Coating device and coating equipment

Abstract

The utility model provides a coating device and coating equipment, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem of non-uniform movement speed of a material box in the coating device. The film coating device is applied to a passivation process of a flaky material. The film coating device comprises a process cavity, two groups of transmission mechanisms, a driving assembly and a position detection assembly, due to the fact that the driving assembly can transmit power to at least one magnetofluid transmission assembly, and the power is transmitted to the other magnetofluid transmission assemblies through the first toothed belt, the two sets of transmission mechanisms can jointly transport the material box, and therefore the material box can be stably transported in a balanced mode; besides, power can be accurately transmitted to the other magnetofluid transmission assemblies from the magnetofluid transmission assembly connected with the driving assembly through the first toothed belt, so that the magnetofluid transmission assemblies can be synchronously transmitted, and the uniformity of the conveying speed is guaranteed.

Description

Technical Field

[0001] The present application relates to the field of semiconductor or photovoltaic material processing, and specifically to a coating device and coating equipment. Background Art

[0002] In the field of semiconductor or photovoltaic material processing, when processing sheet materials, atomic layer deposition (ALD) equipment is often used to coat the sheet materials.

[0003] In the related art, ALD equipment generally includes tubular ALD equipment and rotary ALD equipment. Among them, the tubular ALD equipment is to place the sheet material into the process chamber and introduce a variety of process gases in sequence for coating. Since the multiple process gases are introduced into the process chamber in sequence, it takes a long time, so the capacity of the tubular ALD equipment is low. The rotary ALD equipment is to set a gas nozzle at the top of the process chamber, and the rotating table at the bottom rotates, driving the material box on the rotating table to make a circular motion. When the material box passes under the gas nozzle, it can be coated. This structure can be set with a variety of gas nozzles to spray a variety of gases at the same time for coating, so compared with the tubular ALD equipment, the capacity is higher. However, in the rotary ALD equipment, the material box passes under the gas nozzle at a constant angular velocity, and the linear speed at different positions of the material box is different, which will cause the quality of the sheet material coating at different positions in the material box to be uneven. Therefore, how to transport the material box at a stable and uniform speed has become an urgent problem to be solved. Utility Model Content

[0004] In order to solve the above technical problems, the present application is proposed. The embodiments of the present application provide a coating device and a coating equipment.

[0005] In the first aspect, an embodiment of the present application provides a coating device, which is applied to the passivation process of sheet materials. The coating device includes: a process cavity, a process chamber is formed inside the process cavity, and a first through hole is provided on the side wall of the process cavity; two groups of transmission mechanisms are configured to drive the material box in the process chamber to reciprocate, the two groups of transmission mechanisms are respectively arranged on both sides of the process cavity, and the two groups of transmission mechanisms are symmetrically arranged along the vertical symmetry plane in the extension direction of the process chamber, each group of transmission mechanisms includes a plurality of magnetofluid transmission components and a first toothed belt, each magnetofluid transmission component is arranged through the first through hole, the first ends of the plurality of magnetofluid transmission components are connected through the first toothed belt transmission, and the second end of the magnetofluid transmission component is located in the process chamber; a driving component, the first end of at least one of the plurality of magnetofluid transmission components is connected to the driving component, and the driving component is used to drive the magnetofluid transmission component; a position detection component, at least partially located in the process chamber, for detecting the moving position of the material box.

[0006] In some embodiments, the magnetofluid transmission component includes: a magnetofluid bearing, the first end of the magnetofluid bearing is arranged outside the process chamber, the second end of the magnetofluid bearing passes through the first through hole and extends into the process chamber; a driving wheel, sleeved on the second end of the magnetofluid bearing, and configured to carry and transport the material box; a first synchronous wheel, the first end of each magnetofluid bearing is sleeved with at least two first synchronous wheels, and the first toothed belt is sleeved on the first synchronous wheels of two adjacent magnetofluid bearings; wherein the first ends of m magnetofluid transmission components are sequentially connected through m-1 first toothed belts for transmission, and m≥2.

[0007] In some embodiments, the magnetic fluid transmission assembly includes: a spacer, which is sleeved on the magnetic fluid bearing and located between adjacent first synchronous wheels on each magnetic fluid bearing.

[0008] In some embodiments, the position detection component includes a light emitting component and a light receiving component, and the light emitting component and the light receiving component are respectively arranged on the left side wall and the right side wall of the process chamber, the left side wall of the process chamber has a second through hole, and the right side wall of the process chamber has a third through hole; wherein the light emitting component includes: a first sealing plate connected to the left side wall of the process chamber, the first sealing plate having a sixth through hole, and the sixth through hole is connected to the second through hole; a light emitter connected to the first sealing plate and configured to emit light to the sixth through hole; a first transparent seal, arranged in the sixth through hole, and the first transparent seal is configured to allow light to pass through; a first sealing ring, arranged on the first transparent seal and the first sealing plate; a second sealing ring is arranged between the first sealing plate and the process chamber; wherein the light receiving assembly includes: a second sealing plate connected to the right side wall of the process chamber, the second sealing plate having a seventh through hole, the seventh through hole being connected to the third through hole; a light receiver connected to the second sealing plate, configured to receive light emitted by the light emitter that passes through the sixth through hole, the second through hole, the process chamber, the third through hole and the seventh through hole in sequence; a second transparent seal is arranged in the seventh through hole, the second transparent seal is configured to allow light to pass through; a third sealing ring is arranged between the second transparent seal and the second sealing plate; a fourth sealing ring is arranged between the second sealing plate and the process chamber.

[0009] In some embodiments, there are multiple position detection components, and the multiple position detection components are arranged at intervals along the extension direction of the process chamber.

[0010] In some embodiments, the driving assembly is disposed outside the process chamber and located at the bottom of the process chamber.

[0011] In some embodiments, the drive source component includes: a motor, configured to output rotational force; a driving shaft, which is transmission-connected to the motor and configured to rotate under the drive of the motor; two second synchronous wheels, respectively mounted on both ends of the driving shaft, configured to rotate under the drive of the driving shaft; two second toothed belts, wherein one second toothed belt is mounted on a second synchronous wheel and a magnetohydrodynamic transmission component in a transmission component, and the other second toothed belt is mounted on another second synchronous wheel and a magnetohydrodynamic transmission component in another transmission component.

[0012] In some embodiments, the top of the process chamber has a fourth through hole, and the coating device further includes: at least one gas nozzle, the gas nozzle passes through the fourth through hole and extends into the process chamber; a nozzle seal, disposed in the fourth through hole, configured to seal the gap between the gas nozzle and the inner wall of the fourth through hole; and / or, the top of the process chamber has a fifth through hole, and the coating device further includes: a heating component, the heating component passes through the fifth through hole and extends into the process chamber; a heating component seal, disposed in the fifth through hole, configured to seal the gap between the heating component and the inner wall of the fifth through hole.

[0013] In some embodiments, when the coating device includes a gas nozzle, the gas nozzle is disposed at the central area of ​​the top of the process chamber; when the coating device includes a gas nozzle and a heating assembly, the heating assembly is disposed on both sides of the gas nozzle.

[0014] In the second aspect, an embodiment of the present application provides a coating device, comprising: a coating device according to any one of the first aspects above; and a material box for carrying sheet materials, wherein the material box is located in a process chamber of a process chamber of the coating device, and a transmission mechanism of the coating device is configured to drive the material box to perform reciprocating motion.

[0015] The coating device and coating equipment proposed in the embodiments of the present application, since the driving component can transmit power to at least one magnetofluid transmission component, and transmit it to other magnetofluid transmission components by the first toothed belt, enable the two groups of transmission mechanisms to jointly transport the material box, thereby enabling the material box to be transported in a balanced and stable manner; in addition, the power can be accurately transmitted from the magnetofluid transmission component connected to the driving component to other multiple magnetofluid transmission components through the first toothed belt, so that the multiple magnetofluid transmission components can be transmitted synchronously, thereby ensuring the uniformity of the transportation speed. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 Shown is a schematic structural diagram of a coating device provided by an exemplary embodiment of the present application.

[0018] Figure 2 The following is an exemplary embodiment of the present application. Figure 1 Section view taken along the AA direction.

[0019] Figure 3 Shown is a schematic structural diagram of a magnetofluid transmission assembly provided by an exemplary embodiment of the present application.

[0020] Figure 4 Shown is a schematic structural diagram of a drive assembly provided by an exemplary embodiment of the present application.

[0021] Figure 5 The figure is a schematic diagram of the structure of a light emitting assembly provided by an exemplary embodiment of the present application.

[0022] Figure 6 The following is an exemplary embodiment of the present application. Figure 5 Sectional view taken along the BB direction.

[0023] Figure 7 Shown is a schematic structural diagram of a coating device provided by an exemplary embodiment of the present application.

[0024] Reference numerals:

[0025] 100, coating device; 110, process chamber; 120, drive assembly; 121, motor; 122, driving shaft; 123, second synchronous wheel; 124, second toothed belt; 125, reducer; 126, coupling; 127, reducer mounting plate; 128, bottom plate; 129, bearing seat; 130, transmission mechanism; 131, magnetofluid transmission assembly; 1311, magnetofluid bearing; 1312, driving wheel; 1313, first synchronous wheel; 1314, spacer; 132, first toothed belt; 140, position detection assembly; 141, first sealing plate; 142, light emitter; 143, first transparent sealing member; 144, first sealing ring; 145, second sealing ring; 146, first sensor mounting sheet metal; 150, gas nozzle; 160, heating assembly; 200, coating equipment; 210, material box. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0027] Application Overview

[0028] In the field of semiconductor or photovoltaic material processing, such as the Tunnel Oxide Passivated Contact (TOPCon) process, when processing sheet materials, atomic layer deposition (ALD) equipment is often used to coat the sheet materials. For example, the cross section formed after the silicon wafer is split will affect the light energy conversion efficiency of the silicon wafer, so it is necessary to use ALD equipment to passivate the silicon wafer cross section.

[0029] In the related art, ALD equipment generally includes tubular ALD equipment and rotary ALD equipment. Among them, tubular ALD equipment is to place sheet materials into a process chamber and introduce multiple process gases in sequence for coating. Since multiple process gases are introduced into the process chamber in sequence, it takes a long time, so the capacity of tubular ALD equipment is relatively low.

[0030] The rotary ALD equipment has a gas nozzle at the top of the process chamber. The rotating table at the bottom rotates, driving the material box on the rotating table to make a circular motion. When the material box passes under the gas nozzle, coating can be carried out. This structure can be equipped with multiple gas nozzles to spray multiple gases at the same time for coating. Therefore, compared with the tubular ALD equipment, the production capacity is higher. However, in the rotary ALD equipment, the material box passes under the gas nozzle at a constant angular velocity, and the linear speed at different positions of the material box is different, which will cause the coating quality of the sheet material at different positions in the material box to vary.

[0031] In addition, the sealing of the process chamber of the ALD equipment also greatly affects the process quality and safety.

[0032] In view of this, the present application proposes a coating device and a coating equipment, wherein the coating device is applied to the passivation process of sheet materials, and the coating device includes: a process cavity, a process chamber is formed inside the process cavity, and a first through hole is provided on the side wall of the process cavity; two groups of transmission mechanisms are configured to drive the material box in the process chamber to reciprocate, the two groups of transmission mechanisms are respectively arranged on both sides of the process cavity, and the two groups of transmission mechanisms are symmetrically arranged along the vertical symmetry plane in the extension direction of the process chamber, each group of transmission mechanisms includes a plurality of magnetofluid transmission components and a first toothed belt, each magnetofluid transmission component is arranged through the first through hole, the first ends of the plurality of magnetofluid transmission components are connected through the first toothed belt transmission, and the second end of the magnetofluid transmission component is located in the process chamber; a driving component, a first end of at least one of the plurality of magnetofluid transmission components is connected to the driving component, and the driving component is used to drive the magnetofluid transmission component; a position detection component, at least partially located in the process chamber, for detecting the moving position of the material box.

[0033] Since the driving component can transmit power to at least one magnetofluid transmission component, and transmit it to other magnetofluid transmission components by the first toothed belt, the two sets of transmission mechanisms can jointly transport the material box, thereby transporting the material box in a balanced and stable manner; in addition, the power can be accurately transmitted from the magnetofluid transmission component connected to the driving component to other multiple magnetofluid transmission components through the first toothed belt, so that multiple magnetofluid transmission components can be transmitted synchronously, ensuring the uniformity of the transportation speed.

[0034] Exemplary Devices

[0035] Figure 1 FIG. 1 is a schematic structural diagram of a coating device provided by an exemplary embodiment of the present application. Figure 2 The following is an exemplary embodiment of the present application. Figure 1 The cross-sectional view cut along the AA direction. Figure 1 and Figure 2As shown, the present application provides a coating device 100, which is applied to the passivation process of sheet materials. The coating device 100 includes: a process cavity 110, in which a process chamber is formed, and a first through hole is provided on the side wall of the process cavity 110; two sets of transmission mechanisms 130, which are configured to drive the material box in the process chamber to reciprocate, and the two sets of transmission mechanisms 130 are respectively arranged on both sides of the process cavity 110, and the two sets of transmission mechanisms 130 are symmetrically arranged along the vertical symmetry plane in the extension direction of the process chamber, and each set of transmission mechanisms 130 includes a plurality of magnetic fluid transmission groups Part 131 and a first toothed belt 132, each magnetic fluid transmission component 131 is arranged through the first through hole, the first ends of the multiple magnetic fluid transmission components 131 are connected through the first toothed belt 132, and the second ends of the magnetic fluid transmission components 131 are located in the process chamber; a driving component 120, a first end of at least one of the multiple magnetic fluid transmission components 131 is connected to the driving component 120, and the driving component 120 is used to drive the magnetic fluid transmission component 131; a position detection component 140, at least partially located in the process chamber, is used to detect the moving position of the material box.

[0036] Specifically, the material box is used to carry sheet materials, and the sheet materials are exemplarily silicon wafers or glass substrates, and more specifically, the sheet materials can be exemplarily silicon wafers after being split. The driving component 120 can exemplarily include a motor or a cylinder, which is used to drive the magnetic fluid transmission component 131 in the transmission mechanism 130 to move, thereby driving the material box to move. The position detection component 140 can exemplarily include a photoelectric sensor or a travel switch, which can accurately detect the position of the material box, facilitate manual monitoring of the transportation of the material box, and facilitate regulation of the transportation speed and transportation direction of the transmission mechanism 130. The first toothed belt 132 is a synchronous toothed belt, which is usually made of steel wire rope or glass fiber rope as a strong layer, and is attached with polyurethane or chloroprene rubber on the outside. The inner circumference of the synchronous toothed belt is made into a tooth shape so that it meshes with the toothed belt pulley. There is no relative sliding between the synchronous toothed belt and the toothed belt pulley, thereby ensuring synchronous transmission and a constant transmission ratio.

[0037] In the above embodiment, since the driving component 120 can transmit power to at least one magnetofluid transmission component 131, and transmit it to other magnetofluid transmission components 131 by the first toothed belt 132, the two groups of transmission mechanisms 130 can jointly transport the material box, thereby transporting the material box in a balanced and stable manner; in addition, the power can be accurately transmitted from the magnetofluid transmission component 131 connected to the driving component 120 to other multiple magnetofluid transmission components 131 through the first toothed belt 132, so that the multiple magnetofluid transmission components 131 can be transmitted synchronously, thereby ensuring the uniformity of the transportation speed.

[0038] Figure 3 Shown is a schematic structural diagram of a magnetofluid transmission assembly provided by an exemplary embodiment of the present application.

[0039] In some embodiments, Figure 3 As shown, the magnetic fluid transmission component 131 includes: a magnetic fluid bearing 1311, the first end of the magnetic fluid bearing 1311 is arranged outside the process chamber, and the second end of the magnetic fluid bearing 1311 passes through the first through hole and extends into the process chamber; a driving wheel 1312, which is sleeved on the second end of the magnetic fluid bearing 1311 and is configured to carry and convey the material box; a first synchronous wheel 1313, each magnetic fluid bearing 1311 The first end is sleeved with at least two first synchronous wheels 1313, and the first toothed belt 132 is sleeved on the first synchronous wheels 1313 of two adjacent magnetic fluid bearings 1311; wherein, the first ends of m magnetic fluid transmission components 131 are sequentially connected through m-1 first toothed belts 132 for transmission, and m≥2.

[0040] Specifically, the first synchronous wheel 1313 is a toothed belt wheel, and the magnetic fluid bearing 1311 at least includes: magnetic fluid, a bearing sleeve, a rotating shaft and a permanent magnet, and the first synchronous wheel 1313 and the driving wheel 1312 are sleeved on the rotating shaft. In actual operation, the first synchronous wheel 1313 sleeved on a magnetic fluid bearing 1311 rotates, and the first synchronous wheel 1313 drives the first toothed belt 132 sleeved thereon to move, and the first toothed belt 132 drives the first synchronous wheel 1313 on the magnetic fluid bearing 1311 adjacent to the magnetic fluid bearing 1311 to rotate, thereby transmitting power between adjacent magnetic fluid transmission components 131, ensuring synchronous transmission between multiple magnetic fluid transmission components 131.

[0041] The first synchronous wheel 1313 of the first magnetic fluid transmission component 131 (ie, the magnetic fluid transmission component 131 connected to the driving component 120 ) among the multiple magnetic fluid transmission components 131 is driven to rotate by the driving component 120 .

[0042] More specifically, for any magnetofluid transmission assembly 131, the rotation of the first synchronous wheel 1313 drives the rotating shaft to rotate, and the rotating shaft drives the driving wheel 1312 to rotate, thereby transmitting the power on the first synchronous wheel 1313 to the driving wheel 1312, so that the driving wheel 1312 can drive the material box to move.

[0043] In the above embodiment, since the rotating shaft in the magnetic fluid bearing 1311 is in contact with the magnetic fluid instead of directly in contact with the bearing sleeve, the friction force is smaller. Therefore, when the power is transmitted from the first synchronous wheel 1313 to the driving wheel 1312 through the magnetic fluid bearing 1311, the kinetic energy lost by friction is smaller, so that the first synchronous wheel 1313 and the driving wheel 1312 in the multiple magnetic fluid transmission components 131 can rotate synchronously, so that the material box can be transported at a uniform speed; and the magnetic fluid can play a sealing role to prevent the process gas in the process chamber from overflowing from the internal structure of the magnetic fluid bearing 1311, and the external gas from entering the process chamber, thereby destroying the vacuum environment of the process chamber.

[0044] In some embodiments, Figure 3 As shown, the magnetic fluid transmission assembly 131 includes: a spacer 1314 , which is sleeved on the magnetic fluid bearing 1311 and located between adjacent first synchronous wheels 1313 on each magnetic fluid bearing 1311 .

[0045] In the above embodiment, the spacer 1314 can be provided to prevent the first synchronous wheels 1313 sleeved on the same magnetic fluid bearing 1311 from rubbing against each other. In practical applications, the first synchronous wheel 1313 close to the bearing sleeve can be installed first, then the spacer 1314 can be installed, and finally the first synchronous wheel 1313 away from the bearing sleeve can be installed. During the installation process, the spacer 1314 can also prevent the two first synchronous wheels 1313 from rubbing against each other.

[0046] Figure 5 FIG. 1 is a schematic diagram of the structure of a light emitting component provided by an exemplary embodiment of the present application. Figure 6 The following is an exemplary embodiment of the present application. Figure 5 Sectional view taken along the BB direction.

[0047] In some embodiments, Figure 1 , Figure 5 and Figure 6As shown, the position detection component 140 includes a light emitting component and a light receiving component, which are respectively arranged on the left side wall and the right side wall of the process chamber 110, the left side wall of the process chamber 110 has a second through hole, and the right side wall of the process chamber 110 has a third through hole; wherein the light emitting component includes: a first sealing plate 141, connected to the left side wall of the process chamber 110, the first sealing plate 141 has a sixth through hole, and the sixth through hole is connected to the second through hole; a light emitter 142, connected to the first sealing plate 141, and configured to emit light to the sixth through hole; a first transparent sealing member 143, arranged in the sixth through hole, and the first transparent sealing member 143 is configured to allow light to pass through; a first sealing ring 144, arranged in the first through hole The light receiving assembly comprises: a second sealing plate connected to the right side wall of the process chamber 110, the second sealing plate having a seventh through hole, the seventh through hole being connected to the third through hole; a light receiver connected to the second sealing plate, configured to receive light emitted by the light emitter that passes through the sixth through hole, the second through hole, the process chamber, the third through hole and the seventh through hole in sequence; a second transparent seal arranged in the seventh through hole, the second transparent seal being configured to allow light to pass through; a third sealing ring arranged between the second transparent seal and the second sealing plate; and a fourth sealing ring arranged between the second sealing plate and the process chamber 110.

[0048] The structural positions of the light emitting component and the light receiving component are basically the same. The structural position of the light receiving component can be referred to Figure 5 and Figure 6 As shown, the second sealing plate can refer to the first sealing plate 141, the light receiver can refer to the light emitter 142, the second transparent seal can refer to the first transparent seal 143, the third sealing ring can refer to the first sealing ring 144, and the fourth sealing ring can refer to the second sealing ring 145.

[0049] Specifically, the light emitter 142 in the light emitting component serves as the transmitting end, and the light receiver in the light receiving component serves as the receiving end. The detection process of the position detection component 140 is specifically as follows: the light emitter 142 in the light emitting component first emits light, the light passes through the sixth through hole (through the first transparent seal 143 in the sixth through hole), and then passes through the second through hole to irradiate into the process chamber, and the position information of the material box is determined based on whether the light receiver in the light receiving component receives the light. If there is a material box at the target position detected by the position detection component 140, the light emitted by the light emitter 142 will be blocked by the material box, and the light receiver in the light receiving component will not be able to receive the light; if there is no material box at the target position, the light will pass through the process chamber, the third through hole and the seventh through hole (through the second transparent seal in the seventh through hole) in sequence to irradiate the light receiver in the light receiving component.

[0050] More specifically, the first transparent sealing member 143 and the second transparent sealing member are illustratively made of transparent quartz. Figure 6 As shown, the sixth through hole is a stepped type, and the sixth through hole is composed of a first hole segment, a second hole segment and a third hole segment, wherein the first hole segment is close to the light emitter 142, the third hole segment is close to the process chamber 110, the second hole segment is located between the first hole segment and the third hole segment, the cross-sectional size of the second hole segment is larger than the cross-sectional sizes of the first hole segment and the third hole segment, the first transparent seal 143 can be arranged in the second hole segment, and the step of the third hole segment of the third through hole also has a first groove, the first transparent seal 143 shields the opening of the first groove and the opening of the third hole segment close to the second hole segment, and the first sealing ring 144 is arranged in the first groove. The first sealing plate 141 has a second groove on one side close to the process chamber 110, and the second sealing ring 145 is arranged in the second groove, so that the first sealing plate 141 can be tightly connected with the process chamber 110, reducing the gap and improving the sealing performance. Similarly, the seventh through hole has the same structure as the sixth through hole. The structure and positional relationship of the seventh through hole, the second sealing plate, the light receiver, the second transparent seal, the third sealing ring and the fourth sealing ring can refer to the structure and positional relationship of the sixth through hole, the first sealing plate 141, the light emitter 142, the first transparent seal 143, the first sealing ring 144 and the second sealing ring 145.

[0051] In a specific example, the second through hole is located at the upper part of the left side wall of the process chamber 110, and the third through hole is located at the upper part of the right side wall of the process chamber 110, that is, the light emitting component is arranged at the upper part of the left side wall of the process chamber 110, and the light receiving component is arranged at the upper part of the right side wall of the process chamber 110.

[0052] In some embodiments, Figure 5 and Figure 6As shown, the position detection assembly 140 further includes: a first sensor mounting sheet metal 146 connected between the first sealing plate 141 and the light emitter 142, and / or a second sensor mounting sheet metal connected between the second sealing plate and the light receiver. The structure and position of the second sensor mounting sheet metal can refer to the structure and position of the first sensor mounting sheet metal 146.

[0053] In some embodiments, Figure 1 As shown, there are multiple position detection components 140, and the multiple position detection components 140 are arranged at intervals along the extension direction of the process chamber 110. In the above embodiment, by arranging multiple position detection components 140, the position of the material box can be monitored in real time and signal feedback can be performed.

[0054] It is worth understanding that the present application does not impose any specific limitation on the number of position detection components 140 , which can be set according to actual needs.

[0055] In some embodiments, the position detection component 140 (such as a light receiver) is also used to send a position signal, and the coating device 100 also includes: a controller, which is communicatively connected to the position detection component 140 (such as a light receiver) and is configured to control the drive component 120 to output a driving force based on the position signal, thereby automatically controlling the conveying speed and conveying direction of the material box.

[0056] In some embodiments, Figure 1 and Figure 2 As shown, the driving assembly 120 is disposed outside the process chamber and located at the bottom of the process chamber 110. With this structure, the driving assembly 120 and the process chamber 110 can be compactly connected, thereby reducing the space occupied by the coating device 100.

[0057] Figure 4 Shown is a schematic structural diagram of a drive assembly provided by an exemplary embodiment of the present application.

[0058] In some embodiments, Figure 4 As shown, the driving component 120 includes: a motor 121, which is configured to output a rotational force; a driving shaft 122, which is transmission-connected to the motor 121 and is configured to rotate under the drive of the motor 121; two second synchronous wheels 123, which are respectively sleeved on both ends of the driving shaft 122 and are configured to rotate under the drive of the driving shaft 122; two second toothed belts 124, wherein one second toothed belt 124 is sleeved on a second synchronous wheel 123 and a magnetohydrodynamic transmission component 131 (specifically, the first synchronous wheel 1313) in a transmission component 130, and the other second toothed belt 124 is sleeved on another second synchronous wheel 123 and a magnetohydrodynamic transmission component 131 (specifically, the first synchronous wheel 1313) in another transmission component 130.

[0059] In the above embodiment, one driving source (i.e., motor 121) can drive the two second synchronous wheels 123 to rotate, thereby driving the two sets of transmission mechanisms 130 to move, reducing the number of required driving sources and saving costs. Moreover, this structure can drive the two sets of transmission structures 130 to move synchronously, thereby improving the uniformity of the movement speed of the material box.

[0060] In some embodiments, the second synchronous wheel 123 has a mounting hole, and the driving assembly 120 further includes a screw that passes through the mounting hole and abuts against the driving shaft 122. In the above embodiment, by providing the screw, the driving shaft 122 and the second synchronous wheel 123 can be ensured to rotate synchronously.

[0061] In some embodiments, the driving assembly 120 further includes: a reducer 125, a first end of which is connected to the motor 121; a coupling 126, a first end of which is connected to the second end of the reducer 125, and a second end of the coupling 126 is connected to the driving shaft 122. The reducer 125 is configured to adjust the rotational force output by the motor 121 and change the direction of the rotational force output by the motor 121, and the coupling 126 is configured to transmit the rotational force output by the reducer 125 to the driving shaft 122.

[0062] In some embodiments, Figure 4 As shown, the drive assembly 120 also includes: a reducer mounting plate 127, connected to the reducer 125; a bottom plate 128, connected to the top of the reducer mounting plate 127, and the upper surface of the bottom plate 128 is connected to the bottom of the process chamber 110; at least one bearing seat 129, connected to the bottom of the bottom plate 128, and the driving shaft 122 is rotatably connected to at least one bearing seat 129. The bottom plate 128 and the process chamber 110 can be connected by connecting members such as screws and / or pins. In the above embodiment, the drive assembly 120 can be stably fixed to the bottom of the process chamber 110 through this structure.

[0063] In some embodiments, Figure 1 and Figure 2 As shown, the top of the process chamber 110 has a fourth through hole, and the coating device 100 also includes: at least one gas nozzle 150, the gas nozzle 150 passes through the fourth through hole and extends into the process chamber; a nozzle seal, which is arranged in the fourth through hole and is configured to seal the gap between the gas nozzle 150 and the inner wall of the fourth through hole; and / or, the top of the process chamber 110 has a fifth through hole, and the coating device 100 also includes: a heating component 160, the heating component 160 passes through the fifth through hole and extends into the process chamber; a heating component seal, which is arranged in the fifth through hole and is configured to seal the gap between the heating component 160 and the inner wall of the fifth through hole.

[0064] Specifically, the gas nozzle 150 is used to spray the process gas, the material box has a receiving cavity and an opening connected to the receiving cavity, the receiving cavity is configured to receive the sheet material, and the opening is configured to expose the side of the sheet material to be passivated (the side is exemplarily the cross section after the silicon wafer is split); each time the material box passes through the gas nozzle 150, the gas nozzle 150 can coat the side of the sheet material to be passivated. The heating component 160 can continuously heat the material box so that the material box is quickly heated to the process temperature. Exemplarily, the heating component 160 can be an infrared heating component (commonly known as an infrared lamp tube). Since the process temperature required for spatial atomic layer deposition (SALD) is about 200-300 degrees, the infrared heating component can be used to directly irradiate the infrared rays onto the material box, so that the sheet material in the material box can be quickly heated. The heating component 160 can also be an electric heating wire.

[0065] In some embodiments, when the coating device 100 includes a gas nozzle 150, the gas nozzle 150 is disposed in the central area of ​​the top of the process chamber; when the coating device 100 includes a gas nozzle 150 and a heating component 160, the heating component 160 is disposed on both sides of the gas nozzle 150.

[0066] In the above embodiment, by arranging the gas nozzle 150 in the central area of ​​the top of the process chamber, when the material box moves to the middle of the process chamber, it can be fully in contact with the process gas sprayed by the gas nozzle 150, thereby improving the coating effect.

[0067] In some application scenarios, the position signal includes a first position signal and a second position signal, and the coating device 100 includes two position detection components 140, and the two position detection components 140 include: a first detection component, configured to send a first position signal to the controller when detecting that the material box arrives at the first end of the process chamber; a second detection component, configured to send a second position signal to the controller when detecting that the material box arrives at the second end of the process chamber; wherein the controller is further configured to control the drive component 120 to change the direction of the output rotational force (specifically, it can be to stop outputting the rotational force first, and then output the rotational force in the reverse direction) when receiving the first position signal or the second position signal, so as to realize the reciprocating motion of the material box between the first end and the second end of the process chamber, so that the sheet material can pass through the jet range of the gas nozzle 150 multiple times, thereby quickly and evenly coating a multi-layer film.

[0068] Based on the same concept, the embodiment of the present application also provides a coating device 200. Figure 7 FIG. 1 is a schematic diagram of the structure of a coating device provided by an exemplary embodiment of the present application. Figure 7As shown, the coating equipment 200 includes: the coating device 100 in the above embodiment; and a material box 210 for carrying sheet materials, the material box 210 is located in the process chamber of the process chamber 110 of the coating device 100, and the transmission mechanism 130 of the coating device 100 is configured to drive the material box 210 to reciprocate.

[0069] In some embodiments, the material box 210 has a receiving cavity and an opening communicating with the receiving cavity, the receiving cavity is configured to receive the sheet material, and the opening is configured to expose the side of the sheet material to be passivated.

[0070] In actual work, the heating component 160 first heats the material box 210 to a preset temperature, and evacuates the gas pressure in the process chamber to a preset pressure through a vacuum pump (rapid SALD requires the gas pressure in the process chamber to be lower than 1 torr). After the material box 210 is sent into the process chamber, the gas nozzle 150 sprays the process gas, and the driving component 120 outputs a rotational force to rotate the active wheel 1312, thereby driving the material box 210 to move in the process chamber. The position detection component 140 detects the position of the material box 210 in real time and sends a position signal to the controller so that the controller controls the direction of the rotational force output by the driving component 120 and the magnitude of the output power, thereby enabling the material box 210 to achieve reciprocating motion in the process chamber and coating the sheet material with a multilayer film.

[0071] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0072] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.

[0073] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0074] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0075] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A coating device, characterized in that: Applied to the passivation process of sheet materials, the coating device comprises: A process cavity, wherein a process chamber is formed inside the process cavity, and a first through hole is provided on a side wall of the process cavity; Two groups of transmission mechanisms are configured to drive the material box in the process chamber to reciprocate, the two groups of transmission mechanisms are respectively arranged on both sides of the process chamber, and the two groups of transmission mechanisms are symmetrically arranged along the vertical symmetry plane in the extension direction of the process chamber, each group of the transmission mechanism includes a plurality of magnetic fluid transmission components and a first toothed belt, each of the magnetic fluid transmission components is arranged through the first through hole, the first ends of the plurality of magnetic fluid transmission components are connected by the first toothed belt transmission, and the second ends of the magnetic fluid transmission components are located in the process chamber; A driving assembly, a first end of at least one of the plurality of magnetic fluid transmission assemblies being connected to the driving assembly, the driving assembly being used to drive the magnetic fluid transmission assembly; The position detection component is at least partially located in the process chamber and is used to detect the moving position of the material box.

2. The coating device according to claim 1, characterized in that: The magnetic fluid transmission assembly comprises: A magnetic fluid bearing, wherein a first end of the magnetic fluid bearing is disposed outside the process chamber, and a second end of the magnetic fluid bearing passes through the first through hole and extends into the process chamber; A driving wheel, sleeved on the second end of the magnetic fluid bearing, configured to carry and transport the material box; A first synchronous wheel, wherein at least two of the first synchronous wheels are sleeved on the first end of each of the magnetic fluid bearings, and the first toothed belt is sleeved on the first synchronous wheels of two adjacent magnetic fluid bearings; Among them, the first ends of the m magnetic fluid transmission components are sequentially connected through m-1 first toothed belts, and m≥2.

3. The coating device according to claim 2, characterized in that: The magnetic fluid transmission assembly comprises: The spacer is sleeved on the magnetic fluid bearing and is located between adjacent first synchronous wheels on each of the magnetic fluid bearings.

4. The coating device according to claim 1 or 2, characterized in that: The position detection component includes a light emitting component and a light receiving component, wherein the light emitting component and the light receiving component are respectively arranged on the left wall and the right wall of the process chamber, the left wall of the process chamber has a second through hole, and the right wall of the process chamber has a third through hole; Wherein, the light emitting component comprises: a first sealing plate connected to the left side wall of the process chamber, the first sealing plate having a sixth through hole, the sixth through hole being in communication with the second through hole; a light emitter connected to the first sealing plate and configured to emit light toward the sixth through hole; A first transparent sealing member is disposed in the sixth through hole, wherein the first transparent sealing member is configured to allow light to pass through; A first sealing ring, disposed between the first transparent sealing member and the first sealing plate; A second sealing ring, disposed between the first sealing plate and the process chamber; Wherein, the light receiving component comprises: a second sealing plate connected to the right side wall of the process chamber, the second sealing plate having a seventh through hole, the seventh through hole being connected to the third through hole; a light receiver connected to the second sealing plate and configured to receive the light emitted by the light emitter and passing through the sixth through hole, the second through hole, the process chamber, the third through hole and the seventh through hole in sequence; a second transparent sealing member disposed in the seventh through hole, wherein the second transparent sealing member is configured to allow light to pass through; A third sealing ring, disposed between the second transparent sealing member and the second sealing plate; A fourth sealing ring is arranged between the second sealing plate and the process chamber.

5. The coating device according to claim 1 or 2, characterized in that: There are a plurality of position detection components, and the plurality of position detection components are arranged at intervals along the extension direction of the process chamber.

6. The coating device according to claim 1 or 2, characterized in that: The driving component is arranged outside the process chamber and located at the bottom of the process chamber.

7. The coating device according to claim 6, characterized in that: The drive assembly comprises: a motor configured to output a rotational force; A driving shaft, drivingly connected to the motor and configured to rotate under the drive of the motor; Two second synchronous wheels, respectively sleeved on two ends of the driving shaft, and configured to rotate under the drive of the driving shaft; Two second toothed belts, wherein one of the second toothed belts is sleeved on one of the second synchronous wheel and one of the magnetic fluid transmission components in the transmission components, and the other of the second toothed belts is sleeved on another of the second synchronous wheel and one of the magnetic fluid transmission components in the transmission components.

8. The coating device according to claim 1 or 2, characterized in that: The top of the process chamber is provided with a fourth through hole, and the coating device further comprises: at least one gas nozzle, the gas nozzle passing through the fourth through hole and extending into the process chamber; a nozzle seal, disposed in the fourth through hole and configured to seal a gap between the gas nozzle and an inner wall of the fourth through hole; and / or, The top of the process chamber is provided with a fifth through hole, and the coating device further comprises: a heating component, the heating component passing through the fifth through hole and extending into the process chamber; The heating component seal is disposed in the fifth through hole and is configured to seal a gap between the heating component and an inner wall of the fifth through hole.

9. The coating device according to claim 8, characterized in that: In the case where the coating device includes the gas shower head, the gas shower head is arranged in the central area of ​​the top of the process chamber; In the case where the coating device includes the gas shower head and the heating assembly, the heating assembly is arranged on both sides of the gas shower head.

10. A coating device, characterized in that: include: The coating device according to any one of claims 1 to 9; as well as A material box is used to carry the sheet material. The material box is located in a process chamber of a process chamber of the coating device. The transmission mechanism of the coating device is configured to drive the material box to perform reciprocating motion.

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