Water-cooling rotating structure

Abstract

The utility model discloses a water-cooling rotating structure which comprises a main cavity top plate, a rotating conduction assembly and a liquid cooling assembly. The rotating conduction assembly is fixedly assembled above the top plate of the main cavity and comprises a rotating shaft, the top of the rotating shaft is fixedly connected with a rotating gear, the outer side of the rotating shaft is sleeved with a liquid inlet sleeve and a liquid outlet sleeve, and the liquid inlet sleeve and the rotating shaft are matched to form a liquid inlet cavity and a liquid outlet cavity; and a liquid inlet guide pipe and a liquid outlet guide pipe are inserted into the bottom of the rotating shaft. And the liquid cooling assembly is fixedly assembled below the top plate of the main cavity. According to the utility model, by arranging the rotary conduction assembly and the liquid cooling mechanism, rotary refrigeration can be carried out on the plating pot or the loading disc, the effect of cooling nonuniformity of the water cooling disc due to different positions of the liquid inlet pipe and the liquid outlet pipe is reduced, and the cooling uniformity and the cooling effect of the water cooling structure on the plating pot or the loading disc are improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of water cooling structures of vapor deposition machines, and in particular relates to a water cooling rotating structure. Background Art

[0002] An evaporation machine refers to a type of equipment that evaporates organic semiconductor materials and luminescent materials into films and makes them into light-emitting devices. During use, the evaporation machine uses an annular loading tray to carry the substrate, and then performs evaporation treatment on the leaked part of the loading tray. During use, the evaporation machine needs to be equipped with a water-cooling structure at the bottom of the loading tray. The water-cooling structure is used to cool the plating pot or loading tray on which the substrate is placed, thereby reducing the adverse effects of excessive temperature of the plating pot or loading tray on the substrate.

[0003] In the prior art, a water cooling plate is generally used as a water cooling structure to provide water cooling protection for a plating pot or a loading plate. The water cooling plate is hollow, and the plating pot or the loading plate is cooled by continuously inputting coolant into the hollow water cooling plate.

[0004] However, the water cooling plates in the prior art are mostly fixedly arranged. When such water cooling plates are used to cool the plating pot or the loading plate, the water cooling plates will be affected by the liquid inlet pipe and the flow of the coolant, resulting in a situation where the cooling effect is good at the liquid inlet pipe position and poor at the liquid outlet pipe position, resulting in poor uniformity and effect of the water cooling structure in cooling the plating pot or the loading plate.

[0005] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility Model Content

[0006] The utility model aims to provide a water-cooling rotating structure, which can perform rotational cooling on a plating pot or a loading tray, thereby improving the uniformity and effect of the water-cooling structure cooling the plating pot or the loading tray.

[0007] In order to achieve the above purpose, the technical solution provided by a specific embodiment of the utility model is as follows:

[0008] A water-cooled rotating structure comprises: a main cavity top plate, a rotating conduction component, and a liquid-cooling component.

[0009] The rotating conduction component is fixedly assembled above the top plate of the main cavity, and the rotating conduction component includes a rotating shaft, which is arranged to pass through the top plate of the main cavity, and the top of the rotating shaft is fixedly connected with a rotating gear, and the outer side of the rotating shaft is provided with a liquid inlet sleeve and a liquid outlet sleeve, and the liquid inlet sleeve and the liquid outlet sleeve cooperate with the rotating shaft to form a liquid inlet cavity and a liquid outlet cavity, and a liquid inlet channel and a liquid outlet channel are excavated in the rotating shaft, and the liquid inlet channel and the liquid outlet channel are respectively conductive with the liquid inlet cavity and the liquid outlet cavity, and the bottom of the rotating shaft is plugged with a liquid inlet guide pipe and a liquid outlet guide pipe, and the liquid inlet guide pipe and the liquid outlet guide pipe are respectively connected with the liquid inlet channel and the liquid outlet channel.

[0010] The liquid cooling component is fixedly installed below the top plate of the main cavity, and the liquid cooling component includes a suspension plate, and the suspension plate is fixedly installed at the bottom of the rotating shaft. A water cooling plate is fixedly installed below the suspension plate, and an arc-shaped liquid cooling cavity is excavated in the water cooling plate. A liquid inlet connecting pipe and a liquid outlet connecting pipe are fixedly connected to one side of the water cooling plate, and the liquid inlet connecting pipe and the liquid outlet connecting pipe are both connected to the arc-shaped liquid cooling cavity.

[0011] In one or more embodiments of the utility model, a motor bracket is fixedly installed above the top plate of the main cavity. The motor bracket plays a role in assembling and fixing the drive motor. The drive motor is fixedly installed in the motor bracket. The drive motor plays a role in providing power, and plays a role in rotationally driving the transmission gear by controlling the operation of the drive motor.

[0012] In one or more embodiments of the utility model, a transmission gear is fixedly mounted above the top plate of the main cavity, the transmission gear is fixedly connected to the output shaft of the drive motor, and the transmission gear is meshed with the rotary gear. The transmission gear plays a role in transmitting the power of the drive motor, so that the rotating shaft can be rotationally driven by rotating the transmission gear.

[0013] In one or more embodiments of the utility model, a bearing is fixedly installed above the rotary gear, and the bearing is sleeved on the top of the rotating shaft. The bearing plays a role of locking and fixing the rotary gear, and a plurality of locking bolts are locked and fixed between the bearing and the rotating shaft. The bearing is fixedly assembled on the top of the rotating shaft by the plurality of locking bolts.

[0014] In one or more embodiments of the utility model, a liquid delivery channel is excavated in the liquid inlet sleeve and the liquid outlet sleeve, and the liquid delivery channel is in communication with the liquid inlet cavity and the liquid outlet cavity. The liquid inlet cavity is connected to the liquid inlet nozzle, and the liquid outlet cavity is connected to the liquid outlet nozzle through the liquid delivery channel. The outer thread of the liquid inlet sleeve is provided with a liquid inlet nozzle, and the liquid inlet nozzle is in communication with the liquid delivery channel. Cooling liquid is added to the liquid delivery channel through the liquid inlet nozzle. The outer thread of the liquid outlet sleeve is connected to the liquid outlet nozzle, and the liquid outlet nozzle is in communication with the liquid delivery channel. The cooling liquid after heat exchange is discharged through the liquid outlet nozzle.

[0015] In one or more embodiments of the utility model, a casing cover plate is fixedly installed above the liquid inlet casing. The casing cover plate is used to limit the assembly of the liquid inlet casing. A casing connecting plate is installed between the liquid inlet casing and the liquid outlet casing. The casing connecting plate serves as an assembly separation for the liquid inlet casing and the liquid outlet casing. A casing bottom plate is installed at the bottom of the liquid outlet casing. The casing bottom plate serves as an assembly limit for the liquid outlet casing. A plurality of assembly bolt rods are fixedly connected between the casing cover plate, the casing connecting plate, the liquid inlet casing, the liquid outlet casing and the casing bottom plate. It is convenient to assemble and fix the casing cover plate, the casing connecting plate, the liquid inlet casing, the liquid outlet casing and the casing bottom plate through a plurality of assembly bolt rods.

[0016] In one or more embodiments of the utility model, a top flange is fixedly installed above the top plate of the main cavity. The top flange plays a role in assembling and fixing the rotating shaft bearing. A rotating shaft bearing is fixedly installed above the top flange, and the top flange and the rotating shaft bearing are both mounted on the outside of the rotating shaft. The rotating shaft is assisted in assembly and fixing by the rotating shaft bearing. Multiple groups of evenly distributed limiting pillars are fixedly installed between the rotating shaft bearing and the sleeve bottom plate. It is convenient to assemble and fix the sleeve bottom plate and the rotating shaft bearing by multiple groups of limiting pillars.

[0017] In one or more embodiments of the utility model, an assembly connection plate is fixedly installed above the suspension plate. The rotating shaft and the suspension plate are connected and fixed by the assembly connection plate, so that the suspension plate can be driven to rotate by the rotating shaft. The assembly connection plate and the bottom end of the rotating shaft are fixedly connected by a plurality of evenly distributed fixing bolts. The assembly connection plate and the rotating shaft are assembled and fixed by a plurality of fixing bolts.

[0018] In one or more embodiments of the utility model, a plurality of groups of connecting screw members are fixedly connected between the suspension plate and the water cooling plate. The connecting screw members connect and fix the suspension plate and the water cooling plate, and the distance between the suspension plate and the water cooling plate can be adjusted and controlled by adjusting and controlling the plurality of groups of connecting screw members. A first liquid inlet joint is fixedly connected to the end of the liquid inlet connecting pipe away from the water cooling plate. The first liquid inlet joint serves to connect the connecting bellows and the second liquid inlet joint. A second liquid inlet joint is installed at the end of the first liquid inlet joint away from the liquid inlet connecting pipe, and the second liquid inlet joint is connected to the liquid inlet guide pipe. The cooling liquid guided out of the liquid inlet guide pipe is transported to the connecting bellows through the second liquid inlet joint.

[0019] In one or more embodiments of the utility model, a first liquid outlet joint is fixedly connected to one end of the liquid outlet connecting pipe away from the water cooling disk. The connecting bellows is connected and communicated with the liquid outlet connecting pipe through the first liquid outlet joint. A second liquid outlet joint is equipped at one end of the first liquid outlet joint away from the liquid outlet connecting pipe, and the second liquid outlet joint is connected to the liquid outlet guide pipe, and the cooling liquid after heat exchange refluxed in the liquid outlet connecting pipe is refluxed and transported through the second liquid outlet joint. A connecting bellows is fixedly connected between the first liquid inlet joint and the second liquid inlet joint, and between the first liquid outlet joint and the second liquid outlet joint. The first liquid inlet joint and the second liquid inlet joint, and the first liquid outlet joint and the second liquid outlet joint are connected and communicated respectively through a pair of connecting bellows.

[0020] Compared with the prior art, the utility model can perform rotational cooling on the plating pot or the loading tray by arranging a rotating conduction component and a liquid cooling mechanism, thereby reducing the effect of uneven cooling caused by the different positions of the liquid inlet pipe and the liquid outlet pipe of the water cooling tray, and improving the uniformity and cooling effect of the water cooling structure on the plating pot or the loading tray. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 It is a three-dimensional diagram of a water-cooled rotating structure in one embodiment of the utility model;

[0023] Figure 2 It is a front view of a water-cooled rotating structure in one embodiment of the utility model;

[0024] Figure 3 A three-dimensional diagram of a rotary conduction component in an embodiment of the utility model;

[0025] Figure 4 It is a three-dimensional diagram of a liquid cooling component in one embodiment of the utility model;

[0026] Figure 5 Another angle view of the liquid cooling component in one embodiment of the utility model;

[0027] Figure 6 It is a partial structural cross-sectional view of a water-cooled rotating structure in one embodiment of the utility model;

[0028] Figure 7 for Figure 6 Schematic diagram of the structure at A in the middle;

[0029] Figure 8 It is a side cross-sectional view of a water-cooled rotating structure in one embodiment of the utility model;

[0030] Fig. 9 for Figure 8 Schematic diagram of the structure at B in the middle;

[0031] Fig.10 It is a top cross-sectional view of a water cooling plate in one embodiment of the utility model.

[0032] Description of main reference numerals:

[0033] 1-main cavity top plate, 2-rotating guide assembly, 201-rotating shaft, 202-rotating gear, 203-liquid inlet sleeve, 204-liquid outlet sleeve, 205-liquid inlet cavity, 206-liquid outlet cavity, 207-liquid inlet channel, 208-liquid outlet channel, 209-liquid inlet guide pipe, 210-liquid outlet guide pipe, 211-motor bracket, 212-driving motor, 213-transmission gear, 214-bearing, 215-locking bolt, 216-liquid inlet nozzle, 217-liquid outlet nozzle, 218-sleeve cover plate, 219 - casing connecting plate, 220 - casing bottom plate, 221 - assembly bolt rod, 222 - top flange, 223 - rotating shaft bearing, 224 - limiting pillar, 3 - liquid cooling component, 301 - suspension plate, 302 - water cooling plate, 303 - liquid inlet connecting pipe, 304 - liquid outlet connecting pipe, 305 - assembly connecting plate, 306 - fixing bolt, 307 - connecting screw member, 308 - first liquid inlet joint, 309 - second liquid inlet joint, 310 - first liquid outlet joint, 311 - second liquid outlet joint, 312 - connecting bellows. DETAILED DESCRIPTION

[0034] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0035] like Figures 1 to 10 As shown, a water-cooled rotating structure in an embodiment of the utility model includes: a main cavity top plate 1, a rotating conductive component 2, and a liquid cooling component 3.

[0036] like Figure 1 As shown, the rotary conduction component 2 is fixedly assembled above the main cavity top plate 1. The rotary conduction component 2 is used to rotate and adjust the liquid cooling component 3 and transport the cooling liquid.

[0037] like Figure 1 As shown, the rotary conduction assembly 2 includes a rotary shaft 201, which is arranged through the main cavity top plate 1. The assembly connecting plate 305 is assembled, fixed and rotationally driven by the rotary shaft 201. At the same time, the coolant is guided in and out by the rotary shaft 201.

[0038] like Figure 1 As shown, a rotating gear 202 is fixedly connected to the top of the rotating shaft 201. The rotating shaft 201 is driven to rotate by rotating the rotating gear 202, so that the water cooling plate 302 can be easily controlled to rotate.

[0039] like Figure 1 to Figure 2 As shown, a motor bracket 211 is fixedly installed above the main cavity top plate 1. The motor bracket 211 plays a role in assembling and fixing the driving motor 212.

[0040] like Figure 1 to Figure 2 As shown, a driving motor 212 is fixedly mounted in the motor bracket 211. The driving motor 212 provides power, and the driving gear 213 is driven to rotate by controlling the operation of the driving motor 212.

[0041] like Figure 1 to Figure 2 As shown, a transmission gear 213 is fixedly mounted on the top plate 1 of the main cavity, and the transmission gear 213 is fixedly connected to the output shaft of the driving motor 212, and the transmission gear 213 is meshed with the rotary gear 202. The transmission gear 213 plays a role in transmitting the power of the driving motor 212, so that the rotating shaft 201 can be rotationally driven by rotating the transmission gear 213.

[0042] like Figure 1 to Figure 2 As shown, a bearing 214 is fixedly installed above the rotating gear 202, and the bearing 214 is sleeved on the top of the rotating shaft 201. The bearing 214 plays a role of locking and fixing the rotating gear 202, and a plurality of locking bolts 215 are locked and fixed between the bearing 214 and the rotating shaft 201. The bearing 214 is fixedly assembled on the top of the rotating shaft 201 by the plurality of locking bolts 215.

[0043] like Figures 8 to 9 As shown, a liquid inlet sleeve 203 and a liquid outlet sleeve 204 are sleeved on the outer side of the rotating shaft 201. The cooling liquid delivered by the liquid inlet nozzle 216 is guided and delivered through the liquid inlet sleeve 203. The cooling liquid returned from the liquid outlet nozzle 217 is guided and delivered through the liquid outlet sleeve 204.

[0044] Specifically, liquid delivery channels are opened in the liquid inlet sleeve 203 and the liquid outlet sleeve 204, and the liquid delivery channels are connected to the liquid inlet cavity 205 and the liquid outlet cavity 206. The liquid inlet cavity 205 is connected to the liquid inlet nozzle 216, and the liquid outlet cavity 206 is connected to the liquid outlet nozzle 217 through the liquid delivery channels.

[0045] like Figure 2 As shown, a liquid inlet nozzle 216 is threadedly mounted on the outer side of the liquid inlet sleeve 203, and the liquid inlet nozzle 216 is connected to the liquid delivery channel. Cooling liquid is added into the liquid delivery channel through the liquid inlet nozzle 216.

[0046] like Figure 2 As shown, the outer side of the liquid outlet sleeve 204 is threadedly connected with a liquid outlet nozzle 217, and the liquid outlet nozzle 217 is communicated with the liquid delivery channel. The cooling liquid after heat exchange is discharged through the liquid outlet nozzle 217.

[0047] like Figures 8 to 9 As shown, the liquid inlet sleeve 203 and the liquid outlet sleeve 204 cooperate with the rotating shaft 201 to form a liquid inlet cavity 205 and a liquid outlet cavity 206. The cooling liquid added by the liquid inlet nozzle 216 is guided and limited through the liquid inlet cavity 205. The cooling liquid to be discharged from the liquid outlet nozzle 217 is guided and limited through the liquid outlet cavity 206.

[0048] Specifically, a liquid inlet channel 207 and a liquid outlet channel 208 are excavated in the rotating shaft 201, and the liquid inlet channel 207 and the liquid outlet channel 208 are respectively connected to the liquid inlet cavity 205 and the liquid outlet cavity 206. The cooling liquid transported in the liquid inlet cavity 205 is guided and transported through the liquid inlet channel 207. The cooling liquid after heat exchange is guided and transported through the liquid outlet channel 208.

[0049] like Figure 8As shown, a liquid inlet guide tube 209 and a liquid outlet guide tube 210 are inserted into the bottom of the rotating shaft 201, and the liquid inlet guide tube 209 and the liquid outlet guide tube 210 are respectively connected to the liquid inlet flow channel 207 and the liquid outlet flow channel 208. It is convenient to connect the liquid inlet flow channel 207 with the second liquid inlet joint 309 through the liquid inlet guide tube 209, and connect the liquid outlet flow channel 208 with the second liquid outlet joint 311 through the liquid outlet guide tube 210.

[0050] like Figures 6 to 9 As shown, a sleeve cover plate 218 is fixedly mounted above the liquid inlet sleeve 203. The sleeve cover plate 218 is used to position the liquid inlet sleeve 203.

[0051] like Figures 6 to 9 As shown, a sleeve connecting plate 219 is installed between the liquid inlet sleeve 203 and the liquid outlet sleeve 204. The sleeve connecting plate 219 plays a role of assembling and separating the liquid inlet sleeve 203 and the liquid outlet sleeve 204.

[0052] like Figures 6 to 9 As shown, a casing bottom plate 220 is installed at the bottom of the liquid outlet casing 204. The casing bottom plate 220 plays a role of assembling and limiting the liquid outlet casing 204.

[0053] like Figures 8 to 9 As shown, a plurality of assembly bolt rods 221 are fixedly connected between the casing cover plate 218, the casing connection plate 219, the liquid inlet casing 203, the liquid outlet casing 204 and the casing bottom plate 220. The casing cover plate 218, the casing connection plate 219, the liquid inlet casing 203, the liquid outlet casing 204 and the casing bottom plate 220 are conveniently assembled and fixed by the plurality of assembly bolt rods 221.

[0054] like Figures 6 to 9 As shown, a top flange 222 is fixedly installed above the main cavity top plate 1. The top flange 222 plays a role in assembling and fixing the rotating shaft bearing 223.

[0055] like Figures 6 to 9 As shown, a rotating shaft bearing 223 is fixedly mounted above the top flange 222, and both the top flange 222 and the rotating shaft bearing 223 are sleeved on the outside of the rotating shaft 201. The rotating shaft bearing 223 is used to assist in assembling and fixing the rotating shaft 201.

[0056] like Figures 2 to 9 As shown, multiple groups of evenly distributed limiting pillars 224 are fixedly installed between the rotating shaft bearing 223 and the sleeve bottom plate 220. It is convenient to assemble and fix the sleeve bottom plate 220 and the rotating shaft bearing 223 through multiple groups of limiting pillars 224.

[0057] like Figures 4 to 5As shown, the liquid cooling component 3 is fixedly assembled below the main cavity top plate 1, and the liquid cooling component 3 includes a suspension plate 301, and the suspension plate 301 is fixedly assembled at the bottom of the rotating shaft 201. The suspension plate 301 is used to assemble, fix and control the rotation of the water cooling plate 302.

[0058] like Figures 4 to 5 As shown, an assembly connecting plate 305 is fixedly installed above the suspension plate 301. The rotating shaft 201 and the suspension plate 301 are connected and fixed by the assembly connecting plate 305, so that the suspension plate 301 can be rotated and driven by the rotating shaft 201.

[0059] like Figures 4 to 5 As shown, the assembly connecting plate 305 and the bottom end of the rotating shaft 201 are fixedly connected by a plurality of evenly distributed fixing bolts 306. The assembly connecting plate 305 and the rotating shaft 201 are assembled and fixed by the plurality of fixing bolts 306.

[0060] like Figures 4 to 5 As shown, a water cooling plate 302 is fixedly mounted below the suspension plate 301. The water cooling plate 302 is used to cool the plating pot or the loading plate.

[0061] like Fig.10 As shown, an arc-shaped liquid cooling cavity is formed in the water cooling plate 302. The water cooling plate 302 cools the plating pot or the loading plate by circulating cooling liquid into the arc-shaped liquid cooling cavity.

[0062] like Figures 4 to 5 As shown, a plurality of connecting screw members 307 are fixedly connected between the suspension plate 301 and the water cooling plate 302. The connecting screw members 307 connect and fix the suspension plate 301 and the water cooling plate 302, and the distance between the suspension plate 301 and the water cooling plate 302 can be adjusted and controlled by adjusting and controlling the plurality of connecting screw members 307.

[0063] like Figures 4 to 5 As shown, a liquid inlet connecting pipe 303 and a liquid outlet connecting pipe 304 are fixedly connected to one side of the water cooling plate 302, and the liquid inlet connecting pipe 303 and the liquid outlet connecting pipe 304 are both connected to the arc-shaped liquid cooling cavity.

[0064] like Figures 4 to 5 As shown, one end of the liquid inlet connecting pipe 303 away from the water cooling plate 302 is fixedly connected to a first liquid inlet joint 308. The first liquid inlet joint 308 serves to connect the bellows 312 and the second liquid inlet joint 309.

[0065] like Figures 4 to 5As shown, the end of the first liquid inlet joint 308 away from the liquid inlet connecting pipe 303 is equipped with a second liquid inlet joint 309, and the second liquid inlet joint 309 is connected to the liquid inlet guide pipe 209. The cooling liquid guided out of the liquid inlet guide pipe 209 is transported to the connecting bellows 312 through the second liquid inlet joint 309.

[0066] like Figures 4 to 5 As shown, one end of the liquid outlet connecting pipe 304 away from the water cooling plate 302 is fixedly connected with a first liquid outlet joint 310. The connecting bellows 312 is connected and conducted to the liquid outlet connecting pipe 304 through the first liquid outlet joint 310.

[0067] like Figures 4 to 5 As shown, the end of the first liquid outlet joint 310 away from the liquid outlet connecting pipe 304 is equipped with a second liquid outlet joint 311, and the second liquid outlet joint 311 is connected to the liquid outlet guide pipe 210, and the cooling liquid after heat exchange refluxed in the liquid outlet connecting pipe 304 is refluxed and transported through the second liquid outlet joint 311.

[0068] like Figures 4 to 5 As shown, a connecting bellows 312 is fixedly connected between the first liquid inlet joint 308 and the second liquid inlet joint 309, and between the first liquid outlet joint 310 and the second liquid outlet joint 311. The first liquid inlet joint 308 and the second liquid inlet joint 309, and the first liquid outlet joint 310 and the second liquid outlet joint 311 are connected and conducted by a pair of connecting bellows 312.

[0069] During specific use, the plating pot or loading plate with the substrate is placed on the water cooling plate 302, and the cooling liquid is transported to the liquid inlet cavity 205 along the liquid inlet nozzle 216 by connecting the cooling liquid delivery pipe to the liquid inlet nozzle 216. The cooling liquid is transported to the arc-shaped liquid cooling cavity in the water cooling plate 302 along the liquid inlet channel 207, the liquid inlet guide pipe 209, the second liquid inlet joint 309, the connecting bellows 312, the first liquid inlet joint 308 and the liquid inlet connecting pipe 303. The plating pot or loading plate placed on the water cooling plate 302 is cooled by the cooling liquid circulating in the water cooling plate 302.

[0070] The cooling liquid after heat exchange is transported along the arc-shaped liquid cooling cavity to the liquid outlet connecting pipe 304 under pressure, and is transported along the first liquid outlet joint 310, the connecting bellows 312, the second liquid outlet joint 311, the liquid outlet guide pipe 210 and the liquid outlet channel 208 to the liquid outlet cavity 206, and can then be discharged from the liquid outlet nozzle 217. The cooling liquid circulates in the water cooling plate 302, so that the water cooling plate 302 cools down the plating pot or the loading plate.

[0071] At the same time, the driving motor 212 can be controlled to drive the transmission gear 213 to rotate, and the rotating shaft 201 rotates under the meshing action of the transmission gear 213 and the rotating gear 202. When the rotating shaft 201 rotates, the water cooling plate 302 rotates synchronously with the cooperation of the suspension plate 301, the assembly connecting plate 305, the fixing bolts 306 and the connecting screw member 307. The rotation of the water cooling plate 302 can be used to rotationally cool the plating pot or the loading plate, reducing the effect of uneven cooling of the water cooling plate 302 due to the different positions of the liquid inlet and outlet pipes, thereby improving the uniformity and cooling effect of the water cooling structure on the plating pot or the loading plate.

[0072] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0073] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A water-cooled rotating structure, characterized in that: include: Main cavity top plate; A rotating conduction component is fixedly assembled on the top of the main cavity top plate, the rotating conduction component includes a rotating shaft, the rotating shaft is arranged through the main cavity top plate, the top of the rotating shaft is fixedly connected with a rotating gear, the outer side of the rotating shaft is sleeved with a liquid inlet sleeve and a liquid outlet sleeve, the liquid inlet sleeve and the liquid outlet sleeve cooperate with the rotating shaft to form a liquid inlet cavity and a liquid outlet cavity, the rotating shaft is excavated with a liquid inlet flow channel and a liquid outlet flow channel, the liquid inlet flow channel and the liquid outlet flow channel are respectively connected with the liquid inlet cavity and the liquid outlet cavity, the bottom of the rotating shaft is plugged with a liquid inlet guide pipe and a liquid outlet guide pipe, the liquid inlet guide pipe and the liquid outlet guide pipe are respectively connected with the liquid inlet flow channel and the liquid outlet flow channel; A liquid cooling component is fixedly mounted below the top plate of the main cavity, and the liquid cooling component includes a suspension plate, and the suspension plate is fixedly mounted at the bottom of the rotating shaft. A water cooling plate is fixedly mounted below the suspension plate, and an arc-shaped liquid cooling cavity is excavated in the water cooling plate. A liquid inlet connecting pipe and a liquid outlet connecting pipe are fixedly connected to one side of the water cooling plate, and the liquid inlet connecting pipe and the liquid outlet connecting pipe are both connected to the arc-shaped liquid cooling cavity.

2. The water-cooled rotating structure according to claim 1, characterized in that: A motor bracket is fixedly installed above the top plate of the main cavity, and a driving motor is fixedly installed in the motor bracket.

3. The water-cooled rotating structure according to claim 2, characterized in that: A transmission gear is fixedly mounted above the top plate of the main cavity, the transmission gear is fixedly connected to the output shaft of the driving motor, and the transmission gear is meshed with the rotary gear.

4. The water-cooled rotating structure according to claim 3, characterized in that: A bearing is fixedly installed above the rotary gear, the bearing is sleeved on the top of the rotating shaft, and a plurality of locking bolts are locked and fixed between the bearing and the rotating shaft.

5. The water-cooled rotating structure according to claim 1, characterized in that: Liquid conveying channels are excavated in the liquid inlet sleeve and the liquid outlet sleeve, and the liquid conveying channels are communicated with the liquid inlet cavity and the liquid outlet cavity. The outer side of the liquid inlet sleeve is threadedly installed with a liquid inlet nozzle, and the liquid inlet nozzle is communicated with the liquid conveying channel. The outer side of the liquid outlet sleeve is threadedly connected with a liquid outlet nozzle, and the liquid outlet nozzle is communicated with the liquid conveying channel.

6. The water-cooled rotating structure according to any one of claims 1 or 5, characterized in that: A casing cover plate is fixedly installed above the liquid inlet casing, a casing connecting plate is installed between the liquid inlet casing and the liquid outlet casing, a casing bottom plate is installed at the bottom of the liquid outlet casing, and a plurality of assembly bolt rods are fixedly connected between the casing cover plate, the casing connecting plate, the liquid inlet casing, the liquid outlet casing and the casing bottom plate.

7. The water-cooled rotating structure according to claim 1, characterized in that: A top flange is fixedly installed above the top plate of the main cavity, a rotating shaft bearing is fixedly installed above the top flange, the top flange and the rotating shaft bearing are both sleeved on the outside of the rotating shaft, and a plurality of groups of evenly distributed limiting pillars are fixedly installed between the rotating shaft bearing and the sleeve bottom plate.

8. The water-cooled rotating structure according to claim 1, characterized in that: An assembly connection plate is fixedly installed above the suspension plate, and the assembly connection plate is fixedly connected to the bottom end of the rotating shaft by a plurality of evenly distributed fixing bolts.

9. The water-cooled rotating structure according to claim 1, characterized in that: A plurality of connecting screw members are fixedly connected between the suspension plate and the water cooling plate, a first liquid inlet joint is fixedly connected to one end of the liquid inlet connecting pipe away from the water cooling plate, a second liquid inlet joint is assembled to one end of the first liquid inlet joint away from the liquid inlet connecting pipe, and the second liquid inlet joint is communicated with the liquid inlet guide pipe.

10. The water-cooled rotating structure according to claim 9, characterized in that: The end of the liquid outlet connecting pipe away from the water cooling disk is fixedly connected to the first liquid outlet joint, the end of the first liquid outlet joint away from the liquid outlet connecting pipe is equipped with a second liquid outlet joint, the second liquid outlet joint is connected to the liquid outlet guide pipe, and the first liquid inlet joint and the second liquid inlet joint, as well as the first liquid outlet joint and the second liquid outlet joint are fixedly connected with a connecting bellows.

Images