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Substrate processing apparatus and substrate processing method

A substrate processing apparatus 8 for feeding a processing liquid and processing a substrate W with the processing liquid comprises holding member 22 for holding the substrate W, and a lower side member 42 which is moved relatively with respect to the back surface of the substrate W held by the holding member 22 between a processing position A near the substrate undersurface and a retreat position B remote from the substrate undersurface. The processing liquid is fed between a gap between the lower side member 42 moved to the processing position A and the back surface of the substrate held by the holding member 22, and the substrate undersurface is processed. A cleaning processing unit 221a as one embodiment of the liquid processing apparatus comprises a spin chuck 22 for holding a wafer W substantially horizontally, a stage 224 substantially horizontally below the wafer W held by the spin chuck 223, and a cleaning liquid discharge openings 241 for feeding a required cleaning liquid into a gap between the wafer W held by the spin chuck 223 and the stage 224. The stage 224 has the surface coated with a hydrophobic polymer so that the surface has wetting which allows a contact angle of the cleaning liquid to be above 50E. A layer of the cleaning liquid is formed in the gap between the wafer W held by the spin chuck 223 and the stage 224 to subject the wafer W to the liquid processing.
Owner:TOKYO ELECTRON LTD

Air-permeable tongue for shoes, comprising a rigid yet flexible tongue part

The invention relates to an air-permeable tongue for shoes (1) which adapts to an individual instep and can be connected to shoes, the tongue comprising the following: a flexible yet rigid tongue part (1), which substantially represents the outwardly facing upper face of the tongue and which has an elongate tongue shape having a proximal end (2) and a distal end (3) and substantially consists of a rigid, solid material; and padding (14), which is arranged beneath the rigid tongue part (1) toward a foot in order to protect the foot from pressure points by the rigid tongue part (1) after the shoe has been fastened; the rigid tongue part (1) being characterized in that an inner elongate slot (6; 6a; 6b), and extending therefrom inner transverse slots (7), are introduced into the tongue part substantially in the center along the longitudinal axis of the rigid tongue part (1), whereby rigid segments, which in their interior are not interrupted by the elongate slot (6; 6a, 6b) or by transverse slots (7), are produced between said elongate slots and transverse slots, and whereby narrowed and thus flexible material webs (5) are also produced at connecting points between the rigid segments, wherein, by means of said material webs, the rigid tongue part (1) can be deformed and adapt to the instep, and being further characterized in that the padding (14) has an inner elongate slot (14b), which is substantially congruent with the elongate slot (6; 6a, 6b) in the rigid tongue part (1).
Owner:LEDERER STEFAN
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