Calcination equipment for preparing graphite electrode column of quartz crucible
By designing a simple calcining equipment, using cylindrical support members and multiple open grooves to support the graphite electrode columns, and heating them at high temperatures in an inert atmosphere, the complex and high cost problems of existing equipment are solved, and effective calcination of the graphite electrode columns and the improvement of the quality of the quartz crucible are achieved.
Patent Information
- Application Number
- CN202420547813.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-20
- Publication Date
- 2025-03-25
- Estimated Expiration
- 2034-03-20
AI Technical Summary
The existing graphite electrode column calcining equipment is complex in design, high in manufacturing cost, and it is difficult to effectively remove non-pure graphite impurities in graphite electrode columns, affecting the quality of the quartz crucible.
Design a simple calcining equipment, including furnace body, support and heater. The support member is a cylindrical cylinder body, and a plurality of open grooves are provided on the cylinder wall to support and calcinate the graphite electrode column. Heating at high temperature in an inert atmosphere ensures stability and uniform heating of the graphite electrode column through the design of the opening groove.
Effective calcination and purification of graphite electrode columns is achieved, the utilization rate of graphite electrodes is reduced, the yield and quality of quartz crucibles are improved, and the design is simple and the manufacturing cost is low.
Smart Images
Figure CN222670665U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of quartz crucible preparation, in particular to a calcining device for preparing a graphite electrode column of a quartz crucible. Background Art
[0002] Quartz crucible is the only container for holding silicon material and silicon liquid for crystal pulling in the current crystal pulling process. Its quality directly affects the crystallization performance of single crystal. In the production process of quartz crucible, three-phase high voltage electricity is usually used to make the graphite electrode column discharge violently to generate high temperature to prepare quartz crucible.
[0003] However, the graphite electrode column itself may be doped with impure graphite impurities, or the graphite electrode column may be doped with impurities of impure graphite during production and transportation, which makes it very easy to break out debris or ionize impurities under the action of three-phase high voltage electricity, which will directly affect the quality of the quartz crucible. In the prior art, calcination is used to remove impure graphite impurities in the graphite electrode column to avoid the problem of debris or slag in the graphite electrode column during electrolysis.
[0004] The existing graphite electrode column calcining equipment has a complex design and high manufacturing cost. Utility Model Content
[0005] In view of this, the utility model provides a calcining device for preparing a graphite electrode column for a quartz crucible, which has a simple design, low manufacturing cost and can effectively calcine and purify the graphite electrode column.
[0006] In order to solve the above technical problems, the utility model adopts the following technical solutions:
[0007] The calcining device for preparing a graphite electrode column for a quartz crucible according to an embodiment of the utility model comprises:
[0008] A furnace body, forming a containing space inside and comprising an inert gas inlet and an inert gas outlet to form an inert gas flow in the containing space;
[0009] A support member, the support member is arranged in the furnace body and is formed into a cylindrical body, a plurality of open grooves opening upward are formed on the wall of the body in a vertical direction, the plurality of open grooves include a plurality of pairs, and the distance between each pair of the open grooves is less than the length of the graphite electrode column to support the graphite electrode column;
[0010] A heater is arranged in the furnace body and around the outside of the support member.
[0011] Furthermore, the support member is a crucible.
[0012] Furthermore, the support member is a carbon-carbon crucible used in the hot field of a single crystal furnace.
[0013] Furthermore, the opening groove is formed in a U shape, and the width of the opening groove is slightly larger than the diameter of the graphite electrode column.
[0014] Further, the multiple pairs of open grooves include multiple pairs of first open grooves and multiple pairs of second open grooves, the connecting line of each pair of the multiple pairs of first open grooves is along the first direction, and the connecting line of each pair of the multiple pairs of second open grooves is along the second direction, wherein the projections of the first direction and the second direction on the cross section of the support member perpendicular to the axis are perpendicular to each other.
[0015] Further, a plurality of pairs of the first opening grooves are arranged at equal intervals in the second direction, and a plurality of pairs of the second opening grooves are arranged at equal intervals in the first direction.
[0016] Further, the number of the plurality of pairs of the first open slots and the number of the plurality of pairs of the second open slots are three pairs respectively.
[0017] Furthermore, the opening depth of the open groove is h, and the diameter of the graphite electrode column is D, wherein h≥nD, and n is an integer greater than or equal to 2.
[0018] Furthermore, the length of the graphite electrode column is greater than the diameter of the support member and smaller than the diameter of the heater.
[0019] Furthermore, the graphite electrode columns are supported in each pair of the open grooves of the support member, wherein the graphite electrode columns supported by the first open grooves and the graphite electrode columns supported by the second open grooves are arranged alternately in the vertical direction.
[0020] The above technical solution of the utility model has at least one of the following beneficial effects:
[0021] According to the calcining equipment for preparing graphite electrode columns for quartz crucibles of the embodiment of the utility model, a support is arranged in the furnace body, and the support is formed into a cylindrical barrel, and a plurality of open grooves opening upward are provided on the barrel wall of the barrel in the vertical direction, and the plurality of open grooves include a plurality of pairs. Based on the heating and inert atmosphere conditions of the graphite electrode columns in the single crystal furnace body, a plurality of graphite electrode columns are respectively inserted into the plurality of pairs of open grooves of the support, and the two ends of the graphite electrode columns are supported by the open grooves. In this way, the graphite electrode columns can be effectively calcined, and graphite chips or volatile substances on the graphite electrodes under high temperature conditions can be prevented from mixing into the quartz crucible to affect the quality of the quartz crucible, while reducing the utilization rate of the graphite electrodes. The design is simple and the manufacturing cost is low.
[0022] In addition, by calcining the graphite electrode column through the calcining equipment of the embodiment of the utility model, the graphite blocks on the surface of the graphite electrode column that are easily damaged can be inspected and removed under high temperature conditions, so that they will not fly out and destroy the quartz crucible during the actual production process, thereby directly improving the yield rate of quartz crucibles made from graphite electrodes and the quality of quartz crucibles, forming excellent conditions for subsequent single crystal pulling. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] Figure 1 This is a schematic diagram of the three-dimensional structure of a calcining device for preparing a graphite electrode column of a quartz crucible according to an embodiment of the utility model;
[0024] Figure 2 It is a front view of the calcining equipment of the embodiment of the utility model;
[0025] Figure 3 A top view of a calcining device according to an embodiment of the utility model;
[0026] Figure 4 It is a schematic diagram of the three-dimensional structure of the support member in the calcining equipment of the embodiment of the utility model;
[0027] Figure 5 A top view of a support member in a calcining device according to an embodiment of the utility model;
[0028] Figure 6 This is a schematic diagram of laying a graphite electrode column on a support member in a calcining device according to an embodiment of the utility model;
[0029] Figure 7 This is another schematic diagram of laying graphite electrode columns on the support member in the calcining equipment of an embodiment of the utility model.
[0030] Reference numerals: 100. support member; 110. opening slot; 111. first opening slot; 112. second opening slot;
[0031] 200. Heater;
[0032] 300. Graphite electrode column;
[0033] 1000. Calcination equipment. DETAILED DESCRIPTION
[0034] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution of the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings of the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the described embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the utility model.
[0035] Unless otherwise defined, the technical terms or scientific terms used in the present invention shall have the usual meanings understood by persons with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "one" do not indicate quantity restrictions, but indicate the existence of at least one. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship also changes accordingly.
[0036] The calcining equipment for preparing graphite electrode columns for quartz crucibles according to the embodiments of the utility model will be described in detail below with reference to the accompanying drawings.
[0037] Figure 1 A schematic diagram of the three-dimensional structure of a calcining device for preparing a graphite electrode column of a quartz crucible according to an embodiment of the utility model is shown; Figure 2 A front view of a calcining device according to an embodiment of the utility model is shown; Figure 3 A top view of a calcining device according to an embodiment of the present invention is shown.
[0038] like Figures 1 to 3 As shown, the calcining device 1000 for preparing the graphite electrode column 300 of the quartz crucible according to the embodiment of the utility model (hereinafter sometimes simply referred to as “calcining device 1000 ”) may include: a furnace body (not shown), a support member 100 and a heater 200 .
[0039] Specifically, refer to Figure 1 , a storage space is formed inside the furnace body and includes an inert gas inlet and an inert gas outlet to form an inert gas flow in the storage space and then remove impurities in the graphite electrode column 300 during the calcination process. The support member 100 is arranged in the furnace body and is formed into a cylindrical barrel. A plurality of open grooves 110 opening upward are opened in the vertical direction on the barrel wall of the barrel, and the plurality of open grooves 110 include a plurality of pairs, and the distance between each pair of open grooves 110 is less than the length of the graphite electrode column 300 to support the graphite electrode column 300, so that batch calcination can be achieved and the position design of the open grooves 110 on the barrel enables it to stably support and accommodate the graphite electrode column 300. The heater 200 is arranged in the furnace body and is surrounded by the outside of the support member 100, and is used to provide the high temperature required during the calcination process. Through the synergistic effect of the furnace body, the support member 100 and the heater 200, the graphite electrode column 300 can be effectively calcined and purified in batches, with a simple design and low manufacturing cost.
[0040] The specific principle and steps are as follows: Based on the heating and inert atmosphere conditions of the graphite electrode column 300 in the single crystal furnace body, multiple graphite electrode columns 300 are respectively inserted into multiple pairs of open grooves 110 of the support member 100, and the two ends of the graphite electrode column 300 are supported by the open grooves 110. In the actual calcination process, stable and uniform heating can be achieved by setting the support member 100 on the inner side of the heater 200 in the furnace body. The inert atmosphere can be achieved, for example, by continuously inputting argon gas. The flowing argon gas will take away impurities in time, thereby improving the quality of the graphite electrode column 300. The entire calcination process lasts for 8 hours. In this way, the effective calcination of the graphite electrode column 300 can be achieved, preventing the graphite chips or volatile substances on the graphite electrode from mixing into the quartz crucible under high temperature conditions to affect the quality of the quartz crucible while reducing the utilization rate of the graphite electrode.
[0041] In addition, by calcining the graphite electrode column 300 with this calcination equipment 1000, under high temperature conditions, the graphite blocks on the surface of the graphite electrode column 300 that are easily damaged can be inspected and removed, so that they will not fly out and damage the quartz crucible during the actual production process, thereby directly improving the yield rate of quartz crucibles made from graphite electrodes and the quality of quartz crucibles, forming excellent conditions for subsequent single crystal pulling.
[0042] In some embodiments of the present invention, the support member 100 is a crucible. That is, the crucible used as a single crystal furnace accessory can be directly used as the support member 100 after appropriate processing, and it can be an old crucible that has been eliminated, etc., which can ensure the stable calcination of the graphite electrode column 300 in a high temperature environment, and can also play a role in reducing costs by utilizing waste.
[0043] In some embodiments of the utility model, the support member 100 is a carbon-carbon crucible used in the thermal field of a single crystal furnace. The calcination of the graphite electrode column 300 requires the following conditions: a certain space (capable of accommodating an electrode column longer than 1 meter); the ability to heat to a high temperature (not less than 1500°C); and the ability to have a flowing gas that does not chemically react with the environment and the electrode to carry away impurities released by calcination in or on the surface of the graphite electrode. The present application uses a carbon-carbon crucible used in the thermal field of a single crystal furnace, which not only meets these conditions, but is also an improvement on the existing technology, and is less expensive than designing and manufacturing a completely new structure. It also saves time and does not require design and manufacturing from scratch.
[0044] Figure 4 A schematic diagram of the three-dimensional structure of a support member in a calcining device according to an embodiment of the utility model is shown.
[0045] In some embodiments of the present invention, reference Figure 1 and Figure 4The opening groove 110 is formed in a U shape, and the width of the opening groove 110 is slightly larger than the diameter of the graphite electrode column 300. By designing the opening groove 110 of the U-shaped structure and the width of the opening groove 110 is slightly larger than the diameter of the graphite electrode column 300, the graphite electrode column 300 can be clamped while being conveniently placed so that it can obtain a more stable support, further improving the convenience and stability of the device.
[0046] Figure 5 It is a top view of the support member in the calcining equipment according to an embodiment of the utility model.
[0047] In some embodiments of the present invention, reference Figure 5 The plurality of pairs of opening slots 110 include a plurality of pairs of first opening slots 111 and a plurality of pairs of second opening slots 112, wherein the connecting line of each pair of the plurality of first opening slots 111 is along the first direction, and the connecting line of each pair of the plurality of second opening slots 112 is along the second direction, wherein the projections of the first direction and the second direction on the cross section of the support member 100 perpendicular to the axis are perpendicular to each other. Figure 5 , Figure 5 The direction indicated at A is the first direction, and the direction indicated at B is the second direction. Thus, a cross-support structure is formed, which helps to evenly share the weight of the graphite electrode column 300 and avoid tilting or instability.
[0048] In some embodiments of the present invention, Figure 5 As shown, a plurality of pairs of first opening grooves 111 are arranged at equal intervals in the second direction, and a plurality of pairs of second opening grooves 112 are arranged at equal intervals in the first direction. Thus, the weight of the graphite electrode column 300 is further shared, thereby improving the stability of the support member 100.
[0049] In some embodiments of the present invention, Figure 5 As shown, the plurality of pairs of first open slots 111 and the plurality of pairs of second open slots 112 are three pairs respectively.
[0050] Here, it should be noted that the specific number of the first opening grooves 111 and the second opening grooves 112 is not limited in the present application, as long as the number of the first opening grooves 111 and the second opening grooves 112 provided on the support member 100 is sufficient for batch calcining the graphite electrode columns 300. The number of the first opening grooves 111 and the second opening grooves 112 may be two pairs, four pairs, or five pairs distributed in the first direction and the second direction, and specifically, it may be comprehensively considered according to various factors such as the diameter of the graphite electrode column 300, the diameter of the crucible, the strength of the crucible structure, the difficulty of manufacturing, and the cost control.
[0051] Figure 6 It shows a schematic diagram of the support member laying the graphite electrode column in the calcining equipment of the embodiment of the utility model; Figure 7 Another schematic diagram is shown of the support member in the calcining equipment of the embodiment of the utility model when laying the graphite electrode column.
[0052] In some embodiments of the present invention, reference Figure 6 to Figure 7 , the opening depth of the open groove 110 is h, and the diameter of the graphite electrode column 300 is D, wherein h≥nD, and n is an integer greater than or equal to 2. When the graphite electrode column 300 is inserted into the open groove 110, the depth h is greater than or equal to the diameter of the graphite electrode column 300 to ensure that the graphite electrode column 300 is firmly fixed in the groove and is not prone to displacement or swinging. The open grooves 110 are distributed in the first direction and the second direction, that is, at least two groups of graphite electrode columns 300 are fixed in the vertical depth, so n needs to be an integer greater than or equal to 2. In this way, the stability of the graphite electrode column 300 during the calcination process is ensured.
[0053] In some embodiments of the present invention, reference Figure 3 , the length of the graphite electrode column 300 is greater than the diameter of the support 100 and less than the diameter of the heater 200. Thus, the support 100 can stably support the graphite electrode column 300 and the diameter of the heater 200 is greater than the length of the graphite electrode column 300, so that the entire graphite electrode column 300 is evenly heated, thereby ensuring the effect of calcination purification.
[0054] In some embodiments of the present invention, reference Figures 5 to 7 , the graphite electrode column 300 is supported in each pair of opening grooves 110 of the support member 100, wherein the graphite electrode column 300 supported by the first opening groove 111 and the graphite electrode column 300 supported by the second opening groove 112 are arranged alternately in the vertical direction. Under this arrangement, the space can be utilized to the maximum extent, and a large number of graphite electrode columns 300 can be batch-calcined at the same time to improve the utilization rate of the support member 100. Moreover, since the graphite electrode column 300 is formed in a cylindrical shape and the tail needs to be processed with threads due to special functionality, the head diameter becomes smaller for easy discharge, and the placement is unstable, which brings great inconvenience to calcination. This method can well fix the graphite electrode column 300.
[0055] In addition, reference Figures 5 to 7, based on the arrangement of the calcining equipment 1000 of the embodiment of the utility model, the graphite electrode columns 300 are densely arranged (that is, they are densely arranged in close proximity in the height direction, and are sparsely arranged at intervals in the horizontal plane), and the argon gas blown down from the top of the single crystal furnace can blow to all the graphite electrode columns 300, and the airflow will not be unable to take away impurities in time due to stacking, and the airflow with impurities will just flow out from the gaps between the graphite electrode columns 300, effectively taking away impurities and dust. It should be noted here that although they are densely arranged in close proximity in the height direction, due to the different arrangement directions of the two adjacent layers in the height direction, in fact, they are only point contacts in the height direction, not line contacts or surface contacts, which will not affect the actual impurity removal effect of the graphite electrode columns 300. Therefore, while improving the utilization rate of the support 100, that is, the crucible, it does not affect the support stability of the multi-layer graphite electrode columns 300, and effectively improves the calcination efficiency.
[0056] The above is a preferred embodiment of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.
Claims
1. A calcining device for preparing a graphite electrode column for a quartz crucible, characterized in that: include: A furnace body, forming a containing space inside and comprising an inert gas inlet and an inert gas outlet to form an inert gas flow in the containing space; A support member, the support member is arranged in the furnace body and is formed into a cylindrical body, a plurality of open grooves opening upward are formed on the wall of the body in a vertical direction, the plurality of open grooves include a plurality of pairs, and the distance between each pair of the open grooves is less than the length of the graphite electrode column to support the graphite electrode column; A heater is arranged in the furnace body and around the outside of the support member.
2. The calcining equipment according to claim 1, characterized in that The supporting member is a crucible.
3. The calcining equipment according to claim 2, characterized in that The support member is a carbon-carbon crucible used in the hot field of a single crystal furnace.
4. The calcining equipment according to claim 1, characterized in that The opening groove is formed in a U shape, and the width of the opening groove is slightly larger than the diameter of the graphite electrode column.
5. The calcining equipment according to claim 1, characterized in that The multiple pairs of open grooves include multiple pairs of first open grooves and multiple pairs of second open grooves, the connecting line of each pair of the multiple pairs of first open grooves is along the first direction, and the connecting line of each pair of the multiple pairs of second open grooves is along the second direction, wherein the projections of the first direction and the second direction on the cross section of the support member perpendicular to the axis are perpendicular to each other.
6. The calcining equipment according to claim 5, characterized in that A plurality of pairs of the first opening grooves are arranged at equal intervals in the second direction, and a plurality of pairs of the second opening grooves are arranged at equal intervals in the first direction.
7. The calcining equipment according to claim 6, characterized in that The number of pairs of the first opening slots and the number of pairs of the second opening slots are three, respectively.
8. The calcining equipment according to claim 7, characterized in that The opening depth of the open groove is h, and the diameter of the graphite electrode column is D, wherein h≥nD, and n is an integer greater than or equal to 2.
9. The calcining equipment according to claim 8, characterized in that The length of the graphite electrode column is greater than the diameter of the support member and smaller than the diameter of the heater.
10. The calcining equipment according to claim 9, characterized in that The graphite electrode columns are supported in each pair of the open grooves of the support member, wherein the graphite electrode columns supported by the first open grooves and the graphite electrode columns supported by the second open grooves are arranged alternately in the vertical direction.