Spray sealing structure for atomic layer deposition and atomic layer deposition equipment

Abstract

The utility model provides a spraying sealing structure for atomic layer deposition and atomic layer deposition equipment, and the spraying sealing structure for atomic layer deposition comprises an inner cavity door plate arranged on an outer cavity door plate; the spraying plate is arranged on the side, away from the outer cavity door plate, of the inner cavity door plate, a gap is formed between the spraying plate and the inner cavity door plate, and the spraying plate is provided with a first air inlet; the inner cavity flange sleeves the doorway of the inner cavity, the inner cavity flange is provided with a first abutting part abutting against the inner cavity door plate and a second abutting part used for abutting against the spraying plate, the outer side surface of the inner cavity flange is provided with a second air inlet, and the second abutting part is provided with an air outlet communicated with the second air inlet; when the inner cavity door plate abuts against the first abutting part, the spraying plate abuts against the second abutting part, and the air outlet communicates with the first air inlet in a butt joint mode. According to the spraying sealing structure for atomic layer deposition, the situation that powder is accumulated at the inner furnace door opening, so that the furnace door is not closed tightly, and the vacuum degree is abnormal can be avoided, and the equipment maintenance period interval is prolonged.

Description

Technical Field

[0001] The present application belongs to the technical field of atomic layer deposition, and more specifically, relates to a spray sealing structure for atomic layer deposition and an atomic layer deposition device. Background Art

[0002] In the photovoltaic atomic layer deposition coating process, in order to ensure process stability and uniform thickness of photovoltaic coating, a spray plate design is adopted. In production, alumina process powder will form on the surface of the spray plate after long-term use. The spray plate needs to be cleaned regularly. The traditional design uses the door panel and the spray plate as a whole. When the powder deposited on the door panel surface is too thick, the door panel and the inner furnace door will not be closed tightly, causing gas leakage into the outer chamber space, thereby increasing TMA gas loss and polluting the outer cavity. In severe cases, the cavity will not be able to reach the required vacuum degree, affecting the production or quality of the coating, resulting in a shortened periodic maintenance interval of the equipment and a loss of production capacity. Utility Model Content

[0003] The embodiment of the present application provides a spray sealing structure for atomic layer deposition, which can prevent the accumulation of powder at the inner furnace door, causing the furnace door to be loosely closed and the vacuum degree to be abnormal, thereby extending the equipment maintenance cycle interval.

[0004] The technical solution adopted in the embodiment of the present application is: to provide a spray sealing structure for atomic layer deposition, including:

[0005] An inner cavity door panel is arranged on the outer cavity door panel;

[0006] A spray plate is arranged on a side of the inner cavity door plate away from the outer cavity door plate, the spray plate is spaced apart from the inner cavity door plate, and the spray plate is provided with a first air inlet and a plurality of spray holes connected to the first air inlet;

[0007] An inner cavity flange is mounted on the door of the inner cavity body, the inner cavity flange is provided with a first abutting portion abutting against the inner cavity door plate and a second abutting portion for abutting against the spray plate, the outer surface of the inner cavity flange is provided with a second air inlet, and the second abutting portion is provided with an air outlet connected with the second air inlet;

[0008] Wherein, when the inner cavity door plate abuts against the first abutting portion, the spray plate abuts against the second abutting portion and the air outlet is butted and connected with the first air inlet.

[0009] Further, the first abutment portion has a continuous circle;

[0010] The inner side of the first abutting portion has an inner concave portion, the inner side of the inner concave portion is communicated with the inner circle of the inner cavity flange, and the second abutting portion is located on the inner wall of the inner concave portion.

[0011] Furthermore, the inner recess is rectangular.

[0012] Furthermore, it also includes an elastic rod assembly, the elastic rod assembly includes:

[0013] A rod body, one end of which is connected to the spray plate, and the other end of which is passed through the through hole of the inner cavity door panel;

[0014] The elastic member is sleeved on the rod body, moves to abut against the spray plate, and the other end abuts against the inner cavity door plate. The elastic member elastically pushes the spray plate away from the inner cavity door plate.

[0015] Furthermore, the elastic rod assembly also includes a limit stop ring, which is fixed to one end of the rod body passing through the through hole, and the outer diameter of the limit stop ring is greater than the inner diameter of the through hole.

[0016] Furthermore, the elastic rod assembly also includes a protective cover, which is located at an end of the inner cavity door plate away from the inner cavity flange, and the protective cover covers an end of the rod body passing through the inner cavity door plate.

[0017] Furthermore, a circle of step portions is provided at one end of the inner cavity flange away from the inner cavity door panel, and the step portions can be inserted into one end of the inner cavity body.

[0018] Furthermore, a circle of grooves is provided on the inner wall of the step portion surrounding the side wall of the inner cavity, the grooves are connected to the vacuum breaking air pipe, and a vacuum breaking hole is provided on the side wall of the inner cavity to connect the interior of the inner cavity with the grooves.

[0019] Furthermore, a sealing ring is included, and an embedding groove for installing the sealing ring is provided at one end of the inner cavity door panel facing the first abutting portion.

[0020] An embodiment of the present application also provides an atomic layer deposition device, including the atomic layer deposition spray sealing structure as described above.

[0021] The beneficial effect of the atomic layer deposition spray sealing structure provided by the embodiment of the present application is that: the atomic layer deposition spray sealing structure of the embodiment of the present application is provided with an inner cavity door plate and a spray plate, and the spray plate and the inner cavity door plate have a spacing, and when the inner cavity door plate abuts against the first abutting portion of the inner cavity flange, the inner cavity can be closed, and at this time, the spray plate abuts against the second abutting portion of the inner cavity door plate, and the external process gas source can be input from the second air inlet of the inner ring flange, and sprayed out from the spray hole of the spray plate after passing through the air outlet and the first air inlet. Since the spray plate and the inner cavity door plate have a spacing, even if leakage occurs at the air outlet and the first air inlet, since the inner cavity is still closed by the inner cavity door plate, the leaked gas is still in the inner cavity, and will not leak directly into the outer cavity, avoiding the accumulation of alumina reactants near the furnace door in the inner cavity, thereby causing abnormal vacuum degree of the vacuum cavity, reducing the probability of process gas leaking into the outer cavity, and lengthening the equipment maintenance cycle interval. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0023] Figure 1 A schematic diagram of the three-dimensional structure of the atomic layer deposition spray sealing structure provided in an embodiment of the present application after being installed on an atomic layer deposition device;

[0024] Figure 2 A side view of a spray seal structure for atomic layer deposition provided in an embodiment of the present application;

[0025] Figure 3 A rear view of the atomic layer deposition spray sealing structure provided in an embodiment of the present application;

[0026] Figure 4 A partial cross-sectional view of a spray seal structure for atomic layer deposition provided in an embodiment of the present application when viewed from above;

[0027] Figure 5 for Figure 4 Magnified view at A in the middle;

[0028] Figure 6 A schematic diagram of the three-dimensional structure of the inner cavity flange provided in an embodiment of the present application;

[0029] Figure 7 A schematic diagram of the three-dimensional structure of the inner cavity flange from another angle provided in an embodiment of the present application;

[0030] Figure 8A schematic diagram of the three-dimensional structure of the inner cavity door panel provided in an embodiment of the present application;

[0031] Fig. 9 A schematic diagram of the three-dimensional structure of the elastic rod assembly provided in an embodiment of the present application.

[0032] Among them, the reference numerals in the figure are:

[0033] 10. Inner door panel; 11. Through hole; 12. Sealing ring; 13. Embossed groove;

[0034] 20. Spray plate; 21. First air inlet; 22. Spray hole;

[0035] 30, inner cavity flange; 31, first abutment portion; 32, inner concave portion; 321, second abutment portion; 33, second air inlet; 34, air outlet; 35, step portion; 351, bottom surface; 352, side surface; 353, slot;

[0036] 40. elastic rod assembly; 41. rod body; 42. elastic member; 43. limit stop ring; 44. protective cover; 45. linear bearing;

[0037] 50. External cavity door panel;

[0038] 60. Inner cavity; 61. Vacuum breaking hole;

[0039] 70. External cavity. DETAILED DESCRIPTION

[0040] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0041] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0042] It should be understood that the orientation or position relationship indicated by terms such as "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0043] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0044] See also Figure 1 The atomic layer deposition spray sealing structure provided in the embodiment of the present application is now described. The atomic layer deposition spray sealing structure provided in the embodiment of the present application comprises an inner cavity door plate 10, a spray plate 20 and an inner cavity flange 30.

[0045] Among them, refer to Figure 1 , Figure 4 , the inner cavity door panel 10 is arranged on the outer cavity door panel 50. The atomic layer deposition device has an inner cavity 60 and an outer cavity 70, based on which the chamber in the atomic layer deposition device is divided into two layers, an inner layer and an outer layer. The inner cavity door panel 10 is used to cooperate with the inner cavity 60 to close the inner cavity 60, and the outer cavity door panel 50 is used to cooperate with the outer cavity 70 to close the outer cavity 70. In an embodiment of the present application, the inner cavity door panel 10 is arranged on the inner side of the outer cavity door panel 50. When the outer cavity door panel 50 closes the outer cavity 70, the inner cavity door panel 10 can also close the inner cavity 60, thereby forming two mutually separated inner and outer cavities. Specifically, the inner cavity door panel 10 can be installed on the outer cavity door panel 50 through a telescopic rod structure. When the outer cavity door panel 50 is closed, the inner cavity door panel 10 can be pushed toward the doorway of the inner cavity 60 through the telescopic rod structure, thereby firmly pressing the inner cavity door panel 10 against the doorway of the inner cavity 60, thereby closing the doorway of the inner cavity 60.

[0046] In the related art, the spray plate 20 and the inner cavity door plate 10 are integrated into one body. When leakage occurs, that is, the inner cavity door plate 10 leaks, and the leaked process gas will directly enter the outer cavity.

[0047] Reference Figure 2 and Figure 3In the embodiment of the present application, the spray plate 20 is arranged on the side of the inner cavity door plate 10 away from the outer cavity door plate 50, and there is a distance between the spray plate 20 and the inner cavity door plate 10. The spray plate 20 is provided with a first air inlet 21 and a plurality of spray holes 22 connected with the first air inlet 21. The spray plate 20 is used to spray uniform process gas into the inner cavity 60. These process gases enter the spray plate 20 from the first air inlet 21 and then spray into the inner cavity 60 from each spray hole 22. In the present embodiment, the spray plate 20 is separated from the inner cavity door plate 10, and there is a distance between the two. That is, when the inner cavity door plate 10 closes the inner cavity 60, the spray plate 20 is located in the inner cavity as a whole. Even if the spray plate 20 leaks, the leaked process gas is only in the inner cavity 60, and will not leak into the outer cavity 70.

[0048] Reference Figure 1 , Figure 4 and Figure 5 The inner cavity flange 30 is mounted on the door of the inner cavity body 60. The inner cavity flange 30 is provided with a first abutting portion 31 abutting against the inner cavity door plate 10 and a second abutting portion 321 for abutting against the spray plate 20. The outer surface of the inner cavity flange 30 is provided with a second air inlet 33. The second abutting portion 321 is provided with an air outlet 34 connected with the second air inlet 33. When the inner cavity door plate 10 abuts against the first abutting portion 31, the spray plate 20 abuts against the second abutting portion 321 and the air outlet 34 is connected with the first air inlet 21.

[0049] Reference Figure 5 The inner cavity flange 30 is installed at the door of the inner cavity body 60, and cooperates with the inner cavity door panel 10 to close the door of the inner cavity body 60. When the inner cavity door panel 10 is closed, the inner side of the inner cavity door panel 10 is tightly abutted with the first abutting portion 31 of the inner cavity flange 30 to seal, and at the same time, the second abutting portion 321 is abutted with the spray plate 20, and the gas outlet 34 is connected to the first gas inlet 21. The second gas inlet 33 of the inner cavity flange 30 can be connected to the process gas source, and the process gas is input from the second gas inlet 33, enters the first gas inlet 21 from the gas outlet 34, and finally sprayed out from the spray port. Since the inner cavity door panel 10 abuts against the first abutting portion 31, the inner cavity 60 has been closed. Even if leakage occurs at the joint between the air outlet 34 and the first air inlet 21 after the spray plate 20 abuts against the second abutting portion 321, it will only leak into the inner cavity 60 to participate in the reaction, and will not leak into the outer cavity 70. It will not cause the accumulation of alumina reactants in the inner cavity near the furnace door, thereby causing abnormal vacuum in the vacuum cavity, thereby reducing the probability of process gas leakage into the outer cavity 70 and extending the equipment maintenance cycle.

[0050] Reference Figure 6, the first abutting portion 31 has a continuous circle; the inner side of the first abutting portion 31 has an inner concave portion 32, the inner side of the inner concave portion 32 is connected to the inner circle of the inner cavity flange 30, and the second abutting portion 321 is located on the inner wall of the inner concave portion 32. That is, there is a spacing between the second abutting portion 321 and the first abutting portion 31, and the spacing is the inner concave depth of the inner concave portion 32. It can be understood that when the first abutting portion 31 abuts against the inner cavity door panel 10, the spray plate 20 needs to abut against the second abutting portion 321. Therefore, the spacing between the spray plate 20 and the inner cavity door panel 10 should be greater than or equal to the depth of the inner concave portion 32, so that the spray plate 20 and the second abutting portion 321 can be abutted and pressed after the inner cavity door panel 10 is closed.

[0051] Reference Figure 6 The inner concave portion 32 is rectangular and matches the edge shape of the shower plate 20, so that it can be stably abutted and tightly abutted with the shower plate 20. The shower plate 20 is specifically a rectangular plate, and two inner concave portions 32 are provided, which are provided on both the left and right sides of the inner side of the first abutting portion 31. After the shower plate 20 extends into the inner circle of the inner cavity flange 30, the left and right ends of the shower plate 20 just enter the left and right inner concave portions 32, so as to abut and press against the second abutting portion 321 in the inner concave portion 32.

[0052] Reference Figure 2 and Fig. 9 The atomic layer deposition spray sealing structure further includes an elastic rod assembly 40 , and the elastic rod assembly 40 includes a rod body 41 and an elastic member 42 .

[0053] One end of the rod 41 is connected to the spray plate 20, and the other end is passed through the through hole 11 of the inner door panel 10. The elastic member 42 is sleeved on the rod 41, moves to abut against the spray plate 20, and the other end abuts against the inner door panel 10, and the elastic member 42 elastically pushes the spray plate 20 away from the inner door panel 10.

[0054] Reference Figure 2 and Fig. 9In order to ensure that the spray plate 20 and the second abutting portion 321 can be closely abutted, thereby avoiding leakage at the air outlet 34 and the first air inlet 21, an elastic rod assembly 40 is provided to connect the inner cavity door panel 10 with the spray plate 20, so that after the inner cavity door panel 10 closes the inner cavity 60, the spray plate 20 is tightly abutted against the second abutting portion 321 by the elastic force of the elastic member 42. It can be understood that when the spray plate 20 is located in contact with the second abutting portion 321, the elastic rod assembly 40 supports the distance between the spray plate 20 and the inner cavity door panel 10 to be greater than the distance between the first abutting portion 31 and the second abutting portion 321. Therefore, when closing the door, the second abutting portion 321 first abuts against the spray plate 20 and compresses the elastic member 42, and is completely closed after the first abutting portion 31 contacts the inner cavity door panel 10, and the spray plate 20 is already closely abutted against the second abutting portion 321 under the elastic force of the elastic member 42. Specifically, the elastic member 42 may be a compression spring, and one end of the rod body 41 may be fixed to the spray plate 20 by screw connection. The elastic rod assembly 40 may be provided in multiple groups, such as three groups, four groups or even more groups, as long as it can be ensured that after the spray plate 20 abuts against the second abutting portion 321, the spray plate 20 can stably compress the elastic member 42.

[0055] Reference Fig. 9 In order to make the rod body 41 pass through the inner cavity door panel 10 more smoothly, a linear bearing 45 can be set on the through hole 11 of the inner cavity door panel 10, and the rod body 41 passes through the linear bearing 45.

[0056] Reference Fig. 9 The elastic rod assembly 40 further includes a stop ring 43, which is fixed to one end of the rod body 41 passing through the through hole 11, and the outer diameter of the stop ring 43 is greater than the inner diameter of the through hole 11. The stop ring 43 is used to prevent the spray plate 20 and the rod body 41 from completely separating from the inner door panel 10 after the inner door panel 10 is opened.

[0057] Reference Figure 2 and Figure 5 The elastic rod assembly 40 further includes a protective cover 44, which is located at one end of the inner cavity door plate 10 away from the inner cavity flange 30, and the protective cover 44 covers the end of the rod body 41 passing through the inner cavity door plate 10. The protective cover 44 covers the rod body 41 to prevent the process gas in the inner cavity from leaking from the through hole 11 of the inner cavity door plate 10 to the outer cavity.

[0058] Furthermore, a circle of step portion 35 is provided at one end of the inner cavity flange 30 away from the inner cavity door panel 10, and the step portion 35 can be inserted into one end of the inner cavity body 60. Specifically, the step portion 35 includes a bottom surface 351 and a side surface 352, the bottom surface 351 and the side surface 352 are perpendicular to each other, and the bottom surface 351 is on the inner side of the side surface 352. During installation, the step portion 35 can be fitted onto one end of the inner cavity body 60, the end surface of the inner cavity body 60 abuts against the bottom surface 351 of the step portion 35, and the side surface 352 of the step portion 35 can limit the inner cavity body 60. Specifically, after the inner cavity body 60 is inserted into the step portion 35, it is welded and fixed to the step portion 35 to avoid leakage caused by gaps. Preferably, argon arc welding is used to weld and fix the inner cavity body 60 to the step portion 35.

[0059] Reference Figure 5 and Figure 7 , a circle of grooves 353 is provided on the inner wall of the step portion 35 around the side wall of the inner cavity 60, and the grooves 353 are connected to the vacuum breaking air pipe (not shown in the figure), and a vacuum breaking hole 61 is provided on the side wall of the inner cavity 60 to connect the inner cavity with the groove. Due to the continuous vacuuming in the inner cavity and the consumption of process gas in the inner cavity during the reaction, the inner cavity is in a vacuum or low-pressure state. After the reaction is completed, the inner cavity door panel needs to be opened to take out the internal product, and the vacuum state of the inner cavity needs to be broken first. Therefore, in an embodiment of the present application, a groove 353 is provided on the inner cavity flange, and the groove 353 cooperates with the side wall of the inner cavity 60 to form an airway, which is connected to an external gas source through a vacuum breaking air pipe, and the gas source inputs gas through the airway, and the gas enters the inner cavity from the vacuum breaking hole 61, breaking the vacuum state of the inner cavity, and facilitating the opening of the inner cavity door panel. Specifically, the vacuum breaking air pipe can be set at the bottom of the inner cavity flange.

[0060] Reference Figure 5 and Figure 8 The spray sealing structure of atomic layer deposition also includes a sealing ring 12, and one end of the inner cavity door plate 10 facing the first abutting portion 31 is provided with a groove 13 for installing the sealing ring 12. The sealing ring 12 seals the abutment between the inner cavity door plate 10 and the first abutting portion 31 to prevent the process gas in the inner cavity from leaking into the outer cavity from the connection.

[0061] An embodiment of the present application also provides an atomic layer deposition device, including the atomic layer deposition spray sealing structure in any of the above embodiments.

[0062] The atomic layer deposition device of the embodiment of the present application includes the spray sealing structure for atomic layer deposition in any of the above embodiments, and therefore has the beneficial effects brought by the spray sealing structure for atomic layer deposition in any of the above embodiments, which will not be elaborated here.

[0063] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A spray seal structure for atomic layer deposition, characterized in that: include: An inner cavity door panel is arranged on the outer cavity door panel; A spray plate is arranged on a side of the inner cavity door plate away from the outer cavity door plate, the spray plate is spaced apart from the inner cavity door plate, and the spray plate is provided with a first air inlet and a plurality of spray holes connected to the first air inlet; An inner cavity flange is mounted on the door of the inner cavity body, the inner cavity flange is provided with a first abutting portion abutting against the inner cavity door plate and a second abutting portion for abutting against the spray plate, the outer surface of the inner cavity flange is provided with a second air inlet, and the second abutting portion is provided with an air outlet connected with the second air inlet; Wherein, when the inner cavity door plate abuts against the first abutting portion, the spray plate abuts against the second abutting portion and the air outlet is butted and connected with the first air inlet.

2. The atomic layer deposition spray sealing structure according to claim 1, characterized in that: The first abutment portion has a continuous circle; The inner side of the first abutting portion has an inner concave portion, the inner side of the inner concave portion is communicated with the inner circle of the inner cavity flange, and the second abutting portion is located on the inner wall of the inner concave portion.

3. The atomic layer deposition spray sealing structure according to claim 2, characterized in that: The inner concave portion is rectangular in shape.

4. The atomic layer deposition spray sealing structure according to claim 1, characterized in that: Also included is an elastic rod assembly, the elastic rod assembly comprising: A rod body, one end of which is connected to the spray plate, and the other end of which is passed through the through hole of the inner cavity door panel; The elastic member is sleeved on the rod body, moves to abut against the spray plate, and the other end abuts against the inner cavity door plate. The elastic member elastically pushes the spray plate away from the inner cavity door plate.

5. The atomic layer deposition spray sealing structure according to claim 4, characterized in that: The elastic rod assembly also includes a limit stop ring, which is fixed to one end of the rod body passing through the through hole, and the outer diameter of the limit stop ring is greater than the inner diameter of the through hole.

6. The atomic layer deposition spray sealing structure according to claim 5, characterized in that: The elastic rod assembly also includes a protective cover, which is located at one end of the inner cavity door plate away from the inner cavity flange, and the protective cover covers one end of the rod body passing through the inner cavity door plate.

7. The atomic layer deposition spray sealing structure according to claim 1, characterized in that: A circle of step portion is provided at one end of the inner cavity flange away from the inner cavity door plate, and the step portion can be inserted into one end of the inner cavity body.

8. The atomic layer deposition spray seal structure according to claim 7, characterized in that: A circle of grooves is arranged on the inner wall of the step portion around the side wall of the inner cavity, the grooves are connected to the vacuum breaking air pipe, and a vacuum breaking hole is arranged on the side wall of the inner cavity to connect the inside of the inner cavity with the grooves.

9. The atomic layer deposition spray sealing structure according to claim 1, characterized in that: It also includes a sealing ring, and an embedding groove for installing the sealing ring is provided at one end of the inner cavity door panel facing the first abutting portion.

10. An atomic layer deposition device, characterized in that: A spray seal structure comprising the atomic layer deposition as claimed in any one of claims 1 to 9.

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