Seed crystal suspension member and crystal growth device
By designing a seed crystal chuck and anti-detachment for seed crystal suspension member, the coordination of positioning slots and positioning notches is used to solve the problems of seed crystal body stability and concentricity in the prior art, and more efficient and stable crystal growth is achieved.
Patent Information
- Application Number
- CN202421355409.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-13
- Publication Date
- 2025-03-11
- Estimated Expiration
- 2034-06-13
AI Technical Summary
In the prior art, the hard connection between the seed rod body and the iridium tube causes too large or too small gap, which easily leads to shaking or expanding heat and difficult to remove, and the concentricity is difficult to ensure, affecting the quality of crystal growth.
A seed crystal suspension member is designed, including a seed crystal chuck and anti-detachment. Through the coordination of the positioning slot and the positioning notch, the movement range of the seed crystal rod is limited to ensure its stable suspension and concentricity.
This component simplifies the structure, reduces assembly difficulty, improves assembly efficiency and quality, and ensures stability and high quality of seed growth.
Smart Images
Figure CN222594074U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor processing, in particular to a seed crystal suspension component and a crystal growth device. Background Art
[0002] The melt-pulling method for growing crystals requires oriented seed crystals as seeds to grow crystals with certain crystal orientations to meet product performance requirements. Crystal materials are mostly grown from high-temperature melts. At present, the general seed crystal connection method is to grind the seed crystal into a round shape and then cut a transverse groove, and then insert it into an iridium round tube with transverse perforations. After the transverse groove and transverse perforations are aligned, the iridium wire is inserted to connect the seed crystal to the iridium tube. Please refer to the attached Figure 1 , where 001 represents the iridium tube and 002 represents the seed crystal.
[0003] The inventors have found that the seed crystal growth device in the prior art has at least the following disadvantages:
[0004] Since the iridium tube and the seed crystal rod are hard-connected, if the gap between the seed crystal rod and the iridium tube is too large, the seed crystal rod will easily shake, and it is difficult to ensure concentricity. If the gap between the two is too small, the seed crystal will expand due to heat and be difficult to remove. In severe cases, the seed crystal will be crushed, causing the crystal to fall into the melt, causing irreparable losses. In addition, in the prior art, the concentricity of the seed crystal rod is difficult to adjust, and it depends entirely on the coordination of the iridium wire and the gap. Utility Model Content
[0005] The utility model aims to provide a seed crystal suspension component and a crystal growth device, which can simplify the structure, reduce the difficulty of assembly, improve the assembly efficiency, improve the assembly quality, and improve the quality of seed crystal growth.
[0006] The embodiment of the utility model is achieved as follows:
[0007] In a first aspect, the utility model provides a seed crystal suspension component for positioning a seed crystal rod, comprising:
[0008] A seed crystal chuck and an anti-slip protrusion, wherein the seed crystal chuck is provided with a positioning slot and a positioning notch, wherein the positioning slot has a first slot wall and a second slot wall opposite to each other, wherein the positioning notch penetrates the first slot wall and communicates with the positioning slot; the anti-slip protrusion is installed on the first slot wall and is located above the positioning notch, and there is a spacing between the anti-slip protrusion and the bottom wall of the positioning slot to form a clamping space;
[0009] The clamping space is used to accommodate the seed crystal rod, and the anti-slip protrusion is used to abut against the seed crystal rod placed in the clamping space to limit the seed crystal rod from slipping out of the notch of the positioning slot.
[0010] In an optional embodiment, the first groove wall is configured to be a plane, and the first groove wall is used to support the seed rod.
[0011] Based on the above scheme, the first groove wall is set to be a plane. When the seed crystal chuck is fixed, the first groove wall can be set horizontally. In this way, after the seed crystal rod is supported by the first groove wall, the seed crystal rod can be vertically suspended in the positioning slot, which is conducive to the subsequent crystal growth. When the seed crystal rod is suspended in the positioning slot, under the action of the gravity of the seed crystal rod, the seed crystal rod and the positioning slot are firmly matched and not easy to shift. As the crystal grows, the weight increases and the stability gradually increases.
[0012] In an optional embodiment, the number of the anti-slip protrusions is set to two, the two anti-slip protrusions are both arranged on the first groove wall, the two anti-slip protrusions are distributed on both sides of the positioning notch, and the distance between the two anti-slip protrusions and the groove bottom wall is equal.
[0013] Based on the above scheme, there are two anti-slip protrusions and they are distributed on both sides of the positioning notch. When the seed crystal rod is inserted into the positioning slot, the seed crystal rod abuts against the two anti-slip protrusions at the same time. The two anti-slip protrusions cooperate to limit the position of the seed crystal rod, and the limiting effect is better. The combination of the seed crystal rod and the seed crystal chuck is more stable.
[0014] In an optional embodiment, a weight-reducing hole communicating with the positioning notch is provided on the bottom wall of the positioning slot.
[0015] Based on the above scheme, by setting the weight-reducing hole, on the one hand, when the seed crystal rod is clamped in the positioning slot, the portion of the seed crystal rod aligned with the weight-reducing hole is not supported by the bottom wall of the slot, and this portion will not affect the installation form of the seed crystal rod, that is, the precision of the flatness does not need to be considered at the weight-reducing hole, thereby reducing the difficulty of processing and manufacturing. On the other hand, the weight-reducing hole can reduce the weight of the entire seed crystal chuck and save materials.
[0016] In an optional embodiment, the seed crystal chuck includes a top plate, a side plate and two side plates, the top plate is installed on a first side of the side plate and has an angle with the side plate, the two side plates are installed on a second side of the side plate opposite to the first side, the two side plates are arranged at intervals in the extension direction of the connection line between the top plate and the side plates, the positioning notch is formed between the two side plates, the top plate, the side plate and the two side plates cooperate to form the positioning slot; the anti-slip protrusion is installed on a side of the side plate close to the top plate.
[0017] Based on the above scheme, the structure of the seed crystal chuck is simple, and it is matched with the top plate, the side plate and the two side plates, which has low processing difficulty and is conducive to ensuring the processing quality, thereby facilitating improving the stability of the cooperation between the seed crystal chuck and the seed crystal rod.
[0018] In an optional embodiment, the anti-slip protrusion, the top plate, the side plate and the two side plates are arranged as an integrated structure.
[0019] Based on the above solution, the seed crystal chuck has good integrity, high structural strength and long service life.
[0020] In a second aspect, the utility model provides a crystal growth device, comprising:
[0021] The seed crystal rod and the seed crystal suspension member described in any one of the aforementioned embodiments, wherein the seed crystal rod is clamped in the positioning clamping groove.
[0022] In an optional embodiment, the seed rod includes a head and a rod, the head is fixed to one end of the rod, the width of the head is greater than the width of the rod, the head is located in the clamping space, and the rod is located in the positioning notch.
[0023] Based on the above scheme, the clamping space is used to position the head, which can limit the freedom of the seed crystal rod downward, forward and backward, and the positioning notch is used to position the rod, which can limit the freedom of the seed crystal rod left and right. In this way, the position of the seed crystal rod is stable and reliable. During use, the seed crystal rod is continuously affected by gravity and will not move upward, which is safe and reliable.
[0024] In an optional embodiment, the distance between the anti-slip protrusion and the groove bottom wall is not less than the thickness of the head.
[0025] Based on the above solution, the head can be clamped by the bottom wall of the groove and the anti-slip protrusion, thereby limiting the forward and backward movement range of the head.
[0026] In an optional embodiment, the width of the positioning notch is not less than the width of the rod portion and is less than the width of the head portion.
[0027] Based on the above solution, when the head contacts the first groove wall, the width of the positioning notch is smaller than the width of the head, thereby ensuring that the head will not fall from the positioning notch, and the width of the positioning notch is not smaller than the width of the rod, thereby ensuring that the rod can smoothly enter the positioning notch.
[0028] The beneficial effects of the embodiments of the utility model are:
[0029] In summary, the seed crystal suspension component provided in this embodiment is mainly used in conjunction with the seed crystal rod. The seed crystal rod can be inserted into the positioning slot, and the slot wall and the anti-slip protrusion of the positioning slot cooperate to limit the forward and backward movement range of the seed crystal rod. Part of the seed crystal rod is inserted into the positioning notch. The seed crystal rod is in a vertical suspension state under normal conditions. The top cooperates with the seed crystal chuck, and the bottom is suspended. The degrees of freedom on the left and right sides of the seed crystal rod are limited by the two inner wall surfaces that form the positioning notch. In this way, after the seed crystal rod is suspended in the seed crystal chuck, the degrees of freedom of the seed crystal rod in front, back, bottom, left and right are all limited, and the cooperation between the seed crystal rod and the seed crystal chuck is stable and reliable. At the same time, during the crystal growth process, the crystal is attached to the seed crystal rod, and the weight of the seed crystal rod increases. Under the action of gravity, the cooperation between the seed crystal rod and the seed crystal chuck is more stable. BRIEF DESCRIPTION OF THE DRAWINGS
[0030] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.
[0031] Figure 1 It is a schematic diagram of the prior art;
[0032] Figure 2 A schematic diagram of a seed crystal suspension component according to an embodiment of the present utility model;
[0033] Figure 3 It is a deformation schematic diagram of the seed crystal suspension component of the embodiment of the utility model;
[0034] Figure 4 A side view of a seed crystal suspension component according to an embodiment of the present utility model;
[0035] Figure 5 A schematic diagram of a crystal growth device according to an embodiment of the present utility model;
[0036] Figure 6 Schematic diagram of a seed rod according to an embodiment of the utility model.
[0037] icon:
[0038] 001-iridium tube; 002-seed crystal rod body; 100-seed crystal chuck; 101-positioning slot; 102-positioning notch; 103-weight reduction hole; 104-first slot wall; 105-second slot wall; 106-slot bottom wall; 110-top plate; 120-side plate; 130-side plate; 200-anti-slip protrusion; 300-seed crystal rod; 310-head; 320-rod. DETAILED DESCRIPTION
[0039] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.
[0040] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0041] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.
[0042] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.
[0043] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0044] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0045] In the prior art, the iridium tube 001 and the seed crystal rod body 002 are plug-fitted and positioned using iridium wire. There are many parts and large errors, making it difficult to ensure the concentricity of the seed crystal rod 300. It is also inconvenient to assemble and use.
[0046] In view of this, the designer provides a seed crystal suspension component with simple structure, convenient operation, stable and reliable use, and conducive to crystal growth.
[0047] Please combine Figure 2-Figure 4 In this embodiment, the seed crystal suspension component is used to position the seed crystal rod 300, which includes a seed crystal chuck 100 and an anti-slip protrusion 200. The seed crystal chuck 100 is provided with a positioning slot 101 and a positioning notch 102. The positioning slot 101 has a first slot wall 104 and a second slot wall 105 opposite to each other. The positioning notch 102 penetrates the first slot wall 104 and is connected to the positioning slot 101; the anti-slip protrusion 200 is installed on the first slot wall 104 and is located above the positioning notch 102. The anti-slip protrusion 200 and the bottom wall 106 of the positioning slot 101 are spaced apart to form a clamping space; the clamping space is used to accommodate the seed crystal rod 300, and the anti-slip protrusion 200 is used to abut against the seed crystal rod 300 placed in the clamping space to limit the seed crystal rod 300 from slipping out of the notch of the positioning slot 101.
[0048] Based on the above solution, the seed crystal suspension component provided in this embodiment works as follows:
[0049] Please combine Figure 5 The seed crystal suspension component provided in this embodiment is mainly used in conjunction with the seed crystal rod 300. The seed crystal rod 300 can be inserted into the positioning slot 101, and the groove wall of the positioning slot 101 and the anti-slip protrusion 200 cooperate to limit the forward and backward movement range of the seed crystal rod 300. Part of the seed crystal rod 300 is inserted into the positioning notch 102. The seed crystal rod 300 is in a vertical suspension state under normal conditions, with the top cooperating with the seed crystal chuck 100 and the bottom hanging in the air. The freedom of the left and right sides of the seed crystal rod 300 is limited by the two inner wall surfaces forming the positioning notch 102. In this way, after the seed crystal rod 300 is suspended on the seed crystal chuck 100, the front, back, bottom, left and right degrees of freedom of the seed crystal rod 300 are all limited, and the cooperation between the seed crystal rod 300 and the seed crystal chuck 100 is stable and reliable. Meanwhile, during the crystal growth process, the crystal adheres to the seed crystal rod 300 , the weight of the seed crystal rod 300 increases, and under the action of gravity, the cooperation between the seed crystal rod 300 and the seed crystal chuck 100 becomes more stable.
[0050] The following embodiments illustrate the details of the seed crystal suspension component provided in the present application by way of examples.
[0051] In this embodiment, optionally, the first groove wall 104 is set to be a plane, and the first groove wall 104 is used to carry the seed rod 300 .
[0052] It should be noted that the first groove wall 104 is set as a plane. When the seed crystal chuck 100 is fixed, the first groove wall 104 can be set horizontally. In this way, after the seed crystal rod 300 is carried by the first groove wall 104, the seed crystal rod 300 can be vertically suspended in the positioning slot 101, which is conducive to the subsequent crystal growth. When the seed crystal rod 300 is suspended in the positioning slot 101, under the action of the gravity of the seed crystal rod 300, the seed crystal rod 300 and the positioning slot 101 are firmly matched and not easy to shift. As the crystal grows, the weight increases, and the stability gradually increases.
[0053] In this embodiment, optionally, the number of anti-slip protrusions 200 is set to two, both of which are arranged on the first groove wall 104, and the two anti-slip protrusions 200 are distributed on both sides of the positioning notch 102, and the distance between the two anti-slip protrusions 200 and the groove bottom wall 106 is equal.
[0054] It should be noted that there are two anti-slip protrusions 200 distributed on both sides of the positioning notch 102. When the seed rod 300 is inserted into the positioning slot 101, the seed rod 300 abuts against the two anti-slip protrusions 200 at the same time. The two anti-slip protrusions 200 cooperate to limit the position of the seed rod 300, resulting in a better limiting effect. The combination of the seed rod 300 and the seed chuck 100 is more stable.
[0055] In this embodiment, optionally, a weight-reducing hole 103 communicating with the positioning notch 102 is provided on the bottom wall 106 of the positioning slot 101 .
[0056] It should be noted that, by providing the lightening hole 103, on the one hand, when the seed crystal rod 300 is clamped in the positioning slot 101, the portion of the seed crystal rod 300 aligned with the lightening hole 103 is not supported by the slot bottom wall 106, and this portion will not affect the installation form of the seed crystal rod 300, that is, the lightening hole 103 does not need to consider the accuracy of flatness, thereby reducing the difficulty of processing and manufacturing. On the other hand, the lightening hole 103 can reduce the weight of the entire seed crystal chuck 100 and save materials.
[0057] In this embodiment, optionally, the seed crystal chuck 100 includes a top plate 110, a side plate 120 and two side plates 130. The top plate 110, the side plate 120 and the side plate 130 can all be set as rectangular plates, with regular structure, easy processing and manufacturing, and low cost. The top plate 110 is installed on the first side of the side plate 120 and has an angle with the side plate 120. For example, in this embodiment, the top plate 110 is arranged perpendicular to the side plate 120. The two side plates 130 are both installed on the second side of the side plate 120 opposite to the first side. The two side plates 130 are arranged at intervals in the extension direction of the connecting line between the top plate 110 and the side plate 120. Each side plate 130 is arranged perpendicular to the top plate 110 and the bottom plate at the same time, that is, the top plate 110, the bottom plate and the side plates 130 are arranged vertically in pairs, and the structure is stable and reliable. A positioning notch 102 is formed between the two side panels 130, and the top panel 110, the side panel 120 and the two side panels 130 cooperate to form a positioning slot 101. The anti-drop protrusion 200 is installed on one side of the side panel 130 close to the top panel 110. When the number of the anti-drop protrusion 200 is two, one anti-drop protrusion 200 is installed on the side of each side panel 130 close to the top panel 110.
[0058] It should be noted that the seed crystal chuck 100 has a simple structure. It is easy to process by combining the top plate 110, the side plate 120 and the two side plates 130, which is conducive to ensuring the processing quality, thereby facilitating improving the stability of the cooperation between the seed crystal chuck 100 and the seed crystal rod 300.
[0059] In this embodiment, optionally, the anti-drop protrusion 200, the top plate 110, the side plate 120 and the two side plates 130 are configured as an integrated structure.
[0060] It should be noted that the seed crystal chuck 100 has good integrity, high structural strength and long service life.
[0061] For example, the top plate 110 , the side plate 120 and the side plate 130 may be welded together. The anti-drop protrusion 200 may be directly formed on the side plate 130 .
[0062] The seed crystal suspension member provided in this embodiment can limit the seed crystal rod 300, and the position of the seed crystal rod 300 is stable, which is conducive to crystal growth. The seed crystal rod 300 can be removed from the seed crystal chuck 100 later, and the operation is convenient.
[0063] Please combine Figure 5 and Figure 6 The embodiment of the present application further provides a crystal growth device, which includes a seed crystal rod 300 and the seed crystal suspension component of the above embodiment, and the seed crystal rod 300 is clamped in the positioning slot 101.
[0064] In this embodiment, optionally, the seed rod 300 includes a head 310 and a rod 320, the head 310 is fixed to one end of the rod 320, the width of the head 310 is greater than the width of the rod 320, the head 310 is located in the clamping space, and the rod 320 is located in the positioning notch 102. The head 310 is a rectangular block, the rod 320 is a rectangular rod, and the head 310 and the rod 320 can be an integrated structure, and the two are roughly T-shaped structures.
[0065] It should be noted that the clamping space positioning head 310 can limit the downward, forward and backward freedom of the seed rod 300, and the positioning notch 102 positioning rod 320 can limit the left and right freedom of the seed rod 300, so that the position of the seed rod 300 is stable and reliable. During use, the seed rod 300 is continuously affected by gravity and will not move upward, which is safe and reliable.
[0066] It should be understood that the bottom surface of the head 310 is a plane and can fit tightly with the first groove wall 104 which is set as a plane, so as to ensure that the seed rod 300 is in a vertical state when suspended and ensure its concentricity.
[0067] In this embodiment, optionally, the distance between the anti-slip protrusion 200 and the groove bottom wall 106 is not less than the thickness of the head 310 .
[0068] It should be noted that the groove bottom wall 106 and the anti-slip protrusion 200 cooperate to clamp the head 310 and limit the forward and backward movement range of the head 310 .
[0069] In this embodiment, optionally, the width of the positioning notch 102 is not less than the width of the rod portion 320 and is less than the width of the head portion 310 .
[0070] It should be noted that when the head 310 contacts the first groove wall 104, the width of the positioning notch 102 is smaller than the width of the head 310, thereby ensuring that the head 310 will not fall from the positioning notch 102, and the width of the positioning notch 102 is not less than the width of the rod 320, thereby ensuring that the rod 320 can smoothly enter the positioning notch 102.
[0071] The crystal growth device provided in this embodiment has at least the following advantages:
[0072] 1. The seed crystal chuck 100 and the seed crystal rod 300 adopt a T-shaped contact structure, with a large contact surface and high stability.
[0073] 2. A proper gap can be kept between the seed crystal and the chuck without causing the seed crystal to tilt. The concentricity of the seed crystal depends on the horizontality and verticality of the seed crystal chuck 100 and the seed crystal rod 300. The gap is more conducive to protecting the seed crystal rod 300 from damage.
[0074] 3. Simple structure, easy to take and put, easy to adjust.
[0075] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.
Claims
1. A seed crystal suspension component for positioning a seed crystal rod (300), characterized in that: include: A seed crystal chuck (100) and an anti-slip protrusion (200), wherein the seed crystal chuck (100) is provided with a positioning slot (101) and a positioning notch (102), wherein the positioning slot (101) has a first slot wall (104) and a second slot wall (105) opposite to each other, and the positioning notch (102) penetrates the first slot wall (104) and communicates with the positioning slot (101); the anti-slip protrusion (200) is mounted on the first slot wall (104) and is located above the positioning notch (102), and a spacing is provided between the anti-slip protrusion (200) and a slot bottom wall (106) of the positioning slot (101) to form a clamping space; The clamping space is used to accommodate a seed crystal rod (300), and the anti-slip protrusion (200) is used to abut against the seed crystal rod (300) placed in the clamping space to prevent the seed crystal rod (300) from slipping out of the notch of the positioning slot (101).
2. The seed crystal suspension member according to claim 1, characterized in that: The first groove wall (104) is arranged to be a plane, and the first groove wall (104) is used to support the seed rod (300).
3. The seed crystal suspension member according to claim 1, characterized in that: The number of the anti-slip protrusions (200) is set to two, the two anti-slip protrusions (200) are both arranged on the first groove wall (104), the two anti-slip protrusions (200) are distributed on both sides of the positioning notch (102), and the distances between the two anti-slip protrusions (200) and the groove bottom wall (106) are equal.
4. The seed crystal suspension member according to claim 1, characterized in that: A weight-reducing hole (103) communicating with the positioning notch (102) is provided on the bottom wall (106) of the positioning slot (101).
5. The seed crystal suspension member according to claim 1, characterized in that: The seed crystal chuck (100) comprises a top plate (110), a side plate (120) and two side plates (130); the top plate (110) is mounted on a first side of the side plate (120) and has an angle with the side plate (120); the two side plates (130) are mounted on a second side of the side plate (120) opposite to the first side; the two side plates (130) are arranged at intervals in the extension direction of the connection line between the top plate (110) and the side plate (120); the positioning notch (102) is formed between the two side plates (130); the top plate (110), the side plate (120) and the two side plates (130) cooperate to form the positioning slot (101); the anti-slip protrusion (200) is mounted on a side of the side plate (130) close to the top plate (110).
6. The seed crystal suspension member according to claim 5, characterized in that: The anti-drop protrusion (200), the top plate (110), the side plate (120) and the two side plates (130) are arranged as an integrated structure.
7. A crystal growth device, characterized in that: It includes: A seed crystal rod (300) and a seed crystal suspension component according to any one of claims 1 to 6, wherein the seed crystal rod (300) is clamped in the positioning clamping groove (101).
8. The crystal growth device according to claim 7, characterized in that: The seed crystal rod (300) comprises a head (310) and a rod (320), wherein the head (310) is fixed to one end of the rod (320), the width of the head (310) is greater than the width of the rod (320), the head (310) is located in the clamping space, and the rod (320) is located in the positioning notch (102).
9. The crystal growth device according to claim 8, characterized in that: The distance between the anti-slip protrusion (200) and the groove bottom wall (106) is not less than the thickness of the head (310).
10. The crystal growth device according to claim 8, characterized in that: The width of the positioning notch (102) is not less than the width of the rod portion (320) and is less than the width of the head portion (310).