Continuous metal film thickness measuring mechanism

By designing a continuous metal film thickness measurement mechanism including a fixed rotor, a moving rotor and a moving mechanism, the problems of vibration and shaking when measuring thickness of the metal film are solved, and higher measurement accuracy and equipment stability are achieved.

CN222635405UActive Publication Date: 2025-03-18SHENYANG PUHE VACUUM ELECTRONICS EQUIP
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Patent Information

Application Number
CN202420716539.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-04-09
Publication Date
2025-03-18
Estimated Expiration
2034-04-09

AI Technical Summary

Technical Problem

Continuous metal films are prone to vibration and shaking when measuring thickness, resulting in inaccurate measurement and damage to the equipment.

Method used

A continuous metal film thickness measurement mechanism is designed, including a base, an auxiliary measuring assembly and a moving mechanism. The auxiliary measurement components use a fixed rotor and a movable rotor, which can achieve clamping and transmission of the workpiece to be measured through silicone material to reduce vibration; the moving mechanism includes a cantilever, a rotating shaft and a drive slider to realize the adaptive lifting of the eddy current probe and the stable position adjustment of the measuring head.

Benefits of technology

Through the coordination of the fixed rotor, the movable rotor and the limiting plate, the uniformity and smoothness of the workpiece to be measured during the transmission process is ensured, vibration and shaking are reduced, and measurement continuity and accuracy are improved. The cantilever and moving mechanism arrangement enables precise control of the position of the measuring head, improving the rapid accuracy of measurement and the versatility of the equipment.

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Abstract

The utility model discloses a continuous metal film thickness measuring mechanism, which relates to the technical field of metal films and comprises a base, an auxiliary measuring component and a moving mechanism, the auxiliary measuring component is fixedly mounted at the top of the base, and the moving mechanism is fixedly mounted at the bottom of the base. The auxiliary measuring assembly comprises a bearing table, a mounting frame, a fixed rotating wheel, a moving rod, a movable rotating wheel and an adjusting rod, the bearing table is fixedly mounted at the top of the base, the mounting frame is fixedly mounted on the left side of the top of the bearing table, the fixed rotating wheel is fixedly mounted in an inner cavity of the mounting frame, and the movable rotating wheel is movably mounted at the top of the fixed rotating wheel. According to the continuous metal film thickness measuring mechanism, through the arrangement of the fixed rotating wheel and the movable rotating wheel, the workpiece to be measured can be clamped and conveyed in an auxiliary mode, it is ensured that the workpiece to be measured is more uniform and smoother in the conveying process, and the abnormal conditions such as wrinkles and fractures are avoided, so that the continuity and integrity of measurement are ensured, and better stability is conveniently provided.
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Description

Technical Field

[0001] The utility model belongs to the technical field of metal films, and in particular relates to a continuous metal film thickness measuring mechanism. Background Art

[0002] Metal film is a new type of metal-ceramic composite inorganic membrane successfully developed by the United States in the 1990s with porous stainless steel as the matrix and TiO2 ceramic as the membrane material. It has good plasticity, toughness and strength, as well as adaptability to the environment and materials. It is one of the best performing membrane materials after organic membrane and ceramic membrane. There are two key technologies in the preparation process of metal film - the preparation of the matrix and the preparation of the ceramic membrane layer. The metal matrix is ​​achieved by powder metallurgy technology, and the ceramic membrane layer is completed by the sol-gel method of wet chemical method.

[0003] At present, when measuring the thickness of continuous metal films, vibration and shaking are prone to occur, which not only causes the metal film to be easily damaged and the measurement to be interrupted, but also greatly reduces the accuracy of the measurement. Utility Model Content

[0004] The technical problem to be solved by the utility model is that when the thickness of a continuous metal film is measured, vibration and shaking are likely to occur.

[0005] The technical solution adopted by the utility model to solve its technical problems is: a continuous metal film thickness measuring mechanism, including a base, an auxiliary measuring component and a moving mechanism, the top of the base is fixedly installed with the auxiliary measuring component, the bottom of the base is fixedly installed with the moving mechanism, the auxiliary measuring component includes a bearing platform, a mounting frame, a fixed rotating wheel, a moving rod, a moving rotating wheel and an adjusting rod, the bearing platform is fixedly installed on the top of the base, the mounting frame is fixedly installed on the left side of the top of the bearing platform, the fixed rotating wheel is fixedly installed in the inner cavity of the mounting frame, the moving rotating wheel is movably installed on the top of the fixed rotating wheel, the moving rod is fixedly installed in the inner cavity of the moving rotating wheel, the adjusting rod is movably installed on the front side of the moving rod, and the fixed rotating wheel and the moving rotating wheel are both made of silicone.

[0006] As a preferred embodiment of the utility model, a limit plate is movably installed on the right side of the top of the bearing platform, and a push rod is fixedly installed on the front side of the limit plate.

[0007] As a preferred embodiment of the present invention, a workpiece to be measured is movably mounted in the middle portion of the fixed rotating wheel and the movable rotating wheel, and a measuring head is fixedly mounted on the top of the workpiece to be measured.

[0008] As a preferred embodiment of the utility model, a throttle hole is opened at the bottom of the measuring head, an eddy current probe is fixedly installed on the top of the inner cavity of the throttle hole, and a cantilever is fixedly connected to the back of the measuring head.

[0009] As a preferred embodiment of the utility model, a rotating shaft is fixedly installed on the back side of the cantilever, an adjusting knob is fixedly installed on the right side of the rotating shaft, and a mounting seat is fixedly installed on the bottom of the rotating shaft.

[0010] As a preferred embodiment of the utility model, a driving slider is fixedly mounted on the bottom of the mounting seat, and a slide rail is movably mounted on the bottom of the driving slider.

[0011] As a preferred embodiment of the utility model, the moving mechanism includes a support frame, a telescopic column and moving wheels, the support frame is fixedly installed on the top of the base, the telescopic column is fixedly installed on the bottom of the support frame, and the moving wheels are fixedly installed on the bottom of the telescopic column.

[0012] The beneficial effects of the utility model are:

[0013] 1. This continuous metal film thickness measuring mechanism can clamp and assist in the transmission of the workpiece to be measured through the setting of the fixed rotating wheel and the movable rotating wheel, ensuring that the workpiece to be measured is more uniform and smooth during the transmission process, avoiding abnormal conditions such as wrinkles and breaks, thereby ensuring the continuity and integrity of the measurement, facilitating better stability, reducing the vibration and shaking of the workpiece to be measured during the transmission process, thereby improving the accuracy of the measurement. The setting of the silicone material can better protect the metal film from damage, while also ensuring the accuracy of the measurement.

[0014] 2. This kind of continuous metal film thickness measuring mechanism, through the setting of the cantilever, can realize the self-adaptation of the lifting height between the eddy current probe and the workpiece to be measured, avoid being affected by the mechanical movement accuracy of the measuring mechanism, stabilize the lifting height within a smaller range, and realize rapid and accurate measurement of the thickness of the continuous metal film. Through the setting of the moving mechanism, it is convenient to adjust and move the position of the measuring mechanism to put it in the best measuring state, reduce errors in the measurement process, improve measurement accuracy, and improve the versatility of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure provided by an embodiment of the utility model;

[0016] Figure 2 It is a schematic diagram of the structure of the auxiliary measurement component provided by an embodiment of the utility model;

[0017] Figure 3 It is an exploded view of a local structure provided by an embodiment of the utility model;

[0018] Figure 4 It is a cross-sectional view of the measuring head structure provided by an embodiment of the utility model;

[0019] Figure 5 It is a schematic diagram of the structure of the moving mechanism provided by an embodiment of the utility model.

[0020] Explanation of marks in the figure: 1. Base; 2. Auxiliary measuring component; 201. Carrying platform; 202. Mounting frame; 203. Fixed rotating wheel; 204. Moving rod; 205. Moving rotating wheel; 206. Adjusting rod; 207. Limiting plate; 208. Push rod; 3. Moving mechanism; 301. Support frame; 302. Telescopic column; 303. Moving wheel; 4. Workpiece to be measured; 5. Measuring head; 6. Throttle hole; 7. Eddy current probe; 8. Cantilever; 9. Rotating axis; 10. Adjusting knob; 11. Mounting seat; 12. Driving slider; 13. Slide rail. DETAILED DESCRIPTION

[0021] The present invention will now be further described in detail in conjunction with the accompanying drawings and preferred embodiments. These drawings are simplified schematic diagrams that only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0022] like Figures 1 to 5 As shown, the utility model provides a continuous metal film thickness measuring mechanism, including a base 1, an auxiliary measuring component 2 and a moving mechanism 3. The auxiliary measuring component 2 is fixedly installed on the top of the base 1, and the moving mechanism 3 is fixedly installed on the bottom of the base 1. The auxiliary measuring component 2 includes a bearing platform 201, a mounting frame 202, a fixed rotating wheel 203, a moving rod 204, a moving rotating wheel 205 and an adjusting rod 206. The bearing platform 201 is fixedly installed on the top of the base 1, the mounting frame 202 is fixedly installed on the left side of the top of the bearing platform 201, the fixed rotating wheel 203 is fixedly installed in the inner cavity of the mounting frame 202, the moving rotating wheel 205 is movably installed on the top of the fixed rotating wheel 203, the moving rod 204 is fixedly installed in the inner cavity of the moving rotating wheel 205, and the adjusting rod 206 is movably installed on the front of the moving rod 204. The fixed rotating wheel 203 and the moving rotating wheel 205 are both made of silicone.

[0023] refer to Figure 1 , Figure 3 and Figure 4 A limit plate 207 is movably installed on the right side of the top of the supporting platform 201, a push rod 208 is fixedly installed on the front of the limit plate 207, a workpiece 4 to be measured is movably installed in the middle part of the fixed rotating wheel 203 and the movable rotating wheel 205, a measuring head 5 is fixedly installed on the top of the workpiece 4 to be measured, a throttle hole 6 is opened at the bottom of the measuring head 5, an eddy current probe 7 is fixedly installed on the top of the inner cavity of the throttle hole 6, and a cantilever 8 is fixedly connected to the back of the measuring head 5.

[0024] By adopting the above scheme: through the setting of the cantilever 8, the lifting height between the eddy current probe 7 and the workpiece 4 to be measured can be adaptively adjusted, avoiding the influence of the mechanical movement accuracy of the measuring mechanism, stabilizing the lifting height within a smaller range, and realizing rapid and accurate measurement of the thickness of the continuous metal film.

[0025] refer to Figure 1 , Figure 4 and Figure 5 A rotating shaft 9 is fixedly installed on the back of the cantilever 8, an adjusting knob 10 is fixedly installed on the right side of the rotating shaft 9, a mounting seat 11 is fixedly installed on the bottom of the rotating shaft 9, a driving slider 12 is fixedly installed on the bottom of the mounting seat 11, and a slide rail 13 is movably installed on the bottom of the driving slider 12. The moving mechanism 3 includes a support frame 301, a telescopic column 302 and a moving wheel 303. The support frame 301 is fixedly installed on the top of the base 1, the telescopic column 302 is fixedly installed on the bottom of the support frame 301, and the moving wheel 303 is fixedly installed on the bottom of the telescopic column 302.

[0026] The above scheme is adopted: through the setting of the moving mechanism 3, it is easy to adjust and move the position of the measuring mechanism to put it in the best measuring state, reduce the error in the measuring process, improve the measuring accuracy, and improve the versatility of the equipment.

[0027] Working principle:

[0028] When in use, the workpiece 4 to be measured is placed in the middle of the fixed rotating wheel 203 and the movable rotating wheel 205, and the height of the movable rotating wheel 205 is adjusted by the adjusting rod 206 so that the movable rotating wheel 205 lightly clamps the workpiece to be detected, and the workpiece to be detected 4 is pulled to the right side so that the limit plate 207 is limited on both sides of the workpiece to be measured 4 to avoid displacement during the measurement process, and then the position of the cantilever 8 is adjusted by the adjusting knob 10 so that the measuring head 5 is in a suitable position, and then the continuous metal film thickness of the workpiece to be measured can be detected.

[0029] In summary: this continuous metal film thickness measurement mechanism, through the coordinated use of the fixed rotating wheel 203, the movable rotating wheel 205 and the limit plate 207, solves the problem of vibration and shaking that is prone to occur when measuring the thickness of the continuous metal film. This not only makes the metal film easily damaged and the measurement interrupted, but also greatly reduces the accuracy of the measurement.

[0030] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device;

[0031] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents;

[0032] The above description only describes the specific implementation methods of the utility model. Various examples do not limit the essential content of the utility model. Ordinary technicians in the relevant technical field can modify or deform the specific implementation methods described above after reading the description without departing from the essence and scope of the utility model.

Claims

1. A continuous metal film thickness measurement mechanism, comprising a base (1), an auxiliary measurement component (2) and a moving mechanism (3), characterized in that: An auxiliary measuring component (2) is fixedly mounted on the top of the base (1), and a moving mechanism (3) is fixedly mounted on the bottom of the base (1). The auxiliary measuring component (2) comprises a bearing platform (201), a mounting frame (202), a fixed rotating wheel (203), a moving rod (204), a moving rotating wheel (205) and an adjusting rod (206). The bearing platform (201) is fixedly mounted on the top of the base (1), the mounting frame (202) is fixedly mounted on the left side of the top of the bearing platform (201), the fixed rotating wheel (203) is fixedly mounted in the inner cavity of the mounting frame (202), the moving rotating wheel (205) is movably mounted on the top of the fixed rotating wheel (203), the moving rod (204) is fixedly mounted in the inner cavity of the moving rotating wheel (205), and the adjusting rod (206) is movably mounted on the front of the moving rod (204). Both the fixed rotating wheel (203) and the moving rotating wheel (205) are made of silicone.

2. A continuous metal film thickness measuring mechanism according to claim 1, characterized in that: A limit plate (207) is movably mounted on the right side of the top of the bearing platform (201), and a push rod (208) is fixedly mounted on the front side of the limit plate (207).

3. A continuous metal film thickness measuring mechanism according to claim 1, characterized in that: A workpiece (4) to be measured is movably mounted in the middle of the fixed rotating wheel (203) and the movable rotating wheel (205), and a measuring head (5) is fixedly mounted on the top of the workpiece (4) to be measured.

4. A continuous metal film thickness measuring mechanism according to claim 3, characterized in that: A throttle hole (6) is provided at the bottom of the measuring head (5), an eddy current probe (7) is fixedly mounted on the top of the inner cavity of the throttle hole (6), and a cantilever (8) is fixedly connected to the back of the measuring head (5).

5. A continuous metal film thickness measuring mechanism according to claim 4, characterized in that: A rotating shaft (9) is fixedly mounted on the back of the cantilever (8), an adjusting knob (10) is fixedly mounted on the right side of the rotating shaft (9), and a mounting seat (11) is fixedly mounted on the bottom of the rotating shaft (9).

6. A continuous metal film thickness measuring mechanism according to claim 5, characterized in that: A driving slider (12) is fixedly mounted on the bottom of the mounting seat (11), and a slide rail (13) is movably mounted on the bottom of the driving slider (12).

7. A continuous metal film thickness measuring mechanism according to claim 1, characterized in that: The moving mechanism (3) comprises a support frame (301), a telescopic column (302) and a moving wheel (303); the support frame (301) is fixedly mounted on the top of the base (1); the telescopic column (302) is fixedly mounted on the bottom of the support frame (301); and the moving wheel (303) is fixedly mounted on the bottom of the telescopic column (302).