High-cleanliness sheet vertical cleaning tank

Abstract

The utility model belongs to the technical field of cleaning equipment, and relates to a high-cleanliness sheet vertical cleaning tank which comprises a cleaning tank body, a basket supporting mechanism, a flow uniformizing mechanism, a bubbling mechanism and a cover plate mechanism. The cover plate mechanism comprises a pair of cover plates located on the two sides of the upper portion of the cleaning tank body and a cover opening device controlling the cover plates to rotate and open, rotating shafts of the cover plates are parallel to the long edge direction of the cleaning tank body, the two cover plates seal an opening of the cleaning tank body when located at the horizontal position, and a liquid level mechanism communicated with the backflow area is arranged on the outer side of the cleaning tank body. In the cleaning process of the cleaning tank, the cover plate needs to be closed, so that the risk of secondary pollution is reduced; by means of the liquid level mechanism, when the cover plate covers the cleaning tank body, an operator can directly observe the liquid level in the cleaning tank body, and the situation that cleaning liquid overflows due to the too high liquid level is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of cleaning equipment, in particular to a vertical cleaning tank for sheets with high cleanliness. Background Art

[0002] In recent years, the production technology of solar cell silicon wafers has been continuously improved, the conversion efficiency has become higher and higher, and the process difficulty has continued to rise with the improvement of efficiency. At this time, new requirements are put forward for the cleaning tank of solar cell silicon wafers. It is necessary to ensure the laminar flow stability of the silicon wafer reaction area, and to ensure the uniformity of the internal chemical solution, while taking into account the manufacturing cost of the equipment.

[0003] Chinese patent CN110711742A discloses a cleaning tank structure that improves the uniformity of the solution. The flow equalization component allows the solution fed into the main tank to remain uniform as it rises, and the entire liquid level will rise steadily to ensure uniformity during circulation. A bubbling component is provided above the flow equalization component to provide uniform bubbles upward. Only the air that produces bubbles is filtered here. However, the device is open, and external impurities can easily fall into the cleaning tank, which can cause the cleaning liquid to be contaminated. During the circulation of the cleaning liquid, there is still a risk that the impurities will stick to the surface of the sheet; and if a sealed door is provided, the liquid level in the cleaning tank is not convenient to observe.

[0004] Therefore need to improve cleaning equipment to solve the above problems. Utility Model Content

[0005] The main purpose of the utility model is to provide a vertical cleaning tank for sheets with high cleanliness, which can prevent impurities in the air during cleaning work.

[0006] The utility model achieves the above-mentioned purpose through the following technical scheme: a vertical cleaning tank for high-cleanliness sheets, comprising a cleaning tank body, a flower basket supporting mechanism, a flow equalizing mechanism, a bubbling mechanism and a cover plate mechanism; an overflow plate with a four-sided surrounding structure is provided in the cleaning tank body, the overflow plate divides the interior of the cleaning tank body into a cleaning area with a rectangular structure and a reflux area surrounding the cleaning area, the flower basket supporting mechanism is arranged at the lower part of the cleaning area, the flow equalizing mechanism and the bubbling mechanism are both arranged in the cleaning area and located in the space below the flower basket supporting mechanism; the cover plate mechanism comprises a pair of cover plates located on both sides of the upper part of the cleaning tank body and a cover opening device for controlling the cover plates to rotate and open, the rotating shaft of the cover plates is parallel to the long side direction of the cleaning tank body, and the two cover plates close the open mouth of the cleaning tank body when they are in a horizontal position, and a liquid level mechanism connected to the reflux area is provided on the outer side of the cleaning tank body.

[0007] Specifically, the liquid level mechanism adopts a magnetostrictive liquid level gauge, and the liquid level mechanism is connected to a PLC, and the PLC is used to control the amount of liquid replenishment in the cleaning tank.

[0008] Specifically, the bubbling mechanism includes a plurality of bubbling tubes parallel to the length direction of the cleaning area, and the bubbling tubes are provided with upward bubbling holes equidistantly arranged along the length direction; the flow uniforming mechanism includes a flow uniforming plate located below the bubbling mechanism, and the flow uniforming plate separates a flow uniforming cavity in the lower part of the cleaning area, and a plurality of water outlet holes are distributed on the flow uniforming plate.

[0009] Specifically, a transverse strip-shaped overflow port is provided on the overflow plate, an overflow strip is provided at the lower edge of the overflow port, and the upper portion of the overflow strip is wavy.

[0010] Specifically, a receiving plate is provided at the lower part of the flower basket supporting mechanism, and the receiving plate is located above the flow-uniform mechanism and the bubbling mechanism, and a plurality of mesh holes are evenly distributed on the receiving plate.

[0011] Furthermore, the flower basket supporting mechanism includes a plurality of pairs of flower basket brackets parallel to the wide side direction of the cleaning area, and a plurality of limiting protrusions are equidistantly arranged on the flower basket brackets, and a placement position for the flower basket is formed between adjacent limiting protrusions.

[0012] The beneficial effects of the technical solution of the utility model are:

[0013] 1. This equipment can place the flower basket with vertically inserted sheets on the flower basket supporting mechanism. The uniform flow mechanism provides cleaning liquid from the bottom of the flower basket supporting mechanism upwards. At the same time, the bubbling mechanism is used to evenly provide bubbles within the cleaning area and pass through the sheets upwards, thereby enhancing the stirring effect of the cleaning liquid and cleaning the more stubborn dirt from the surface of the sheet.

[0014] 2. During the cleaning process, the cover needs to be closed to reduce the risk of secondary contamination; relying on the liquid level mechanism, when the cover is closed, the operator can directly observe the liquid level in the cleaning tank to avoid overflow of the cleaning liquid due to excessive liquid level.

[0015] 3. The wavy overflow strip design forms many overflow channels at the concave position of its upper edge, which is conducive to destroying the molecular surface tension, accelerating the flow of surface liquid, making the upward flow speed of the cleaning liquid more uniform, and ensuring the consistency of the sheet cleaning quality.

[0016] 4. The cleaning liquid and bubbles will pass through the receiving plate and reach the flower basket. The mesh can evenly distribute the cleaning liquid and bubbles, making the cleaning state of each sheet more stable.

[0017] 5. The more upper limit protrusions a single flower basket bracket has, the larger the processing volume of a single batch will be. On the basis of ensuring stable cleaning quality, the production capacity can be increased. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1A three-dimensional diagram of the cleaning tank in the embodiment with the cover opened;

[0019] Figure 2 A three-dimensional diagram of a cleaning tank in an embodiment with some parts removed;

[0020] Figure 3 for Figure 2 A partial enlarged view of position A in the middle;

[0021] Figure 4 It is a cross-sectional view of the cleaning tank of the embodiment when it is working.

[0022] The numbers in the figure represent:

[0023] 1- Cleaning tank,

[0024] 11-cleaning tank, 11a-cleaning area, 11b-reflow area, 111-overflow plate, 1111-overflow bar, 112-liquid level mechanism;

[0025] 12-flower basket supporting mechanism, 121-receiving plate, 1211-mesh, 122-flower basket support, 1221-limiting protrusion,

[0026] 13-flow equalizing mechanism, 131-flow equalizing plate, 1311-water outlet, 132-flow equalizing cavity,

[0027] 14-bubble mechanism, 141-bubble tube, 142-bubble hole,

[0028] 15-cover mechanism, 151-cover, 152-opening device,

[0029] 16-Liquid level mechanism;

[0030] 2- Flower basket. DETAILED DESCRIPTION

[0031] The utility model is further described in detail below in conjunction with specific embodiments.

[0032] Example:

[0033] like Figure 1 As shown, a vertical cleaning tank 1 for high-cleanliness sheets of the utility model comprises a cleaning tank body 11 , a basket supporting mechanism 12 , a flow-uniform mechanism 13 , a bubbling mechanism 14 and a cover mechanism 15 .

[0034] like Figures 1 to 4As shown, an overflow plate 111 with a surrounding structure on all sides is provided in the cleaning tank body 11, and the overflow plate 11 divides the interior of the cleaning tank body 11 into a cleaning area 11a with a rectangular structure and a reflux area 11b surrounding the cleaning area 11a. The flower basket supporting mechanism 12 is arranged at the lower part of the cleaning area 11a, and the flow equalizing mechanism 13 and the bubbling mechanism 14 are both arranged in the cleaning area 11a and located in the space below the flower basket supporting mechanism 12. The bubbling mechanism 14 includes a plurality of bubbling tubes 141 parallel to the length direction of the cleaning area, and the bubbling tubes 141 are provided with upward bubbling holes 142 equidistantly arranged along the length direction; the flow equalizing mechanism 13 includes a plurality of flow equalizing plates 131 located below the bubbling mechanism 14, and the flow equalizing plates 131 separate a plurality of flow equalizing cavities 132 in the lower part of the cleaning area 11a, and a plurality of water outlet holes 1311 are distributed on the flow equalizing plates 131.

[0035] This device can place the flower basket 2 with the sheets inserted vertically onto the flower basket supporting mechanism 12. The flow equalizing mechanism 13 provides cleaning liquid from the bottom of the flower basket supporting mechanism 12 upwards. At the same time, the bubbling mechanism 14 is used to evenly provide bubbles within the range of the cleaning area 11a, and pass through the sheets upwards, thereby enhancing the stirring effect of the cleaning liquid, so that the more stubborn dirt is cleaned from the surface of the sheet. The cleaning liquid added to the cleaning tank 1 first enters the flow equalizing chamber 132 to release the water pressure evenly, and then the cleaning liquid will be sprayed from bottom to top at a relatively uniform flow rate, and the bubbles will also be entrained in the cleaning liquid and rise together. The sheet here can be a flat structure such as a large silicon wafer, a large printed circuit board, and other materials that need surface cleaning.

[0036] like Figure 1 , Figure 2 and Figure 4 As shown, the cover mechanism 15 includes a pair of covers 151 located on both sides of the upper part of the cleaning tank body 11 and a cover opening device 152 for controlling the cover 151 to rotate and open. The rotation axis of the cover 151 is parallel to the long side direction of the cleaning tank body 11. When the two covers 151 are in a horizontal position, the open mouth of the cleaning tank body 11 is closed.

[0037] When loading, the upper part of the cleaning tank 11 must be opened to allow the flower basket 2 to be placed in. During the cleaning process, if the cleaning tank 11 remains open, dust and impurities from the outside will fall into the cleaning liquid, which will be detrimental to the cleaning quality and cause secondary pollution. Therefore, during the cleaning process, the cover 151 needs to be closed to reduce the risk of secondary pollution. Because the area of ​​the cover 151 is about half of the cross-sectional area of ​​the cleaning tank 11, if the processing volume is relatively large, the cover 151 will have a considerable mass. If there is no cover opening device 152, on the one hand, it is difficult to open the cover, and on the other hand, the cover 151 is at risk of falling when loading and unloading, resulting in damage to the equipment, the flower basket 2 or the sheet. Therefore, the use of the cover opening device 152 can improve the safety of use.

[0038] like Figure 1and Figure 2 As shown, a liquid level mechanism 112 communicating with the reflow area 11 b is provided on the outer side of the cleaning tank body 11 .

[0039] When the cleaning tank 11 is working, the cover plate 151 needs to be covered, so the operator cannot directly observe the liquid level in the cleaning tank 11. In order to avoid the cleaning liquid overflowing due to the high liquid level, the liquid level mechanism 112 needs to be used for liquid level monitoring. Here, the liquid level mechanism 112 can use a magnetostrictive liquid level gauge, which can continuously monitor the liquid level height in the tank and connect to a PLC (programmable controller). The PLC can be used to control the amount of liquid replenishment in the cleaning tank 11, thereby realizing the automation of the filling of the cleaning liquid.

[0040] like Figure 3 As shown, a transverse strip-shaped overflow port is provided on the overflow plate 111, an overflow strip 1111 is provided at the lower edge of the overflow port, and the upper part of the overflow strip 1111 is wavy.

[0041] The basic design structure of the overflow plate 111 requires that the upper edge is basically at the same height. If its edge is a linear structure, the overflow plate 111 is easy to overflow from only one position, which will destroy the uniformity of the flow of the cleaning liquid in the cleaning area 11a. The wavy overflow strip 1111 is designed to form a number of overflow channels at the concave position of its upper edge, which is conducive to destroying the molecular surface tension, accelerating the flow of the surface liquid, making the upward flow speed of the cleaning liquid more uniform, and ensuring the consistency of the sheet cleaning quality.

[0042] like Figures 2 to 4 As shown, a receiving plate 121 is provided at the lower part of the flower basket supporting mechanism 12 . The receiving plate 121 is located above the flow-uniform mechanism 13 and the bubbling mechanism 14 . A plurality of mesh holes 1211 are evenly distributed on the receiving plate 121 .

[0043] The cleaning liquid and the bubbles will pass through the receiving plate 121 and reach the flower basket 2. The mesh 1211 can evenly distribute the cleaning liquid and the bubbles once again, so that the cleaning state of each sheet is relatively stable.

[0044] like Figure 3 As shown, the flower basket supporting mechanism 12 includes a plurality of pairs of flower basket brackets 122 parallel to the wide side direction of the cleaning area 11 a , and a plurality of limiting protrusions 1221 are equidistantly arranged on the flower basket brackets 122 , and a placement position for the flower basket 2 is formed between adjacent limiting protrusions 122 .

[0045] The flower basket supporting mechanism 12 will only support the edge of the flower basket 2 by the flower basket bracket 122, and the middle part of the flower basket 2 is permeable to water vapor, so that the cleaning liquid and bubbles will pass through the flower basket supporting mechanism 12 and pass through the sheets, and finally achieve the desired cleaning effect. In Example 1, there are two pairs of flower basket brackets 122, and the number of upper limit protrusions 1221 of a single flower basket bracket 122 is three, so the placement positions of the flower basket supporting mechanism 12 are 2×2. If each flower basket 2 can hold 100 sheets of sheet material. The placement positions of the flower basket supporting mechanism 12 are m×n, where m is the number of pairs of flower basket brackets 122, generally taking a value of 1 to 2; n is a positive integer less than the number of upper limit protrusions 1221 of a single flower basket bracket 122, generally taking a value of 2 to 4.

[0046] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A vertical cleaning tank for high cleanliness sheets, characterized in that: It comprises a cleaning trough body, a flower basket supporting mechanism, a flow equalizing mechanism, a bubbling mechanism and a cover mechanism; the cleaning trough body is provided with an overflow plate with a surrounding structure on four sides, the overflow plate divides the interior of the cleaning trough body into a cleaning area with a rectangular structure and a reflux area surrounding the cleaning area, the flower basket supporting mechanism is arranged at the lower part of the cleaning area, the flow equalizing mechanism and the bubbling mechanism are both arranged in the cleaning area and located in the space below the flower basket supporting mechanism; the cover mechanism comprises a pair of cover plates located at both sides of the upper part of the cleaning trough body and a cover opening device for controlling the cover plates to rotate and open, the rotating shaft of the cover plates is parallel to the long side direction of the cleaning trough body, and the two cover plates close the open mouth of the cleaning trough body when they are in a horizontal position, and a liquid level mechanism connected to the reflux area is arranged on the outer side of the cleaning trough body.

2. The vertical cleaning tank for high cleanliness sheets according to claim 1, characterized in that: The liquid level mechanism adopts a magnetostrictive liquid level gauge, and the liquid level mechanism is connected to a PLC, and the PLC is used to control the amount of liquid replenishment in the cleaning tank body.

3. The vertical cleaning tank for high cleanliness sheets according to claim 1, characterized in that: The bubbling mechanism includes a plurality of bubbling tubes parallel to the length direction of the cleaning area, and upward bubbling holes are equidistantly arranged on the bubbling tubes along the length direction; the flow uniforming mechanism includes a flow uniforming plate located below the bubbling mechanism, and the flow uniforming plate separates a flow uniforming cavity in the lower part of the cleaning area, and a plurality of water outlet holes are distributed on the flow uniforming plate.

4. The vertical cleaning tank for high cleanliness sheets according to claim 1, characterized in that: The overflow plate is provided with a transverse strip-shaped overflow port, the lower edge of the overflow port is provided with an overflow strip, and the upper part of the overflow strip is wavy.

5. The vertical cleaning tank for high cleanliness sheets according to claim 1, characterized in that: A receiving plate is provided at the lower part of the flower basket supporting mechanism, and the receiving plate is located above the flow-uniform mechanism and the bubbling mechanism, and a plurality of mesh holes are evenly distributed on the receiving plate.

6. The vertical cleaning tank for high-cleanliness sheets according to claim 5, characterized in that: The flower basket supporting mechanism comprises a plurality of pairs of flower basket brackets parallel to the wide side direction of the cleaning area, a plurality of limiting protrusions are arranged at equal intervals on the flower basket brackets, and a placement position for the flower basket is formed between adjacent limiting protrusions.

Images