Sapphire LED polishing solution heating circulation device

Abstract

The utility model discloses a sapphire LED (light-emitting diode) polishing solution heating and circulating device, which relates to the technical field of sapphire polishing and comprises a heating box internally provided with an electric heating plate, a circulating solution barrel and a circulating pump are sequentially and fixedly arranged on the outer wall of the top of the heating box, and a coil pipe is arranged on the inner wall of the circulating solution barrel. A polishing solution barrel is fixedly installed on the inner wall of the bottom of the circulating solution barrel, the coil pipe makes contact with the polishing solution barrel, the polishing solution barrel is filled with aluminum oxide polishing solution, and a temperature sensor is fixedly installed on the inner wall of the polishing solution barrel. According to the heating circulating device, when initial machining begins, the temperature of sapphire polishing liquid is constantly controlled to be 34-36 DEG C, large temperature fluctuation does not exist, the machining process runs stably, the polishing efficiency is improved, the polishing time is shortened, the flatness of a machined workpiece is improved, and the sapphire polishing removal rate is increased; and the stirring assembly is arranged, so that the polishing solution in the polishing solution barrel can be fully stirred, and the polishing solution can be uniformly heated.

Description

Technical Field

[0001] The utility model relates to the technical field of sapphire polishing, in particular to a sapphire LED polishing liquid heating circulation device. Background Art

[0002] Sapphire single crystal has interesting comprehensive mechanical, optical and thermal properties, and has zero porosity. Because of these properties, sapphire products are widely used in technology. As an important technical crystal, sapphire crystal has been widely used in many fields of science and technology, national defense and civil industry, and electronic technology. For example, infrared window materials, substrates in the field of microelectronics, laser matrices, optical components and other uses.

[0003] Chemical mechanical polishing technology is currently one of the key technologies for semiconductor surface processing, and it has also been widely used in the sapphire crystal polishing stage. In this chemical mechanical polishing process, the sapphire polishing liquid uses the mechanical force of the polishing machine to polish the crystal surface. According to the needs of downstream products, the polishing liquid is used to achieve the required removal amount of the workpiece.

[0004] LED polishing liquid is a polishing material specially used in the LED industry. It usually contains ultra-fine solid particle abrasives, oxidants, surfactants, stabilizers and other ingredients. This polishing liquid is designed to improve the surface quality of LED chips or substrates and increase the brightness and efficiency of products. In the LED industry, polishing liquid is widely used, especially in the back thinning of sapphire substrates, silicon carbide wafers, precision ceramics, precision molds, aerospace, optical instruments and other fields.

[0005] At present, in the sapphire polishing process, the polishing effect is closely related to the temperature control of the polishing liquid. However, the temperature of the polishing liquid used in the prior art is not easy to control, and there is a large temperature fluctuation, which cannot ensure the stable operation of the polishing process. Therefore, we propose a sapphire LED polishing liquid heating circulation device. Utility Model Content

[0006] In view of the deficiencies in the prior art, the utility model provides a sapphire LED polishing liquid heating circulation device, which enables the sapphire crystal sheet to have a higher removal rate and stable equipment operation within a fixed polishing time, thereby improving efficiency, reducing processing time costs and processing stability.

[0007] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0008] A sapphire LED polishing liquid heating circulation device comprises a heating box with an electric heating plate installed inside, a circulating liquid barrel and a circulating pump are fixedly installed on the top outer wall of the heating box in sequence, and a coil is installed on the inner wall of the circulating liquid barrel;

[0009] A polishing liquid barrel is fixedly installed on the inner wall of the bottom of the circulating liquid barrel, and the coil is in contact with the polishing liquid barrel. Alumina polishing liquid is filled in the polishing liquid barrel, and a temperature sensor is fixedly installed on the inner wall of the polishing liquid barrel.

[0010] As an optimal technical solution of the utility model, a stirring assembly is provided in the polishing liquid barrel, and the stirring assembly includes a support plate fixedly connected to the top outer wall of the circulating liquid barrel, a stirring motor fixedly installed on the top outer wall of the support plate, an active bevel gear fixedly mounted on the output shaft of the stirring motor, a stirring shaft rotatably mounted on the support plate, a driven bevel gear fixedly mounted on the top of the stirring shaft, and a double helical stirring blade welded on the outer wall of the stirring shaft.

[0011] As a preferred technical solution of the utility model, the active bevel gear and the driven bevel gear are meshed with each other, and the double helical stirring blade is located in the polishing liquid barrel.

[0012] As a preferred technical solution of the utility model, the liquid extraction end of the circulation pump is connected to one side of the heating box through a liquid extraction pipe, and an automatic valve 1 is installed on the liquid extraction pipe.

[0013] As a preferred technical solution of the utility model, the liquid delivery end of the circulation pump is connected to one end of the coil through a liquid delivery pipe, and the other end of the coil is connected to the other side of the heating box through a reflux pipe.

[0014] As a preferred technical solution of the utility model, the liquid extraction pipe is connected to an external cooling pipe, and an automatic valve 2 is installed on the external cooling pipe.

[0015] As a preferred technical solution of the utility model, a controller is fixedly installed on the front outer wall of the heating box.

[0016] The beneficial effects of the utility model are:

[0017] 1. The utility model adopts high-purity alumina as raw material. Compared with the widely used silicon oxide polishing liquid, the cost of this alumina polishing liquid is lower than that of silicon oxide, and the processing efficiency can reach 3-4 times that of silicon oxide. The hardness of the sapphire polishing liquid reaches 9.3, which can achieve a higher polishing efficiency. In addition, the alumina polishing liquid will not crystallize during use, the equipment cleanliness is high, and the alumina polishing liquid can be recycled;

[0018] 2. The utility model uses the heating circulation device to control the temperature of the sapphire polishing liquid at a constant level of 34-36°C at the beginning of the initial processing, without large temperature fluctuations, so that the processing process runs stably, which is beneficial to improving the polishing efficiency, shortening the polishing time, improving the flatness of the processed workpiece, and improving the polishing removal rate of the sapphire;

[0019] 3. The utility model is provided with a stirring assembly, which can fully stir the polishing liquid in the polishing liquid barrel so that it can be heated evenly, further improving the use effect of the polishing liquid. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the specific implementation of the utility model or the technical solution in the prior art, the following is a brief introduction to the drawings required for the specific implementation or the prior art description. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, each element or part is not necessarily drawn according to the actual scale.

[0021] Figure 1 This is a schematic diagram of the overall front-view stereoscopic structure of a sapphire LED polishing liquid heating circulation device proposed by the utility model;

[0022] Figure 2 This is a schematic diagram of the overall rear-view stereoscopic structure of a sapphire LED polishing liquid heating circulation device proposed by the utility model;

[0023] Figure 3 This is a schematic diagram of the three-dimensional structure inside the circulating liquid barrel in the sapphire LED polishing liquid heating circulation device proposed by the utility model;

[0024] Figure 4 The utility model provides a schematic diagram of the three-dimensional structure of the interior of a polishing liquid barrel in a sapphire LED polishing liquid heating circulation device.

[0025] In the figure: 1. Heating box; 2. Circulating liquid barrel; 3. Circulating pump; 4. Polishing liquid barrel; 5. Coil; 6. Temperature sensor; 7. Support plate; 8. Stirring motor; 9. Driving bevel gear; 10. Stirring shaft; 11. Driven bevel gear; 12. Double helical stirring blade; 13. Liquid extraction pipe; 14. Automatic valve 1; 15. External cooling pipe; 16. Automatic valve 2; 17. Reflux pipe; 18. Liquid delivery pipe; 19. Controller. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0027] Example

[0028] Reference Figure 1-4 A sapphire LED polishing liquid heating circulation device comprises a heating box 1 with an electric heating plate installed inside, a circulating liquid barrel 2 and a circulating pump 3 are fixedly installed on the top outer wall of the heating box 1 in sequence, and a coil 5 is installed on the inner wall of the circulating liquid barrel 2;

[0029] Furthermore, a polishing liquid barrel 4 is fixedly installed on the inner wall of the bottom of the circulating liquid barrel 2, the coil 5 is in contact with the polishing liquid barrel 4, the polishing liquid barrel 4 is filled with alumina polishing liquid, and a temperature sensor 6 is fixedly installed on the inner wall of the polishing liquid barrel 4;

[0030] Then, using high-purity alumina as raw material, compared with the widely used silicon oxide polishing liquid, the cost of this alumina polishing liquid is lower than that of silicon oxide, and the processing efficiency can reach 3-4 times that of silicon oxide. The hardness of sapphire polishing liquid reaches 9.3, which can achieve a higher polishing efficiency. In addition, the alumina polishing liquid will not crystallize during use, the equipment cleanliness is high, and the alumina polishing liquid can be recycled;

[0031] Furthermore, a stirring assembly is provided in the polishing liquid barrel 4, and the stirring assembly includes a support plate 7 fixedly connected to the top outer wall of the circulating liquid barrel 2, a stirring motor 8 fixedly installed on the top outer wall of the support plate 7, a driving bevel gear 9 fixedly sleeved on the output shaft of the stirring motor 8, a stirring shaft 10 rotatably installed on the support plate 7, a driven bevel gear 11 fixedly sleeved on the top of the stirring shaft 10 and a double helical stirring blade 12 welded on the outer wall of the stirring shaft 10, the driving bevel gear 9 and the driven bevel gear 11 are meshed with each other, and the double helical stirring blade 12 is located in the polishing liquid barrel 4;

[0032] When in use: the active bevel gear 9 is controlled to rotate by the stirring motor 8, and then the driven bevel gear 11 meshing with the active bevel gear 9 controls the double helical stirring blades 12 on the stirring shaft 10 to rotate in the polishing liquid barrel 4, so that the polishing liquid in the polishing liquid barrel 4 can be fully stirred, so that it can be heated evenly, and the use effect of the polishing liquid is further improved;

[0033] Furthermore, the liquid extraction end of the circulation pump 3 is connected to one side of the heating box 1 through a liquid extraction pipe 13, and an automatic valve 14 is installed on the liquid extraction pipe 13. The liquid delivery end of the circulation pump 3 is connected to one end of the coil 5 through a liquid delivery pipe 18, and the other end of the coil 5 is connected to the other side of the heating box 1 through a reflux pipe 17. An external cooling pipe 15 is connected to the liquid extraction pipe 13, and an automatic valve 2 16 is installed on the external cooling pipe 15. A controller 19 is fixedly installed on the front outer wall of the heating box 1.

[0034] During the specific implementation of this embodiment: the controller 19 performs full-process automatic control, and the liquid temperature in the heating box 1 is set at 85°C. At this time, the high-temperature liquid in the heating box 1 is extracted by the circulating pump 3 and sent to the coil 5 through the liquid delivery pipe 18 to heat the polishing liquid in the polishing liquid barrel 4. At the same time, the reflux circulation is performed by the reflux pipe 17 to realize cyclic heating, and the internal temperature sensor 6 senses the temperature in real time. The program sets the polishing liquid barrel 4 to sense the temperature at 35±2°C. When it is lower than 33°C, the automatic valve one 14 opens and the automatic valve two 16 closes. When it is higher than 37°C, the automatic valve one closes 14 and the automatic valve two 16 automatically opens for cooling. In this way, the temperature of the sapphire polishing liquid can be constantly controlled at 34-36°C without large temperature fluctuations, so that the processing process can run stably, which is beneficial to improving the polishing efficiency, shortening the polishing time, improving the flatness of the processed workpiece, and improving the polishing removal rate of the sapphire.

[0035] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A sapphire LED polishing liquid heating circulation device, comprising a heating box (1) with an electric heating plate installed inside, characterized in that: A circulating liquid barrel (2) and a circulating pump (3) are fixedly mounted on the top outer wall of the heating box (1) in sequence, and a coil (5) is mounted on the inner wall of the circulating liquid barrel (2); A polishing liquid barrel (4) is fixedly mounted on the inner wall of the bottom of the circulating liquid barrel (2), and the coil (5) is in contact with the polishing liquid barrel (4). The polishing liquid barrel (4) contains aluminum oxide polishing liquid, and a temperature sensor (6) is fixedly mounted on the inner wall of the polishing liquid barrel (4).

2. A sapphire LED polishing liquid heating circulation device according to claim 1, characterized in that: The polishing liquid barrel (4) is provided with a stirring assembly, and the stirring assembly comprises a support plate (7) fixedly connected to the top outer wall of the circulating liquid barrel (2), a stirring motor (8) fixedly mounted on the top outer wall of the support plate (7), a driving bevel gear (9) fixedly sleeved on the output shaft of the stirring motor (8), a stirring shaft (10) rotatably mounted on the support plate (7), a driven bevel gear (11) fixedly sleeved on the top of the stirring shaft (10), and a double helical stirring blade (12) welded to the outer wall of the stirring shaft (10).

3. A sapphire LED polishing liquid heating circulation device according to claim 2, characterized in that: The driving bevel gear (9) and the driven bevel gear (11) are meshed with each other, and the double helical stirring blade (12) is located in the polishing liquid barrel (4).

4. A sapphire LED polishing liquid heating circulation device according to claim 1, characterized in that: The liquid extraction end of the circulation pump (3) is connected to one side of the heating box (1) through a liquid extraction pipe (13), and an automatic valve (14) is installed on the liquid extraction pipe (13).

5. A sapphire LED polishing liquid heating circulation device according to claim 1, characterized in that: The liquid delivery end of the circulation pump (3) is connected to one end of the coil (5) through a liquid delivery pipe (18), and the other end of the coil (5) is connected to the other side of the heating box (1) through a return pipe (17).

6. A sapphire LED polishing liquid heating circulation device according to claim 4, characterized in that: The liquid extraction pipe (13) is connected to an external cooling pipe (15), and an automatic valve 2 (16) is installed on the external cooling pipe (15).

7. A sapphire LED polishing liquid heating circulation device according to claim 1, characterized in that: A controller (19) is fixedly mounted on the front outer wall of the heating box (1).

Images