Waterproof sealing door for cutting part of scribing machine

Abstract

The utility model discloses a waterproof sealing door for a cutting part of a scribing machine, which comprises a mounting support, a protective cover, a sliding door, an air curtain rod, a water curtain rod, a photoelectric sensor and a door magnet, the protective cover is arranged on one side of the mounting support, a sliding door fixing support is arranged on the other side of the mounting support, a guide rail is arranged on the sliding door fixing support, and the sliding door is arranged on the guide rail. An air curtain rod is arranged on the mounting support, the mounting support is connected with a water curtain rod, the sliding door is arranged between the air curtain rod and the water curtain rod, and a photoelectric sensor and a door magnet are arranged on the sliding door. By adopting the technical scheme, the waterproof sealing door for the cutting part of the scribing machine is convenient and practical. The cutting state can be observed through the transparent acrylic sliding door, and splashing generated in the cutting process is prevented. A water curtain is arranged on the inner side of the sliding door and used for washing workpieces passing through the lower portion, and an air curtain is arranged outside the sliding door and used for blowing off the workpieces passing through the lower portion.

Description

Technical Field

[0001] The utility model relates to the field of wafer dicing machines, in particular to a waterproof closed door of a cutting part of a dicing machine. Background Art

[0002] Wafer dicing machine, also known as slicer, is a key equipment used to cut semiconductor wafers (we call them workpieces) into small-sized chips. During the manufacturing process, the dicing machine uses a high-speed rotating diamond blade to cut and process the chips on the wafer, cutting large-sized wafers into small-sized chips. After cutting, these chips can be separated from the wafer and further used to manufacture various electronic products, such as mobile phones and computer chips.

[0003] When cutting wafers, the dicing machine needs to continuously provide cutting cooling water and high-speed rotation of the blade, which will cause a large amount of splashing water and water mist during the cutting process. The currently commonly used overall opening door has problems such as insufficient airtightness and no door opening alarm safety linkage. At the same time, the layout of the air and water curtain pipelines is unreasonable and occupies a large space. Utility Model Content

[0004] In order to solve the above problems, the utility model provides a convenient and practical waterproof closed door for the cutting part of a dicing machine.

[0005] A waterproof closed door for the cutting part of a dicing machine in the utility model comprises a mounting support, a protective cover, a sliding door, an air curtain rod, a water curtain rod, a photoelectric sensor and a door magnet. A protective cover is provided on one side of the mounting support, a sliding door fixing bracket is provided on the other side of the mounting support, a guide rail is provided on the sliding door fixing bracket, a sliding door is provided on the guide rail, an air curtain rod is provided on the mounting support, the mounting support is connected to the water curtain rod, the sliding door is provided between the air curtain rod and the water curtain rod, and a photoelectric sensor and a door magnet are provided on the sliding door.

[0006] In the above solution, the mounting support includes a first mounting support and a second mounting support, the protective cover includes a left protective cover and a right protective cover, and the sliding door includes a left sliding door and a right sliding door.

[0007] In the above scheme, a left protective cover is provided on the first mounting support, a left sliding door is provided outside the first mounting support, a right protective cover is provided on the second mounting support, and a right sliding door is provided outside the second mounting support.

[0008] In the above scheme, a photoelectric sensor and a door magnet are provided on the left sliding door, and the photoelectric sensor and the door magnet are used together to open and sense the opening and closing of the left sliding door and the right sliding door.

[0009] In the above solution, the air curtain rod is arranged between the first mounting support and the second mounting support.

[0010] In the above solution, the sliding door is a transparent acrylic sliding door.

[0011] The advantages and beneficial effects of the utility model are as follows: the utility model provides a convenient and practical waterproof closed door for the cutting part of a dicing machine. The cutting state can be observed through the transparent acrylic sliding door, and splashes generated during the cutting process can be prevented. There is a water curtain on the inner side of the sliding door for washing the workpiece passing below, and there is an air curtain on the outer side of the sliding door for blowing clean the workpiece passing below. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0013] Figure 1 It is a structural schematic diagram of the utility model.

[0014] In the figure: 1. Air curtain rod 2. Water curtain rod 3. Photoelectric sensor 4. Door magnetic suction

[0015] 5. First mounting bracket 6. Second mounting bracket 7. Left side protective cover

[0016] 8. Right protective cover 9. Left sliding door 10. Right sliding door DETAILED DESCRIPTION

[0017] The following is a further description of the specific implementation of the present invention in conjunction with the accompanying drawings and embodiments. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and cannot be used to limit the protection scope of the present invention.

[0018] like Figure 1 As shown, the utility model is a waterproof closed door for the cutting part of a dicing machine, comprising a mounting support, a protective cover, a sliding door, an air curtain rod 1, a water curtain rod 2, a photoelectric sensor 3 and a door magnet 4. A protective cover is provided on one side of the mounting support, a sliding door fixing bracket is provided on the other side of the mounting support, a guide rail is provided on the sliding door fixing bracket, a sliding door is provided on the guide rail, an air curtain rod 1 is provided on the mounting support, the mounting support is connected to the water curtain rod 2, the sliding door is provided between the air curtain rod 1 and the water curtain rod 2, and a photoelectric sensor 3 and a door magnet 4 are provided on the sliding door.

[0019] The mounting support includes a first mounting support 5 and a second mounting support 6, the protective cover includes a left protective cover 7 and a right protective cover 8, and the sliding door includes a left sliding door 9 and a right sliding door 10. The first mounting support 5 is provided with a left protective cover 7, and the first mounting support 5 is provided with a left sliding door 9 outside, the second mounting support 6 is provided with a right protective cover 8, and the second mounting support 6 is provided with a right sliding door 10 outside.

[0020] The left sliding door 9 is provided with a photoelectric sensor 3 and a door magnet 4, which cooperate with the photoelectric sensor 3 and the door magnet 4 to open and sense the opening and closing of the left sliding door 9 and the right sliding door 10. The air curtain rod 1 is arranged between the first mounting support 5 and the second mounting support 6.

[0021] The sliding door is a transparent acrylic sliding door.

[0022] On the inner side of the sliding door fixing bracket, there is a set of mounting brackets, namely the first mounting bracket 5 and the second mounting bracket 6, which are used to install the air curtain rod 1 and the water curtain rod 2. The mounting brackets are provided with quick-connect connectors and air curtain air supply hoses for air curtains, and quick-connect connectors and water curtain water supply pipes for water curtains. A space is designed between the air curtain rod and the water curtain rod for the sliding door to move. The water curtain rod is located on the inner side of the sliding door, and the water curtain rod has multiple small holes with uniform spacing at an angle of 45° toward the inner side of the sliding door, which are used to flush cleaning water to the workpiece passing under it. The air curtain rod is located on the outer side of the sliding door, and the water curtain rod has multiple small holes with uniform spacing at an angle of 45° toward the inner side of the sliding door, which are used to blow nitrogen to the workpiece passing under it to clean the surface of the workpiece.

[0023] The transparent acrylic sliding door is fixed on the slide rail of the sliding door fixing bracket and can be moved horizontally. A guide rail groove is designed under the sliding door fixing bracket. The sliding door moves in the guide rail groove to play a limiting role. The contact area of ​​the two sliding doors is installed with a door magnet 4 and a photoelectric sensor 3. The function of the sensor is to detect whether the sliding door is opened to prevent foreign objects from entering the cutting action area during cutting. This structure can observe the cutting state through the transparent acrylic sliding door during cutting and prevent cutting water from splashing. The water curtain inside the sliding door rinses the workpiece passing under the water curtain, and the air curtain outside the sliding door blows the workpiece passing under the air curtain. The sliding door moves between the water curtain rod and the air curtain rod.

[0024] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A waterproof closed door for a cutting section of a dicing machine, characterized in that: It includes a mounting support, a protective cover, a sliding door, an air curtain rod, a water curtain rod, a photoelectric sensor and a door magnet. The mounting support is provided with a protective cover on one side, and a sliding door fixing bracket is provided on the other side of the mounting support. A guide rail is provided on the sliding door fixing bracket, and a sliding door is provided on the guide rail. The mounting support is provided with an air curtain rod, the mounting support is connected to the water curtain rod, the sliding door is provided between the air curtain rod and the water curtain rod, and the sliding door is provided with a photoelectric sensor and a door magnet.

2. A waterproof closed door for a dicing machine cutting part according to claim 1, characterized in that: The mounting support includes a first mounting support and a second mounting support, the protective cover includes a left protective cover and a right protective cover, and the sliding door includes a left sliding door and a right sliding door.

3. A waterproof closed door for a dicing machine cutting part according to claim 2, characterized in that: A left protective cover is provided on the first mounting support, and a left sliding door is provided outside the first mounting support; a right protective cover is provided on the second mounting support, and a right sliding door is provided outside the second mounting support.

4. A waterproof closed door for a dicing machine cutting part according to claim 3, characterized in that: The left sliding door is provided with a photoelectric sensor and a door magnet, and the photoelectric sensor and the door magnet are used in cooperation to open and sense the opening and closing of the left sliding door and the right sliding door.

5. A waterproof closed door for a cutting part of a dicing machine according to claim 4, characterized in that: The air curtain rod is arranged between the first mounting support and the second mounting support.

6. A waterproof closed door for a dicing machine cutting part according to claim 1, characterized in that: The sliding door is a transparent acrylic sliding door.

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