Sample box device for containing equipment for bonding samples

Abstract

The utility model provides a sample box device for containing equipment for bonding samples, which is applied to the technical field of sample lofting devices.The sample box device is characterized in that a first clamping piece and a second clamping piece are detachably connected through a fixing piece, and the equipment for bonding the samples is clamped between the first clamping piece and the second clamping piece; a sample on the apparatus for bonding the sample is located outside the first clamping piece and the second clamping piece, and the sample is in a suspended state; the lifting basket piece is fixedly connected with the first clamping piece, the lifting basket piece is fixed to the supporting frame in a lap joint mode, and the first clamping piece and the second clamping piece which are connected through the fixing piece are fixed to the supporting frame in a lap joint mode through the lifting basket piece. According to the sample box, when the sample box body shakes, a device for bonding a sample is clamped between the first clamping piece and the second clamping piece, the sample is in a suspended state and is not prone to colliding with the sample box body or other parts, and the probability that the sample falls off or is bent is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of sample placement devices, and in particular to a sample box device for holding a bonding sample. Background Art

[0002] Transmission electron microscope (TEM), also known as TEM for short, generally projects an accelerated and focused electron beam onto a very thin sample. These electrons will collide with the atoms in the sample, and the direction of electron movement will change, resulting in three-dimensional angle scattering. After the electrons pass through the sample, they are focused and magnified by an electromagnetic lens and displayed on an imaging device. It is a high-resolution instrument that uses electron beams to observe the microscopic structure of matter, and is widely used in materials science, biology, medicine and other fields.

[0003] Focused Ion Beam-Scanning Electron Microscope (FIB-SEM) dual beam system refers to a system with both focused ion beam (FIB) and scanning electron microscope (SEM) functions. By combining with corresponding gas deposition devices and nanomanipulators, various detectors, controllable sample stages and other accessories, it becomes an analytical instrument integrating micro-area imaging, processing and analysis, and manipulation, which has a wide range of applications in many fields such as physics, chemistry, biology, new materials, agriculture, environment and energy.

[0004] Since the sample for TEM photography needs to be thin enough, about 40 to 100nm, there are many preparation methods according to the state and structure of the sample, among which FIB cutting is one of them. Use the FIB machine to cut the sample into 5-10μm*5-10μm long*wide samples. After cutting, use pt (platinum) to stick the sample to a special device (Gride); then put it in a sample box and transfer it to the TEM equipment for photography. At present, the sample box for holding FIB Grid (equipment for bonding focused ion beam cut samples) mainly includes high-elastic membrane boxes. Since the Gride is placed directly in the box of the high-elastic membrane box, it is easy for the sample on the Gride to collide with the box due to the shaking of the high-elastic membrane box, causing the sample to fall off.

[0005] Based on this, a new technical solution is needed. Utility Model Content

[0006] In view of this, an embodiment of the present specification provides a sample box device for containing a device for bonding samples.

[0007] The embodiments of this specification provide the following technical solutions:

[0008] The embodiment of the present specification provides a sample box device for holding a bonding sample, comprising a sample box body, wherein the sample box body comprises a support frame, a basket member, a first clamping member, a second clamping member, and a fixing member;

[0009] The first clamping member and the second clamping member are detachably connected via a fixing member, and are configured as a device for clamping and bonding the sample between the first clamping member and the second clamping member;

[0010] The sample on the sample bonding device is located outside the first clamping member and the second clamping member, and is configured so that the sample is in a suspended state;

[0011] The basket carrying member is fixedly connected to the first clamping member, and the basket carrying member is overlapped and fixed on the support frame, and is configured such that the first clamping member and the second clamping member connected by the fixing member are overlapped and fixed on the support frame through the basket carrying member.

[0012] Preferably, the first clamping member is provided with a groove for placing the equipment for bonding the sample, and the equipment part for bonding the sample is located between the groove and the second clamping member, and is configured such that the equipment part for bonding the sample is clamped between the groove and the second clamping member;

[0013] The sample on the device for bonding the sample is located outside the groove and the second clamping member, and is configured so that the sample is in a suspended state.

[0014] Preferably, the groove has the same thickness as the clamped portion of the device for bonding the sample, and is configured so that the first clamping member and the second clamping member fit and clamp.

[0015] Preferably, the equipment for bonding samples is equipment for bonding focused ion beam cut samples.

[0016] Preferably, the support frame comprises a plurality of support plates and a plurality of placement plates, and the placement plates are fixed on each of the support plates;

[0017] The plurality of support plates are arranged opposite to each other, and the placement plates on the oppositely arranged support plates are arranged opposite to each other;

[0018] The basket carrying member is mounted on oppositely arranged placement plates.

[0019] Preferably, the support plates arranged opposite to each other are provided with fastening members for fixing the basket carrying member, and are configured so that the basket carrying member is detachably connected to the support plates via the fastening members.

[0020] Preferably, the support plate comprises a supporting portion and a limiting portion for limiting the basket structure; and the limiting portion and the supporting portion are divided and arranged by the placement plate.

[0021] Preferably, the fixing member comprises a fixing rod and a fixing block which are fixedly connected;

[0022] The fixing rod passes through the second clamping member, the fixing block is used to abut against the side wall of the second clamping member away from the first clamping member, and the first clamping member has a fixing hole, and the fixing rod is threadedly connected with the fixing hole.

[0023] Preferably, the sample box device further comprises a box cover; the box cover is arranged to cover the sample box body.

[0024] Preferably, the first clamping members are provided in plurality, the second clamping members are provided in plurality, each of the first clamping members corresponds to at least two of the second clamping members, and the second clamping members are provided in one-to-one correspondence with the equipment for bonding the samples.

[0025] Compared with the prior art, the at least one technical solution adopted in the embodiments of this specification can achieve the following beneficial effects:

[0026] In the present application, the first clamping member and the second clamping member clamp the equipment for bonding the sample through the fixing member, and the sample on the equipment for bonding the sample is located outside the first clamping member and the second clamping member, and the sample is in a suspended state. The first clamping member and the second clamping member connected by the fixing member are overlapped and fixed on the support frame through the basket member to form an integral structure. When the sample box body shakes, the equipment for bonding the sample is clamped by the first clamping member and the second clamping member, and the sample is in a suspended state and is not easy to collide with the sample box body or other components, thereby reducing the probability of the sample falling or bending. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 This is a schematic diagram of Gride;

[0029] Figure 2 It is a schematic diagram of FIB Grid;

[0030] Figure 3 is a front view of the FIB Grid sample box device in this application;

[0031] Figure 4 is a top view of the FIB Grid sample box device highlighted in this application;

[0032] Figure 5is a top view of the FIB Grid sample box device cover highlighted in the present application;

[0033] Figure 6 It is a schematic diagram of the relative positions of the FIB Grid and the second clamping member in this application.

[0034] Figure numerals: 1, support frame; 2, clamping member; 3, basket member; 4, first clamping member; 5, fixing hole; 6, groove; 7, second clamping member; 8, fixing member; 9, equipment for bonding samples; 10, box cover; 11, label. DETAILED DESCRIPTION

[0035] The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0036] The following describes the implementation methods of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation methods, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the following embodiments and the features in the embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work belong to the scope of protection of the present application.

[0037] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on the present application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspect described herein can be used to implement the device and / or practice the method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this device and / or practice this method.

[0038] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The drawings only show components related to the present application rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0039] Additionally, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the examples can be practiced without these specific details.

[0040] In view of this, the applicant conducted in-depth research and improvement exploration on the sample placement device and the sample box device, and found that: the current TEM photography samples can be prepared by FIB. The samples prepared by FIB are about 5-10μm long * 5-10μm wide, and 40-100nm thick. The sample is then glued to the Gride using the FIB machine. There are four Cu columns in the middle of a Gride, and the sample is mainly glued above or on the side of the Cu (copper) column.

[0041] Special equipment grid Figure 1 As shown, the equipment 9 for bonding the sample is as follows Figure 2 As shown in the figure, for example, the equipment for bonding the sample cut by the focused ion beam is the FIB Grid structure. The solid structure at the top of the copper column corresponding to the mark "4" is the sample cut by the FIB for TEM photography, that is, Figure 2 Medium solid block construction.

[0042] After the conventional samples are prepared by FIB, they are directly placed in the high-elastic membrane box. When taking TEM photos, they are directly taken out of the high-elastic membrane box and placed on the TEM sample rod for shooting. Since there are gaps around the inside of the high-elastic membrane box and the gride is not fixed in the membrane box, the sample is taken out of the gride with the FIB and transferred to the TEM machine for shooting. Due to the shaking of the box, the sample may hit the gaps around the membrane box or bounce onto the membrane box cover, causing the sample to bend or fall and unable to be photographed by TEM. In addition, the FIB Grid will also stick to the sticky small square box. When taking it out of the sticky small square grid, the FIB Grid may bend due to the stickiness inside the box, or the sample may stick to the box, which will cause the sample to bend or fall.

[0043] Based on this, the technical solutions provided by the embodiments of the present application are described below in conjunction with the accompanying drawings.

[0044] The embodiment of this specification provides a sample box device for holding a device for bonding samples, preferably a sample box device for holding a device for bonding focused ion beam cut samples, namely a FIB Grid sample box device, such as Figure 3 and Figure 4 As shown, the sample box body includes a support frame 1, a basket member 3, a first clamping member 4, a second clamping member 7 and a fixing member 8. The first clamping member 4 and the second clamping member 7 are detachably connected through the fixing member 8, and are configured such that a device 9 for clamping and bonding the sample is provided between the first clamping member 4 and the second clamping member 7;

[0045] The sample bonding device 9 is partially located between the first clamping member 4 and the second clamping member 7, and the sample on the sample bonding device 9 is located outside the first clamping member 4 and the second clamping member 7. The sample is configured so that it is completely suspended in the air and the first clamping member 4 and the second clamping member 7 do not interfere with the sample, that is, it is suspended in the air.

[0046] The equipment 9 for bonding samples includes an equipment body and a sample. The sample is bonded to the equipment body. The equipment body includes an equipment body part and a placement column. The placement column is fixed to the equipment body part, and the sample is bonded to the placement column. For example, the sample can be bonded to the side position of the placement column. Here, the placement column needs to be outside the first clamping member 4 and the second clamping member 7, that is, the placement column is completely or partially suspended, so that the sample is completely suspended and does not interfere with other components; for another example, the sample can be bonded to the top position of the placement column. If the thickness of the placement column is greater than the thickness of the equipment body part, the first clamping member 4 and the second clamping member 7 can clamp the thickness of the placement column. If the thickness of the equipment body part is still greater than the thickness of the placement column, the first clamping member 4 and the second clamping member 7 can also clamp the equipment body part; the placement column can be set to multiple on the equipment body part, and the placement column can be a copper column. The sample can be a focused ion beam cutting sample, and the equipment 9 for bonding samples can be a gride and a sample that need to be placed, for example, it can be an equipment for bonding focused ion beam cutting samples (FIB Grid).

[0047] The basket lifting member 3 is fixedly connected to the first clamping member 4, and the basket lifting member 3 is overlapped and fixed on the support frame 1, and is configured such that the first clamping member 4 and the second clamping member 7 connected by the fixing member 8 are overlapped and fixed on the support frame 1 through the basket lifting member 3, and the sample is in a suspended state. For example, the basket lifting member 3 is directly overlapped on the support frame 1, and the basket lifting member 3 is directly or indirectly fixed on the support frame 1. The handle of the basket lifting member 3 is located above the first clamping member 4 and the second clamping member 7.

[0048] like Figure 6 As shown in the figure, the sample cut by FIB is located at the solid part of the top of the copper column above the mark "4", that is, the solid part. After the Gride is placed, the sample is in a suspended state, thus ensuring that the sample cannot be touched and reducing the risk of the sample falling.

[0049] In one embodiment, if Figure 3 and Figure 4As shown, the first clamping member 4 is provided with a groove 6 for placing and limiting the equipment 9 for bonding samples, and the equipment 9 for bonding samples is partially located between the groove 6 and the second clamping member 7, and is configured so that the equipment 9 for bonding samples is partially clamped between the groove 6 and the second clamping member 7; the sample on the equipment 9 for bonding samples is located outside the groove 6 and the second clamping member 7, and is configured so that the sample is in a suspended state. The size of the groove 6 toward the second clamping member 7 is the maximum thickness of the clamped part of the equipment 9 for bonding samples. The groove 6 can also form a limiting channel for the equipment 9 for bonding samples. The equipment for bonding samples can abut against the bottom of the groove, that is, the end of the main part of the equipment away from the placement column abuts against the bottom of the groove.

[0050] In one embodiment, if Figure 3 and Figure 4 As shown, the groove 6 is consistent with the thickness of the clamped part of the equipment 9 for clamping and bonding the sample, and is configured so that the first clamping member 4 and the second clamping member 7 fit tightly together. For example, the dimension of the groove 6 toward the second clamping member 7 is consistent with the thickness of the main body of the equipment 9 for bonding the sample, and the first clamping member 4 and the second clamping member 7 fit tightly together.

[0051] In one embodiment, if Figure 3 and Figure 4 As shown, the device 9 for bonding samples is a device for bonding focused ion beam cut samples.

[0052] In one embodiment, if Figure 3 and Figure 4 As shown, the support frame 1 includes a plurality of support plates and a plurality of placement plates, and the placement plates are fixed on each support plate; the plurality of support plates are arranged oppositely, and the placement plates on the oppositely arranged support plates are arranged oppositely; the basket carrying member 3 is mounted on the oppositely arranged placement plates, that is, the placement plates are respectively located on opposite surfaces of the oppositely arranged support plates. For example, the support plates are arranged to be two oppositely arranged.

[0053] In one embodiment, if Figure 3 and Figure 4 As shown, the support plates are provided with fastening members 2 for fixing the basket lifting member 3, and the basket lifting member 3 is configured so that the basket lifting member 3 is detachably connected to the support plate through the fastening members 2. The fastening members 2 pass through the limiting part of the support plate, and the fastening members 2 are rotatable screws, and the fastening members 2 are threadedly connected to the support plate, and the two fastening members 2 are relatively fastened to the basket lifting member 3.

[0054] In one embodiment, if Figure 3 and Figure 4As shown, the support plate includes a support portion and a limiting portion for limiting the basket structure; and the limiting portion and the support portion are divided and arranged by the placement plate, that is, the cross-sectional shape of the support frame 1 can be a convex shape. For example, the limiting portion is located above the placement plate, the supporting portion is located below the placement plate, and the limiting surface of the limiting portion is the opposite surface of the limiting portion of the support plate that is arranged oppositely.

[0055] Specifically, the support plate is a rectangular structure of the outer periphery of the sample box, and a fastening member 2 is contained in the middle of the rectangular body. The fastening member 2 is a rotatable screw used to fix the basket lifting member 3. The basket lifting member 3 is a structure in which the basket lifting structure is fixed as an integral whole with the first clamping member 4. At the same time, a protruding rectangular step is set in the middle of the inner side wall of the rectangular support plate, which is the placement plate. The step is a three-sided structure. The side of the placement plate is the inner side of the support frame 1. The height of the rear support plate is set to half the vertical height of the basket lifting member 3. The placement surface of the bottom placement plate is set to be larger than the parallel width of the overlap surface of the basket lifting member 3. The step structure can ensure that the basket lifting member 3 can be leaned on this structure without falling, and also ensure that it is detachable.

[0056] In one embodiment, if Figure 3 and Figure 4 As shown, the fixing member 8 includes a fixing rod and a fixing block which are fixedly connected; the fixing rod passes through the second clamping member 7, and the fixing block is used to abut against the side wall of the second clamping member 7 away from the first clamping member 4, and the first clamping member 4 has a fixing hole 5, and the fixing rod is threadedly connected with the fixing hole 5. The fixing member 8 can be a rotatable screw, the fixing rod is the rod part of the rotatable screw, and the fixing block is the head of the rotatable screw. The fixing member 8 is located below the sample bonding device 9 installed on the sample box body.

[0057] The first clamping member 4 is a rectangular parallelepiped structure, and the fixing hole 5 is a rotating screw hole in the lower part of the first clamping member 4, so that the fixing member 8 can be screwed in and out, thereby fixing and removing the second clamping member 7. The groove 6 is the structure of the groove 6 above the first clamping member 4, and the second clamping member 7 is an independent rectangular parallelepiped structure. The fixing member 8 is a rotatable screw in the lower part of the second clamping member 7 that completely corresponds to the fixing hole 5.

[0058] In one embodiment, if Figure 4 and Figure 5 As shown, Figure 4 The interior of the sample box is highlighted in Figure 5 The sample box cover, i.e., the box cover 10, is shown in the figure; the sample box device also includes the box cover 10; the box cover 10 covers the sample box body. For example, the box cover 10 can be plugged into the support frame 1. The box cover 10 is the sample box cover. The reference numeral 11 is a position mark located next to the groove 6. For example Figure 5 A, B, C, D, E, F. The height of groove 6 is 300 μm lower than that of reference numeral 11.

[0059] In one embodiment, a plurality of first clamping members 4 are provided, a plurality of second clamping members 7 are provided, each first clamping member 4 corresponds to at least two second clamping members 7, and the second clamping members 7 are provided in one-to-one correspondence with the equipment 9 for bonding the sample. That is, the second clamping member 7, the groove 6, the fixing member 8, and the equipment 9 for bonding the sample are provided in one-to-one correspondence.

[0060] The first clamping member 4 is arranged in multiple rows, the placement plates are arranged in multiple rows, and at least two placement plates are arranged on each support plate. The first clamping member 4, the basket member 3, the placement plates on each support plate, and the fastening member 2 on each support plate are arranged in a one-to-one correspondence. Multiple rows of repeated structures can be set, and after one row of Gride is full, the next row can be installed. It is ensured that a box can store more Gride at the same time, and because the position where the sample is on the Gride remains suspended, there is almost no risk of touching the sample box, which better ensures that the sample will not fall during movement or storage, and can be stored for a long time.

[0061] The present application relates to a FIB Gride sample placement device, and more particularly to a sample box device for a Gride sample for TEM photography. The present application is a detachable FIB Gride sample box in which the sample position is completely suspended and can hold multiple Grides. The new sample box is a detachable device that prevents samples from falling, so that the Gride is suspended in the sample box where there are samples, reducing the risk of sample falling, which is conducive to solving the problem of samples falling due to collision with the sample box in the existing FIB Gride sample box.

[0062] When the equipment 9 for bonding samples is not placed, the first clamping member 4 and the second clamping member 7 are connected by the fixing member 8 but there is a gap in the middle. When installing, the equipment 9 for bonding samples is placed in the groove 6, and the fixing member 8 is rotated to make the first clamping member 4 and the second clamping member 7 fit tightly, ensuring that the equipment 9 for bonding samples is fixed in the groove 6. After the grid is placed, the first clamping member 4 and the second clamping member 7 can be moved as a whole by moving the basket member 3 to realize the detachable function, ensuring that it can be replaced at any time and conveniently placing the overall structure in the front row when installing the gride, so as to facilitate the rotation of the fixing member 8 for placement or removal operations. The sample box cover just covers the support frame 1, the basket member 3, the first clamping member 4, the second clamping member 7, and the equipment 9 for bonding samples in the box cover 10 to prevent the sample from being accidentally touched and damaged during the placement process. The role of the label 11 is to facilitate the distinction of each gride, so that different sample information can be distinguished. The label 11 can be set to letters or numbers. The FIB Grid sample box is a detachable sample box and can store multiple samples at the same time. The independent numbers 11 are easy to distinguish.

[0063] In this specification, the same or similar parts between the various embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the embodiments described later, the description is relatively simple, and the relevant parts can be referred to the partial description of the previous embodiments.

[0064] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A sample box device for holding a bonding sample, characterized in that: The sample box comprises a sample box body, wherein the sample box body comprises a support frame (1), a basket member (3), a first clamping member (4), a second clamping member (7) and a fixing member (8); The first clamping member (4) and the second clamping member (7) are detachably connected via a fixing member (8), and are configured such that a device (9) for clamping and bonding the sample is disposed between the first clamping member (4) and the second clamping member (7); The sample on the sample bonding device (9) is located outside the first clamping member (4) and the second clamping member (7), and is configured so that the sample is in a suspended state; The basket lifting member (3) and the first clamping member (4) are fixedly connected, and the basket lifting member (3) is overlapped and fixed on the support frame (1), and is configured such that the first clamping member (4) and the second clamping member (7) connected by the fixing member (8) are overlapped and fixed on the support frame (1) through the basket lifting member (3).

2. The sample box device for holding a bonding sample according to claim 1, characterized in that: The first clamping member (4) is provided with a groove (6) for placing a sample bonding device (9), and a portion of the sample bonding device (9) is located between the groove (6) and the second clamping member (7), and is configured such that a portion of the sample bonding device (9) is clamped between the groove (6) and the second clamping member (7); The sample on the sample bonding device (9) is located outside the groove (6) and the second clamping member (7), and is configured so that the sample is in a suspended state.

3. The sample box device for holding a bonding sample according to claim 2, characterized in that: The groove (6) has the same thickness as the clamped portion of the sample bonding device (9), and is configured so that the first clamping member (4) and the second clamping member (7) fit and clamp.

4. The sample box device for holding a bonding sample according to claim 3, characterized in that: The equipment (9) for bonding samples is an equipment for bonding focused ion beam cut samples.

5. The sample box device for holding a bonding sample according to claim 1, characterized in that: The support frame (1) comprises a plurality of support plates and a plurality of placement plates, and the placement plates are fixed on each of the support plates; The plurality of support plates are arranged opposite to each other, and the placement plates on the oppositely arranged support plates are arranged opposite to each other; The basket carrying member (3) is mounted on a placement plate which is arranged opposite to the basket carrying member.

6. The sample box device for holding a bonding sample according to claim 5, characterized in that: The support plates arranged opposite to each other are provided with fastening members (2) for fixing the basket carrying member (3), and are configured such that the basket carrying member (3) is detachably connected to the support plates via the fastening members (2).

7. The sample box device for holding a bonding sample according to claim 5, characterized in that: The support plate includes a support portion and a limiting portion for limiting the basket structure; and the limiting portion and the support portion are divided and arranged by the placement plate.

8. The sample box device for holding a bonding sample according to claim 1, characterized in that: The fixing member (8) comprises a fixing rod and a fixing block which are fixedly connected; The fixing rod passes through the second clamping member (7), the fixing block is used to abut against the side wall of the second clamping member (7) away from the first clamping member (4), and the first clamping member (4) has a fixing hole (5), and the fixing rod is threadedly connected to the fixing hole (5).

9. The sample box device for holding a bonding sample according to claim 1, characterized in that: The sample box device further comprises a box cover (10); the box cover (10) is arranged to cover the sample box body.

10. The sample box device for holding a bonding sample according to claim 1, characterized in that: The first clamping members (4) are arranged in plurality, the second clamping members (7) are arranged in plurality, each of the first clamping members (4) corresponds to at least two of the second clamping members (7), and the second clamping members (7) are arranged in one-to-one correspondence with the equipment (9) for bonding the sample.

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