Electrostatic chuck

Abstract

The utility model discloses an electrostatic chuck, and relates to the technical field of semiconductors. Comprising a filtering device, the filtering device comprises a base, sliding grooves are formed in the two sides of the bottom of the base, a dust suction device is arranged at the top of the filtering device, the dust suction device comprises a bottom plate, sliding strips are fixedly connected to the two sides of the top of the bottom plate, and the tops of the sliding strips are slidably connected with the bottoms of the sliding grooves; a shell is fixedly connected to one side of the top of the bottom plate. In the use process, when dust needs to be cleaned, firstly, the filtering mechanism slides into the shell through the sliding strip at the top of the bottom plate, and then the locking motor drives the gear to rotate and drives the rack to move, so that the sealing plate moves along the fixing frame until the sealing plate is sealed with the bottom plate; and finally, a dust suction motor sucks dust into a dust suction box through a dust suction pipe, a dust suction mechanism prevents dust in air from entering the electrostatic chuck, the service life of the electrostatic chuck is prolonged, and the maintenance cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to an electrostatic chuck. Background Art

[0002] For example, an electrostatic chuck with patent application number 202221586967.9 includes a metal base and a ceramic plate, wherein the ceramic plate is arranged on the metal base, an electrode layer is provided in the ceramic plate, the positive electrode of the electrode layer is connected to a first electrode assembly, the negative electrode of the electrode layer is connected to a second electrode assembly, and a first through hole located below the first electrode assembly and a second through hole located below the second electrode assembly are provided on the metal base.

[0003] However, during the use of the above-mentioned device, due to the setting of the internal ceramic plate and the second electrode assembly, when the workpiece is filtered during use, the dust in the air will be sucked into the electrostatic chuck through the through holes of the electrostatic chuck. Excessive dust accumulation after long-term use of the electrostatic chuck may cause the electronic equipment inside the electrostatic chuck to malfunction or even be damaged. In addition, it is inconvenient to disassemble and assemble the electrostatic chuck, and it is not convenient to clean the inside of the electrostatic chuck, which results in a short service life of the electrostatic chuck and a high maintenance cost. Therefore, in response to this situation, we propose a more convenient and practical electrostatic chuck that meets the use needs. Utility Model Content

[0004] The purpose of the utility model is to provide an electrostatic chuck to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an electrostatic chuck, comprising a filtering device, the filtering device comprising a base, sliding grooves are provided on both sides of the bottom of the base, a dust suction device is arranged on the top of the filtering device, the dust suction device comprises a bottom plate, sliding bars are fixedly connected on both sides of the top of the bottom plate, the top of the sliding bar is slidably connected to the bottom of the sliding groove, and a shell is fixedly connected to one side of the top of the bottom plate.

[0006] Furthermore, an electrode seat is installed at the center of the top of the base, a filter seat is installed on the top of the electrode seat, and equidistant side ears are fixedly connected to the outer wall of the filter seat.

[0007] Furthermore, a through hole is formed through the top of the side ear, a connecting piece is installed in the through hole, and a plurality of equidistant filter holes are formed on the top of the filter seat.

[0008] Furthermore, a fixing frame is fixedly connected to one side of the bottom of the shell, a through hole is penetrated through the top of the fixing frame, a sealing plate is slidably connected in the through hole, and one side of the sealing plate is parallel to one side of the shell.

[0009] Furthermore, a rack is fixedly connected to the center of one side of the sealing plate, a gear is provided on one side of the rack, the teeth of the gear and the rack are meshed, a locking motor is installed on one side of the fixing frame, and the output end of the locking motor is connected to the gear.

[0010] Furthermore, a dust box is fixedly connected to the center of the top of the shell, a through hole is opened on one side of the top of the dust box, a dust pipe is fixedly connected in the through hole, one end of the dust pipe is connected to the top of the shell, and a dust motor is installed on the top of the dust box.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] The electrostatic chuck is provided with a filtering device and a dust collecting device. When dust needs to be cleaned during use, the filtering mechanism first slides into the outer shell through the sliding bar on the top of the bottom plate, and then the locking motor drives the gear to rotate, driving the rack to move, so that the sealing plate moves along the fixing frame until it is sealed with the bottom plate, and finally the dust collecting motor sucks the dust into the dust collecting box through the dust collecting pipe. The dust collecting mechanism prevents dust in the air from entering the interior of the electrostatic chuck, and avoids dust in the air from being sucked into the electrostatic chuck through the through hole of the electrostatic chuck, thereby increasing the service life of the electrostatic chuck, reducing maintenance costs, having strong practicality, and being suitable for promotion.

[0013] At the same time, the structure of the filter device is reasonably designed, and the filter holes on the filter seat are easy to disassemble and clean, which facilitates the maintenance and cleaning of the filter and reduces the number of cleaning times. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0015] Figure 2 This is a schematic diagram of the filter seat structure of the utility model;

[0016] Figure 3 It is a schematic diagram of the structure of the dust collecting device of the present utility model.

[0017] In the figure: 1. Filter device; 101. Base; 102. Sliding groove; 103. Electrode seat; 104. Filter seat; 105. Side ears; 106. Connector; 107. Filter hole; 2. Dust suction device; 201. Bottom plate; 202. Sliding bar; 203. Shell; 204. Fixed frame; 205. Sealing plate; 206. Rack; 207. Gear; 208. Locking motor; 209. Dust suction box; 210. Dust suction pipe; 211. Dust suction motor. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0019] Electrostatic chuck is a general term for ultra-clean thin film carriers and gripping and handling equipment suitable for atmospheric or vacuum environments. The electrostatic filtration technology used by electrostatic chuck is an advantageous technology that replaces traditional mechanical clamping and vacuum filtration methods. It is widely used in semiconductors, panel displays, optics and other fields. Therefore, the electrostatic chuck is needed. Before using this equipment, please make sure that the power supply and switch of the electrostatic chuck are turned off to avoid accidents or risks of electric shock. During operation, due to the generation of static electricity, electric shock or electromagnetic interference may occur. Please ensure that the equipment is well grounded and avoid touching uninsulated parts.

[0020] like Figure 1-Figure 3 As shown, the utility model provides a technical solution: an electrostatic chuck, including a filter device 1, the filter device 1 includes a base 101, sliding grooves 102 are provided on both sides of the bottom of the base 101, a dust suction device 2 is arranged on the top of the filter device 1, the dust suction device 2 includes a bottom plate 201, sliding bars 202 are fixedly connected on both sides of the top of the bottom plate 201, the top of the sliding bar 202 is slidably connected to the bottom of the sliding groove 102, and a shell 203 is fixedly connected to one side of the top of the bottom plate 201.

[0021] It should be noted that during use, the base 101 of the filter device 1 is first slid on the top of the sliding bar 202 through the sliding groove 102, and the filter device 1 is pulled out of the shell 203 for work. When dust removal is required, it is placed in the shell 203 for dust removal. The electrostatic chuck can move horizontally to adapt to different working areas, and filter the air through the dust suction device 2 to provide a clean working environment.

[0022] like Figure 2 As shown, an electrode seat 103 is installed in the center of the top of the base 101, and a filter seat 104 is installed on the top of the electrode seat 103. The outer wall of the filter seat 104 is fixedly connected with equidistant side ears 105. A through hole is opened through the top of the side ear 105, and a connecting piece 106 is installed in the through hole. A plurality of equidistant filter holes 107 are opened on the top of the filter seat 104.

[0023] It should be noted that during use, the base 101 is first connected through the sliding groove 102 and the sliding bar 202, and then the electrode seat 103 and the filter seat 104 are stacked together with the base 101 in turn, and then connected through the through holes between the side ears 105 and through the connecting piece 106, and finally the semiconductor is placed on the filter seat 104. The structural design of the filter device 1 is reasonable, and the filter hole 107 on the filter seat 104 is easy to disassemble and clean, which facilitates maintenance and cleaning of the filter and reduces the number of cleaning times.

[0024] like Figure 3 As shown, a fixing frame 204 is fixedly connected to one side of the bottom of the shell 203, a through hole is opened on the top of the fixing frame 204, a sealing plate 205 is slidably connected in the through hole, one side of the sealing plate 205 is parallel to one side of the shell 203, a rack 206 is fixedly connected to the center of one side of the sealing plate 205, a gear 207 is provided on one side of the rack 206, the teeth of the gear 207 and the rack 206 are meshed, a locking motor 208 is installed on one side of the fixing frame 204, and the output end of the locking motor 208 is connected to the gear 207, a dust box 209 is fixedly connected to the center of the top of the shell 203, a through hole is opened on one side of the top of the dust box 209, a dust pipe 210 is fixedly connected in the through hole, one end of the dust pipe 210 is connected to the top of the shell 203, and a dust motor 211 is installed on the top of the dust box 209.

[0025] It should be noted that during use, when dust needs to be cleaned, the filter device 1 first slides into the outer shell 203 through the sliding bar 202 on the top of the bottom plate 201, and then the locking motor 208 drives the gear 207 to rotate, driving the rack 206 to move, so that the sealing plate 205 moves along the fixed frame 204 until it is sealed with the bottom plate 201, and finally the dust suction motor 211 sucks the dust into the dust suction box 209 through the dust suction pipe 210. The dust suction device 2 prevents dust in the air from entering the interior of the electrostatic chuck, and avoids dust in the air from being sucked into the electrostatic chuck through the through hole of the electrostatic chuck, thereby increasing the service life of the electrostatic chuck and reducing maintenance costs.

[0026] During use, the base 101 is first connected to the sliding bar 202 through the sliding groove 102, and then the electrode seat 103 and the filter seat 104 are stacked together with the base 101 in turn, and then connected through the through holes between the side ears 105 and through the connecting piece 106. When dust needs to be cleaned, the sliding bar 202 of the filter device 1 is first slid into the outer shell 203, and then the locking motor 208 drives the gear 207 to rotate, driving the rack 206 and the sealing plate 205 to move until they are sealed with the bottom plate 201. Finally, the dust suction motor 211 sucks the dust into the dust suction box 209 through the dust suction pipe 210. The dust suction device 2 prevents dust in the air from entering the interior of the electrostatic chuck, thereby increasing the service life of the electrostatic chuck and reducing maintenance costs.

[0027] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is limited by the attached embodiments and their equivalents.

Claims

1. An electrostatic chuck, characterized in that: The filter device (1) comprises a base (101), the base (101) having sliding grooves (102) on both sides of the bottom, the filter device (1) having a dust collecting device (2) on the top, the dust collecting device (2) comprising a bottom plate (201), the top of the bottom plate (201) having sliding bars (202) fixedly connected to both sides, the top of the sliding bar (202) being slidably connected to the bottom of the sliding groove (102), and the top of the bottom plate (201) having a housing (203) fixedly connected to one side.

2. An electrostatic chuck according to claim 1, characterized in that: An electrode seat (103) is installed at the center of the top of the base (101), a filter seat (104) is installed on the top of the electrode seat (103), and equidistant side ears (105) are fixedly connected to the outer wall of the filter seat (104).

3. An electrostatic chuck according to claim 2, characterized in that: A through hole is formed through the top of the side ear (105), a connecting piece (106) is installed in the through hole, and a plurality of equidistant filtering holes (107) are formed on the top of the filter seat (104).

4. An electrostatic chuck according to claim 1, characterized in that: A fixing frame (204) is fixedly connected to one side of the bottom of the housing (203), a through hole is penetrated through the top of the fixing frame (204), a sealing plate (205) is slidably connected in the through hole, and one side of the sealing plate (205) is parallel to one side of the housing (203).

5. An electrostatic chuck according to claim 4, characterized in that: A rack (206) is fixedly connected to the center of one side of the sealing plate (205), a gear (207) is arranged on one side of the rack (206), the teeth of the gear (207) and the rack (206) are meshed, a locking motor (208) is installed on one side of the fixing frame (204), and the output end of the locking motor (208) is connected to the gear (207).

6. An electrostatic chuck according to claim 4, characterized in that: A dust collection box (209) is fixedly connected to the center of the top of the shell (203); a through hole is opened on one side of the top of the dust collection box (209); a dust collection pipe (210) is fixedly connected in the through hole; one end of the dust collection pipe (210) is connected to the top of the shell (203); and a dust collection motor (211) is installed on the top of the dust collection box (209).

Images