Wafer box positioning device

Abstract

The utility model discloses a wafer box positioning device, which comprises a fixing plate, a wafer box and positioning assemblies, at least two groups of positioning assemblies are fixedly arranged on the fixing plate, the wafer box is detachably arranged on the fixing plate, and positioning grooves matched with the positioning assemblies are arranged on the wafer box; the positioning assembly comprises two positioning blocks matched with the two sides of the wafer box respectively, the positioning blocks are provided with positioning protrusions matched with the positioning grooves, the upper surfaces of the positioning protrusions are provided with first arc-shaped faces matched with the positioning grooves, and the ends of the positioning blocks are provided with second arc-shaped faces matched with the side walls of the wafer box. The fixing plate is fixed on the production line and is fixed, then the positioning assembly composed of the multiple sets of positioning blocks is arranged on the fixing plate, the wafer boxes of different sizes are matched with the different positioning assemblies, under the action of the positioning assemblies, the wafer boxes can be rapidly positioned to the fixing plate, a mechanical arm on the production line can conveniently grab or store the wafer boxes, and the machining efficiency is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafers, in particular to a wafer box positioning device. Background Art

[0002] With the advancement of science and technology, wafer processing is all automated, and wafers are stored in wafer boxes. The processed wafers are placed in wafer boxes, and wafers need to be taken out of the wafer boxes when they need further processing. During the automatic processing, the wafer box needs to be precisely positioned so that the robot can store or take the wafers to prevent damage during storage or taking. Wafers vary in size, so wafer boxes of different sizes need to be repositioned each time, and a certain amount of time is wasted in the repositioning process, which seriously affects the processing efficiency during automated production. Utility Model Content

[0003] The utility model aims to overcome the deficiencies of the prior art and provide a wafer box positioning device.

[0004] The purpose of this utility model is achieved through the following technical solutions:

[0005] A wafer box positioning device comprises a fixing plate, a wafer box and a positioning assembly, wherein at least two groups of the positioning assemblies are fixedly arranged on the fixing plate, the wafer box is detachably arranged on the fixing plate, and a positioning groove for the positioning assembly to cooperate is arranged on the wafer box;

[0006] The positioning assembly includes two positioning blocks respectively cooperating with the two sides of the wafer box, the positioning block is provided with a positioning protrusion cooperating with the positioning groove, the upper surface of the positioning protrusion is provided with a first arc surface cooperating with the positioning groove, and the end of the positioning block is provided with a second arc surface cooperating with the side wall of the wafer box.

[0007] Furthermore, the two positioning blocks on the positioning assembly are symmetrically arranged.

[0008] Furthermore, the second arc-shaped surface cooperates with the inner wall of the wafer box.

[0009] Furthermore, a detection sensor is arranged on the middle part of the fixing plate, and a connecting plate cooperating with the detection sensor is arranged on the lower end of the wafer box.

[0010] Furthermore, a mounting groove for mounting the detection sensor is provided on the upper surface of the fixing plate, and the detection sensor does not protrude from the upper surface of the fixing plate.

[0011] Furthermore, three groups of the positioning components are arranged on the fixing plate, and the three groups of the positioning components are arranged in an isosceles trapezoid.

[0012] Furthermore, at least two placement slots for storing wafers are provided in the wafer box, and the placement slots at the bottom of the wafer box are higher than the positioning assembly.

[0013] Furthermore, the positioning block is fixed to the fixing plate by two screws.

[0014] The beneficial effects of the utility model are:

[0015] 1) In this technology, a fixed plate is fixed on the production line and does not move. Then a positioning assembly consisting of multiple groups of positioning blocks is set on the fixed plate. Wafer boxes of different sizes are matched with different positioning assemblies. Under the action of the positioning assembly, the wafer box can be quickly positioned on the fixed plate, which is convenient for the robot on the production line to grab or store, and effectively improves the processing efficiency.

[0016] 2) In this technology, a first curved surface and a second curved surface are provided on the positioning block to facilitate the robot to quickly position the wafer box on the fixed plate, thereby reducing the difficulty of positioning and realizing rapid processing and production.

[0017] 3) In this technology, a detection sensor is set on the fixed plate. The detection sensor can detect whether the placement position of the wafer box is accurate. Wafer processing can be carried out only after the placement is accurate. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a three-dimensional connection structure between the fixed plate and the wafer box Figure 1 ;

[0019] Figure 2 It is a three-dimensional connection structure between the fixed plate and the wafer box Figure 2 ;

[0020] Figure 3 It is a three-dimensional connection structure between the fixed plate and the wafer box Figure 3 ;

[0021] Figure 4 The three-dimensional structure diagram of the wafer box;

[0022] Figure 5 It is a three-dimensional connection structure diagram of the positioning block on the fixed plate;

[0023] In the figure, 1-fixing plate, 2-wafer box, 3-positioning groove, 4-positioning block, 5-first arc surface, 6-second arc surface, 7-detection sensor, 8-connecting plate, 9-placing groove, 10-screw. DETAILED DESCRIPTION

[0024] The following will be combined with the embodiments to clearly and completely describe the technical solution of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the utility model.

[0025] See also Figure 1-Figure 5 , the utility model provides a technical solution:

[0026] A wafer box positioning device comprises a fixed plate 1, a wafer box 2 and a positioning assembly, wherein at least two groups of positioning assemblies are fixedly arranged on the fixed plate 1, the wafer box 2 is detachably arranged on the fixed plate 1, and a positioning groove 3 matched with the positioning assembly is arranged on the wafer box 2; the positioning assembly comprises two positioning blocks 4 respectively matched with the two sides of the wafer box 2, the positioning block 4 is provided with a positioning protrusion matched with the positioning groove 3, the upper surface of the positioning protrusion is provided with a first arc surface 5 matched with the positioning groove 3, and the end of the positioning block 4 is provided with a second arc surface 6 matched with the side wall of the wafer box 2. Three groups of positioning assemblies are arranged on the fixed plate 1, and the three groups of positioning assemblies are arranged in an isosceles trapezoid. The positioning block 4 is fixed on the fixed plate 1 by two screws 10. Among them, the two positioning blocks 4 simultaneously position the two sides of the wafer box 2, the two second arc surfaces 6 position the left and right positions of the wafer box 2, and the first arc surface 5 positions the front and rear positions of the wafer box 2, thereby achieving precise positioning. The fixing plate 1 is fixed on the production line to install the positioning block 4 and the wafer box 2. Under the action of multiple sets of positioning components, wafer boxes 2 of various specifications can be placed on the fixing plate 1, and the center positions of wafer boxes 2 of different specifications on the fixing plate 1 remain unchanged. Figure 1 As shown, the wafer box 2 is a four-inch wafer box, and the four-inch wafer box cooperates with the outer positioning block 4; Figure 2 As shown, the wafer box 2 is a three-inch wafer box, and the three-inch wafer box cooperates with the positioning block 4 in the middle; Figure 3 As shown, the wafer box 2 is a two-inch wafer box, and the two-inch wafer box cooperates with the inner positioning block 4. This is not only convenient for rapid and accurate positioning, but also convenient for quickly removing the wafer box 2 from the fixing plate 1.

[0027] In some embodiments, the two positioning blocks 4 on the positioning assembly are symmetrically arranged. The second arc surface 6 cooperates with the inner wall of the wafer box 2. Among them, by positioning from the inside of the wafer box 2, the area of ​​the fixing plate 1 can be reduced, so that the structure of the entire device is more miniaturized and compact.

[0028] In some embodiments, a detection sensor 7 is provided on the middle part of the fixed plate 1, and a connecting plate 8 cooperating with the detection sensor 7 is provided on the lower end of the wafer box 2. A mounting groove for mounting the detection sensor 7 is provided on the upper surface of the fixed plate 1, and the detection sensor 7 does not protrude from the upper surface of the fixed plate 1. Among them, the detection sensor 7 is a distance detection sensor in the prior art, and the detection sensor 7 is used in conjunction with the connecting plate 8. The detection sensor 7 detects the position of the connecting plate 8 to confirm whether the position of the wafer box 2 is accurate. After the position of the wafer box 2 is accurate, the wafers can be stored or taken out, thereby preventing the wafers from being damaged during storage or taking out.

[0029] In some embodiments, at least two placement slots 9 for storing wafers are provided in the wafer box 2, and the placement slot 9 at the bottom of the wafer box 2 is higher than the positioning assembly. Among them, multiple placement slots 9 for placing wafers are provided at equal intervals on the wafer box 2, and the position of the placement slot 9 at the bottom layer of the wafer box 2 is higher than the height of the positioning block 4, so as to prevent the positioning block 4 from affecting the storage or retrieval of the wafer.

[0030] In the description of the present invention, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "inside", "front", "center", "both ends" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0031] In the present utility model, unless otherwise clearly stipulated and limited, the terms such as "installation", "setting", "connection", "fixation", "hinge" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, ordinary technicians in this field can understand the specific meanings of the above terms in the utility model according to the specific circumstances.

[0032] The above is only a preferred embodiment of the utility model. It should be understood that the utility model is not limited to the form disclosed herein, and should not be regarded as excluding other embodiments, but can be used in various other combinations, modifications and environments, and can be modified within the scope of the concept described herein through the above teachings or the technology or knowledge of the relevant field. The changes and modifications made by those skilled in the art do not deviate from the spirit and scope of the utility model, and should be within the scope of protection of the claims attached to the utility model.

Claims

1. A wafer box positioning device, characterized in that: It comprises a fixing plate (1), a wafer box (2) and a positioning assembly, wherein at least two groups of the positioning assemblies are fixedly arranged on the fixing plate (1), the wafer box (2) is detachably arranged on the fixing plate (1), and a positioning groove (3) for cooperating with the positioning assembly is arranged on the wafer box (2); The positioning assembly comprises two positioning blocks (4) respectively cooperating with two sides of the wafer box (2); the positioning block (4) is provided with a positioning protrusion cooperating with the positioning groove (3); the upper surface of the positioning protrusion is provided with a first arc surface (5) cooperating with the positioning groove (3); and the end of the positioning block (4) is provided with a second arc surface (6) cooperating with the side wall of the wafer box (2).

2. A wafer box positioning device according to claim 1, characterized in that: The two positioning blocks (4) on the positioning assembly are symmetrically arranged.

3. A wafer box positioning device according to claim 1 or 2, characterized in that: The second arc-shaped surface (6) cooperates with the inner wall of the wafer box (2).

4. A wafer box positioning device according to claim 1 or 2, characterized in that: A detection sensor (7) is arranged on the middle part of the fixing plate (1), and a connecting plate (8) cooperating with the detection sensor (7) is arranged on the lower end of the wafer box (2).

5. A wafer box positioning device according to claim 4, characterized in that: A mounting groove for mounting the detection sensor (7) is provided on the upper surface of the fixing plate (1), and the detection sensor (7) does not protrude from the upper surface of the fixing plate (1).

6. A wafer box positioning device according to claim 1 or 2, characterized in that: The fixing plate (1) is provided with three groups of positioning components, and the three groups of positioning components are arranged in an isosceles trapezoidal shape.

7. A wafer box positioning device according to claim 1 or 2, characterized in that: At least two placement slots (9) for storing wafers are arranged in the wafer box (2), and the placement slots (9) at the bottom of the wafer box (2) are higher than the positioning assembly.

8. A wafer box positioning device according to claim 1 or 2, characterized in that: The positioning block (4) is fixed on the fixing plate (1) by means of two screws (10).

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