Structure of magnetic control target shielding cover capable of being disassembled and assembled quickly

Abstract

The utility model discloses a structure of a magnetic control target fast dismounting shielding case, comprising a fixed base plate and a shielding case module, the fixed base plate is provided with a fixed part, the fixed part is provided with an elastic element, the shielding case module is provided with an L-shaped slot at a position corresponding to the fixed part, and the elastic element is provided with a through hole. And after the L-shaped slotted hole compresses the elastic element at the fixing piece, the shielding case module can be quickly disassembled and assembled in a push-pull manner. According to the structure of the magnetic control target shielding case capable of being quickly disassembled and assembled, the shielding case can be quickly disassembled and assembled in a push-pull mode, assembly and disassembly can be completed in a short time, the working efficiency can be greatly improved, the shielding case module can be always kept stable in the push-pull process through matched use of the fixing piece and the elastic element, and the shielding case can be quickly disassembled and assembled. The fixing piece can be tightly abutted against the shielding case module all the time under the action of the elastic element, and the L-shaped slotted hole in the shielding case module can be tightly connected with the fixing piece, so that the shielding case module can be effectively prevented from loosening or falling off in the use process.

Description

Technical Field

[0001] The utility model relates to a vacuum coating technology, and more specifically to a structure of a quick-disassembly shielding cover for a magnetron target. Background Art

[0002] Magnetron sputtering is an important coating technology in the field of vacuum coating, which has the advantages of low temperature, high speed, low energy consumption, wide range of applicable substrates and coating materials, dense film layer, high smoothness, good bonding force, etc. Magnetron sputtering coating mainly applies the Penning discharge principle. By applying a magnetic field in the discharge space, charged particles (electrons, ions) are bound in the discharge space, increasing the ionization rate of charged particles to neutral atoms (molecules), reducing the gas pressure and voltage required for glow discharge, and at the same time, the magnetic field on the target surface binds secondary electrons to the target surface, increasing the bombardment of secondary electrons on the target surface and improving the sputtering rate of the target.

[0003] When electrons are accelerated toward the substrate by the electric field, they collide with argon atoms and ionize a large number of argon ions and electrons. The electrons fly toward the substrate, and the argon ions are accelerated by the electric field to bombard the target material, sputtering a large number of target atoms. The neutral target atoms (or molecules) are deposited on the substrate to form a film.

[0004] In the actual operation of the cathode device, shielding devices are usually installed to ensure the stability and safety of the equipment. The main purpose of these shielding devices is to prevent the target base exposed to the vacuum chamber from being sputtered by ions, and because the shielding device is usually grounded and has the same potential as the anode, the ions will not bombard the shielding device, and thus will not bombard the target base, thus protecting non-target materials.

[0005] However, the shielding devices currently on the market have some obvious deficiencies in use. In particular, during installation and removal, the shielding device needs to be installed by tightening and loosening screws one by one. This traditional installation method is not only inefficient, but also prone to reduced shielding effect and even safety hazards during operation due to loose screws or insufficient tightening. Utility Model Content

[0006] In order to overcome the problem that the existing shielding device needs to be completed by tightening and loosening screws one by one, this installation method is not only inefficient, but also easily leads to a decrease in shielding effect due to loose screws or insufficient tightening during operation, and even causes safety hazards, the utility model provides a structure of a magnetron target quick-disassembly shielding cover.

[0007] The technical solution of the utility model is as follows:

[0008] A structure for quick disassembly and assembly of a shielding cover for a magnetron target comprises a fixed base plate and a shielding cover module, wherein the fixed base plate is provided with a fixing part, the fixing part is provided with an elastic element, and the shielding cover module is provided with an L-shaped slot hole at a position corresponding to the fixing part, and the L-shaped slot hole compresses the elastic element at the fixing part to realize quick disassembly and assembly of the shielding cover module by a push-pull manner.

[0009] According to the above-mentioned solution of the utility model, the shielding cover module includes a shielding cover body and a detachable plate, one end of the shielding cover body is open, and the detachable plate is installed on the open end of the shielding cover body.

[0010] According to the utility model of the above scheme, the two side surfaces and the top surface of the removable plate extend outward to form protrusions, and the shielding cover body is provided with openings at positions corresponding to the protrusions. The protrusions cooperate with the openings so that the removable plate can be installed on the shielding cover body.

[0011] According to the above-mentioned solution of the utility model, a limiting screw is installed on the removable plate, and the limiting screw is close to the bottom edge of the removable plate.

[0012] According to the above-mentioned solution of the utility model, the bottom edge of the removable plate extends horizontally outward to form a push-pull portion.

[0013] According to the above-mentioned solution of the utility model, a lock buckle is installed on the open end of the shielding cover body.

[0014] According to the above-mentioned solution of the utility model, the shielding cover body is an integrally formed structure.

[0015] According to the above-mentioned solution of the utility model, the fixing member includes a screw and a disc, the elastic element is arranged between the screw head and the disc, and the shielding cover module is installed between the disc and the fixed base plate.

[0016] According to the above-mentioned solution of the utility model, the elastic element is a disc spring or a wave spring.

[0017] According to the above solution of the utility model, the disc has a conical structure, and the size of the disc close to the fixed bottom plate is smaller than the size of the disc away from the fixed bottom plate.

[0018] The utility model according to the above scheme has the beneficial effect that the utility model provides a structure for quickly disassembling and assembling the shielding cover of a magnetron target, and adopts a push-pull method to quickly disassemble and assemble the shielding cover, which can complete installation and disassembly in a short time, and can greatly improve work efficiency. The coordinated use of fixings and elastic elements can ensure that the shielding cover module always remains stable during the pushing and pulling process, and the fixings can always remain tightly abutted against the shielding cover module under the action of the elastic elements. The L-shaped slots on the shielding cover module can be tightly connected to the fixings, which can effectively prevent the shielding cover module from loosening or falling off during use. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of the utility model;

[0020] Figure 2 for Figure 1 A magnified view of part A;

[0021] Figure 3 It is a schematic diagram of the exploded structure of the utility model;

[0022] Figure 4 It is a schematic diagram of the exploded structure of the shielding cover module of the present utility model.

[0023] In the drawings, the reference numerals are as follows:

[0024] 1. Fixed bottom plate; 11. Fixed piece; 111. Screw; 112. Disc; 12. Elastic element;

[0025] 2. Shielding cover module; 21. Shielding cover body; 211. L-shaped slot; 212. Opening; 213. Lock; 22. Removable plate; 221. Protrusion; 222. Limit screw; 223. Push-pull part. DETAILED DESCRIPTION

[0026] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments.

[0027] It should be noted that the terms "including" and "having" and any variations thereof in the specification and claims of the present utility model are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but optionally includes steps or units that are not listed, or optionally includes other steps or units inherent to these processes, methods, products or devices. Terms such as "setting" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral body; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. The directions or positions indicated by the terms "upper", "lower", "left", "right", "front", "back", "bottom", etc. are based on the directions or positions shown in the drawings, which are only for the convenience of description and cannot be understood as limitations on the present technical solution.

[0028] like Figure 1-Figure 4 As shown, the conventional shielding cover usually needs to tighten and loosen the screws 111 one by one, which is cumbersome and time-consuming. This embodiment provides a structure for a magnetron target quick-disassembly shielding cover, which adopts a push-pull method to quickly disassemble the shielding cover, and can complete installation and removal in a short time, which can greatly improve work efficiency. The operator can easily complete the installation and removal of the shielding cover without using additional tools or skills, which not only simplifies the operation process, but also reduces the requirements for operator skills.

[0029] Specifically, it includes a fixed base plate 1 and a shielding cover module 2. The fixed base plate 1 surrounds the periphery of the magnetron target and plays a role of fixing and supporting. A fixing part 11 is provided on the fixed base plate 1, and the fixing part 11 is provided with an elastic element 12. The shielding cover module 2 is provided with an L-shaped slot 211 at the corresponding position of the fixing part 11. After the L-shaped slot 211 compresses the elastic element 12 at the fixing part 11, the shielding cover module 2 can be quickly disassembled and assembled by pushing and pulling. The coordinated use of the fixing part 11 and the elastic element 12 can ensure that the shielding cover module 2 always remains stable during the pushing and pulling process. After the elastic element 12 is compressed, it is in a state to be restored. Under the action of the elastic element 12, the fixing part 11 can always remain tightly abutted against the shielding cover module 2. The L-shaped slot 211 on the shielding cover module 2 can be tightly connected to the fixing part 11, which can effectively prevent the shielding cover module 2 from loosening or falling off during use.

[0030] Since installation and removal become simple and quick, daily maintenance and cleaning of the shielding cover becomes more convenient. When the shielding cover needs to be cleaned or repaired, it can be quickly removed and reinstalled after maintenance is completed, ensuring the continuous and stable operation of the equipment.

[0031] In one embodiment, when installing the shielding cover module 2, after the L-shaped slot 211 is pushed and pulled to one side, there will be a certain gap between the shielding cover module 2 and the fixed base plate 1, which will lead to the problem of reduced shielding effect of the magnetron target, and may even lead to reduced performance of the device or unstable operation. In order to solve the above problems, the shielding cover module 2 is set as a split structure in this embodiment. Specifically, the shielding cover module 2 includes a shielding cover body 21 and a removable plate 22. The shielding cover body 21 is the main part of the shielding cover module 2, and the L-shaped slot 211 is set on it, which is used to cooperate with the fixing part 11 on the fixed base plate 1 to achieve rapid push-pull installation. The removable plate 22 is a supplementary part of the shielding cover module 2. Its size and shape match the open end of the shielding cover body 21, and can be installed on the shielding cover body 21 after the shielding cover body 21 is installed. The removable plate 22 can be close to the fixed base plate 1, effectively eliminating the gap between the shielding cover module 2 and the fixed base plate 1, thereby ensuring the shielding effect of the magnetron target.

[0032] In order to realize the rapid installation and removal of the removable plate 22, one end of the shielding cover body 21 is open. The removable plate 22 is installed at the open end of the shielding cover body 21. After the shielding cover body 21 is installed, the removable plate 22 is installed, and the removable plate 22 can be closely attached to the fixed bottom plate 1. The removable plate 22 can be quickly installed on the shielding cover body 21 and form an integrated module with the shielding cover body 21.

[0033] The design of the removable plate 22 also takes into account the need for quick installation and disassembly. It adopts an interface and connection method that matches the shielding cover body 21, making the installation process simple and quick. The installation method of the removable plate 22 and the shielding cover body 21 is specifically as follows: the two side surfaces and the top surface of the removable plate 22 extend outward to form a protrusion 221, and the shielding cover body 21 is provided with an opening 212 at the corresponding position of the protrusion 221. The protrusion 221 cooperates with the opening 212 to enable the removable plate 22 to be installed on the shielding cover body 21. A limiting screw 222 is installed on the removable plate 22, and the limiting screw 222 is close to the bottom edge of the removable plate 22. The setting of the limiting screw 222 can ensure the distance between the removable plate 22 and the target electrode module inside the fixed bottom plate 1, and also limit the screen cover body. In the above manner, the connection between the removable plate 22 and the shielding cover body 21 is stable, and a stable shielding effect can be maintained during the operation of the equipment. Preferably, a lock 213 is installed on the open end of the shielding cover body 21. After the lock 213 is locked, the protrusions 221 on both sides of the removable plate 22 can be tightly connected with the opening 212 of the shielding cover body 21. After the lock 213 is opened, the removable plate 22 can be quickly taken out.

[0034] Preferably, the bottom edge of the removable plate 22 extends outward horizontally to form a push-pull portion 223 . The push-pull portion 223 is provided for the user to hold, so that the removable plate 22 can be quickly installed and removed.

[0035] Preferably, the shielding cover body 21 is an integrally formed structure. The integrally formed structure ensures the firmness and stability of the shielding cover body 21. Since there are no additional interfaces or connecting parts, the entire shielding cover body 21 becomes a continuous whole, thereby reducing the risk of performance degradation caused by loose or damaged connecting parts. The shielding cover body 21 can show stronger resistance when subjected to external pressure or impact, ensuring the stable operation of the magnetron target.

[0036] In one embodiment, the fixing member 11 includes a screw 111 and a disc 112 , the elastic element 12 is disposed between the head of the screw 111 and the disc 112 , and the shielding cover module 2 is installed between the disc 112 and the fixed base plate 1 .

[0037] The disc 112 has a conical structure, and the size of the disc 112 on the side close to the fixed base plate 1 is smaller than the size on the side away from the fixed base plate 1. The conical structure of the disc 112 allows it to fit more closely to the L-shaped slot 211 of the shielding cover module 2 during the fixing process. When the shielding cover module 2 is pushed into the fixing member 11, the L-shaped slot 211 will directly contact the disc 112. As the size of the disc 112 gradually decreases, the L-shaped slot 211 can be easily inserted between the disc 112 and the fixed base plate 1, achieving a quick and stable installation. This design not only simplifies the installation process, but also improves the reliability and stability of the installation.

[0038] The elastic element 12 between the disc 112 and the head of the screw 111 plays a vital role. In this embodiment, the elastic element 12 is preferably a disc spring or a wave spring, both of which have excellent elasticity and recovery properties. During the installation process, the elastic element 12 is compressed, which produces a certain elastic deformation. This elastic deformation can not only prevent the shielding cover module 2 from loosening or falling off during use, but also provide a certain buffering effect during the fixing process, effectively reducing the impact of external shocks on the shielding cover. Both disc springs and wave springs have good fatigue resistance and can maintain stable elastic properties during long-term use, thereby ensuring the stable fixation of the shielding cover module 2.

[0039] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to the utility model.

[0040] The above is an exemplary description of the utility model patent in conjunction with the accompanying drawings. It is obvious that the implementation of the utility model patent is not limited to the above-mentioned method. As long as various improvements are made by adopting the method concept and technical solution of the utility model patent, or the concept and technical solution of the utility model patent are directly applied to other occasions without improvement, they are all within the protection scope of the utility model.

Claims

1. A structure for quick disassembly and assembly of a shielding cover for a magnetron target, characterized in that: It includes a fixed base plate and a shielding cover module. The fixed base plate is provided with a fixing part, the fixing part is provided with an elastic element, and the shielding cover module is provided with an L-shaped slot hole at a corresponding position of the fixing part. After the L-shaped slot hole compresses the elastic element at the fixing part, the shielding cover module can be quickly disassembled and assembled by pushing and pulling.

2. The structure of a magnetron target quick-disassembly shielding cover according to claim 1, characterized in that: The shielding cover module comprises a shielding cover body and a detachable plate. One end of the shielding cover body is open, and the detachable plate is installed on the open end of the shielding cover body.

3. The structure of a magnetron target quick-disassembly shielding cover according to claim 2, characterized in that: Both side surfaces and the top surface of the removable plate extend outward to form protrusions, and the shielding cover body is provided with openings at positions corresponding to the protrusions. The protrusions cooperate with the openings so that the removable plate is installed on the shielding cover body.

4. The structure of a magnetron target quick-detachable shielding cover according to claim 3, characterized in that: The detachable plate is provided with a limiting screw, and the limiting screw is close to the bottom edge of the detachable plate.

5. The structure of a magnetron target quick-detachable shielding cover according to claim 4, characterized in that: The bottom edge of the removable plate extends outward horizontally to form a push-pull portion.

6. A structure for a magnetron target quick-detachable shielding cover according to any one of claims 3 to 5, characterized in that: A lock buckle is installed at one open end of the shielding cover body.

7. The structure of a magnetron target quick-detachable shielding cover according to claim 6, characterized in that: The shielding cover body is an integrally formed structure.

8. The structure of a magnetron target quick-detachable shielding cover according to claim 1, characterized in that: The fixing member comprises a screw and a disc, the elastic element is arranged between the head of the screw and the disc, and the shielding cover module is installed between the disc and the fixed bottom plate.

9. The structure of a magnetron target quick-detachable shielding cover according to claim 8, characterized in that: The elastic element is a disc spring or a wave spring.

10. The structure of a magnetron target quick-detachable shielding cover according to claim 9, characterized in that: The disc is in a conical structure, and the size of the disc at a side close to the fixed bottom plate is smaller than the size of the disc at a side away from the fixed bottom plate.

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