Sheet conveying device and transport system

Abstract

The utility model relates to the technical field of semiconductors and photovoltaics, in particular to a sheet carrying device and a sheet conveying system, and solves the problems of long time for carrying silicon wafers and low process efficiency in related technologies. The sheet carrying device comprises a fixed seat, a driving mechanism and at least two carrying mechanisms, wherein the fixed seat is arranged on one side of a plurality of working stations; the multiple carrying mechanisms are connected with the driving mechanism in the first direction, the driving mechanism can drive each carrying mechanism to move in the first direction, each carrying mechanism can independently move in the first direction, and the adjacent carrying mechanisms correspond to the adjacent working stations. And the control device is configured to control the driving mechanism to drive all the carrying mechanisms to carry the sheets at the same time, so that each carrying mechanism carries the sheets at the current working position to the next working position. According to the sheet carrying device and the conveying system, the carrying time can be saved, and the process efficiency can be improved.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor and photovoltaic technology, and in particular to a sheet material handling device and a transmission system. Background Art

[0002] With the development of photovoltaic technology, solar cells are widely used in various fields. In order to improve the conversion efficiency of the battery, laser equipment is used to reduce the contact resistance between the metal and the semiconductor on the silicon wafer through the laser process. The handling device is an indispensable component in the realization of the laser process, which is used to transport the silicon wafer from the conveying position to the working position for the laser process.

[0003] During the process of transporting silicon wafers, the transport device can only transport the silicon wafers from the conveying position to the four-way regularization position, and then from the four-way regularization position to the laser process position. During the process of transporting silicon wafers, the transporting time is relatively long, which makes the laser process efficiency low. Utility Model Content

[0004] In view of this, the embodiments of the present disclosure provide a sheet material handling device and a transmission system to solve the problem of long handling time and low process efficiency caused by sequentially handling silicon wafers to different workstations in the related art.

[0005] In a first aspect, an embodiment of the present disclosure provides a sheet material handling device, which is applied to a transmission system, wherein the transmission system includes a control device, and the transmission system is arranged in sequence along a first direction with at least three workstations, the sheet material handling device is used to circulate between the multiple workstations to handle sheets, and the sheets pass through the multiple workstations in sequence; wherein the sheet material handling device includes: a fixed seat, which is arranged on one side of the multiple workstations; a driving mechanism, which is arranged on the fixed seat; at least two handling mechanisms, which are respectively connected to the driving mechanism along the first direction, and the driving mechanism can drive each handling mechanism to move along the first direction, wherein each handling mechanism can move independently along the first direction, and adjacent handling mechanisms correspond to adjacent workstations; the control device is configured to control the driving mechanism to drive all the handling mechanisms to handle sheets at the same time, so that each handling mechanism handles the sheets at the current workstation to the next workstation.

[0006] In some embodiments, the fixed seat is provided with a slide extending along a first direction; the transport mechanism includes: a slide, which is slidably connected to the slide, and the slide is connected to a driving mechanism; wherein the control device is configured to control the driving mechanism to drive each slide to slide along the slide, and make the single sliding distance of each slide equal to the distance between adjacent work stations, so that multiple transport mechanisms can move from the corresponding work station to the next work station at the same time.

[0007] In some embodiments, there are two conveying mechanisms, and the driving mechanism is a linear motor. The linear motor includes: a stator, which is arranged on a fixed seat; a first mover, which is electromagnetically coupled to the stator and is arranged on a slide; a second mover, which is electromagnetically coupled to the stator and is arranged on a slide, and the first mover and the second mover are located on different slides. When the control device controls the linear motor to work, the first mover and the second mover can simultaneously approach or move away from the stator along the first direction, and the distance between the first mover and the second mover is equal to the distance between adjacent working positions.

[0008] In some embodiments, the transport mechanism includes: a support assembly connected to the slide; a grab assembly connected to the support assembly, and the grab assembly extends to above the working position to pick up and place the sheet located at the working position.

[0009] In some embodiments, the support assembly includes: a first support rod extending in a vertical direction and connected to the slide; a second support rod extending in a horizontal direction, one end of the second support rod is connected to the first support rod, and the other end of the second support rod is detachably connected to the grasping assembly so that the grasping assembly is located above the working position, and a support seat is fixedly connected to the slide, and a groove is provided on the upper surface of the support seat, and the first support rod can be embedded in the groove and detachably connected to the support seat.

[0010] In some embodiments, the grabbing assembly includes: a fixed plate; an adsorption component, which is detachably connected to the fixed plate, the adsorption component is located on the side of the fixed plate facing the working position, and the adsorption component can adsorb the sheet at the corresponding working position; an adjusting component, which is connected to the fixed plate and the second support rod, and the adjusting component is configured to be able to adjust the position of the adsorption component in the vertical direction.

[0011] In some embodiments, the adjusting member includes: an adjusting plate connected to the fixing plate, the adjusting plate being provided with a waist-shaped hole extending in the vertical direction, the waist-shaped hole passing through the adjusting plate; a locking member passing through the waist-shaped hole and being detachably connected to the second support rod.

[0012] In some embodiments, the grabbing assembly further includes: a first sensing member, detachably connected to the fixed plate, the first sensing member being configured to generate a first sensing signal when sensing that the sheet is located under the adsorption member, and the adsorption member adsorbs the sheet according to the first sensing signal.

[0013] In some embodiments, it also includes: a second sensing element, connected to the conveying mechanism; a third sensing element, connected to the conveying mechanism, and the second sensing element and the third sensing element are respectively arranged relatively to different conveying mechanisms, and are configured as follows: when the distance between the second sensing element and the third sensing element is reduced to a first distance, a second sensing signal is generated, and the control device controls the driving mechanism to stop working according to the second sensing signal, and the first distance is less than the distance between adjacent work positions.

[0014] In some embodiments, it also includes: a first buffer member, connected to the conveying mechanism; a second buffer member, connected to the conveying mechanism, and the first buffer member and the second buffer member are respectively arranged relative to different conveying mechanisms; wherein, there is a second distance between the first buffer member and the second buffer member, and the second distance is greater than the first distance, and is configured as follows: when the distance between the second sensing member and the third sensing member continues to decrease from the first distance, the first buffer member and the second buffer member can abut against each other and produce elastic deformation.

[0015] In the second aspect, an embodiment of the present disclosure also provides a transmission system, comprising: a control device; at least three workstations arranged sequentially along a first direction; a sheet material transporting device described in any of the above items, wherein the sheet material transporting device is arranged on one side of the multiple workstations, and the control device can control the sheet material transporting device to flow between the multiple workstations to transport sheets, so that the sheets pass through the multiple workstations sequentially.

[0016] A sheet material handling device and transmission system provided in the embodiments of the present disclosure can control a driving mechanism through a control device to drive multiple handling mechanisms to simultaneously handle sheets, so as to realize the circulation and transportation of multiple sheets between workstations, thereby saving the time for the circulation and transportation of sheets between workstations and thereby improving the efficiency of sheet material processing.

[0017] In addition, the multiple conveying mechanisms of the sheet material conveying device are independent of each other. The control device controls the driving mechanism to simultaneously drive the multiple independent conveying mechanisms to move to different working positions, which can increase the movement speed of the conveying mechanism and further save the time of sheet material transfer and conveying between working positions. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The above and other purposes, features and advantages of the present disclosure will become more apparent by describing the embodiments of the present disclosure in more detail in conjunction with the accompanying drawings. The accompanying drawings are used to provide a further understanding of the embodiments of the present disclosure and constitute a part of the specification. Together with the embodiments of the present disclosure, they are used to explain the present disclosure and do not constitute a limitation of the present disclosure. In the drawings, the same reference numerals generally represent the same components or steps.

[0019] Figure 1 The figure shows a simple schematic diagram of the cooperation of the sheet material handling device provided by one embodiment of the present disclosure in the transmission system.

[0020] Figure 2 Shown is a schematic structural diagram of a sheet material transporting device provided in one embodiment of the present disclosure.

[0021] Figure 3 Shown is a schematic structural diagram of a transport mechanism in a sheet transport device provided in an embodiment of the present disclosure.

[0022] Figure 4Shown is a schematic structural diagram of a support assembly of a transport mechanism in a sheet transport device provided in an embodiment of the present disclosure.

[0023] Figure 5 Shown is a schematic structural diagram of a support seat in a sheet material handling device provided in an embodiment of the present disclosure.

[0024] Figure 6 Shown is a schematic structural diagram of a transport mechanism in a sheet transport device provided in an embodiment of the present disclosure.

[0025] Figure 7 Shown is a schematic structural diagram of a grabbing assembly in a sheet material handling device provided in an embodiment of the present disclosure.

[0026] Figure 8 The figure shows a top view of two conveying mechanisms in a sheet material conveying device provided in an embodiment of the present disclosure.

[0027] Fig. 9 The figure shows a top view of the second sensing member and the third sensing member of two conveying mechanisms in the sheet conveying device provided by an embodiment of the present disclosure, in which the distance between the second sensing member and the third sensing member is a first distance.

[0028] Fig.10 The figure shows a top view of a sheet material conveying device according to an embodiment of the present disclosure, in which a first buffer component and a second buffer component of two conveying mechanisms are at a second distance from each other.

[0029] Reference numerals:

[0030] 100, transmission system; 10, sheet material handling device; 1, fixed seat; 11, slide; 2, handling mechanism; 21, slide; 22, support assembly; 221, first support rod; 222, second support rod; 2221, fastening screw hole; 2222, locking screw hole; 223, support seat; 2231, groove; 2232, fixing hole; 224, reinforcing plate; 225, pressure detection component; 226, speed regulating valve; 227, solenoid valve; 228, air pipe; 229, wiring hole; 23, grab assembly; 231, fixed plate; 2311, bending plate; 232, adsorption component; 2321, suction cup; 23 22. Leveling plate; 2323. Leveling bolt; 233. Adjusting member; 2331. Adjusting plate; 2332. Waist-shaped hole; 234. First sensing member; 24. Anti-collision sensing assembly; 241. Second sensing member; 242. Third sensing member; 25. Anti-collision buffer assembly; 251. First buffer; 252. Second buffer; 3. Driving mechanism; 4. Drag chain assembly; 20. Assembly line; 201. First working position; 202. Second working position; 203. Third working position; X. First direction; M. Adjustment direction; L1. Preset distance; L2. Third distance; L3. Fourth distance; L3'. Fifth distance. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0032] The present disclosure provides a sheet material transporting device, such as Figure 1 The sheet material handling device 10 is applied to a transmission system 100, the transmission system 100 includes a control device, and the transmission system includes at least three workstations arranged in sequence along a first direction X. The sheet material handling device 10 is used to flow between the multiple workstations to transport the sheets, and the sheets pass through the multiple workstations in sequence.

[0033] It can be understood that the transmission system 100 includes an assembly line 20 for processing sheet materials, and the sheet materials are placed on the assembly line 20 and move along the transmission direction of the assembly line 20, and the transmission direction is parallel to the first direction X. Along the transmission direction of the assembly line 20, different workstations can be set in the assembly line 20 according to the processing technology of the sheet materials, such as the first workstation 201, the second workstation 202, the third workstation 203, etc. arranged at intervals. For example, in the cutting process, the processes that need to be set in the assembly line 20 include a loading workstation, an adjustment workstation, a cutting workstation, a unloading workstation, etc. For another example, in the laser process, the workstations that need to be set in the assembly line 20 include a conveying workstation, a four-way regularization workstation, a laser workstation, an output workstation, etc. In the embodiment of the present disclosure, the laser process of the transmission system 100 is taken as an example for description.

[0034] Optionally, the sheet material may be, for example, a square substrate, a circular substrate, etc. The substrate may be, for example, a silicon wafer prepared from a silicon material as a substrate, or a perovskite substrate prepared from a perovskite material as a substrate, without specific limitation. For ease of understanding, the sheet material will be set to be square and uniformly referred to as a silicon wafer in the following, and will no longer be emphasized separately.

[0035] The sheet material handling device 10 includes a fixed seat 1, at least two handling mechanisms 2 and a driving mechanism 3. The fixed seat 1 is arranged on one side of a plurality of workstations, and a plurality of handling mechanisms 2 are arranged at intervals on the fixed seat 1 along a first direction X. The plurality of handling mechanisms 2 are respectively connected to the driving mechanism 3 along the first direction X, and the driving mechanism 3 can drive each handling mechanism 2 to move along the first direction X, wherein each handling mechanism 2 can independently move along the first direction X, and adjacent handling mechanisms 2 correspond to adjacent workstations, and the control device is configured to control the driving mechanism 3 to drive all the handling mechanisms 2 to simultaneously handle silicon wafers, so that each handling mechanism 2 handles the silicon wafers at the current workstation to the next workstation.

[0036] It is understandable that the number of the multiple transport mechanisms 2 provided in the sheet transport device 10 may be less than the number of the multiple workstations arranged. For example, when there are five workstations, the number of transport mechanisms 2 provided may be four, three, or two, and when there are four workstations, the number of transport mechanisms 2 provided may be three or two, and when there are three workstations, the number of transport mechanisms 2 provided may be two. The number may be adjusted adaptively according to actual needs without specific limitation. In the disclosed embodiment, for the convenience of description, as Figure 1 , three working positions are set, two conveying mechanisms 2 are set, and the working positions are respectively the first working position 201, the second working position 202 and the third working position 203 from right to left. In the laser process, the first working position 201 corresponds to the conveying working position, the second working position 202 corresponds to the four-way regularization working position, and the third working position 203 corresponds to the laser working position. The distances between the first working position 201, the second working position 202 and the third working position 203 are the same, which are all preset distances L1.

[0037] In other examples, the distances between adjacent workstations may also be set to be different and may be adaptively adjusted according to actual needs without specific limitation.

[0038] The sheet material handling device 10 in the disclosed embodiment can control the driving mechanism 3 through the control device to drive the multiple handling mechanisms 2 to move along the first direction X, so that the multiple handling mechanisms 2 can flow between different workstations respectively, and the multiple handling mechanisms 2 can simultaneously transport the silicon wafers in the corresponding workstation to the next workstation. Compared with the scheme in which only one handling mechanism 2 can transport the silicon wafers from one workstation to another at a time, the control device can control the driving mechanism 3 to drive the multiple handling mechanisms 2 to simultaneously transport the multiple silicon wafers to the next adjacent workstation, so as to realize the circulation and transportation of multiple silicon wafers between the workstations, save the time of the circulation and transportation of silicon wafers between the workstations, and thus improve the efficiency.

[0039] In addition, in the sheet material transporting device 10, each transporting mechanism 2 can move independently along the first direction X, and adjacent transporting mechanisms 2 correspond to adjacent workstations. The control device can control the driving mechanism 3 to drive each independent transporting mechanism 2 to transport silicon wafers at the same time, which can increase the movement speed of a single transporting mechanism 2 and further save the transport time of silicon wafers when they flow between different workstations.

[0040] The following is a detailed description of an example in which the laser process includes a conveying workstation, a four-way regularization workstation and a laser workstation with the same spacing, and the sheet material conveying device 10 is provided with two conveying mechanisms 2.

[0041] like Figure 1 and Figure 2 , the fixed seat 1 is provided with a slideway 11 extending along the first direction X, and the transport mechanism 2 includes a slide 21, which is slidably connected to the slideway 11, and the slide 21 is connected to the driving mechanism 3. Among them, the control device is configured to control the driving mechanism 3 to drive each slide 21 to slide along the slideway 11, and make the distance of each slide 21 sliding at a time equal to the distance between adjacent work positions, that is, the preset distance L1, so that multiple transport mechanisms 2 move from the corresponding work position to the next work position at the same time. The control device controls the driving mechanism 3 to drive the two transport mechanisms 2 to achieve synchronous movement, so that the two transport mechanisms 2 can accurately transport the silicon wafers from the current work position to the next work position, and the silicon wafers can be easily and quickly transferred between different work positions without re-positioning the moving transport mechanism 2, saving transportation time.

[0042] For example, continue as Figure 1 and Figure 2 The transport mechanism 2 includes a first transport mechanism and a second transport mechanism. The first transport mechanism is correspondingly arranged at one side of the first workstation 201. The first transport mechanism can grab the silicon wafer on the first workstation 201, and the second transport mechanism can grab the silicon wafer on the second workstation 202. The control device controls the driving mechanism 3 to drive the first transport mechanism and the second transport mechanism to move a preset distance L1 along the first direction X toward the third workstation 203 at the same time, so that the first transport mechanism and the second transport mechanism move synchronously, until the first transport mechanism moves to make the silicon wafer grabbed by the first transport mechanism located above the second workstation 202, so as to transport the silicon wafer from the first workstation 201 to the second workstation 202, and the second transport mechanism moves to make the silicon wafer grabbed by the second transport mechanism located above the third workstation 203, so as to transport the silicon wafer from the second workstation 202 to the third workstation 203, so as to realize the simultaneous transport of two silicon wafers through the two transport mechanisms, thereby saving the silicon wafer transport time.

[0043] It can be understood that the distance between adjacent workstations can be understood as: the distance between the center of the current workstation and the center of the next workstation along the first direction X. The distance between adjacent slides 21 can be understood as: the distance between the center of the previous slide 21 and the center of the next slide 21 along the first direction X.

[0044] Optionally, a slide 21 extending along the first direction X can be set on the fixed base 1, and a slide 11 cooperating with the slide 21 can be set on the conveying mechanism 2, or other cooperating structures capable of achieving relative sliding in addition to the slide 21 and the slide 11 can be set between the fixed base 1 and the conveying mechanism 2, without specific limitation.

[0045] In some embodiments, the driving mechanism 3 is a linear motor, which includes a stator, a first mover, and a second mover. The stator is arranged on a fixed seat, and the first mover and the second mover are electromagnetically coupled to the stator respectively. The first mover and the second mover are arranged on two different slides 21 respectively. When the control device controls the linear motor to work, the first mover and the second mover can approach or move away from the stator along the first direction X, and the distance between the first mover and the second mover is equal to the distance between the adjacent working positions, that is, equal to the preset distance L1. The double mover structure set by the linear motor can realize the synchronous movement of the two transport mechanisms 2. The double-motor linear motor can make the two transport mechanisms 2 move faster along the first direction X, and the displacement accuracy of the two transport mechanisms 2 is higher, ensuring that during the multiple reciprocating movements of the two transport mechanisms 2 along the first direction X, the distance between the slides 21 of the two transport mechanisms 2 is maintained at the preset distance L1 corresponding to the adjacent working positions, thereby improving the alignment accuracy.

[0046] Optionally, the stator, the first mover and the second mover are respectively connected to an external power source via connecting wires.

[0047] In an optional embodiment, the sheet-like transport device further includes a drag chain assembly 4, which is connected to the fixed seat. The drag chain assembly 4 is configured to at least accommodate the connecting wire of the mover, and the drag chain assembly 4 can drive the connecting wires of the two movers to move along the first direction X with the multiple transport mechanisms 2. Specifically, the drag chain assembly 4 may include a guide sheet metal and a closed drag chain, and the connecting wire is inserted into the closed drag chain, so that when the first mover and the second mover move relative to the stator, the closed drag chain can move relative to the guide sheet metal along the first direction X, so that the connecting wire extends into the closed drag chain or extends from the closed drag chain to avoid confusion of the connecting wire, and at the same time can achieve a silent effect on the linear motor. It should be emphasized that the specific matching structure of the drag chain assembly 4 can refer to the structure of the drag chain used in the linear motion structure in the field, and will not be repeated.

[0048] It can be understood that the driving mechanism 3 can also be set as a structure in which a motor drives the movement of a screw nut pair, or it can also be set as a structure in which a motor drives the rotation of a gear set, converting the gear transmission into the movement of a belt along the first direction X, thereby driving multiple conveying mechanisms 2 to move along the first direction X, without specific limitation.

[0049] In some embodiments, Figures 3 to 7 The transport mechanism 2 includes a support assembly 22 and a grab assembly 23. The support assembly 22 is connected to the slide 21, and the grab assembly 23 is connected to the support assembly 22. The grab assembly 23 extends to the top of the working position to pick up and place the silicon wafer at the working position. The support assembly 22 is set so that the grab assembly 23 can extend to the top of the working position, and the grab assembly 23 can pick up and place the silicon wafer at the corresponding working position.

[0050] like Figures 3 to 5 The support assembly 22 includes a first support rod 221 and a second support rod 222. The first support rod 221 extends in a vertical direction and is connected to the slide 21. The second support rod 222 extends in a horizontal direction. One end of the second support rod 222 is connected to the first support rod 221, and the other end of the second support rod 222 is detachably connected to the grabbing assembly 23 so that the grabbing assembly 23 is located above the working position.

[0051] It is understandable that the first support rod 221 and the second support rod 222 are both configured as hollow profile structures to reduce the weight of the support assembly 22, thereby reducing the load of the driving mechanism 3, which helps to increase the movement speed of the transport mechanism 2.

[0052] Optionally, the hollow profiles provided by the first support rod 221 and the second support rod 222 may be, for example, I-shaped, Y-shaped, etc., and may be selected according to common geometric patterns of profiles without specific limitation.

[0053] In some optional embodiments, a reinforcing plate 224 is connected between the first support rod 221 and the second support rod 222 to improve the strength of the connection between the first support rod 221 and the second support rod 222 .

[0054] Optionally, at least one of the first support rod 221 and the second support rod 222 is further provided with a wiring hole 229 communicating with the hollow space, so as to allow wiring to be routed inside the first support rod 221 and the second support rod.

[0055] It is understandable that at least one of the first support rod 221 and the second support rod 222 is provided with a fastening screw hole 2221, and the screw passes through the fastening screw hole 2221 to fasten the first support rod 221 and the second support rod 222. In other examples, the detachable connection between the first support rod 221 and the second support rod 222 can also be a snap connection, for example, without specific limitation.

[0056] In some embodiments, the support assembly 22 further includes a support seat 223, the support seat 223 is fixedly connected to the slide 21, and a groove 2231 is provided on the upper surface of the support seat 223, and the first support rod 221 can be inserted into the groove 2231 and detachably connected to the support seat 223. The groove 2231 is provided to improve the strength and stability of the connection between the first support rod 221 and the support seat 223.

[0057] Optionally, the first support rod 221 is loosely matched with the groove 2231, and the depth of the groove 2231 is at least greater than 1 mm, for example, the depth of the groove 2231 is 2 mm. The specific depth of the groove 2231 in the support seat 223 can be adaptively adjusted according to actual needs and is not specifically limited.

[0058] It is understandable that the support seat 223 may further include a plurality of fixing holes 2232 , and bolts pass through the fixing holes 2232 to fix the support seat 223 to the slide 21 .

[0059] In an optional embodiment, the first support rod 221 and the second support rod 222 are made of aluminum profiles, and the support seat 223 is made of aluminum plate, so as to further reduce the weight of the support assembly 22 and reduce the load of the drive mechanism 3. It is understandable that in other examples, the first support rod 221, the second support rod 222 and the support seat 223 can also be made of other light metal or non-metal materials to ensure high support strength while being light in weight, without specific limitation.

[0060] In some embodiments, Figure 6 and Figure 7 The gripping assembly 23 includes a fixed plate 231, an adsorbent 232 and an adjusting member 233. The adsorbent 232 is detachably connected to the fixed plate 231. The adsorbent 232 is located on the side of the fixed plate 231 facing the working position. The adsorbent 232 can adsorb silicon wafers at the corresponding working position. The adjusting member 233 connects the fixed plate 231 and the second support rod 222. The adjusting member 233 is configured to be able to adjust the vertical position of the adsorbent 232. The adjusting member 233 can be used to conveniently and quickly adjust the vertical position of the entire adsorbent 232, so that the distance from the adsorbent 232 to the silicon wafer at the working position is within the adsorbable distance, saving the adjustment and alignment time of the transport mechanism 2.

[0061] It is understandable that the adsorption distance between the adsorption member 232 and the silicon wafer at the working position is not greater than 5 mm, for example, it can be 3 mm, without specific limitation.

[0062] In some embodiments, the adjustment member 233 includes an adjustment plate 2331 and a locking member. The adjustment plate 2331 is connected to the fixing plate 231. The adjustment plate 2331 is provided with a waist-shaped hole 2332 extending in the vertical direction. The waist-shaped hole 2332 passes through the adjustment plate 2331. The locking member is detachably connected to the second support rod 222 through the waist-shaped hole 2332. A locking screw hole 2222 is provided at one end of the second support rod 222 away from the first support rod 221. The locking member can be set as a locking screw. The locking screw passes through the waist-shaped hole 2332 and is detachably connected to the locking screw hole 2222. Among them, the waist-shaped hole 2332 extending in the vertical direction allows the adjustment direction M (such as Figure 6 The specific matching position of the locking screw and the waist-shaped hole 2332 can be adjusted in the direction indicated by the double arrow M in the middle (the adjustment direction M is parallel to the vertical direction).

[0063] It can be understood that, along the extension direction of the waist-shaped hole 2332, the distance between the locking pieces at the two end positions of the waist-shaped hole 2332 is not greater than 5 mm, that is, the adjustable distance of the adjustment plate 2331 along the adjustment direction M is not greater than 5 mm.

[0064] In some embodiments, the grabbing assembly 23 further includes a first sensing member 234, which is detachably connected to the fixing plate 231. The first sensing member 234 is configured to generate a first sensing signal when sensing that the silicon wafer is located below the adsorbing member 232, and the adsorbing member 232 adsorbs the silicon wafer according to the first sensing signal. Specifically, the first sensing member 234 is configured as a silicon wafer sensor, and the fixing plate 231 is detachably connected with a bending plate 2311, and the silicon wafer sensor is connected to the bending plate 2311. The silicon wafer sensor is set at a position corresponding to the adsorbing member 232 through the bending plate 2311 to detect whether there is a silicon wafer at the corresponding working position below the adsorbing member 232. The setting of the bending plate 2311 can facilitate the maintenance and replacement of the silicon wafer sensor.

[0065] It is understood that the adsorption member 232 includes a suction cup 2321, an adjustment plate 2322, and a plurality of leveling bolts 2323 connecting the adjustment plate 2322 and the suction cup 2321. The adjustment of the plurality of leveling bolts 2323 makes the adjustment plate 2322 parallel to the suction cup 2321, and the suction cup 2321 is parallel to the silicon wafer. The adjustment plate 2322 is connected to the fixing plate 231.

[0066] Optionally, the adsorption member 232 may also include a speed regulating valve 226, a pressure detecting member 225, a solenoid valve 227, an air pipe 228, etc. connected to the adsorption member 232. The speed regulating valve 226, the pressure detecting member 225, the solenoid valve 227 and the air pipe 228 may be correspondingly arranged on the first support rod 221 and the second support rod 222 without specific limitation.

[0067] In some embodiments, Figure 8 and Fig. 9The sheet material handling device 10 further includes an anti-collision sensing component 24, which includes a second sensing member 241 and a third sensing member 242, which are respectively connected to the two handling mechanisms 2, and the second sensing member 241 and the third sensing member 242 are arranged opposite to each other, and are configured to generate a second sensing signal when the distance between the second sensing member 241 and the third sensing member 242 is reduced to a first distance, and the driving mechanism 3 stops working according to the second sensing signal, and the first distance is less than the distance between adjacent working positions, wherein the first distance is the sensing distance at which the second sensing member 241 and the third sensing member 242 can generate the second sensing signal, and the first distance can be 0. When the distance between the two handling mechanisms 2 is the distance between adjacent working positions (i.e., the preset distance L1), the distance between the second sensing member 241 and the third sensing member 242 is the third distance L2, and the third distance L2 is less than the first distance. When the driving mechanism 3 drives the two conveying mechanisms 2 to move too fast, under the action of inertia, the first mover and the second mover may not be able to stop in time, thereby causing the distance between the two conveying mechanisms 2 to be shortened relative to the preset distance L1, and the distance between the second sensing member 241 and the third sensing member 242 will also be reduced from the original third distance L2. When it is reduced to the first distance, an induction signal will be generated, and the driving mechanism 3 will force the two movers to stop moving, thereby avoiding a collision between the two conveying mechanisms 2.

[0068] It is understandable that the second sensing element 241 and the third sensing element 242 may be, for example, infrared sensors, position sensors, etc., without specific limitation.

[0069] For example, continue as Figure 8 and Fig. 9 , the second sensing member 241 can be set as an induction ring, and the third sensing member 242 can be set as an induction rod that cooperates with the induction ring. There is a preset distance L1 between the two conveying mechanisms 2, and at this time, there is a third distance L2 between the end of the induction rod and the induction ring. When the two conveying mechanisms 2 move from the corresponding working position to the next working position at the same time, the first mover and the second mover may be affected by the inertia force when they stop, resulting in failure to stop in time, which may cause the distance between the two conveying mechanisms to decrease from the original preset distance L1. In the process of reducing the preset distance, the distance between the end of the induction rod and the induction ring will also decrease from the third distance L2. When the end of the induction rod is flush with the end of the induction ring, a second induction signal will be generated. At this time, the first distance is 0. The control device forcibly controls the two movers to stop according to the second induction signal to prevent the two conveying mechanisms 2 from colliding under the action of inertia.

[0070] It is understandable that the second sensing element 241 and the third sensing element 242 may also be configured as other matching structures so that the first distance when the second sensing signal is generated is a value between 0 and the third distance L2, without specific limitation.

[0071] In some embodiments, Figures 8 to 10 The sheet material handling device 10 further includes an anti-collision buffer assembly 25, which includes a first buffer 251 and a second buffer 252, which are respectively connected to the two handling mechanisms 2, and the first buffer 251 and the second buffer 252 are arranged opposite to each other. There is a second distance between the first buffer 251 and the second buffer 252, which is greater than the first distance, and less than the preset distance L1 between adjacent working positions. The first buffer 251 and the second buffer 252 can be configured as components with elastic deformation ability, such as rubber, spring, foam, etc. The first buffer 251 and the second buffer 252 are configured such that when the distance between the second sensing member 241 and the third sensing member 242 continues to decrease from the first distance, the first buffer 251 and the second buffer 252 can abut and produce elastic deformation.

[0072] For example, Figure 8 and Fig. 9 , when there is a preset distance L1 between the two transport mechanisms 2, at this time, there is a third distance L2 between the end of the sensing rod and the sensing ring, and there is a fourth distance L3 between the end of the first buffer 251 and the end of the second buffer 252, and the fourth distance L3 is greater than the third distance L2. In the process of the distance between the two transport mechanisms 2 decreasing from the preset distance L1 under the action of inertia, the distance between the end of the sensing rod and the sensing ring will also decrease from the third distance L2, and the distance between the end of the first buffer 251 and the end of the second buffer 252 will also decrease from the fourth distance L3. When the distance between the end of the sensing rod and the sensing ring decreases from the third distance L2 to the first distance (the first distance is 0 at this time), the distance between the end of the first buffer 251 and the end of the second buffer 252 decreases from the fourth distance L3 to the fifth distance L3', and the fifth distance L3' is greater than the first distance.

[0073] like Fig.10 If the control device forcibly controls the two movers to stop moving according to the second sensing signal, the two movers still have a certain inertia, which will cause the distance between the two transport mechanisms 2 to continue to decrease, and the sensing rod continues to move through the sensing ring. The first distance becomes a negative number, and the distance between the first buffer 251 and the second buffer 252 continues to decrease from the fifth distance L3' to the second distance. At this time, the second distance is 0, and the second distance is greater than the first distance. The first buffer 251 and the second buffer 252 contact and produce elastic deformation. At this time, there is still a certain distance between the two transport mechanisms 2, so that the elastic deformation ability of the two buffers is used to further prevent the two transport mechanisms 2 from collision.

[0074] It is understandable that when the distance between the two transport mechanisms 2 is the preset distance L1, the third distance L2 between the second sensing member 241 and the third sensing member 242 of the two transport mechanisms 2 can be adaptively adjusted according to the size of the first distance for generating the second sensing signal, and the third distance L2 is greater than the first distance. The fourth distance L3 between the first buffer member 251 and the second buffer member 252 of the two transport mechanisms 2 can be adaptively adjusted according to the third distance L2, the first distance for generating the second sensing signal, the size of the second distance, and the deformability of the buffer member, without specific limitation. It should be emphasized that the specific matching structure of the anti-collision sensing component 24 and the anti-collision buffer component 25, the specific setting position in the transport mechanism 2, and the number of settings, etc., can be adaptively adjusted according to actual needs, without specific limitation.

[0075] An embodiment of the present disclosure also provides a transmission system, such as Figure 1 , including: a control device; a transmission system is provided with at least three workstations, which are arranged in sequence along the first direction X; the sheet material handling device 10 described in any of the above embodiments, the sheet material handling device is arranged on one side of the multiple workstations, and the control device can control the sheet material handling device to flow between the multiple workstations to transport the sheets, so that the sheets pass through the multiple workstations in sequence, which will not be repeated.

[0076] In the embodiments of the present disclosure, if not clearly defined, the connection form may be a detachable connection by means of bolts and nuts, screws, buckles, magnetic attraction, etc. In some connections, if there is no special requirement for the detachable form, a non-detachable connection may be made by means of welding, bonding, etc.

[0077] The basic principles of the present disclosure are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present disclosure are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present disclosure. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, and are not limitations. The above details do not limit the present disclosure to the necessity of adopting the above specific details to be implemented.

[0078] The block diagrams of the devices, apparatuses, equipment, and systems involved in this disclosure are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including," "comprising," "having," and the like are open words, referring to "including but not limited to," and can be used interchangeably therewith. The words "or" and "and" used herein refer to the words "and / or," and can be used interchangeably therewith, unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to," and can be used interchangeably therewith.

[0079] It should also be noted that in the apparatus, device and method of the present disclosure, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present disclosure.

[0080] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present disclosure. Therefore, the present disclosure is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0081] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present disclosure to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A sheet material conveying device, characterized in that: Applied to a transmission system, the transmission system includes a control device, and the transmission system is sequentially arranged with at least three working positions along a first direction, the sheet material handling device is used to transfer between the plurality of the working positions to handle the sheet material, and the sheet material sequentially passes through the plurality of the working positions; Wherein, the sheet material conveying device comprises: A fixing seat, arranged on one side of the plurality of working positions; A driving mechanism, arranged on the fixing seat; At least two transport mechanisms are respectively connected to the driving mechanism along the first direction, and the driving mechanism can drive each of the transport mechanisms to move along the first direction, wherein each of the transport mechanisms can independently move along the first direction, and adjacent transport mechanisms correspond to adjacent working positions; The control device is configured to control the driving mechanism to drive all the conveying mechanisms to convey the sheet materials simultaneously, so that each conveying mechanism conveys the sheet materials at the current working position to the next working position.

2. The sheet material conveying device according to claim 1, characterized in that: The fixing seat is provided with a slideway extending along the first direction; The transport mechanism comprises: A slide table is slidably connected to the slideway, and the slide table is connected to the driving mechanism; Wherein, the control device is configured to control the driving mechanism to drive each slide to slide along the slideway, and make the single sliding distance of each slide equal to the distance between adjacent work stations, so that multiple conveying mechanisms can move from the corresponding work station to the next work station at the same time.

3. The sheet material conveying device according to claim 2, characterized in that: The number of the transport mechanisms is two, and the driving mechanism is a linear motor, which includes: A stator, arranged on the fixing seat; A first mover is electromagnetically coupled to the stator, and the first mover is arranged on the slide; The second mover is electromagnetically coupled to the stator, the second mover is arranged on the slide, and the first mover and the second mover are located on different slides. When the control device controls the linear motor to work, the first mover and the second mover can approach or move away from the stator along the first direction at the same time, and the distance between the first mover and the second mover is equal to the distance between adjacent working positions.

4. The sheet material conveying device according to claim 2, characterized in that: The transport mechanism comprises: A support assembly connected to the slide; A grabbing assembly is connected to the supporting assembly, and the grabbing assembly extends to above the working position to take and place the sheet material located at the working position.

5. The sheet material conveying device according to claim 4, characterized in that: The support assembly comprises: A first support rod extending in a vertical direction and connected to the slide; A second support rod extending in a horizontal direction, one end of the second support rod being connected to the first support rod, and the other end of the second support rod being detachably connected to the grabbing assembly, so that the grabbing assembly is located above the working position; The support seat is fixedly connected to the slide, and a groove is provided on the upper surface of the support seat. The first support rod can be embedded in the groove and detachably connected to the support seat.

6. The sheet material conveying device according to claim 5, characterized in that: The grabbing component comprises: Fixed plate; An adsorption member is detachably connected to the fixing plate, the adsorption member is located on a side of the fixing plate facing the working position, and the adsorption member can adsorb the sheet material at the corresponding working position; An adjusting member is connected to the fixing plate and the second supporting rod, and the adjusting member is configured to be able to adjust the position of the adsorption member in the vertical direction.

7. The sheet material conveying device according to claim 6, characterized in that: The adjusting member comprises: An adjusting plate connected to the fixing plate, wherein the adjusting plate is provided with a waist-shaped hole extending in a vertical direction, and the waist-shaped hole penetrates the adjusting plate; A locking piece passes through the waist-shaped hole and is detachably connected to the second support rod.

8. The sheet material conveying device according to claim 6, characterized in that: The grabbing component also includes: The first sensing element is detachably connected to the fixing plate. The first sensing element is configured to generate a first sensing signal when sensing that the sheet material is located below the adsorbent. The adsorbent adsorbs the sheet material according to the first sensing signal.

9. The sheet material conveying device according to any one of claims 1 to 8, characterized in that: Also includes: A second sensing element connected to the transport mechanism; The third induction element is connected to the transport mechanism, and the second induction element and the third induction element are respectively disposed on different transport mechanisms and are configured as follows: When the distance between the second sensing element and the third sensing element decreases to a first distance, a second sensing signal is generated, and the control device controls the driving mechanism to stop working according to the second sensing signal, and the first distance is smaller than the distance between adjacent working positions.

10. The sheet material conveying device according to claim 9, characterized in that: Also includes: A first buffer and a second buffer, wherein the first buffer and the second buffer are respectively arranged opposite to each other on the adjacent conveying mechanisms; Wherein, there is a second distance between the first buffer member and the second buffer member, and the second distance is greater than the first distance; If the distance between the second induction member and the third induction member continues to decrease from the first distance, the first buffer member and the second buffer member can abut against each other and generate elastic deformation.

11. A transmission system, characterized in that: include: Control devices; At least three working positions are arranged in sequence along a first direction; The sheet material conveying device according to any one of claims 1 to 10 is arranged on one side of the plurality of workstations, and the control device is capable of controlling the sheet material conveying device to flow between the plurality of workstations to convey the sheets, so that the sheets pass through the plurality of workstations in sequence.

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