Semiconductor cleaning equipment

Abstract

The utility model relates to the technical field of cleaning devices, and provides semiconductor cleaning equipment which comprises a machine body, a corrugated pipe and a water collector, a mounting plate is mounted on the inner wall of the machine body, an air cylinder is mounted on the outer wall of the mounting plate, an output rod is mounted at the output end of the air cylinder, one end of the output rod is connected with a connecting block, and the other end of the output rod is connected with the corrugated pipe. A sliding rail is mounted on the back side of the moving plate; a corrugated pipe is mounted on one side of the outer wall of the spray head; a water pipe is mounted at one end of the spray head; a water storage tank is mounted at one end of the water pipe; through the combination of the movable spray head and the fixed spray head, more comprehensive and more thorough cleaning of semiconductors is realized, through the design, each corner and each gap can be ensured to be fully cleaned, the cleaning efficiency and effect are greatly improved, and the problem of incomplete cleaning is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of cleaning devices, in particular to semiconductor cleaning equipment. Background Art

[0002] Semiconductor cleaning technology is an important part of the semiconductor manufacturing process. Its purpose is to remove pollutants on the surface of semiconductors and improve the quality and reliability of semiconductors. However, traditional semiconductor cleaning equipment usually uses a large amount of water to clean semiconductors, and the wastewater after cleaning is often discharged directly, which not only wastes precious water resources, but also increases sewage treatment costs and environmental burdens. In addition, ordinary cleaning equipment can usually only clean a single semiconductor, resulting in a long cleaning process and low efficiency. Therefore, a new type of semiconductor cleaning equipment is needed to solve these problems. Utility Model Content

[0003] The utility model provides a semiconductor cleaning device, which solves the problem of incomplete cleaning and waste of water resources.

[0004] The technical solution of the utility model is as follows:

[0005] A semiconductor cleaning device comprises a body, a bellows and a water collector, wherein a mounting plate is installed on the inner wall of the body, a cylinder is installed on the outer wall of the mounting plate, an output rod is installed on the output end of the cylinder, one end of the output rod is connected to a connecting block, a movable plate is installed on the outer wall of the connecting block, a nozzle is installed on the outer wall of the movable plate, a slide rail is installed on the back side of the movable plate, a bellows is installed on one side of the outer wall of the nozzle, a water pipe is installed on one end of the nozzle, a water storage tank is installed on one end of the water pipe, a conveyor belt is installed at the bottom of the inner wall of the body, and a filter is installed at the bottom of the conveyor belt.

[0006] Preferably, clamping blocks are installed at both ends of the filter, a fixing bolt is installed on the inner wall of the clamping block, and an insert block is installed at the bottom of the fixing bolt. The water flow will be filtered through the filter and then fall into the outer wall of the water collector through the filter.

[0007] Preferably, a water collector is installed on the inner wall of the plug block, a telescopic spring rod is installed on the inner wall of the water collector, a force-bearing head is installed on one end of the telescopic spring rod, a button is installed on one side of the force-bearing head, and a bottom plate is installed on the bottom of the outer wall of the body, and the water collector can collect water resources.

[0008] Preferably, a sliding block is provided on the back side of the movable plate, and the sliding block of the movable plate is matched with the slide rail, and when the connecting block is driven, the connecting block drives the movable plate to slide along the slide rail.

[0009] Preferably, one end of the water pipe is connected to a nozzle, and the other end of the water pipe is connected to a water storage tank. The nozzle can draw water from the inner wall of the water storage tank through the water pipe for spraying and cleaning.

[0010] Preferably, the top of the outer wall of the water collector is inclined, and the inclination angle of the water collector is 123°. Since the outer wall of the water collector is inclined, the inner wall of the water collector can be slid into through the inclined outer wall.

[0011] Preferably, both sides of the outer wall of the water collector are semicircular, the interior of the water collector is hollow, and the inner wall of the water collector is used to store water.

[0012] The working principle and beneficial effects of the utility model are:

[0013] 1. In the semiconductor manufacturing process, cleaning is a very critical link, because the surface of the semiconductor must be kept highly clean to ensure its performance and reliability. However, traditional semiconductor cleaning equipment often has the problem of incomplete cleaning, which may cause residual pollutants on the surface of the semiconductor, thereby affecting its performance. The semiconductor cleaning equipment designed by the present invention adopts an innovative nozzle design, which can not only clean multiple semiconductors at the same time, but also achieve a more comprehensive and thorough cleaning of the semiconductor through the combination of movable nozzles and fixed nozzles. This design can ensure that every corner and gap can be fully cleaned, greatly improving the efficiency and effect of cleaning. Therefore, the use of this cleaning equipment can greatly reduce semiconductor performance problems caused by incomplete cleaning, improve the quality and reliability of semiconductors, and bring huge economic benefits to the semiconductor manufacturing industry.

[0014] 2. In traditional semiconductor cleaning equipment, a large amount of water is usually used to clean semiconductors, and the waste water after cleaning is often discharged directly, which not only wastes precious water resources, but also increases the cost of sewage treatment and the environmental burden. The semiconductor cleaning equipment designed in this utility model adopts a water collector design, which can collect and treat the waste water after cleaning. Through the filtering effect of the water collector, most of the pollutants in the waste water can be removed, thereby realizing the secondary utilization of the waste water or meeting the discharge standards. This design can not only reduce the waste of water resources and reduce production costs, but also reduce the burden on the environment, and achieve a double improvement in economic and environmental benefits. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The utility model is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0017] Figure 2 It is a schematic diagram of the partial structure work proposed by the utility model;

[0018] Figure 3 For this utility model Figure 1 The proposed partial enlarged schematic diagram of point A;

[0019] Figure 4 For this utility model Figure 1 The proposed enlarged schematic diagram of the local area B.

[0020] In the figure: 1. body; 2. mounting plate; 3. cylinder; 4. output rod; 5. connecting block; 6. moving plate; 7. slide rail; 8. nozzle; 9. bellows; 10. water pipe; 11. water storage tank; 12. conveyor belt; 13. filter screen; 14. clamping block; 15. fixing bolt; 16. plug block; 17. water collector; 18. telescopic spring rod; 19. force head; 20. button; 21. bottom plate. DETAILED DESCRIPTION

[0021] The following will be combined with the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] Example 1

[0023] like Figure 1 to Figure 4 As shown, this embodiment proposes a semiconductor cleaning device, including a body 1, a bellows 9 and a water collector 17, a mounting plate 2 is installed on the inner wall of the body 1, a cylinder 3 is installed on the outer wall of the mounting plate 2, an output rod 4 is installed on the output end of the cylinder 3, one end of the output rod 4 is connected to a connecting block 5, a movable plate 6 is installed on the outer wall of the connecting block 5, a nozzle 8 is installed on the outer wall of the movable plate 6, a slide rail 7 is installed on the back side of the movable plate 6, a bellows 9 is installed on one side of the outer wall of the nozzle 8, a water pipe 10 is installed on one end of the nozzle 8, a water storage tank 11 is installed on one end of the water pipe 10, a conveyor belt 12 is installed at the bottom of the inner wall of the body 1, and a filter screen 13 is installed at the bottom of the conveyor belt 12.

[0024] In this embodiment, clamping blocks 14 are installed at both ends of the filter 13, a fixing bolt 15 is installed on the inner wall of the clamping block 14, and an insert block 16 is installed at the bottom of the fixing bolt 15. If the water collector 17 needs to be installed, it is only necessary to align the two ends of the water collector 17 with the inner wall of the insert block 16 and insert it.

[0025] In this embodiment, a water collector 17 is installed on the inner wall of the plug block 16, and a telescopic spring rod 18 is installed on the inner wall of the water collector 17. A force head 19 is installed at one end of the telescopic spring rod 18, and a button 20 is installed on one side of the force head 19. A bottom plate 21 is installed at the bottom of the outer wall of the body 1. After the button 20 is pressed, one end of the button 20 will squeeze the force head 19, and the force head 19 will drive the telescopic spring rod 18 to contract, so that the force head 19 is aligned with the inner wall of the plug block 16. The water collector 17 can be installed in this way.

[0026] In this embodiment, a slider is provided on the back side of the movable plate 6, and the slider of the movable plate 6 is adapted to the slide rail 7. In this embodiment, two slidable movable plates 6 are provided in total, and both movable plates 6 can be driven by the cylinder 3 to slide to one side along the outer wall of the slide rail 7.

[0027] In this embodiment, one end of the water pipe 10 is connected to the nozzle 8, and the other end of the water pipe 10 is connected to the water tank 11. The middle nozzle 8 is in a fixed state, and the other two nozzles 8 are in an active state. In this way, by starting the nozzle 8, multiple semiconductors can be cleaned at the same time.

[0028] In this embodiment, the top of the outer wall of the water collector 17 is inclined, and the inclination angle of the water collector 17 is 123°. The inclination of the outer wall of the water collector 17 can not only collect water resources, but also ensure that if the water flow is too fast, the remaining spilled water droplets can slide back into the inner wall of the water collector 17 through the outer wall of the water collector 17.

[0029] In this embodiment, both sides of the outer wall of the water collector 17 are semicircular, and the interior of the water collector 17 is hollow, so the water collector 17 can prevent the waste of water resources.

[0030] The working principle of this utility is:

[0031] First, when using the present invention, it is necessary to place the semiconductor to be cleaned on the conveyor belt 12 at the bottom of the inner wall of the body 1, and then it is necessary to confirm whether there is water in the water storage tank 11. After confirming that it is correct, it is necessary to start the cylinder 3. After the cylinder 3 is started, it will drive the output rod 4 to extend and retract. When the output rod 4 is extended and retracted, it will drive the connecting block 5. When the connecting block 5 is driven, the connecting block 5 will drive the movable plate 6 to slide along the slide rail 7. Because the present invention is provided with two slidable movable plates 6, the movable plate 6 on the other side will also be driven by the cylinder 3 to slide to one side along the outer wall of the slide rail 7. At this time, the middle nozzle 8 is in a fixed state, and the other two nozzles 8 are in an active state. In this way, starting the nozzle 8 again can clean multiple semiconductors at the same time, and the two movable nozzles 8 and the nozzle 8 fixed in the middle position can be reversed. The semiconductor is cleaned repeatedly to ensure that the cleaning is more thorough. At the same time, during cleaning, the water flow will be filtered through the filter screen 13, and then fall into the outer wall of the water collector 17 through the filter screen 13. Since the outer wall of the water collector 17 is inclined, it can slide into the inner wall of the water collector 17 through the inclined outer wall. This design can prevent the waste of water resources. The user can press and hold the button 20. After the button 20 is pressed, one end of the button 20 will squeeze the force-bearing head 19, and the force-bearing head 19 will drive the telescopic spring rod 18 to shrink, so that the force-bearing head 19 is aligned with the inner wall of the plug block 16. In this way, the water collector 17 can be removed for secondary treatment of water resources. If the water collector 17 needs to be reinstalled, it is only necessary to align the two ends of the water collector 17 with the inner wall of the plug block 16 and insert it to complete it. At this point, this practical work is completed.

[0032] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A semiconductor cleaning device, comprising a body (1), a bellows (9) and a water collector (17), characterized in that: The inner wall of the machine body (1) is mounted with a mounting plate (2), the outer wall of the mounting plate (2) is mounted with a cylinder (3), the output end of the cylinder (3) is mounted with an output rod (4), one end of the output rod (4) is connected with a connecting block (5), the outer wall of the connecting block (5) is mounted with a moving plate (6), the outer wall of the moving plate (6) is mounted with a spray head (8), the back side of the moving plate (6) is mounted with a slide rail (7), one side of the outer wall of the spray head (8) is mounted with a bellows (9), one end of the spray head (8) is mounted with a water pipe (10), one end of the water pipe (10) is mounted with a water storage tank (11), the bottom of the inner wall of the machine body (1) is mounted with a conveyor belt (12), and the bottom of the conveyor belt (12) is mounted with a filter screen (13).

2. A semiconductor cleaning device according to claim 1, characterized in that: Clamping blocks (14) are installed at both ends of the filter screen (13), a fixing bolt (15) is installed on the inner wall of the clamping block (14), and an inserting block (16) is installed at the bottom of the fixing bolt (15).

3. A semiconductor cleaning device according to claim 2, characterized in that: A water collector (17) is installed on the inner wall of the plug block (16), a telescopic spring rod (18) is installed on the inner wall of the water collector (17), a force-bearing head (19) is installed on one end of the telescopic spring rod (18), a button (20) is installed on one side of the force-bearing head (19), and a bottom plate (21) is installed on the bottom of the outer wall of the body (1).

4. A semiconductor cleaning device according to claim 1, characterized in that: A sliding block is provided on the back side of the movable plate (6), and the sliding block of the movable plate (6) is matched with the sliding rail (7).

5. The semiconductor cleaning equipment according to claim 1, characterized in that: One end of the water pipe (10) is connected to the spray head (8), and the other end of the water pipe (10) is connected to the water storage tank (11).

6. The semiconductor cleaning equipment according to claim 3, characterized in that: The top of the outer wall of the water collector (17) is inclined, and the inclination angle of the water collector (17) is 123°.

7. A semiconductor cleaning device according to claim 3, characterized in that: Both sides of the outer wall of the water collector (17) are semicircular, and the interior of the water collector (17) is hollow.

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