Flower basket for glue cooking machine

Abstract

The utility model provides a flower basket for a glue boiling machine, which comprises a support frame, an opening and an accommodating cavity for accommodating a silicon wafer are arranged on the support frame, the support frame comprises a coaming and a base, one end of the coaming is connected with the base so that the opening is opposite to the base, and a plurality of through holes for liquid to enter and exit are further arranged on the support frame. The plurality of through holes are arranged around the supporting frame at intervals; the fixing frame is arranged on the outer side of the supporting frame, the fixing frame is connected with the supporting frame, the fixing frame is arranged around the supporting frame, the fixing frame comprises a plurality of fixing rings, and the fixing rings are arranged at intervals so that the through holes can be exposed; the supporting frame and the fixing frame are both surrounded by high-temperature-resistant materials. According to the flower basket for the glue cooking machine, the technical problem that flower baskets are easy to deform in a high-temperature environment in the prior art is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer processing equipment, in particular to a flower basket for a glue boiling machine. Background Art

[0002] Silicon wafers are the basic materials of semiconductor devices. By performing several processes on this basic material, semiconductor devices with various functions can be formed. When producing silicon wafers, it is necessary to first bond a layer of resin or plastic sheet that meets the performance requirements on the material holder of the equipment, then bond the silicon rod to the sheet, and finally place the bonded material holder into the equipment for cutting, so as to cut the silicon rod into silicon wafers. After that, put the silicon wafer with the material plate into the glue boiling machine for boiling to separate the silicon wafer from the material plate. The conventional boiling operation is to put the silicon wafer with the material plate into the flower basket, put the flower basket into the glue boiling machine, and after a period of steaming, the gel of the bonding material plate will lose its adhesive force and fall off, thus separating from the silicon wafer.

[0003] However, during the steaming process, continuous high temperature can easily cause the flower basket to deform, and in severe cases it can also affect the subsequent cleaning process.

[0004] Therefore, the prior art needs to be further developed. Utility Model Content

[0005] The purpose of the utility model is to overcome the above technical deficiencies and provide a flower basket for a glue boiling machine to solve the technical problem in the related art that the flower basket is prone to deformation in a high temperature environment.

[0006] In order to achieve the above technical purpose, the utility model adopts the following technical scheme: a flower basket for a glue boiling machine is provided, comprising: a support frame, the support frame is provided with an opening and a receiving cavity for placing silicon wafers, the support frame comprises a surrounding plate and a base, one end of the surrounding plate is connected to the base so that the opening is arranged opposite to the base, and the support frame is also provided with a plurality of through holes for entering and exiting liquid, and the plurality of through holes are arranged at intervals around the support frame; a fixing frame, the fixing frame is arranged on the outside of the support frame, the fixing frame is connected to the support frame, the fixing frame is arranged around the support frame, the fixing frame comprises a plurality of fixing rings, the plurality of fixing rings are arranged at intervals to expose the respective through holes; the support frame and the fixing frame are both surrounded by high temperature resistant material.

[0007] Furthermore, the fixing frame is made of stainless steel.

[0008] Furthermore, the enclosure is perpendicular to the base.

[0009] Further, the enclosure includes a first connecting plate, a second connecting plate, a third connecting plate and a fourth connecting plate, which are connected in sequence, and are arranged around the base to form a accommodating cavity; through holes are respectively arranged on the first connecting plate, the second connecting plate, the third connecting plate and the fourth connecting plate.

[0010] Furthermore, the base is a rectangular structure, the first connecting plate and the third connecting plate are arranged opposite to each other, the second connecting plate and the fourth connecting plate are arranged opposite to each other, and the length of the first connecting plate and the third connecting plate is greater than the length of the second connecting plate and the fourth connecting plate.

[0011] Furthermore, the fixing ring includes a first fixing bar, a second fixing bar, a third fixing bar and a fourth fixing bar, which are connected in sequence to form a ring structure, the first fixing bar is fixed to the first connecting plate, the second fixing bar is fixed to the second connecting plate, the third fixing bar is fixed to the third connecting plate, and the fourth fixing bar is fixed to the fourth connecting plate.

[0012] Furthermore, there are two fixing rings, the planes where the two fixing rings are located are arranged parallel to each other, and the two fixing rings are respectively mounted on the enclosure, one of the fixing rings is located at one end of the enclosure close to the opening, and the other fixing ring is located at one end of the enclosure close to the base.

[0013] Furthermore, the fixing frame also includes a fixing column, there are multiple fixing columns, the multiple fixing columns are arranged at intervals, one end of the fixing column is connected to one of the fixing rings, and the other end of the fixing column is connected to the other fixing ring.

[0014] Furthermore, each fixing column is perpendicular to the two fixing rings.

[0015] Furthermore, the flower basket for the glue boiling machine also includes a support arm, and the support arm passes through the fixing frame and is connected to the support frame.

[0016] Beneficial effects:

[0017] The flower basket for the glue cooking machine of the utility model is provided with a fixing frame on the periphery of the flower basket, the fixing frame is used to reinforce the internal structure of the flower basket, and finally the supporting frame and the fixing frame of the flower basket are wrapped with high temperature resistant material, so that not only the flower basket structure is reinforced, but also the heat resistance of the flower basket can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the first viewing angle of the flower basket used for the glue boiling machine adopted in the embodiment of the utility model;

[0019] Figure 2 It is a structural schematic diagram of a flower basket for a glue boiling machine adopted in an embodiment of the utility model from a second viewing angle;

[0020] Figure 3 It is a structural schematic diagram of the third viewing angle of the flower basket for the glue boiling machine adopted in the embodiment of the utility model.

[0021] The above drawings include the following reference numerals:

[0022] 1. Support frame; 11. Opening; 12. Accommodating cavity; 13. Through hole; 14. Enclosure; 141. First connecting plate; 142. Second connecting plate; 143. Third connecting plate; 144. Fourth connecting plate; 15. Base; 2. Fixing frame; 21. Fixing ring; 211. First fixing bar; 212. Second fixing bar; 213. Third fixing bar; 214. Fourth fixing bar; 22. Fixing column; 3. Support arm. DETAILED DESCRIPTION

[0023] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present application.

[0024] According to an embodiment of the utility model, a flower basket for a glue boiling machine is provided. Figures 1 to 3 , including: a support frame 1, the support frame 1 is provided with an opening 11 and a receiving cavity 12 for placing silicon wafers, the support frame 1 includes a panel 14 and a base 15, one end of the panel 14 is connected to the base 15 so that the opening 11 and the base 15 are arranged opposite to each other, and the support frame 1 is also provided with a plurality of through holes 13 for entering and exiting liquids, and the plurality of through holes 13 are arranged at intervals around the support frame 1; a fixing frame 2, the fixing frame 2 is arranged on the outside of the support frame 1, the fixing frame 2 is connected to the support frame 1, the fixing frame 2 is arranged around the support frame 1, the fixing frame 2 includes a plurality of fixing rings 21, and the plurality of fixing rings 21 are arranged at intervals to expose each through hole 13; the support frame 1 and the fixing frame 2 are both surrounded by high temperature resistant materials. The silicon wafer to be debonded is placed from the opening 11 into the receiving cavity 12, the panel 14 of the support frame 1 is provided with a through hole 13, and high temperature hot water enters the support frame 1 through the through hole 13 to perform high temperature water boiling debonding treatment on the silicon wafer. A plurality of fixing rings 21 are respectively sleeved on the outer side of the enclosure 14, and the plurality of fixing rings 21 are arranged at intervals to avoid blocking the through hole 13. The fixing rings 21 reinforce the support frame 1 to improve the stability of the flower basket and prevent the flower basket from deforming. The support frame 1 and the fixing frame 2 are wrapped with high temperature resistant materials to improve the heat resistance of the flower basket. The flower basket for the glue boiling machine of this embodiment solves the technical problem in the related art that the flower basket is prone to deformation in a high temperature environment.

[0025] Specifically, the support frame 1 and the fixing frame 2 are wrapped by PP material.

[0026] In the flower basket used in the glue boiling machine of this embodiment, the fixing frame 2 is made of stainless steel. The fixing frame 2 of the flower basket is made of stainless steel, and the outside of the stainless steel fixing frame 2 is wrapped with PP material for protection; the support frame 1 inside the flower basket is welded by PP plates, and the outside of the support frame 1 is also wrapped with PP material for protection, which improves the heat resistance of the flower basket and solves the problem of deformation of the flower basket caused by excessive temperature during boiling.

[0027] See also Figure 1 In the basket for the glue cooking machine of this embodiment, the enclosure 14 is perpendicular to the base 15 to facilitate placing the silicon wafer into the accommodating cavity 12.

[0028] See also Figure 2 In the flower basket for the glue cooking machine of this embodiment, the enclosure 14 includes a first connecting plate 141, a second connecting plate 142, a third connecting plate 143 and a fourth connecting plate 144, which are connected in sequence, and are arranged around the base 15 to form a receiving chamber 12; through holes 13 are respectively arranged on the first connecting plate 141, the second connecting plate 142, the third connecting plate 143 and the fourth connecting plate 144. The four connecting plates are connected in sequence around the base 15 to form a support frame 1 with an opening 11 at one end. The through holes 13 are arranged at intervals on each connecting plate to facilitate the high-temperature water flow to enter the flower basket.

[0029] See also Figure 2 In the flower basket for the glue boiling machine of this embodiment, the base 15 is a rectangular structure, the first connecting plate 141 and the third connecting plate 143 are arranged oppositely, the second connecting plate 142 and the fourth connecting plate 144 are arranged oppositely, and the lengths of the first connecting plate 141 and the third connecting plate 143 are both greater than the lengths of the second connecting plate 142 and the fourth connecting plate 144. The glue boiling machine is a large square device, and the support frame 1 is arranged as a rectangular parallelepiped structure, so that the flower basket can be put into the glue boiling machine to fully utilize the internal space of the glue boiling machine, increase the degumming amount, and improve the degumming efficiency.

[0030] See also Figure 2In the flower basket for the glue cooking machine of this embodiment, the fixing ring 21 includes a first fixing bar 211, a second fixing bar 212, a third fixing bar 213 and a fourth fixing bar 214. The first fixing bar 211, the second fixing bar 212, the third fixing bar 213 and the fourth fixing bar 214 are sequentially connected to form a ring structure. The first fixing bar 211 is fixed to the first connecting plate 141, the second fixing bar 212 is fixed to the second connecting plate 142, the third fixing bar 213 is fixed to the third connecting plate 143, and the fourth fixing bar 214 is fixed to the fourth connecting plate 144. The fixing ring 21 is a square ring, which is used in conjunction with the square support frame 1. Each fixing bar reinforces the corresponding connecting plate in the horizontal direction, thereby preventing the internal support frame 1 from deforming.

[0031] See also Figure 3 In the basket for the glue cooking machine of this embodiment, there are two fixing rings 21, the planes where the two fixing rings 21 are located are arranged parallel to each other, and the two fixing rings 21 are respectively sleeved on the enclosure 14, one fixing ring 21 is located at one end of the enclosure 14 close to the opening 11, and the other fixing ring 21 is located at one end of the enclosure 14 close to the base 15. The upper and lower fixing rings 21 reinforce the two ends of the enclosure 14 respectively.

[0032] See also Figure 1 and Figure 3 In the flower basket for the glue cooking machine of this embodiment, the fixing frame 2 further includes a fixing column 22, and there are multiple fixing columns 22, and the multiple fixing columns 22 are arranged at intervals, one end of the fixing column 22 is connected to one of the fixing rings 21, and the other end of the fixing column 22 is connected to another fixing ring 21. The fixing column 22 is arranged between the two fixing rings 21, and the multiple fixing columns 22 are arranged at intervals around the enclosure 14, so as to reinforce the internal support frame 1 in different directions.

[0033] See also Figure 2 In the basket for the glue cooking machine of this embodiment, each fixing column 22 is perpendicular to the two fixing rings 21, so that each fixing bar can reinforce the corresponding connecting plate in the vertical direction. Therefore, the upper horizontal direction of the support frame 1 is fixed by the fixing ring 21 and the vertical direction is reinforced by the fixing bar, thereby improving the overall strength of the support frame 1.

[0034] See also Figure 1 and Figure 3 In the flower basket for the glue cooking machine of the present embodiment, the flower basket for the glue cooking machine further includes a support arm 3, and the support arm 3 passes through the fixing frame 2 and is connected to the support frame 1. The flower basket containing the silicon wafers to be debonded is transported to the glue cooking machine, and the support arm 3 of the flower basket is grasped by the mechanical gripper, and then the flower basket is placed in a designated water tank by the mechanical gripper, and the support arm 3 is stuck on the tank wall, so that the mechanical gripper can grasp it again after the debonding is completed.

[0035] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0036] Optionally, the specific examples in this embodiment may refer to the examples described in the above embodiments, and this embodiment will not be described in detail here.

[0037] The serial numbers of the above-mentioned embodiments of the present application are for description only and do not represent the advantages or disadvantages of the embodiments.

[0038] In the above embodiments of the present application, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, please refer to the relevant description of other embodiments.

[0039] The above is only a preferred implementation of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications should also be regarded as the scope of protection of the present application.

Claims

1. A flower basket for a glue cooking machine, characterized in that: include: A support frame (1), the support frame (1) being provided with an opening (11) and a receiving cavity (12) for placing a silicon wafer, the support frame (1) comprising a surrounding plate (14) and a base (15), one end of the surrounding plate (14) being connected to the base (15) so that the opening (11) and the base (15) are arranged opposite to each other, the support frame (1) being further provided with a plurality of through holes (13) for the inlet and outlet of liquid, the plurality of through holes (13) being arranged at intervals around the support frame (1); a fixing frame (2), the fixing frame (2) being arranged outside the supporting frame (1), the fixing frame (2) being connected to the supporting frame (1), the fixing frame (2) being arranged around the supporting frame (1), the fixing frame (2) comprising a plurality of fixing rings (21), the plurality of fixing rings (21) being arranged at intervals so as to expose each of the through holes (13); The support frame (1) and the fixing frame (2) are both surrounded by high temperature resistant materials.

2. The flower basket for the glue cooking machine according to claim 1, characterized in that: The fixing frame (2) is made of stainless steel.

3. The flower basket for the glue cooking machine according to claim 1, characterized in that: The enclosure plate (14) is perpendicular to the base (15).

4. The flower basket for the glue cooking machine according to claim 3, characterized in that: The enclosure (14) comprises a first connecting plate (141), a second connecting plate (142), a third connecting plate (143) and a fourth connecting plate (144); the first connecting plate (141), the second connecting plate (142), the third connecting plate (143) and the fourth connecting plate (144) are connected in sequence; the first connecting plate (141), the second connecting plate (142), the third connecting plate (143) and the fourth connecting plate (144) are arranged around the base (15) to form the accommodating cavity (12); the through holes (13) are respectively arranged on the first connecting plate (141), the second connecting plate (142), the third connecting plate (143) and the fourth connecting plate (144).

5. The flower basket for the glue cooking machine according to claim 4, characterized in that: The base (15) is a rectangular structure, the first connecting plate (141) and the third connecting plate (143) are arranged opposite to each other, the second connecting plate (142) and the fourth connecting plate (144) are arranged opposite to each other, and the lengths of the first connecting plate (141) and the third connecting plate (143) are both greater than the lengths of the second connecting plate (142) and the fourth connecting plate (144).

6. The flower basket for the glue cooking machine according to claim 5, characterized in that: The fixing ring (21) comprises a first fixing bar (211), a second fixing bar (212), a third fixing bar (213) and a fourth fixing bar (214); the first fixing bar (211), the second fixing bar (212), the third fixing bar (213) and the fourth fixing bar (214) are sequentially connected to form a ring structure; the first fixing bar (211) is fixed to the first connecting plate (141), the second fixing bar (212) is fixed to the second connecting plate (142), the third fixing bar (213) is fixed to the third connecting plate (143), and the fourth fixing bar (214) is fixed to the fourth connecting plate (144).

7. The flower basket for the glue cooking machine according to claim 3, characterized in that: There are two fixing rings (21), the planes on which the two fixing rings (21) are located are arranged parallel to each other, and the two fixing rings (21) are respectively sleeved on the enclosure (14), one of the fixing rings (21) is located at one end of the enclosure (14) close to the opening (11), and the other fixing ring (21) is located at one end of the enclosure (14) close to the base (15).

8. The flower basket for the glue cooking machine according to claim 7, characterized in that: The fixing frame (2) further comprises a fixing column (22), wherein the fixing columns (22) are multiple and the multiple fixing columns (22) are arranged at intervals, one end of the fixing column (22) is connected to one of the fixing rings (21), and the other end of the fixing column (22) is connected to another fixing ring (21).

9. The flower basket for the glue cooking machine according to claim 8, characterized in that: Each of the fixing columns (22) is respectively perpendicular to the two fixing rings (21).

10. The flower basket for the glue cooking machine according to claim 1, characterized in that: The flower basket for the glue cooking machine further comprises a support arm (3), and the support arm (3) passes through the fixing frame (2) and is connected to the support frame (1).

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