Semiconductor chip electrical performance detection device

Abstract

The utility model relates to the technical field of semiconductor chip detection, in particular to a semiconductor chip electrical property detection device, which comprises an operation table, a rotary table, a rotary driving piece, a connecting piece, a support and a driving assembly, a detector, a feeding conveying belt and a discharging conveying belt are arranged on the operation table, and the rotary table is rotatably connected with the operation table. A plurality of test seats with placing grooves are uniformly arranged on the turntable around the axis of the turntable, and are clamped with the turntable through clamping blocks in the test seats; the rotary driving part drives the rotary table to rotate, so that the chips which are circularly switched to the lower part of the detector and are arranged in the test seats are detected through the detector; the clamping block is connected with the connecting piece; a material suction assembly is arranged on the bracket; the driving assembly drives the material suction assembly to move, so that the detected chip is taken out and placed on the discharging conveying belt while the to-be-detected chip is sucked from the feeding conveying belt and then placed in the vacant test seat. According to the utility model, the test seat is convenient to replace and operate, the chip is automatically loaded and unloaded, and the detection efficiency is high.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor chip detection, in particular to a semiconductor chip electrical performance detection device. Background Art

[0002] Refers to testing the electrical characteristics of the chip during the design process, with the aim of ensuring that the electrical performance of the chip meets the specification requirements and ensures the reliability and stability of the chip. It generally includes power consumption testing, static testing, and dynamic electrical parameter testing. By testing the samples, potential design problems can be discovered and fixed to ensure a high yield in subsequent large-scale production. The corresponding test socket needs to be matched during the chip electrical performance test.

[0003] The existing chip electrical performance testing device uses a robotic arm and a suction nozzle to suck the chip on the conveyor belt and place it on a fixed point for testing. After the test is completed, the chip is taken out by the robotic arm and the suction nozzle. The specific action implementation sequence is the detector rising, the suction nozzle loading, the detector descending for testing, the detector rising and then the suction nozzle unloading. The steps are cumbersome, and it is necessary to wait for each step to be implemented step by step in the middle. The interval time is long, resulting in low detection efficiency. In addition, the existing detection device needs to be stopped and replaced after wear, and the operation is complicated and time-consuming and labor-intensive. Utility Model Content

[0004] The utility model aims to solve the problems existing in the background technology and proposes a semiconductor chip electrical performance detection device.

[0005] The technical solution of the utility model is: a semiconductor chip electrical performance detection device, including an operating table, a detector, a feeding conveyor belt and a discharging conveyor belt are arranged on the operating table, and a motor A for driving the feeding conveyor belt and the discharging conveyor belt to rotate is arranged on the operating table;

[0006] A turntable is rotatably connected to the operating table. A plurality of test seats with placement slots are evenly arranged on the turntable around its axis. The test seats are clamped with the turntable through the clamping blocks inside them;

[0007] A rotary drive member, wherein the rotary drive member drives the turntable to rotate so as to detect the chip in the test seat cyclically switched thereto through the detector;

[0008] The connecting piece, the clamping block is connected to the connecting piece, so that when the connecting piece is pushed toward the inner side of the test seat, the clamping block automatically retracts to be separated from the turntable;

[0009] A bracket, on which a suction component is arranged;

[0010] And a driving component, the driving component drives the suction component to move, so as to suck the chip to be tested from the feeding conveyor belt and place it in the empty test seat, and at the same time, take out the chip that has been tested and place it on the discharging conveyor belt.

[0011] Preferably, a plurality of mounting openings are provided on the turntable, a slide groove is provided on the inner wall of the mounting opening, and a card slot connected to the corresponding side slide groove is provided on the turntable, a slider is provided on the test seat, the slider is slidably connected to the slide groove, and a through hole connected to the interior of the slider is provided on the slider, the card block body is located in the slider, and one end of the card block with an inclined surface extends outward along the through hole and is inserted into the card slot.

[0012] Preferably, the connecting piece includes a button and a movable plate, the button is connected to the movable plate, and both are located in the test seat and slide inside it, a tensioning component for pushing the movable plate outward is provided in the test seat, and the main body of the card block is located in the movable plate and elastically slidably connected thereto.

[0013] Preferably, the suction assembly includes a suction nozzle A, a suction nozzle B and an air pump, and the air pump connects the suction nozzle A and the suction nozzle B.

[0014] Preferably, a support plate is provided on the bracket, and both the suction nozzle A and the suction nozzle B are connected to the support plate.

[0015] Preferably, the driving assembly includes a lifting driving assembly and a linear module, the lifting driving assembly drives the connection support plate, and the linear module is connected to the support plate and drives the connection between the suction nozzles A and B.

[0016] Preferably, the discharge conveyor belts include two to respectively convey qualified chips and unqualified chips, and the support plate is also provided with a motor C for driving the suction nozzle B to rotate so as to place the chips on the discharge conveyor belt on the corresponding side.

[0017] Compared with the prior art, the utility model has the following beneficial technical effects:

[0018] A feed conveyor belt and two discharging conveyor belts are provided, a turntable is provided between the feed conveyor belt and the discharging conveyor belt, and suction cups A and B are provided. The chip to be tested is sucked up and placed in the corresponding test seat by suction cup A, and the tested chip is sucked up and placed on the corresponding discharging conveyor belt, so that automatic loading and unloading is realized, and automatic classification is performed during the unloading process. At the same time, cyclic loading and unloading is performed by the rotating turntable, so the time period required for chip transportation and testing is shortened. At the same time, the utility model is provided with a matching structure of a card block and a connecting piece, which is convenient for disassembling the test seat from the turntable and also for installing a new test seat, and the operation is simple and convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the structure of the utility model;

[0020] Figure 2 It is a schematic diagram of the connection structure of various components on the operating table;

[0021] Figure 3 It is a schematic diagram of the connection structure between the turntable and the test socket;

[0022] Figure 4 It is a schematic diagram of the connection structure between the button and the card block;

[0023] Figure 5 It is a schematic diagram of the connection structure between nozzle A and nozzle B and the air pump.

[0024] Figure numerals: 1. operating table; 101. detector; 2. feed conveyor belt; 3. discharge conveyor belt; 4. motor A; 5. turntable; 501. slide slot; 502. card slot; 6. motor B; 7. test seat; 701. placement slot; 702. slider; 703. through hole; 8. button; 9. movable plate; 10. tensioning assembly; 11. block; 12. bracket; 13. support plate; 14. lifting drive assembly; 15. nozzle A; 16. linear module; 17. nozzle B; 18. motor C; 19. air pump. DETAILED DESCRIPTION

[0025] Embodiment 1

[0026] like Figure 1-Figure 5As shown, a semiconductor chip electrical performance detection device proposed by the utility model includes an operating table 1, a turntable 5, a rotating driving member, a connecting member, a bracket 12 and a driving assembly, a detector 101, a feeding conveyor belt 2 and a discharging conveyor belt 3 are arranged on the operating table 1, and a motor A4 for driving the feeding conveyor belt 2 and the discharging conveyor belt 3 to rotate is arranged on the operating table 1. The turntable 5 is rotatably connected to the operating table 1, and a plurality of test seats 7 with placement slots 701 are evenly arranged on the turntable 5 around its axis, and the test seats 7 are clamped with the turntable 5 through the clamping blocks 11 inside them. The turntable 5 is provided with a plurality of mounting openings, a slide groove 501 is provided on the inner wall of the mounting opening, and a slot 502 connected to the corresponding side slot 501 is provided on the turntable 5. A slider 702 is provided on the test seat 7, the slider 702 is slidably connected to the slide groove 501, and a through hole 703 connected to the inside of the slider 702 is provided. The body of the card block 11 is located in the slider 702, and one end of the card block 11 with an inclined surface extends outward along the through hole 703 and is inserted into the slot 502. The rotating drive member drives the turntable 5 to rotate so as to detect the chip in the test seat that is cyclically switched to the bottom thereof through the detector, and the rotating drive member includes but is not limited to the motor B6. The card block 11 is connected to the connecting member so that when the connecting member is pushed toward the inside of the test seat 7, the card block 11 automatically retracts to be separated from the turntable 5. The connecting piece includes a button 8 and a movable plate 9, the button 8 is connected to the movable plate 9, and both are located in the test seat 7 and slide inside it, a tensioning assembly 10 for pushing the movable plate 9 outward is arranged in the test seat 7, and the main body of the block 11 is located in the movable plate 9 and elastically slidably connected thereto. A suction assembly is arranged on the bracket 12. The suction assembly includes a suction nozzle A15, a suction nozzle B17 and an air pump 19, and the air pump 19 connects the suction nozzle A15 and the suction nozzle B17. A support plate 13 is arranged on the bracket 12, and the suction nozzle A15 and the suction nozzle B17 are both connected to the support plate 13. The driving assembly drives the suction assembly to move, so that while the chip to be tested is sucked from the feed conveyor belt 2 and placed in the empty test seat 7, the chip that has been tested is taken out and placed on the discharge conveyor belt 3. The driving assembly includes a lifting driving assembly 14 and a linear module 16. The lifting driving assembly 14 drives the connection support plate 13. The linear module 16 is connected to the support plate 13 and drives the connection between the suction nozzle A15 and the suction nozzle B17.

[0027] In this embodiment, the detector 101 detects the chip below it. During the detection process, the feed conveyor belt 2 conveys the chip to be detected to the suction working point, and the linear module 16 controls the suction nozzle A15 to move above the chip. Then, the lifting drive 14 controls the suction nozzle A15 to descend and contact the chip, and the air pump 19 sucks air, and then the suction nozzle 15 is used to attract the chip. Then, the lifting drive 14 lifts the chip and, driven by the linear module 16, moves the chip to the placement groove 701 on the test seat 7 close to the side of the feed conveyor belt 2. At the same time, the suction nozzle B17 descends synchronously with the suction nozzle A15 and sucks up the chip that has been detected, and places the chip on the discharge conveyor belt 3. This cycle of work shortens the waiting time from loading, detection to unloading, thereby improving the detection efficiency. When it is necessary to test different chips and replace the test socket 7, you only need to press the button 8, and the button 8 will drive the movable plate 9 to slide. At this time, the inclined surface of the block 11 abuts against the edge of the through hole 703, and under the restriction of the edge of the through hole 703, the block 11 is forced to retract into the movable plate 9, so as to facilitate the removal of the test socket 7 from the turntable 5 as a whole. When installing a new test socket 7, the sliders 702 on both sides of the new test socket 7 are inserted into the slide groove 501, and the test socket 7 is pushed inward into place. At this time, the block 11 automatically pops out and is inserted into the slot 502, thereby realizing the sliding limit of the test socket 7.

[0028] Embodiment 2

[0029] like Figure 1 , Figure 2 and Figure 5 As shown, the semiconductor chip electrical performance detection device proposed by the utility model, compared with the first embodiment, includes two discharge conveyor belts 3 to respectively transport qualified chips and unqualified chips, and the support plate 13 is also provided with a motor C18 for driving the suction nozzle B17 to rotate so as to place the chip on the discharge conveyor belt 3 on the corresponding side.

[0030] In this embodiment, the detector 101 distinguishes qualified chips from unqualified chips. After the nozzle B17 picks up the detected and distinguished chips, the motor C18 drives the chips to rotate to the corresponding discharge conveyor belt 3 to achieve automatic classification and discharge.

[0031] The implementation modes of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited thereto, and various changes can be made within the knowledge scope of technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A semiconductor chip electrical performance detection device, characterized in that: include An operating table (1), on which a detector (101), a feeding conveyor belt (2) and a discharging conveyor belt (3) are arranged, and a motor A (4) for driving the feeding conveyor belt (2) and the discharging conveyor belt (3) to rotate is arranged on the operating table (1); A turntable (5), the turntable (5) is rotatably connected to the operating table (1), a plurality of test seats (7) having placement grooves (701) are evenly arranged on the turntable (5) around its axis, and the test seats (7) are engaged with the turntable (5) via an internal clamping block (11); A rotating drive member, the rotating drive member drives the turntable (5) to rotate so as to detect the chip in the test seat cyclically switched to the bottom thereof through the detector; A connecting piece, wherein the clamping block (11) is connected to the connecting piece so that when the connecting piece is pushed toward the inside of the test seat (7), the clamping block (11) automatically retracts to be separated from the rotating disk (5); A bracket (12), on which a material suction assembly is arranged; And a driving component, the driving component drives the suction component to move, so as to suck the chip to be tested from the feeding conveyor belt (2) and place it in the empty test seat (7), and at the same time, take out the chip that has been tested and place it on the discharging conveyor belt (3).

2. A semiconductor chip electrical performance detection device according to claim 1, characterized in that: A plurality of mounting openings are provided on the turntable (5), a slide groove (501) is provided on the inner wall of the mounting opening, and a clamping groove (502) connected to the corresponding side slide groove (501) is provided on the turntable (5), a slider (702) is provided on the test seat (7), the slider (702) is slidably connected to the slide groove (501), and a through hole (703) connected to the interior of the slider (702) is provided on the slider (702), the clamping block (11) body is located in the slider (702), and one end of the clamping block (11) with an inclined surface extends outward along the through hole (703) and is clamped into the clamping groove (502).

3. A semiconductor chip electrical performance detection device according to claim 1, characterized in that: The connecting piece comprises a button (8) and a movable plate (9), the button (8) is connected to the movable plate (9), and both are located in the test seat (7) and slide inside the test seat (7), a tensioning component (10) for pushing the movable plate (9) outward is arranged in the test seat (7), and the main body of the clamping block (11) is located in the movable plate (9) and is elastically slidably connected thereto.

4. A semiconductor chip electrical performance detection device according to claim 1, characterized in that: The material suction component comprises a suction nozzle A (15), a suction nozzle B (17) and an air pump (19), wherein the air pump (19) is connected to the suction nozzle A (15) and the suction nozzle B (17).

5. A semiconductor chip electrical performance detection device according to claim 4, characterized in that: A support plate (13) is arranged on the bracket (12), and the suction nozzle A (15) and the suction nozzle B (17) are both connected to the support plate (13).

6. A semiconductor chip electrical performance detection device according to claim 5, characterized in that: The driving assembly comprises a lifting driving assembly (14) and a linear module (16); the lifting driving assembly (14) drives the connection support plate (13); the linear module (16) is connected to the support plate (13) and drives the connection between the suction nozzle A (15) and the suction nozzle B (17).

7. A semiconductor chip electrical performance detection device according to claim 6, characterized in that: The discharge conveyor belt (3) includes two belts for conveying qualified chips and unqualified chips respectively. The support plate (13) is also provided with a motor C (18) for driving the suction nozzle B (17) to rotate so as to place the chips on the discharge conveyor belt (3) on the corresponding side.

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