Feeding auxiliary device for thinning scribing machining

Abstract

The utility model discloses a thinning scribing processing feeding auxiliary device, which relates to the technical field of silicon wafer processing and comprises an auxiliary placing table, a plurality of rectangular sliding grooves are uniformly formed in the peripheral side of the auxiliary placing table, horizontal moving rods are arranged in the rectangular sliding grooves in a sliding manner, and the horizontal moving rods are arranged in the rectangular sliding grooves in a sliding manner. L-shaped connecting rods are fixedly mounted at the ends, away from each other, of the multiple horizontal moving rods, and arc-shaped positioning plates are detachably mounted at the ends, close to each other, of the multiple L-shaped connecting rods. The device is reasonable in structure, when an adjusting knob is rotated, a plurality of horizontal lead screws are driven to synchronously rotate through a hexagonal connecting rod, a control rotating rod, a first bevel gear and a second bevel gear, and the plurality of horizontal lead screws synchronously rotate to drive a plurality of arc-shaped positioning plates to move towards or away from each other through a horizontal moving rod and an L-shaped connecting rod; therefore, the purpose of adaptive positioning of silicon wafers with different sizes is achieved, the application range of the device is widened, and the device is simple to operate, convenient to use and good in practicability.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer processing, in particular to a material feeding auxiliary device for thinning and scribing processing. Background Art

[0002] When using equipment to thin and slice silicon wafers, the robot mainly relies on to grab the silicon wafers and automatically transport them to the equipment for processing. In the process of using the robot for automatic loading, auxiliary devices are usually used to assist in positioning the silicon wafers, so that the robot can accurately grab the silicon wafers.

[0003] Most of the existing silicon wafer loading auxiliary devices can generally only assist in positioning silicon wafers of a fixed size when in use. When silicon wafers of different sizes need to be positioned and loaded, their structure cannot be adjusted, resulting in the inability to adapt and position silicon wafers of different sizes. The scope of application is small and the practicality needs to be improved. Therefore, in order to solve the above problems, the present application proposes a thinning and dicing processing loading auxiliary device. Utility Model Content

[0004] The purpose of the present application is to provide a thinning and scribing processing feeding auxiliary device to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the present application provides the following technical solutions: an auxiliary device for thinning and scribing processing feeding, comprising an auxiliary placement table, a plurality of rectangular slide grooves are evenly arranged on the outer peripheral side of the auxiliary placement table, horizontal movement rods are slidably installed in the plurality of rectangular slide grooves, a plurality of horizontal movement rods are fixedly installed with L-shaped connecting rods at the ends away from each other, and arc positioning plates are detachably installed at the ends of the plurality of L-shaped connecting rods close to each other, a linkage cavity is arranged in the auxiliary placement table, and a plurality of inner walls of the side portions of the rectangular slide grooves are provided with a plurality of connecting rods connected to the linkage cavity. The movable cavity is connected to a screw rod rotating hole, and horizontal screw rods are rotatably installed in multiple screw rod rotating holes. Multiple horizontal shift rods are respectively threadedly sleeved on multiple horizontal screw rods. A control rotating rod is rotatably installed on the top inner wall of the linkage cavity. A gear transmission unit for making multiple horizontal screw rods rotate synchronously is connected to the control rotating rod. The bottom end of the control rotating rod extends to the outside of the auxiliary placement table and is fixedly installed with a hexagonal connecting rod. An adjusting knob is slidably sleeved on the hexagonal connecting rod, and an anti-slip baffle is fixedly installed on the bottom end of the hexagonal connecting rod.

[0006] Preferably, the gear transmission unit comprises a first bevel gear fixedly sleeved on the control rotating rod, and the ends of the plurality of horizontal screw rods are fixedly mounted with a second bevel gear meshing with the first bevel gear.

[0007] Preferably, two locking rods are fixedly installed on the top of the adjusting knob, a plurality of locking holes are evenly opened on the bottom of the auxiliary placement table, the top ends of the two locking rods extend into two of the locking holes, and an elastic reset unit is installed on the adjusting knob.

[0008] Preferably, the elastic reset unit comprises a reset spring sleeved on the hexagonal connecting rod, and two ends of the reset spring are respectively fixedly mounted on the bottom of the adjusting knob and the top of the anti-slip baffle.

[0009] Preferably, a connecting sleeve is slidably sleeved on the L-shaped connecting rod, and the connecting sleeve is fixedly mounted on the outer peripheral side of the arc-shaped positioning plate. A fastening screw hole is opened on the top of the connecting sleeve, and a fastening bolt is threadedly installed in the fastening screw hole, and the bottom end of the fastening bolt is in conflict with the top of the L-shaped connecting rod.

[0010] Preferably, two columns are fixedly mounted on the bottom of the auxiliary placement table, a mounting base is fixedly mounted on the bottom ends of the two columns, and a plurality of mounting holes are evenly opened on the top of the mounting base.

[0011] Preferably, protective pads are fixedly provided on the top of the auxiliary placement table and the inner circumference of the plurality of arc-shaped positioning plates.

[0012] In summary, the technical effects and advantages of the utility model are:

[0013] 1. The utility model has a reasonable structure. When the adjusting knob is turned, multiple horizontal screws will be driven to rotate synchronously through the hexagonal connecting rod, the control rotating rod, the first bevel gear, and the second bevel gear. The synchronous rotation of multiple horizontal screws will drive multiple arc-shaped positioning plates to move toward or away from each other through the horizontal shift rod and the L-shaped connecting rod, thereby achieving the purpose of adapting and positioning silicon wafers of different sizes, improving the application range of the device, and the operation is simple, easy to use, and practical;

[0014] 2. In the utility model, when the adjusting knob is pulled downwards to make the locking rod move out of the locking hole, the adjusting knob can be loosened, and the adjusting knob can be rotated to perform the adjustment operation. When the adjusting knob is loosened, the locking rod will be automatically reset upward and inserted into the locking hole under the elastic force of the reset spring, and the adjusting knob will be locked and cannot be rotated. Therefore, during use, the position change of the arc positioning plate caused by the self-rotation of the adjusting knob can be effectively reduced, and the stability is good during use. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without paying any creative work.

[0016] Figure 1 This is a schematic diagram of a three-dimensional structure from a first viewing angle of an embodiment of the present application;

[0017] Figure 2 A schematic diagram of a second viewing angle stereoscopic structure of an embodiment of the present application;

[0018] Figure 3 This is a schematic diagram of a partial cross-section structure of an auxiliary placement table in an embodiment of the present application;

[0019] Figure 4 This is a partially enlarged structural schematic diagram of the connection between the control lever and the adjustment knob in the embodiment of the present application.

[0020] In the figure: 1. Auxiliary placement table; 2. Horizontal shift rod; 3. Horizontal screw rod; 4. L-shaped connecting rod; 5. Arc positioning plate; 6. Control rotating rod; 7. Hexagonal connecting rod; 8. Adjustment knob; 9. Anti-slip baffle; 10. First bevel gear; 11. Second bevel gear; 12. Locking rod; 13. Reset spring; 14. Connecting sleeve; 15. Fastening bolt; 16. Column; 17. Mounting base; 18. Protective pad. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] Example: Reference Figure 1-Figure 4The shown device is an auxiliary device for thinning and scribing processing, comprising an auxiliary placement table 1, a plurality of rectangular slide grooves are evenly opened on the outer peripheral side of the auxiliary placement table 1, and horizontal movement rods 2 are slidably installed in the plurality of rectangular slide grooves, and the ends of the plurality of horizontal movement rods 2 away from each other are fixedly installed with L-shaped connecting rods 4, and the ends of the plurality of L-shaped connecting rods 4 close to each other are detachably installed with arc positioning plates 5. A linkage cavity is opened in the auxiliary placement table 1, and the side inner walls of the plurality of rectangular slide grooves are provided with screw rod rotating holes connected to the linkage cavity, and horizontal screw rods 3 are rotatably installed in the plurality of screw rod rotating holes, and the plurality of horizontal movement rods 2 are respectively threadedly sleeved on the plurality of horizontal screw rods 3, and a control rotating rod 6 is rotatably installed on the top inner wall of the linkage cavity, and a gear transmission unit for making the plurality of horizontal screw rods 3 rotate synchronously is connected to the control rotating rod 6, and the bottom end of the control rotating rod 6 extends to the outside of the auxiliary placement table 1 and is fixedly installed with a hexagonal connecting rod 7, and an adjusting knob 8 is slidably sleeved on the hexagonal connecting rod 7, and an anti-slip baffle 9 is fixedly installed on the bottom end of the hexagonal connecting rod 7.

[0023] By means of the above structure, when the adjusting knob 8 is rotated, the control rotating rod 6 will be driven to rotate together through the hexagonal connecting rod 7. The rotation of the control rotating rod 6 will drive multiple horizontal screw rods 3 to rotate synchronously through the gear transmission unit. The synchronous rotation of multiple horizontal screw rods 3 will drive multiple horizontal shift rods 2 to move toward or away from each other, and then the L-shaped connecting rod 4 can be used to drive multiple arc-shaped positioning plates 5 to move toward or away from each other, thereby achieving the purpose of adapting and positioning silicon wafers of different sizes, improving the application range of the device, and simple operation, easy use and good practicality.

[0024] As a preferred implementation of this embodiment, the gear transmission unit includes a first bevel gear 10 fixedly sleeved on the control rotating rod 6, and the ends of the plurality of horizontal screw rods 3 are fixedly mounted with second bevel gears 11 meshing with the first bevel gear 10. The advantage of such a setting is that when the control rotating rod 6 rotates, the first bevel gear 10 is driven to rotate, and the rotation of the first bevel gear 10 drives the plurality of second bevel gears 11 to rotate together, thereby driving the plurality of horizontal screw rods 3 to rotate synchronously, thus playing the role of synchronous transmission.

[0025] As a preferred implementation of this embodiment, two locking rods 12 are fixedly installed on the top of the adjusting knob 8, and a plurality of locking holes are evenly opened on the bottom of the auxiliary placement table 1. The top ends of the two locking rods 12 extend into two of the locking holes, and an elastic reset unit is installed on the adjusting knob 8. The advantage of such a setting is that when the adjusting knob 8 is moved downward so that the locking rods 12 are moved out of the locking holes, the adjusting knob 8 can be loosened, and the adjusting knob 8 can be rotated to perform the adjustment operation. When the adjusting knob 8 is moved upward so that the locking rods 12 are inserted into the locking holes, the adjusting knob 8 can be locked and cannot be rotated, so that during use, the situation that the position of the arc-shaped positioning plate 5 changes due to the self-rotation of the adjusting knob 8 can be effectively reduced, and the stability during use is good.

[0026] In this embodiment, the elastic reset unit includes a reset spring 13 sleeved on the hexagonal connecting rod 7, and the two ends of the reset spring 13 are respectively fixedly mounted on the bottom of the adjusting knob 8 and the top of the anti-slip block 9. The advantage of this arrangement is that when the adjusting knob 8 is released, the elastic force of the reset spring 13 will squeeze and push the adjusting knob 8 to automatically reset upward, and then the locking rod 12 can be automatically inserted into the locking hole, so that the adjusting knob 8 is automatically locked and can be kept in a locked state, with better stability.

[0027] As a preferred implementation of this embodiment, a connecting sleeve 14 is slidably sleeved on the L-shaped connecting rod 4, and the connecting sleeve 14 is fixedly installed on the outer peripheral side of the arc-shaped positioning plate 5. A fastening screw hole is opened on the top of the connecting sleeve 14, and a fastening bolt 15 is installed in the inner thread of the fastening screw hole, and the bottom end of the fastening bolt 15 conflicts with the top of the L-shaped connecting rod 4. The advantage of this arrangement is that when the fastening bolt 15 is rotated, the connecting sleeve 14 can be fixed or loosened under the joint action of the fastening screw hole, thereby achieving the purpose of facilitating the disassembly and replacement of the arc-shaped positioning plate 5.

[0028] As a preferred implementation of this embodiment, two columns 16 are fixedly installed at the bottom of the auxiliary placement table 1, and a mounting base 17 is fixedly installed at the bottom ends of the two columns 16. A plurality of mounting holes are evenly opened at the top of the mounting base 17. The advantage of this arrangement is that the auxiliary placement table 1 can be easily installed and fixed through the coordinated arrangement of the columns 16, the mounting base 17 and the mounting holes.

[0029] As a preferred implementation of this embodiment, a protective pad 18 is fixedly provided on the top of the auxiliary placement table 1 and the inner circumference of the plurality of arc-shaped positioning plates 5. The advantage of such an arrangement is that it can protect the placed silicon wafers and prevent the silicon wafers from hitting the auxiliary placement table 1 and the arc-shaped positioning plates 5 and causing damage thereto.

[0030] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A material feeding auxiliary device for thinning and scribing processing, comprising an auxiliary placement table (1), characterized in that: A plurality of rectangular slide grooves are evenly arranged on the outer peripheral side of the auxiliary placement platform (1), and a horizontal shift rod (2) is slidably installed in each of the plurality of rectangular slide grooves. An L-shaped connecting rod (4) is fixedly installed at one end of each of the plurality of horizontal shift rods (2) that are away from each other, and an arc-shaped positioning plate (5) is detachably installed at the end of each of the plurality of L-shaped connecting rods (4) that are close to each other. A linkage cavity is arranged in the auxiliary placement platform (1), and a screw rod rotating hole connected to the linkage cavity is arranged on the side inner wall of each of the plurality of rectangular slide grooves, and a horizontal screw rod ( 3), the plurality of horizontal shift rods (2) are respectively threadedly sleeved on the plurality of horizontal screw rods (3), a control rotating rod (6) is rotatably mounted on the top inner wall of the linkage chamber, the control rotating rod (6) is connected with a gear transmission unit for making the plurality of horizontal screw rods (3) rotate synchronously, the bottom end of the control rotating rod (6) extends to the outside of the auxiliary placement table (1) and is fixedly mounted with a hexagonal connecting rod (7), an adjusting knob (8) is slidably sleeved on the hexagonal connecting rod (7), and an anti-slip baffle (9) is fixedly mounted on the bottom end of the hexagonal connecting rod (7).

2. The device for feeding materials in thinning and scribing process according to claim 1, characterized in that: The gear transmission unit comprises a first bevel gear (10) fixedly sleeved on the control rotating rod (6), and the ends of the plurality of horizontal screw rods (3) are all fixedly mounted with second bevel gears (11) meshing with the first bevel gear (10).

3. The device for feeding materials in thinning and scribing process according to claim 1, characterized in that: Two locking rods (12) are fixedly mounted on the top of the adjusting knob (8); a plurality of locking holes are evenly arranged on the bottom of the auxiliary placement table (1); the top ends of the two locking rods (12) extend into two of the locking holes; and an elastic reset unit is mounted on the adjusting knob (8).

4. The device for feeding materials in thinning and scribing process according to claim 3, characterized in that: The elastic reset unit comprises a reset spring (13) sleeved on the hexagonal connecting rod (7), and two ends of the reset spring (13) are respectively fixedly mounted on the bottom of the adjusting knob (8) and the top of the anti-slip baffle (9).

5. The device for feeding materials in thinning and scribing process according to claim 1, characterized in that: A connecting sleeve (14) is slidably sleeved on the L-shaped connecting rod (4), and the connecting sleeve (14) is fixedly mounted on the outer peripheral side of the arc-shaped positioning plate (5). A fastening screw hole is provided on the top of the connecting sleeve (14), and a fastening bolt (15) is installed in the inner thread of the fastening screw hole. The bottom end of the fastening bolt (15) contacts the top of the L-shaped connecting rod (4).

6. The device for feeding materials in thinning and scribing process according to claim 1, characterized in that: Two columns (16) are fixedly mounted on the bottom of the auxiliary placement table (1), a mounting base (17) is fixedly mounted on the bottom ends of the two columns (16), and a plurality of mounting holes are evenly arranged on the top of the mounting base (17).

7. The device for feeding materials in thinning and scribing process according to claim 1, characterized in that: The top of the auxiliary placement table (1) and the inner circumference of the plurality of arc-shaped positioning plates (5) are both fixedly provided with protection pads (18).

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