherein, the pushing assembly includes a push plate and a driving component, the driving component is located outside the hopper, the push plate is arranged inside the hopper, the driving end of the driving component is connected to the push plate, and can pass through the side wall of the hopper to drive the push plate to reciprocate radially in the hopper.

[0011] Specifically, a receiving groove is formed on the side of the hopper, the shape of the receiving groove is adapted to the push plate, and the depth of the receiving groove is not less than the thickness of the push plate, so that the push plate can be embedded in the receiving groove.

[0012] Specifically, the driving component is an oil cylinder, a gas cylinder or an electric telescopic rod.

[0013] Furthermore, a sealing ring is provided on the edge of the second baffle plate on the side facing the feed inlet, and the outer diameter of the sealing ring is matched with the inner diameter of the feed inlet.

[0014] Compared with the prior art, the feeding device provided by the utility model has the following advantages:

[0015] The feeding device provided by the utility model comprises a hopper, an elastic member, a baffle assembly and a pushing assembly; the elastic member is arranged in the hopper, the hopper is formed with a feed port and a discharge port, the baffle assembly comprises a first baffle, a second baffle and a connecting rod, one end of the elastic member is connected to the bottom of the hopper, and the other end is connected to the first baffle, the two ends of the connecting rod are respectively connected to the first baffle and the second baffle, the area of ​​the second baffle is adapted to the area of ​​the feed port, and before the elastic member is compressed to the limit state, the second baffle and the feed port have a feed gap; the discharge port is located on the side wall of the hopper, and the height of the discharge port is not lower than the horizontal height of the first baffle when the elastic member is compressed to the limit state, the pushing assembly is arranged corresponding to the discharge port, and the pushing assembly can reciprocate along the radial direction of the hopper.

[0016] From this analysis, it can be known that the hopper can carry the photoresist raw material, and the elastic member and the baffle assembly arranged in the hopper include the first baffle, the connecting rod and the second baffle arranged in an I-shaped shape, and the elastic member is connected to the first baffle, so that when the raw material is fed from the feed port, it can fall on the first baffle. With continuous feeding, the raw material on the first baffle increases and the weight increases, so that the elastic member is continuously compressed and the first baffle moves downward in the hopper. Since the second baffle is connected to the first baffle through the connecting rod, the downward movement of the first baffle can drive the second baffle to move downward, and since the area of ​​the second baffle in this application is compatible with the area of ​​the feed port, and there is still a feed gap between the second baffle and the feed port before the elastic member is compressed to the limit state, therefore, when passing through the feed gap, it will not affect the entry of the raw material, and when one feeding is completed, the operator can manually press the second baffle to achieve the closure of the feed port by the second baffle.

[0017] Since the discharge port in the present application is formed on the side of the hopper, and the height of the discharge port is not lower than the horizontal height of the first baffle when the elastic member is compressed to the limit state, the downward movement of the first baffle can eventually expose the discharge port. In addition, the pushing assembly in the present application is arranged corresponding to the discharge port, and the pushing assembly can reciprocate along the radial direction of the hopper. Therefore, when the first baffle passes over the pushing assembly and the discharge port, the material can be pushed out of the discharge port through the reciprocating movement of the pushing assembly in the radial direction, thereby realizing the operation of sealed feeding.

[0018] In addition, the utility model also provides a photoresist production system, including the above-mentioned feeding device.

[0019] A photoresist production system that adopts the feeding device provided in the present application can divide one feeding into multiple feedings during the feeding operation, thereby ensuring the feeding accuracy and greatly reducing the size of the feeding device, saving more production costs, reducing space occupancy, and greatly alleviating the operating pressure of subsequent cleaning and inspection and maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 A schematic diagram of the overall structure of a feeding device provided in an embodiment of the utility model;

[0022] Figure 2 A cross-sectional view of a feeding device provided in an embodiment of the utility model.

[0023] In the figure: 1- hopper; 101- columnar portion; 1011- discharge port; 1012- containing groove; 102- funnel portion; 1021- feed port; 2- elastic member; 3- first baffle; 4- connecting rod; 5- second baffle; 6- driving member; 7- push plate. DETAILED DESCRIPTION

[0024] To make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present application.

[0025] In the description of the embodiments of the present application, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or are the positions or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0026] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0027] In the description of the embodiments of the present application, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "setting", "installation", "connection", and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal connection of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0028] As used herein, the term "and / or" includes any one of the associated listed items and any combination of any two or more items.

[0029] For ease of description, spatial relative terms such as "above", "upper", "below", and "lower" may be used herein to describe the relationship of one element to another element as shown in the drawings. Such spatial relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the drawings.

[0030] The terms used herein are only used to describe various examples and are not used to limit the present disclosure. Unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. The terms "include", "comprise" and "have" list the stated features, quantities, operations, components, elements and / or their combinations that exist, but do not exclude the existence or addition of one or more other features, quantities, operations, components, elements and / or their combinations.

[0031] Variations in the shapes shown in the drawings may occur due to manufacturing techniques and / or tolerances. Therefore, the examples described herein are not limited to the specific shapes shown in the drawings but include variations in shapes that occur during manufacturing.

[0032] The features of the examples described herein may be combined in various ways that will be apparent after understanding the disclosure of the present application. In addition, although the examples described herein have various configurations, other configurations are possible as will be apparent after understanding the disclosure of the present application. In addition, the technical solutions between the various embodiments may be combined with each other, but must be based on the ability of ordinary technicians in the field to implement. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be considered that the combination of such technical solutions does not exist and is not within the scope of protection required by the present application.

[0033] like Figure 1 Combination Figure 2As shown, the utility model provides a feeding device, including a hopper 1, an elastic member 2, a baffle assembly and a pushing assembly; the elastic member 2 is arranged in the hopper 1, and the hopper 1 is formed with a feed port 1021 and a discharge port 1011, the baffle assembly includes a first baffle 3, a second baffle 5 and a connecting rod 4, one end of the elastic member 2 is connected to the bottom of the hopper 1, and the other end is connected to the first baffle 3, the two ends of the connecting rod 4 are respectively connected to the first baffle 3 and the second baffle 5, and the area of ​​the second baffle 5 is adapted to the area of ​​the feed port 1021; the discharge port 1011 is located on the side wall of the hopper 1, and the height of the discharge port 1011 is not lower than the horizontal height of the first baffle 3 when the elastic member 2 is compressed to the limit state, the pushing assembly is arranged corresponding to the discharge port 1011, and the pushing assembly can reciprocate along the radial direction of the hopper 1.

[0034] Compared with the prior art, the feeding device provided by the utility model has the following advantages:

[0035] The feeding device provided by the utility model comprises a hopper 1, an elastic member 2, a baffle assembly and a pushing assembly; the elastic member 2 is arranged in the hopper 1, and the hopper 1 is formed with a feed port 1021 and a discharge port 1011, the baffle assembly comprises a first baffle 3, a second baffle 5 and a connecting rod 4, one end of the elastic member 2 is connected to the bottom of the hopper 1, and the other end is connected to the first baffle 3, the two ends of the connecting rod 4 are respectively connected to the first baffle 3 and the second baffle 5, and the area of ​​the second baffle 5 is adapted to the area of ​​the feed port 1021; the discharge port 1011 is located on the side wall of the hopper 1, and the height of the discharge port 1011 is not lower than the horizontal height of the first baffle 3 when the elastic member 2 is compressed to the limit state, the pushing assembly is arranged corresponding to the discharge port 1011, and the pushing assembly can reciprocate along the radial direction of the hopper 1.

[0036] From this analysis, it can be known that the hopper 1 can carry the photoresist raw material, and the elastic member 2 and the baffle assembly including the first baffle 3, the connecting rod 4 and the second baffle 5 arranged in an I-shape are arranged in the hopper 1, and the elastic member 2 is connected to the first baffle 3, so that when the raw material is fed from the feed port 1021, it can fall on the first baffle 3. With the continuous feeding, the raw material on the first baffle 3 increases and the weight increases, so that the elastic member 2 is continuously compressed and the first baffle 3 moves downward in the hopper 1. Since the second baffle 5 is connected to the first baffle 3 through the connecting rod 4, the downward movement of the first baffle 3 can drive the second baffle 5 to move downward. Since the area of ​​the second baffle 5 in the present application is adapted to the area of ​​the feed port 1021, and there is still a feed gap between the second baffle 5 and the feed port 1021 before the elastic member 2 is compressed to the limit state, the feed gap will not affect the entry of the raw materials. After one feeding is completed, the operator can manually press the second baffle 5 to achieve the closure of the feed port 1021 by the second baffle 5.

[0037] Since the discharge port 1011 in the present application is formed on the side of the hopper 1, and the height of the discharge port 1011 is not lower than the horizontal height of the first baffle 3 when the elastic member 2 is compressed to the limit state, the downward movement of the first baffle 3 can eventually expose the discharge port 1011. In addition, the pushing assembly in the present application is arranged corresponding to the discharge port 1011, and the pushing assembly can reciprocate along the radial direction of the hopper 1. Therefore, when the first baffle 3 passes over the pushing assembly and the discharge port 1011, the reciprocating movement of the pushing assembly in the radial direction can realize the material being pushed out of the discharge port 1011, and the sealed feeding operation is realized.

[0038] It should be noted that in the present application, a slot can be formed at the discharge port 1011 of the hopper 1, and a buckle can be formed at the edge of the second baffle 5. When the operator presses the second baffle 5, the elastic member 2 can be compressed to the limit state, and at the same time, the buckle is snapped into the slot to achieve locking between the second baffle 5 and the hopper 1. After the pushing assembly completes pushing the material, the second baffle 5 can be pressed again to disengage the buckle from the slot, so that the first baffle 3 and the second baffle 5 can be synchronously moved upward under the restoring force of the elastic member 2 to open the feed port 1021.

[0039] It can be understood that since the packaging weight of a single bag of solid photoresist raw material is 20 kg, the capacity of the hopper 1 provided in the present application is at least 20 L, and preferably 25 L, which is nearly 40 times smaller than the existing feeding device, greatly reducing the space occupied and reducing the production, cleaning, inspection and maintenance costs.

[0040] Preferably, the elastic member 2 in the present application is a spring, and the pressure of compressing the spring to the limit state is greater than the weight of a single feed.

[0041] The use of springs not only has a simple and stable structure, but also has a low cost. The pressure of the compression spring when compressed to the limit state is greater than the weight of a single feed, which means that the pressure required to compress the spring to the limit state is slightly greater than the weight of the feed. For example, the pressure required to compress the spring to the limit state is 21kg. Since the single feed is 20kg, the spring will not be compressed to the limit state. As the raw materials are fed, the spring is gradually compressed until the spring is close to the limit state after the feed is fully fed. At this time, there is a feeding gap between the second baffle 5 and the feed port 1021. The operator further presses the second baffle 5 to compress the elastic member 2 to the limit state. At the same time, the second baffle 5 and the hopper 1 are locked by buckles to achieve the sealing of the feed port 1021, thereby achieving a sealed feeding operation.

[0042] At the same time, the first baffle plate 3 can just pass over the discharge port 1011 , so that the raw materials carried on the first baffle plate 3 can be pushed out of the discharge port 1011 by starting the push component and moving along the radial direction of the hopper 1 .

[0043] When the raw material is completely pushed out, the assembly is pushed back, and the operator presses the second baffle plate 5 again to make the buckle disengage from the slot, so that the elastic member 2 can push the first baffle plate 3 and the second baffle plate 5 upward to open the feed port 1021.

[0044] Preferably, the feeding device provided by the utility model further comprises a counterweight, and the counterweight is arranged on the second baffle 5 to increase the pressure on the elastic member 2 .

[0045] The present application further adds a counterweight, which eliminates the need to set a buckle and a slot between the second baffle 5 and the hopper 1, thereby making the structure simpler. During operation, taking the example of adding 20kg of raw materials at a time, the pressure required to compress the spring to the limit state is 21kg. When the raw materials are fully put in, the spring still does not reach the limit state. At this time, there is still a feeding gap between the second baffle 5 and the feed port 1021. The operator places the counterweight on the second baffle 5, and based on the above weight, the weight of the counterweight is at least 1kg, so that the spring can be compressed to the limit position, and then the second baffle 5 can be buckled with the feed port 1021 to achieve the sealing of the feed port 1021.

[0046] Afterwards, the pushing component is extended to perform the pushing operation, and during the pushing process, the pressure on the elastic member 2 is reduced due to the continuous reduction of raw materials, and the extension of the pushing component can ensure the limitation of the second baffle 5, so that the second baffle 5 can always seal the feed port 1021 and achieve a smooth pushing action.

[0047] When the pushing is finished, the pushing assembly is completely recovered and separated from the second baffle 5 , and the elastic member 2 returns to a natural state after losing pressure, thereby realizing the opening of the feed port 1021 .

[0048] Alternatively, if Figure 1 Combination Figure 2 As shown, the hopper 1 in the present application includes a funnel portion 102 and a column portion 101, one end of the funnel portion 102 forms a feed port 1021, the other end of the funnel portion 102 is connected to the column portion 101, the discharge port 1011 is formed on the side wall of the column portion 101, and the first baffle 3 is always located in the column portion 101.

[0049] The funnel portion 102 can increase the diameter of the feed port 1021 on the one hand, and can make the raw material fall smoothly onto the first baffle 3 on the other hand, while the column portion 101 can make the structure more regular and the pushing process of the pushing assembly smoother.

[0050] Alternatively, if Figure 1 Combination Figure 2As shown, the two ends of the connecting rod 4 in the present application are respectively connected to the center of the first baffle 3 and the center of the second baffle 5 to form a structure with an I-shaped cross section.

[0051] By locating the connecting rod 4 at the center of the first baffle plate 3 and the second baffle plate 5 , the forces on the first baffle plate 3 and the second baffle plate 5 can be made more uniform, thereby ensuring the stability of the blanking process and reducing the problem of the first baffle plate 3 being tilted.

[0052] Correspondingly, the diameter of the first baffle plate 3 in the present application is adapted to the inner diameter of the column portion 101, which can not only realize the reciprocating motion of the first baffle plate 3 in the column portion 101, but also utilize the column portion 101 to limit the first baffle plate 3, thereby avoiding the problem of the first baffle plate 3 tilting during the material receiving process.

[0053] Since the connecting rod 4 is located in the middle position, the pushing assembly can have two sets, and the two sets of pushing assemblies are arranged at an interval, and the interval is not less than the diameter of the connecting rod 4, so that the pushing process of the pushing assembly can avoid the middle connecting rod 4 position and ensure the smooth pushing of the raw materials.

[0054] It is understandable that, since the two sets of spaced pushing components will cause a blind area for pushing materials in the corresponding area of ​​the connecting rod 4 when pushing, in order to ensure that all the raw materials are pushed out, two spaced pushing components can be added on both sides. When the pushing component corresponding to the discharge port 1011 completes the main pushing action and retracts, and before entering the receiving groove 1012, the pushing components added on both sides extend and push the raw materials in the blind area for pushing materials at the position of the corresponding connecting rod 4 away from the area. Finally, the action of the two pushing components corresponding to the discharge port 1011 is used again to achieve the complete pushing of the raw materials.

[0055] Alternatively, if Figure 1 Combination Figure 2 As shown, the pushing assembly in the present application includes a push plate 7 and a driving member 6, the driving member 6 is located outside the hopper 1, the push plate 7 is arranged inside the hopper 1, the driving end of the driving member 6 is connected to the push plate 7, and can pass through the side wall of the hopper 1 to drive the push plate 7 to reciprocate radially in the hopper 1.

[0056] It can be understood that the driving component 6 in the present application is an oil cylinder, a gas cylinder or an electric telescopic rod. The extension and retraction of the driving component 6 can drive the push plate 7 to reciprocate radially in the hopper 1, thereby realizing the pushing out of the raw materials.

[0057] Preferably, if Figure 2 As shown, a receiving groove 1012 is formed on the side of the hopper 1 in the present application, the shape of the receiving groove 1012 is adapted to the push plate 7, and the depth of the receiving groove 1012 is not less than the thickness of the push plate 7, so that the push plate 7 can be embedded in the receiving groove 1012.

[0058] By forming the receiving groove 1012 , when the driving member 6 is fully retracted, the push plate 7 can enter the receiving groove 1012 without protruding from the inner wall surface of the column portion 101 , thereby avoiding interference with the reciprocating motion of the first baffle 3 in the vertical direction.

[0059] Optionally, a sealing ring is provided on the edge of the second baffle 5 in the present application on the side facing the feed port 1021 , and the outer diameter of the sealing ring is matched with the inner diameter of the feed port 1021 .

[0060] By means of the sealing ring arranged on the second baffle plate 5 , the sealing degree between the second baffle plate 5 and the hopper 1 can be improved, thereby ensuring the sealing performance of the sealed feeding process.

[0061] In addition, the utility model also provides a photoresist production system, including the above-mentioned feeding device.

[0062] A photoresist production system that adopts the feeding device provided in the present application can divide one feeding into multiple feedings during the feeding operation, thereby ensuring the feeding accuracy and greatly reducing the size of the feeding device, saving more production costs, reducing space occupancy, and greatly alleviating the operating pressure of subsequent cleaning and inspection and maintenance.

[0063] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A feeding device, characterized in that: It includes a hopper, an elastic member, a baffle assembly and a pushing assembly; The elastic member is arranged in the hopper, and the hopper is formed with a feed port and a discharge port. The baffle assembly includes a first baffle, a second baffle and a connecting rod. One end of the elastic member is connected to the bottom of the hopper, and the other end is connected to the first baffle. Both ends of the connecting rod are respectively connected to the first baffle and the second baffle. The area of ​​the second baffle is adapted to the area of ​​the feed port, and before the elastic member is compressed to the limit state, the second baffle and the feed port have a feed gap. The discharge port is located on the side wall of the hopper, and the height of the discharge port is not lower than the horizontal height of the first baffle when the elastic member is compressed to the limit state. The pushing component is arranged corresponding to the discharge port, and the pushing component can reciprocate radially along the hopper.

2. The feeding device according to claim 1, characterized in that: The elastic member is a spring, and the pressure of compressing the spring to a limit state is greater than the weight of a single feed.

3. The feeding device according to claim 1, characterized in that: It also includes a weight balancing member, which is disposed on the second baffle plate and is used to increase the pressure on the elastic member.

4. The feeding device according to claim 1, characterized in that: The hopper includes a funnel portion and a column portion, one end of the funnel portion forms the feed port, the other end of the funnel portion is connected to the column portion, the discharge port is formed on the side wall of the column portion, and the first baffle is always located in the column portion.

5. The feeding device according to claim 1, characterized in that: Two ends of the connecting rod are respectively connected to the center of the first baffle plate and the center of the second baffle plate to form a structure with an I-shaped cross section.

6. The feeding device according to claim 1, characterized in that: The pushing assembly includes a push plate and a driving component, wherein the driving component is located outside the hopper, and the push plate is arranged inside the hopper. The driving end of the driving component is connected to the push plate and can pass through the side wall of the hopper to drive the push plate to reciprocate radially in the hopper.

7. The feeding device according to claim 6, characterized in that: A receiving groove is formed on the side of the hopper, the shape of the receiving groove is matched with the push plate, and the depth of the receiving groove is not less than the thickness of the push plate, so that the push plate can be embedded in the receiving groove.

8. The feeding device according to claim 6, characterized in that: The driving component is an oil cylinder, an air cylinder or an electric telescopic rod.

9. The feeding device according to claim 1, characterized in that: A sealing ring is provided on the edge of the second baffle plate on one side facing the feed inlet, and the outer diameter of the sealing ring is matched with the inner diameter of the feed inlet.

10. A photoresist production system, characterized in that: The invention comprises a feeding device as described in any one of claims 1 to 9.

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