Quartz tube annealing positioning device

Abstract

The utility model relates to the technical field of semiconductor growth, and discloses a quartz tube annealing positioning device which comprises two coaxial assemblies arranged oppositely and a sliding rail connected with the two coaxial assemblies, and the two coaxial assemblies can slide face to face or back to back along the sliding rail; the coaxial assembly comprises an annular stress frame which is used for being embedded in a hearth of the annealing furnace and is coaxial with the hearth, two first elastic pieces and a second elastic piece are arranged on the inner wall of the stress frame at intervals, and the second elastic piece is located between the two first elastic pieces. The first elastic piece and the second elastic piece are connected through a force guide rod; the coaxial assembly further comprises an arc-shaped limiting rod, the two ends of the limiting rod are adjustably connected with the two first elastic parts respectively, and the side wall of the middle of the limiting rod abuts against the second elastic parts. According to the utility model, the measurement precision of the quartz tube can be ensured, the dosage of arsenic added into the quartz tube is ensured to be accurate, and the product quality is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor growth, in particular to a quartz tube annealing positioning device. Background Art

[0002] During the manufacturing process, gallium arsenide products need to be annealed. The annealing process is to first place the wafer in a quartz boat, then place the quartz boat in a quartz tube, and then install the quartz tube in the hearth of the annealing furnace. During annealing, a certain arsenic gas pressure is required in the quartz tube, so a tape measure is needed to measure the tube length, and then the arsenic content of the corresponding volume is calculated based on the tube length and placed at the bottom of the quartz tube. In addition, the quartz boat and high-purity arsenic also need to be kept at a certain distance, which also needs to be measured.

[0003] To ensure measurement accuracy, it is necessary to ensure that the quartz tube and the annealing furnace are coaxial. However, due to the different specifications of the quartz tubes used for different products, and the diameter of the annealing furnace hearth remains unchanged, it is difficult to ensure that the quartz tube and the annealing furnace hearth are completely coaxial during the installation of the quartz tube, which affects the subsequent measurement accuracy, resulting in inaccurate arsenic dosage and affecting product quality. Utility Model Content

[0004] In order to solve the above technical problems, the utility model provides a quartz tube annealing positioning device to ensure that the quartz tube is coaxial with the annealing furnace hearth, ensure that the amount of arsenic added to the quartz tube is accurate, and ensure product quality.

[0005] The technical solution adopted by the utility model to solve its technical problems is:

[0006] A quartz tube annealing positioning device comprises two coaxial components arranged opposite to each other and a slide rail connecting the two coaxial components, wherein the two coaxial components can slide toward or away from each other along the slide rail;

[0007] The coaxial component includes an annular force-bearing frame for being embedded in the furnace of the annealing furnace and being coaxial with the furnace. The inner wall of the force-bearing frame is provided with two first elastic members and one second elastic member at intervals, and the second elastic member is located between the two first elastic members, and the first elastic member and the second elastic member are connected by a force guiding rod; the coaxial component also includes an arc-shaped limiting rod, and the two ends of the limiting rod are respectively adjustably connected to the two first elastic members, and the side wall of the middle part of the limiting rod abuts against the second elastic member.

[0008] Preferably, there are multiple limiting rods, the radii of the multiple limiting rods are different, and any one of the limiting rods is connected between two of the first elastic members.

[0009] Preferably, a shift rod is provided on the outer wall of the first elastic member, and a plurality of fixing holes are provided at both ends of the limit rod, and the plurality of fixing holes are arranged along the length direction of the limit rod, and each of the shift rods is connected to any one of the plurality of fixing holes at its corresponding end.

[0010] Preferably, two abutment seats are provided on the inner wall of the force-bearing frame, the two abutment seats correspond to the two first elastic members one by one, and one end of the first elastic member away from the second elastic member abuts against the abutment seat.

[0011] Preferably, the first elastic member is in a rhombus shape, a group of diagonal corners of the rhombus are respectively connected to the inner wall of the force-bearing frame and the limiting rod, and another group of diagonal corners of the rhombus are respectively connected to the abutment seat and the force guiding rod.

[0012] Preferably, the second elastic member is in a rhombus shape, a first set of diagonal portions of the rhombus are respectively connected to the limit rod and the inner wall of the force-bearing frame, and a second set of diagonal portions of the rhombus are respectively connected to the force-guiding rod;

[0013] A return spring is arranged inside the second elastic member, and two ends of the return spring are respectively connected to the first set of diagonal corners.

[0014] Preferably, a fixing frame is connected between the slide rails, and the fixing frame is located between the two coaxial components. A through hole for the quartz tube to pass through is provided in the middle of the fixing frame.

[0015] Preferably, an auxiliary bracket is connected between the two limiting rods, and the auxiliary bracket passes through the through hole.

[0016] Compared with the prior art, the quartz tube annealing positioning device of the utility model embodiment has the beneficial effect that: by arranging two coaxial components that can slide toward or away from each other on the slide rail, the relative positions of the two coaxial components are first adjusted according to the size of the quartz tube when installing the quartz tube, and then the force-bearing frames of the two coaxial components are embedded in the furnace of the annealing furnace, and then the quartz tube is installed on the two coaxial components, the quartz tube compresses the second elastic member, and at the same time adjusts the corresponding deformation of the first elastic member, and then the corresponding position of the limit rod is connected to the first elastic member, so that the quartz tube and the inner wall of the limit rod are fitted, the quartz tube and the furnace of the annealing furnace can be completely coaxial, the measurement accuracy of the quartz tube can be guaranteed, so as to ensure the accuracy of the amount of arsenic added to the quartz tube and the quality of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the quartz tube annealing positioning device of the utility model.

[0018] Figure 2 It is a structural schematic diagram of the coaxial component of the utility model.

[0019] Among them: 1-coaxial assembly, 11-force frame, 12-first elastic member, 13-second elastic member, 14-force guiding rod, 15-limiting rod, 16-gear rod, 17-abutment seat, 18-reset spring, 2-slide rail, 3-fixed frame, 4-auxiliary bracket, 5-quartz tube. DETAILED DESCRIPTION

[0020] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0021] like Figure 1-2 As shown, a quartz tube annealing positioning device of a preferred embodiment of the utility model comprises two coaxial components 1 arranged opposite to each other and a slide rail 2 connecting the two coaxial components 1, and the two coaxial components 1 can slide toward or away from each other along the slide rail 2; the coaxial component 1 comprises an annular force-bearing frame 11 for being embedded in the furnace of the annealing furnace and being coaxial with the furnace, and the inner wall of the force-bearing frame 11 is provided with two first elastic members 12 and a second elastic member 13 at intervals, and the second elastic member 13 is located between the two first elastic members 12, and the first elastic member 12 and the second elastic member 13 are connected by a force guide rod 14; the coaxial component 1 also comprises an arc-shaped limiting rod 15, and the two ends of the limiting rod 15 are respectively adjustably connected to the two first elastic members 12, and the side wall of the middle part of the limiting rod 15 abuts against the second elastic member 13.

[0022] The quartz tube annealing positioning device based on the above characteristics is provided with two coaxial components 1 that can slide toward or away from each other on the slide rail 2. When installing the quartz tube 5, the relative positions of the two coaxial components 1 are first adjusted according to the size of the quartz tube 5, and then the force-bearing frames 11 of the two coaxial components 1 are embedded in the furnace of the annealing furnace, and then the quartz tube 5 is installed on the two coaxial components 1. The quartz tube 5 compresses the second elastic member 13, and at the same time adjusts the corresponding deformation of the first elastic member 12, and then the corresponding position of the limit rod 15 is connected to the first elastic member 12, so that the quartz tube 5 fits with the inner wall of the limit rod 15, so that the quartz tube 5 and the furnace of the annealing furnace can be completely coaxial, which can ensure the measurement accuracy of the quartz tube, thereby ensuring the accuracy of the amount of arsenic added to the quartz tube 5 and ensuring the quality of the product.

[0023] In this embodiment, there are multiple limiting rods 15, and the radii of the multiple limiting rods 15 are different. Any one of the limiting rods 15 is connected between the two first elastic members 12, so that the corresponding limiting rod 15 can be selected according to the different specifications of the quartz tubes 5. At the same time, the limiting rod 15 is elastic, and when connecting, the corresponding limiting rod 15 is first selected, and then the corresponding position on the limiting rod 15 is connected to the first elastic member 12 according to the quartz tube 5.

[0024] Specifically, a lever 16 is provided on the outer wall of the first elastic member 12, and a plurality of fixing holes are provided at both ends of the limiting rod 15, and the plurality of fixing holes are arranged along the length direction of the limiting rod 15, and each of the levers 15 is connected to any one of the plurality of fixing holes at one end corresponding to it. That is, when connecting, the lever 15 can be connected by selecting the corresponding fixing hole, which is simple and convenient to operate.

[0025] Since the first elastic member 12 and the second elastic member 13, namely the limiting rod 15, are elastic and adjustable, and the positioning and installation of the quartz tube 5 of any specification can be achieved by combining the multiple specifications of the limiting rod 15 and the cooperation of the multiple fixing holes.

[0026] In this embodiment, the inner wall of the force-bearing frame 11 is provided with two abutment seats 17, the two first elastic members 12 correspond to the two abutment seats 17 one by one, and one end of the first elastic member 12 away from the second elastic member 13 abuts against the abutment seat 17. By abutting against the abutment seat 17, the free adjustment of the abutment seat 17 can be achieved. Specifically, the first elastic member 12 is a rhombus, and one set of diagonal angles of the rhombus are respectively connected to the inner wall of the force-bearing frame 11 and the limit rod 15, and the other set of diagonal angles of the rhombus are respectively connected to the abutment seat 17 and the force guiding rod 14, that is, the two sides of one corner constituting the abutment between the first elastic member 12 and the abutment seat 17 can slide along the abutment seat 17, so as to facilitate the adjustment of the first elastic member 12.

[0027] In this embodiment, the second elastic member 13 is also in a rhombus shape, and the first group of diagonals of the rhombus are respectively connected to the limit rod 15 and the inner wall of the force frame 11, and the second group of diagonals of the rhombus are respectively connected to the force guide rod 14; a reset spring 18 is provided inside the second elastic member 13, and the two ends of the reset spring 18 are respectively connected to the first group of diagonals, that is, the reset spring 18 is arranged on a diagonal line of the rhombus. By providing the reset spring 18, the second elastic member 13 can be reset when the quartz tube 5 is taken out.

[0028] The first elastic member 12 and the second elastic member 13 are both rhombus-shaped and are made of elastic rods.

[0029] In this embodiment, in order to ensure the overall stability of the quartz tube annealing positioning device, a fixing frame 3 is connected between the slide rails 2, and the fixing frame 3 is located between the two coaxial components 1. A through hole for the quartz tube 5 to pass through is provided in the middle of the fixing frame 3. At the same time, in order to facilitate the installation of the quartz tube 5 between the two coaxial components 1, an auxiliary bracket 4 is connected between the two limiting rods 15, and the auxiliary bracket 4 passes through the through hole. During installation, the quartz tube 5 can be placed on the auxiliary bracket 4 and pushed forward to achieve installation, which is convenient for the assembly and removal of the quartz tube 5.

[0030] The method of using the quartz tube annealing positioning device of the utility model is:

[0031] The device is placed in the furnace of the furnace body and kept fully engaged with the furnace. The quartz tube 5 is pushed along the auxiliary bracket 4 and placed on the front and rear coaxial components 1. When the quartz tube annealing device is subjected to pressure from quartz tubes 5 of different sizes, the second elastic member 13 will deform accordingly according to the weight of the quartz tube 5. Then, the deformation amount of the first elastic member 12 is adjusted according to the size of the quartz tube 5 to be placed. The corresponding fixing hole is selected on the limit rod 15, and the gear rod 16 is inserted into the corresponding fixing hole to complete the fixing effect. Finally, the quartz tube 5 is abutted against the limit rod 15, so that the quartz tube 5 can be kept coaxial with the furnace of the furnace body at all times.

[0032] When the quartz tube 5 is taken out along the auxiliary bracket 4, the force on the second elastic member 13 is reduced, and the first elastic member 12 and the second elastic member 13 are restored to their original positions under the elastic force of the reset spring 18, and the shift rod 16 is pulled out of the fixing hole during the deformation of the first elastic member 12 to facilitate the next use.

[0033] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A quartz tube annealing positioning device, characterized in that: It comprises two coaxial components arranged opposite to each other and a slide rail connecting the two coaxial components, and the two coaxial components can slide toward or away from each other along the slide rail; The coaxial component includes an annular force-bearing frame for being embedded in the furnace of the annealing furnace and being coaxial with the furnace. The inner wall of the force-bearing frame is provided with two first elastic members and one second elastic member at intervals, and the second elastic member is located between the two first elastic members, and the first elastic member and the second elastic member are connected by a force guiding rod; the coaxial component also includes an arc-shaped limiting rod, and the two ends of the limiting rod are respectively adjustably connected to the two first elastic members, and the side wall of the middle part of the limiting rod abuts against the second elastic member.

2. The quartz tube annealing positioning device according to claim 1, characterized in that: There are multiple limiting rods, and the radii of the multiple limiting rods are different. Any one of the limiting rods is connected between two of the first elastic members.

3. The quartz tube annealing positioning device according to claim 1 or 2, characterized in that: A shift rod is provided on the outer wall of the first elastic member, and a plurality of fixing holes are provided at both ends of the limit rod. The plurality of fixing holes are arranged along the length direction of the limit rod, and each of the shift rods is connected to any one of the plurality of fixing holes at one end corresponding to it.

4. The quartz tube annealing positioning device according to claim 1, characterized in that: The inner wall of the force-bearing frame is provided with two abutting seats, the two abutting seats correspond to the two first elastic members one by one, and one end of the first elastic member away from the second elastic member abuts against the abutting seat.

5. The quartz tube annealing positioning device according to claim 4, characterized in that: The first elastic member is in the shape of a rhombus, one set of diagonals of the rhombus is respectively connected to the inner wall of the force-bearing frame and the limiting rod, and the other set of diagonals of the rhombus is respectively connected to the abutting seat and the force-guiding rod.

6. The quartz tube annealing positioning device according to claim 1, characterized in that: The second elastic member is in a rhombus shape, a first group of diagonal corners of the rhombus are respectively connected to the limit rod and the inner wall of the force-bearing frame, and a second group of diagonal corners of the rhombus are respectively connected to the force-guiding rod; A return spring is arranged inside the second elastic member, and two ends of the return spring are respectively connected to the first set of diagonal corners.

7. The quartz tube annealing positioning device according to claim 1, characterized in that: A fixing frame is connected between the slide rails and is located between the two coaxial components. A through hole for the quartz tube to pass through is provided in the middle of the fixing frame.

8. The quartz tube annealing positioning device according to claim 7, characterized in that: An auxiliary bracket is connected between the two limiting rods, and the auxiliary bracket passes through the through hole.

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