Silicon wafer waste mortar recovery device

Abstract

The utility model discloses a silicon wafer waste mortar recovery device which comprises a main body mechanism, the main body mechanism comprises a recovery box and a tension adjusting mechanism, a cooling mechanism is fixedly installed at the bottom of the main body mechanism, a slag removing mechanism is fixedly installed on one side of the main body mechanism, a filter cavity is formed in the recovery box, and the tension adjusting mechanism is arranged in the filter cavity. A liquid storage cavity is formed in the bottom of the filtering cavity, the filtering mechanism comprises a storage roller, the storage roller is rotationally installed on one side of the recycling box, the displacement space of a filtering belt is limited between a guide frame and a guide roller through the guide frame and the guide roller, the recycling box is divided into the filtering cavity and the liquid storage cavity through the filtering belt, and mortar enters the recycling box after being guided into the recycling box. Impurities in mortar are filtered through the filter belt, waste mortar is reduced into usable cutting fluid, the cutting fluid flows into the fluid storage cavity to be stored, in the process, when too many impurities are attached to the surface of the filter belt to influence the filtering performance, the rotary material storage roller winds the filter belt losing the performance to the surface, and the brand-new usable filter belt is provided through the storage roller.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer production, in particular to a silicon wafer waste mortar recovery device. Background Art

[0002] Silicon wafers, also known as wafers, are key materials in semiconductor technology and electronic device manufacturing. They are round sheets made of high-purity single-crystal silicon and are widely used in the production of integrated circuits, microprocessors, memory chips, sensors, and many other semiconductor components. The importance of silicon wafers lies in the semiconductor properties of silicon, which enables it to form complex circuit structures through a series of complex micro-nano processing steps such as lithography, etching, and ion implantation. The quality of silicon wafers directly affects the performance, reliability, and production cost of semiconductor devices. Therefore, every step from the selection of raw materials to processing must be strictly controlled to ensure that the high standards of the semiconductor industry are met.

[0003] Cutting is an essential step in the silicon wafer production process. Waste slurry generated in the silicon wafer process is a mixture of multiple components. It is a by-product of the silicon wafer wire cutting operation. During the cutting process, a cutting fluid (usually based on polyethylene glycol and sometimes containing other additives) containing silicon carbide micropowder (as an abrasive) is used to cut silicon rods to obtain thin and precise silicon wafers. During this process, the cutting fluid interacts with the silicon rod, resulting in silicon powder, silicon carbide micropowder, iron powder generated by cutting steel wire, and the cutting fluid itself mixing together to form waste slurry.

[0004] The treatment and recycling of waste mortar is an important environmental and economic activity. Polyethylene glycol and high-purity silicon carbide powder, and even single crystal silicon powder, can be recovered from waste mortar through filtering devices. These materials can be recycled and reused in new cutting operations, which not only reduces resource waste but also reduces environmental pollution. After long-term use, a large amount of impurities will adhere to the surface of the filter screen inside the silicon wafer waste mortar filtering device, which will affect the subsequent filtering effect. Usually, the filter assembly is replaced manually by the staff. Although the waste mortar filtering device in the prior art meets the use requirements to a certain extent, the manual replacement method is usually slow, especially in an environment where the filter screen needs to be replaced frequently, which reduces the mortar recovery efficiency. Utility Model Content

[0005] The purpose of the utility model is to provide a silicon wafer waste mortar recovery device, which has the advantage of quickly replacing a new filter component and solves the problem that manual replacement is usually slow, especially in an environment where the filter needs to be replaced frequently, which reduces the mortar recovery efficiency.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a silicon wafer waste slurry recovery device, comprising a main body mechanism, the main body mechanism comprising a recovery box and a tension adjustment mechanism, a cooling mechanism is fixedly installed on the bottom of the main body mechanism, a slag removal mechanism is fixedly installed on one side of the main body mechanism, a filter chamber is arranged inside the recovery box, a liquid storage chamber is arranged at the bottom of the filter chamber, a filter mechanism is arranged inside the main body mechanism, the filter mechanism comprises a storage roller, the storage roller is rotatably installed on one side of the recovery box, a storage roller is rotatably installed on the side of the recovery box away from the storage roller, a filter belt is fixedly installed on the outer wall of the storage roller, one end of the filter belt is fixedly installed on the outer wall of the storage roller, a plurality of guide rollers are rotatably installed inside the recovery box, and a guide frame is fixedly installed on the bottom of the guide roller.

[0007] As a preferred silicon wafer waste slurry recovery device of the utility model, the tension adjustment mechanism includes a mounting frame, a roller frame is slidably installed inside the mounting frame, the storage roller is movably installed on the top of the roller frame, a screw is rotatably installed on one side of the roller frame, the screw is threadedly connected to one side of the mounting frame, a motor is fixedly installed on one side of the roller frame, and the output shaft of the motor is fixedly connected to one side of the screw through a coupling.

[0008] As a preferred silicon wafer waste slurry recovery device of the utility model, the cooling mechanism includes a refrigerator, the refrigerator is fixedly installed on one side of the recovery box, a heat pipe is fixedly installed on one side of the refrigerator, and the heat pipe is fixedly installed inside the liquid storage chamber.

[0009] As a preferred silicon wafer waste mortar recovery device of the utility model, the slag removal mechanism includes a guide plate and a storage box, a scraper is fixedly installed on one side of the guide plate, and the storage box is arranged at the bottom of the guide plate.

[0010] As a preferred silicon wafer waste mortar recovery device of the utility model, a plurality of universal wheels with brakes are rotatably mounted on the bottom of the storage box.

[0011] As a preferred silicon wafer waste mortar recovery device of the utility model, a counterweight seat is fixedly installed on the bottom of the recovery box, and a control panel is fixedly installed on one side of the recovery box.

[0012] As a preferred silicon wafer waste slurry recovery device of the utility model, a liquid inlet hole is fixedly installed on the top of the recovery box, a conduit is connected to one side of the recovery box, a pump is fixedly connected to one end of the conduit, and a secondary filter is fixedly connected to the top of the pump.

[0013] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0014] 1. The utility model limits the displacement space of the filter belt between the guide frame and the guide roller through the cooperation between the two, and divides the recovery box into a filter chamber and a liquid storage chamber through the filter belt. After the mortar is introduced into the recovery box, the impurities in the mortar are filtered through the filter belt, and the waste mortar is restored to usable cutting fluid, which flows into the liquid storage chamber for storage. During this process, when too many impurities adhere to the surface of the filter belt and affect the filtering performance, the rotating storage roller will rewind the filter belt that has lost its performance onto the surface of the storage roller, and provide a new usable filter belt through the storage roller. During this process, the displacement trajectory of the filter belt is limited by the guide roller. In summary, the equipment has the advantage of quickly replacing a new filter component, and solves the problem that the manual replacement method is usually slow, especially in an environment where the filter screen needs to be replaced frequently, which reduces the mortar recovery efficiency.

[0015] 2. The utility model uses a scraper to clean the filter residue on the surface of the filter belt, and guides the filter residue to the inside of the storage box for storage through a guide plate, which is convenient for subsequent recycling. The heat pipe is cooled by a refrigerator, and the cutting fluid in the liquid storage chamber is cooled by the heat pipe to ensure that the temperature of the cutting fluid meets the standard when it is used for the second time, thereby ensuring the cooling effect of the cutting fluid on the cutting process.

[0016] 3. The utility model fixes and supports the storage roller by the roller frame, and through the cooperation between the mounting frame, the screw and the roller frame, the roller frame is displaced inside the mounting frame when the screw rotates. By changing the distance between the roller frame and the recovery box, the distance between the storage roller and the material storage roller is changed, and then the tension of the filter belt is changed. The user can control the tension of the filter belt in the above manner to ensure the filtering effect of the filter belt and prevent the filter belt from loosening, resulting in uneven filter cakes, blocking of the filter channels, and reduced filtering speed and efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0018] Figure 2 It is a structural diagram of the main mechanism of the utility model;

[0019] Figure 3 This is a schematic diagram of the structure of the filter mechanism of the utility model;

[0020] Figure 4 It is a structural schematic diagram of the tension adjustment mechanism of the utility model.

[0021] In the figure: 1. main body; 101. recovery box; 102. filter chamber; 103. liquid storage chamber; 104. counterweight seat; 105. control panel; 106. conduit; 107. pump; 108. secondary filter; 109. liquid inlet; 110. tension adjustment mechanism; 111. mounting frame; 112. roller frame; 113. screw; 114. motor; 2. filtering mechanism; 201. storage roller; 202. filter belt; 203. storage roller; 204. guide frame; 205. guide roller; 3. cooling mechanism; 301. refrigerator; 302. heat pipe; 4. slag removal mechanism; 401. guide plate; 402. scraper; 403. storage box; 404. universal wheel with brake. DETAILED DESCRIPTION

[0022] See also Figure 1-4 A silicon wafer waste slurry recovery device comprises a main body mechanism 1, the main body mechanism 1 comprises a recovery box 101 and a tension adjustment mechanism 110, a cooling mechanism 3 is fixedly installed at the bottom of the main body mechanism 1, a slag removal mechanism 4 is fixedly installed at one side of the main body mechanism 1, a filter chamber 102 is arranged inside the recovery box 101, a liquid storage chamber 103 is arranged at the bottom of the filter chamber 102, a filter mechanism 2 is arranged inside the main body mechanism 1, the filter mechanism 2 comprises a storage roller 201, the storage roller 201 is rotatably installed on one side of the recovery box 101, a storage roller 203 is rotatably installed on the side of the recovery box 101 away from the storage roller 201, a filter belt 202 is fixedly installed on the outer wall of the storage roller 201, one end of the filter belt 202 is fixedly installed on the outer wall of the storage roller 203, a plurality of guide rollers 205 are rotatably installed inside the recovery box 101, and a guide frame 204 is fixedly installed at the bottom of the guide roller 205;

[0023] During use, the displacement space of the filter belt 202 is limited between the two through the cooperation between the guide frame 204 and the guide roller 205, and the recovery box 101 is divided into a filter chamber 102 and a liquid storage chamber 103 by the filter belt 202. After the mortar is introduced into the interior of the recovery box 101, the impurities in the mortar are filtered through the filter belt 202, and the waste mortar is restored to usable cutting fluid, which flows into the internal storage chamber 103 for storage. In this process, when too many impurities adhere to the surface of the filter belt 202 and affect the filtering performance, the rotating storage roller 203 will reel the filter belt 202 that has lost its performance onto the surface of the storage roller 203, and provide a new and usable filter belt 202 through the storage roller 201. In this process, the displacement trajectory of the filter belt 202 is limited by the guide roller 205. In summary, the present device has the advantage of quickly replacing a new filter component, and solves the problem that the manual replacement method is usually slow, especially in an environment where the filter screen needs to be replaced frequently, which reduces the mortar recovery efficiency.

[0024] Further, the tension adjustment mechanism 110 includes a mounting frame 111, a roller frame 112 is slidably mounted inside the mounting frame 111, a storage roller 201 is movably mounted on the top of the roller frame 112, a screw rod 113 is rotatably mounted on one side of the roller frame 112, the screw rod 113 is threadedly connected to one side of the mounting frame 111, a motor 114 is fixedly mounted on one side of the roller frame 112, and an output shaft of the motor 114 is fixedly connected to one side of the screw rod 113 through a coupling;

[0025] During use, the storage roller 201 is fixedly supported by the roller frame 112, and the mounting frame 111, the screw 113 and the roller frame 112 cooperate to make the roller frame 112 move inside the mounting frame 111 when the screw 113 rotates. By changing the distance between the roller frame 112 and the recovery box 101, the distance between the storage roller 201 and the material storage roller 203 is changed, thereby changing the tension of the filter belt 202. The user can control the tension of the filter belt 202 in the above manner to ensure the filtering effect of the filter belt 202 and prevent the filter belt 202 from loosening, resulting in uneven filter cakes, blocked filter channels, and reduced filtering speed and efficiency.

[0026] Further, the cooling mechanism 3 includes a refrigerator 301, which is fixedly mounted on one side of the recovery box 101, and a heat pipe 302 is fixedly mounted on one side of the refrigerator 301, and the heat pipe 302 is fixedly mounted inside the liquid storage chamber 103;

[0027] During use, the heat pipe 302 is cooled by the refrigerator 301, and the cutting fluid inside the liquid storage chamber 103 is cooled by the heat pipe 302 to ensure that the temperature of the cutting fluid meets the standard when it is used for the second time, thereby ensuring the cooling effect of the cutting fluid on the cutting process.

[0028] Furthermore, the slag removal mechanism 4 includes a guide plate 401 and a storage box 403, a scraper 402 is fixedly installed on one side of the guide plate 401, and the storage box 403 is arranged at the bottom of the guide plate 401;

[0029] During use, the scraper 402 is used to clean the filter residue on the surface of the filter belt 202, and the guide plate 401 guides the filter residue to the inside of the storage box 403 for storage, so as to facilitate subsequent recycling.

[0030] Furthermore, a plurality of universal wheels 404 with brakes are rotatably mounted on the bottom of the storage box 403;

[0031] During use, a plurality of universal wheels 404 with brakes enable workers to flexibly move or fix the material storage box 403, which is convenient for use.

[0032] Furthermore, a counterweight seat 104 is fixedly installed at the bottom of the recycling box 101, and a control panel 105 is fixedly installed at one side of the recycling box 101;

[0033] During use, the weight of the main body 1 is increased by the counterweight seat 104, and the center of gravity of the device is lowered to improve the stability of the device. The control panel 105 is used to facilitate users to control the device as a whole.

[0034] Furthermore, a liquid inlet 109 is fixedly installed on the top of the recovery box 101, a conduit 106 is connected to one side of the recovery box 101, a pump 107 is fixedly connected to one end of the conduit 106, and a secondary filter 108 is fixedly connected to the top of the pump 107;

[0035] During use, the waste slurry is introduced into the recovery box 101 through the liquid inlet 109, and the filtered cutting fluid is pumped out from the liquid storage chamber 103 through the pump 107, filtered through the secondary filter 108 for secondary filtration, and then exported for continued use by the silicon wafer cutting device.

[0036] Working principle: During use, after the mortar is introduced into the recycling box 101, the impurities in the mortar are filtered through the filter belt 202, and the waste mortar is restored to usable cutting fluid, which flows into the liquid storage chamber 103 for storage. During this process, when too many impurities adhere to the surface of the filter belt 202 and affect the filtering performance, the rotating storage roller 203 will reel the filter belt 202 that has lost its performance onto the surface of the storage roller 203, and provide a new usable filter belt 202 through the storage roller 201;

[0037] In the above process, the displacement trajectory of the filter belt 202 is limited by the guide roller 205, the storage roller 201 is fixedly supported by the roller frame 112, and the roller frame 112 is displaced inside the mounting frame 111 when the screw 113 rotates through the cooperation between the mounting frame 111, the screw 113, and the roller frame 112. By changing the distance between the roller frame 112 and the recovery box 101, the distance between the storage roller 201 and the storage roller 203 is changed, thereby changing the tension of the filter belt 202, and cooling the heat pipe 302 by the refrigerator 301, and cooling the cutting fluid inside the liquid storage chamber 103 by the heat pipe 302 to ensure that the temperature of the cutting fluid meets the standard when it is used for the second time, and the waste slurry is introduced into the recovery box 101 through the liquid inlet hole 109, and the filtered cutting fluid is extracted from the inside of the liquid storage chamber 103 by the pump 107, and after secondary filtration through the secondary filter 108, it is exported for continued use by the silicon wafer cutting device.

[0038] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A silicon wafer waste slurry recovery device, comprising a main body mechanism (1), the main body mechanism (1) comprising a recovery box (101) and a tension adjustment mechanism (110), a cooling mechanism (3) is fixedly installed at the bottom of the main body mechanism (1), a slag removal mechanism (4) is fixedly installed on one side of the main body mechanism (1), a filter chamber (102) is arranged inside the recovery box (101), a liquid storage chamber (103) is arranged at the bottom of the filter chamber (102), and a filter mechanism (2) is arranged inside the main body mechanism (1), characterized in that: The filtering mechanism (2) comprises a storage roller (201), the storage roller (201) being rotatably mounted on one side of a recovery box (101), a storage roller (203) being rotatably mounted on a side of the recovery box (101) away from the storage roller (201), a filter belt (202) being fixedly mounted on the outer wall of the storage roller (201), one end of the filter belt (202) being fixedly mounted on the outer wall of the storage roller (203), a plurality of guide rollers (205) being rotatably mounted inside the recovery box (101), and a guide frame (204) being fixedly mounted on the bottom of the guide roller (205).

2. A silicon wafer waste slurry recovery device as claimed in claim 1, characterized in that: The tension adjustment mechanism (110) comprises a mounting frame (111), a roller frame (112) is slidably mounted inside the mounting frame (111), the storage roller (201) is movably mounted on the top of the roller frame (112), a screw rod (113) is rotatably mounted on one side of the roller frame (112), the screw rod (113) is threadedly connected to one side of the mounting frame (111), a motor (114) is fixedly mounted on one side of the roller frame (112), and the output shaft of the motor (114) is fixedly connected to one side of the screw rod (113) via a coupling.

3. The device for recovering waste silicon wafer slurry according to claim 1, characterized in that: The cooling mechanism (3) comprises a refrigerator (301), wherein the refrigerator (301) is fixedly mounted on one side of the recovery box (101), a heat conducting pipe (302) is fixedly mounted on one side of the refrigerator (301), and the heat conducting pipe (302) is fixedly mounted inside the liquid storage chamber (103).

4. The device for recovering waste silicon wafer slurry according to claim 1, characterized in that: The slag removal mechanism (4) comprises a guide plate (401) and a material storage box (403); a scraper (402) is fixedly mounted on one side of the guide plate (401); and the material storage box (403) is arranged at the bottom of the guide plate (401).

5. A silicon wafer waste slurry recovery device as claimed in claim 4, characterized in that: A plurality of universal wheels (404) with brakes are rotatably mounted on the bottom of the material storage box (403).

6. The device for recovering waste silicon wafer slurry according to claim 1, characterized in that: A counterweight seat (104) is fixedly mounted on the bottom of the recovery box (101), and a control panel (105) is fixedly mounted on one side of the recovery box (101).

7. The device for recovering waste silicon wafer slurry according to claim 1, characterized in that: A liquid inlet (109) is fixedly installed on the top of the recovery box (101), a conduit (106) is connected to one side of the recovery box (101), one end of the conduit (106) is fixedly connected to a pump (107), and the top of the pump (107) is fixedly connected to a secondary filter (108).

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