Boat piece, boat structure and coating equipment

Abstract

The utility model provides a boat piece, a boat structure and coating equipment, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem of how to prevent sheet materials from displacing under the condition of not generating clamping point marks or clamping groove marks. The boat piece is applied to the coating equipment and comprises a piece body, a piece cover and a piece cover, the anti-skid film is arranged on the upper surface of the sheet body and is configured to bear the sheet material; the friction force between the upper surface of the anti-skid film and the flaky material is greater than that between the upper surface of the sheet body and the flaky material; wherein under the condition that the anti-skid film bears the sheet material, the friction force between the anti-skid film and the sheet material is used for limiting the sheet material to move relative to the anti-skid film. Through the structure, only the anti-skid film is in contact with the sheet material, so that sticking point marks or slot marks are not generated, the process quality is improved, and the friction force between the anti-skid film and the sheet material can prevent the sheet material from displacing.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor or photovoltaic material processing, and in particular to a boat sheet, a boat structure and a coating device. Background Art

[0002] At present, when using coating equipment to coat sheet materials (such as semiconductors or photovoltaic materials), a boat structure is usually used as a carrier to carry the sheet materials, and the boat structure is transported to the vacuum chamber of the coating equipment to coat the sheet materials. Among them, the horizontal boat structure includes multiple boat sheets, and the sheet materials are placed on the upper surface of the boat sheets. However, if the boat sheets are directly placed on the surface of the boat sheets, when the boat structure is transported or the vacuum chamber is evacuated, the sheet materials will be displaced due to vibration or airflow during transportation, thereby affecting the process quality.

[0003] In the traditional boat structure, the surface of the boat has columnar card points arranged around the sheet material, which can prevent the sheet material from being displaced. Alternatively, the surface of the boat has grooves, and the sheet material is placed in the grooves to prevent the sheet material from being displaced. However, using these two methods will cause card point marks or card groove marks on the surface of the sheet material, and it is also easy to cause uneven coating of the sheet material, thereby reducing the process quality. Utility Model Content

[0004] In order to solve the above technical problems, the present application is proposed. The embodiments of the present application provide a boat sheet, a boat structure and a coating device.

[0005] In the first aspect, an embodiment of the present application provides a boat sheet, which is applied to a coating device, comprising: a sheet body, arranged horizontally; an anti-skid film, arranged on the upper surface of the sheet body, and configured to carry a sheet material; wherein the friction force between the upper surface of the anti-skid film and the sheet material is greater than the friction force between the upper surface of the sheet body and the sheet material; wherein, when the anti-skid film carries the sheet material, the friction force between the anti-skid film and the sheet material is used to limit the movement of the sheet material relative to the anti-skid film.

[0006] In some embodiments, the material of the anti-slip film is carbon fiber or silicon carbide.

[0007] In some embodiments, the boat sheet further includes: a conductive adhesive disposed between the sheet body and the anti-slip film, and configured to increase the adhesion between the sheet body and the anti-slip film.

[0008] In some embodiments, the material of the conductive glue is any one of graphite glue, carbon black glue, metal glue, and conductive silicone glue.

[0009] In some embodiments, the sheet body has a threaded hole, and the anti-skid film has a first through hole; wherein the boat sheet further comprises: a screw, which passes through the first through hole and is screwed to the threaded hole.

[0010] In some embodiments, the upper surface of the sheet body has a plurality of bearing areas, the anti-slip film includes a plurality of sub-anti-slip films, and the plurality of sub-anti-slip films are respectively disposed in the plurality of bearing areas.

[0011] In a second aspect, an embodiment of the present application provides a boat structure, comprising: a plurality of boat pieces as described in any one of the first aspects above; a connecting rod, connecting the plurality of boat pieces, the plurality of boat pieces being arranged at intervals along the extension direction of the connecting rod.

[0012] In some embodiments, the anti-slip film has a second through hole, the sheet body has a third through hole, and the connecting rod passes through the second through hole and the third through hole; wherein the boat structure also includes: a first nut, threadedly connected to the first end of the connecting rod; and a second nut, threadedly connected to the second end of the connecting rod.

[0013] In a third aspect, an embodiment of the present application provides a coating device, comprising: a cavity having a vacuum chamber; a boat structure as described in any one of the second aspects above, which can be placed in the vacuum chamber and is configured to carry a sheet material; a vacuum pump, which is connected to the vacuum chamber and is configured to evacuate the vacuum chamber to a vacuum state.

[0014] In some embodiments, the cavity has multiple air inlet holes, and the multiple air inlet holes connect the vacuum chamber and the vacuum pump; wherein the multiple air inlet holes are arranged on the upper side and / or the lower side of the cavity; wherein the distances between adjacent air inlet holes are equal.

[0015] The boat sheet, boat structure and coating equipment proposed in the embodiments of the present application will not produce stuck point marks or stuck groove marks because only the anti-slip film is in contact with the sheet material, thereby improving the process quality, and the friction between the anti-slip film and the sheet material can prevent the sheet material from shifting. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 Shown is a schematic structural diagram of a boat piece provided by an exemplary embodiment of the present application.

[0018] Figure 2 An exemplary embodiment of the present application is shown. Figure 1 A partial enlarged view of area A in the middle.

[0019] Figure 3 Shown is a schematic structural diagram of a boat structure provided by an exemplary embodiment of the present application.

[0020] Figure 4 An exemplary embodiment of the present application is shown. Figure 3 A partial enlarged view of area B in the middle.

[0021] Figure 5 An exemplary embodiment of the present application is shown. Figure 3 A partial enlarged view of area C in the middle.

[0022] Figure 6 Shown is a schematic structural diagram of a coating device provided by an exemplary embodiment of the present application.

[0023] Reference numerals:

[0024] 100, boat sheet; 110, sheet body; 111, third through hole; 120, anti-slip film; 121, second through hole; 140, first boat sheet; 150, second boat sheet; 200, sheet material; 300, boat structure; 310, connecting rod; 320, first nut; 330, gasket; 340, insulating sleeve; 350, first cushion block; 360, second cushion block; 370, first electrode plate; 380, second electrode plate; 390, fixing rod; 400, coating equipment; 410, cavity; 420, vacuum pump. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0026] Application Overview

[0027] At present, when using coating equipment to coat sheet materials (semiconductor or photovoltaic materials, such as silicon wafers, battery cells), a boat structure is usually used as a carrier to carry the sheet materials, and the boat structure is transported to the vacuum chamber of the coating equipment to coat the sheet materials. Among them, the horizontal boat structure includes multiple boats, and the sheet materials are placed on the upper surface of the boats. However, if the boats are directly placed on the surface of the boats, when the boat structure is transported, or when the vacuum chamber is evacuated, the sheet materials will be displaced (displaced) due to airflow or vibration during transportation, and may fall off the boats, or contact with other structures on the boats, reducing the process quality. If the sheet materials contact the ceramic rings on the boat connecting rods, serious uneven coating or even burning may occur.

[0028] In the traditional boat structure, the surface of the boat has columnar card points arranged around the sheet material, and the columnar card points can limit the four sides of the sheet material to prevent the sheet material from displacement; alternatively, the surface of the boat has grooves, and placing the sheet material into the grooves can also prevent the sheet material from displacement. However, using these two methods will cause card point marks or card groove marks on the surface of the sheet material, reducing the process quality and thus reducing the light energy utilization rate of the sheet material.

[0029] In view of this, the present application proposes a boat sheet, a boat structure and a coating device, wherein the boat sheet is applied to the coating device, and comprises: a sheet body, arranged horizontally; an anti-skid film, arranged on the upper surface of the sheet body, and configured to carry a sheet material; wherein the friction between the upper surface of the anti-skid film and the sheet material is greater than the friction between the upper surface of the sheet body and the sheet material; wherein, in the case where the anti-skid film carries the sheet material, the friction between the anti-skid film and the sheet material is used to limit the movement of the sheet material relative to the anti-skid film. Through this structure, only the anti-skid film is in contact with the sheet material, so that no stuck point mark or stuck groove mark is generated, which improves the process quality, and the friction between the anti-skid film and the sheet material can prevent the sheet material from being displaced.

[0030] Exemplary Devices

[0031] Figure 1 Shown is a schematic structural diagram of a boat piece provided by an exemplary embodiment of the present application. Figure 2 An exemplary embodiment of the present application is shown. Figure 1 A partial enlarged view of area A in the middle. Figure 3 FIG. 1 is a schematic diagram of a boat structure provided by an exemplary embodiment of the present application. Figure 1 to Figure 3 As shown, an embodiment of the present application provides a boat sheet 100, which is applied to a coating device, and includes: a sheet body 110, which is horizontally arranged; an anti-skid film 120, which is arranged on the upper surface of the sheet body 110 and is configured to carry a sheet material 200; wherein the friction force between the upper surface of the anti-skid film 120 and the sheet material 200 is greater than the friction force between the upper surface of the sheet body 110 and the sheet material 200; wherein, when the anti-skid film 120 carries the sheet material 200, the friction force between the anti-skid film 120 and the sheet material 200 is used to limit the movement of the sheet material 200 relative to the anti-skid film 120.

[0032] The sheet material 200 may be a semiconductor or photovoltaic material, such as a silicon wafer, a wafer, a glass substrate, a semi-finished product of a cell, etc. The sheet body 110 may be a graphite material, which has good electrical conductivity and heat resistance.

[0033] Here, since only the anti-slip film 120 is in contact with the sheet material 200, no stuck point marks or stuck groove marks will be produced, thereby improving the process quality; and since the anti-slip film 120 has a large friction coefficient, under the influence of the sheet material 200's own gravity, a large static friction force can be generated between the anti-slip film 120 and the sheet material 200, so that when the coating equipment is vacuumed and when the sheet material 200 is transported, the sheet material 200 can be prevented from being displaced due to airflow or vibration during transportation.

[0034] In some embodiments, the material of the anti-slip film 120 is carbon fiber or silicon carbide. Specifically, both carbon fiber and silicon carbide materials are resistant to high temperatures and have certain electrical conductivity. Since the current needs to flow from the sheet 110 to the sheet material 200 during the coating process, and the temperature in the vacuum chamber of the coating equipment is relatively high, the use of conductive and high-temperature resistant materials will not affect the coating of the sheet material 200, nor will it be damaged by the high temperature in the vacuum chamber. In addition, silicon carbide has a higher friction force, which can better prevent the sheet material 200 from moving, while carbon fiber has a lower cost.

[0035] In some embodiments, the boat 100 further includes: a conductive adhesive disposed between the sheet 110 and the anti-slip film 120, configured to increase the adhesion between the sheet 110 and the anti-slip film 120. The anti-slip film 120 can be fastened and attached to the sheet 110 by disposing the conductive adhesive. The conductive adhesive can be made of a conductive and heat-resistant material to avoid affecting the coating of the sheet material 200 or being damaged under the high temperature of the vacuum chamber.

[0036] In some embodiments, the conductive adhesive is made of any one of graphite adhesive, carbon black adhesive, metal adhesive, and conductive silicone rubber. The metal adhesive may be silver paste adhesive, aluminum conductive adhesive, copper conductive adhesive, and the like.

[0037] In other embodiments, the sheet body 110 has a threaded hole, and the anti-skid film 120 has a first through hole, wherein the boat sheet 100 further includes a screw passing through the first through hole and screwed with the threaded hole. The anti-skid film 120 can be firmly fixed on the sheet body 110 by the screw.

[0038] In other embodiments, the sheet body 110 has an eighth through hole, and the anti-skid film 120 has a first through hole; wherein the boat sheet 100 further includes: a bolt passing through the first through hole and the eighth through hole; and a fifth nut screwed to the bolt. The anti-skid film 120 can be firmly fixed to the sheet body 110 by the bolt.

[0039] In some embodiments, the anti-slip film 120 may completely cover the upper surface of the sheet body 110 , or may be disposed on a partial area of ​​the upper surface of the sheet body 110 .

[0040] In some embodiments, the upper surface of the sheet 110 has multiple bearing areas, and the anti-skid film 120 includes multiple sub-anti-skid films 120, and the multiple sub-anti-skid films 120 are respectively arranged in the multiple bearing areas. Specifically, each sub-anti-skid film 120 can carry at least one sheet material 200, and the multiple bearing areas can be evenly arranged on the upper surface of the sheet 110. For example, Figure 3 As shown, the upper surface of the sheet body 110 has 18 bearing areas, each bearing area can bear a sheet material 200 , that is, one boat 100 can bear 18 sheet materials 200 at most.

[0041] In some embodiments, the cross-section of the anti-slip film 120 may be in any of a rectangular, circular, elliptical, and polygonal shape.

[0042] Figure 4 An exemplary embodiment of the present application is shown. Figure 3 A partial enlarged view of area B in the middle. Figure 5 An exemplary embodiment of the present application is shown. Figure 3 A partial enlarged view of area C in the middle.

[0043] Based on the same concept, Figure 3 to Figure 5 As shown, the embodiment of the present application further provides a boat structure 300 , comprising: a plurality of boat pieces 100 as described in the above embodiment; a connecting rod 310 , connecting the plurality of boat pieces 100 , and the plurality of boat pieces 100 are spaced apart along the extension direction of the connecting rod 310 .

[0044] In some embodiments, Figure 2 to Figure 5 As shown, the anti-skid film 120 has a second through hole 121, the sheet body 110 has a third through hole 111, and the connecting rod 310 passes through the second through hole 121 and the third through hole 111; wherein the boat structure 300 further includes: a first nut 320, which is screwed to the first end of the connecting rod 310; and a second nut, which is screwed to the second end of the connecting rod 310. Through this structure, multiple boat sheets 100 can be fastened and connected, and the sheet body 110 and the anti-skid film 120 can be more tightly connected.

[0045] In some embodiments, the anti-slip film 120 has a plurality of second through holes 121, which are evenly distributed on the anti-slip film 120, and the sheet body 110 has a plurality of third through holes 111, which are evenly distributed on the sheet body 110; wherein the boat structure 300 includes a plurality of connecting rods 310, which respectively pass through the plurality of second through holes 121 and the plurality of third through holes 111.

[0046] For example, Figure 3As shown, the plurality of second through holes 121 may be evenly distributed on the anti-slip film 120 in the manner of M rows and N columns, and the plurality of third through holes 111 may be evenly distributed on the sheet 110 in the manner of M rows and N columns, wherein N and M are natural numbers.

[0047] In some embodiments, the first nut 320 and the second nut may be made of a material having electrical conductivity and heat resistance, such as graphite.

[0048] In some embodiments, the boat structure 300 further includes a gasket 330, which is sleeved on the connecting rod 310 and disposed between the first nut 320 and the boat piece 100, and between the second nut and the boat piece 100. The gasket 330 is elastic, and the connection between the multiple boat pieces 100 can be more tightly provided by providing the gasket 330. The material of the gasket 330 can be graphite, for example.

[0049] In some embodiments, the boat structure 300 further includes: an insulating sleeve 340, which is sleeved on the connecting rod 310 and located between adjacent boat pieces 100. By providing the insulating sleeve 340, multiple boat pieces 100 can be spaced apart to maintain the distance between the multiple boat pieces 100, and the material of the insulating sleeve 340 is an insulating material to prevent conduction between adjacent boat pieces 100, and the material of the insulating sleeve 340 is exemplarily ceramic.

[0050] In some embodiments, Figure 5 As shown, the multiple boat sheets 100 include multiple first boat sheets 140 and multiple second boat sheets 150 that are arranged in an alternating manner; wherein the boat structure 300 also includes: a first pad 350, connected between adjacent first boat sheets 140; a second pad 360, connected between adjacent second boat sheets 150; a first electrode plate 370, connected to the first pad 350, configured to provide current to the first boat sheet 140 through the first pad 350; and a second electrode plate 380, connected to the second pad 360, configured to provide current to the second boat sheet 150 through the second pad 360.

[0051] Among them, the first pad 350 and the second pad 360 are conductive and resistant to high temperatures, and the material of the first pad 350 and the second pad 360 can be exemplarily graphite. The first electrode plate 370 and the second electrode plate 380 are conductive and resistant to high temperatures, and the material of the first electrode plate 370 and the second electrode plate 380 can be exemplarily graphite.

[0052] Specifically, the first spacer 350 may maintain the distance between the first boat pieces 140 , and the second spacer 360 may maintain the distance between the second boat pieces 150 . In addition, when the power supply device supplies power to the first electrode plate 370, the current in the first electrode plate 370 can flow into the first boat sheet 140 connected to the first pad 350 through the first pad 350 connected to the first electrode plate 370, and then be transmitted to other first boat sheets 140 through other first pads 350 connected to the first boat sheet 140, and so on, the current is transmitted through the first pad 350, thereby supplying power to all first boat sheets 140; when the power supply device supplies power to the second electrode plate 380, the current in the second electrode plate 380 can flow into the second boat sheet 150 connected to the second pad 360 through the second electrode plate 380, and then be transmitted to other second boat sheets 150 through other second pads 360 connected to the second boat sheet 150, and so on, the current is transmitted through the second pad 360, thereby supplying power to all second boat sheets 150. In this way, when the power supply device provides voltages of opposite polarities to the first electrode plate 370 and the second electrode plate 380, the staggered first boat sheets 140 and the second boat sheets 150 can have opposite polarities, and the electric field formed between the adjacent first boat sheets 140 and the second boat sheets 150 can ionize the process gas, thereby coating the sheet material 200 based on the ionized process gas.

[0053] In some embodiments, the first electrode 370 has a fourth through hole, and the fourth through hole is used to be electrically connected to the power supply device. The second electrode 380 has a fifth through hole, and the fifth through hole is used to be electrically connected to the power supply device.

[0054] In some embodiments, Figure 5 As shown, the second electrode plate 380 is disposed at the bottom of the plurality of boats 100 and is configured to support the boats 100 .

[0055] In some embodiments, Figure 5 As shown, the boat piece 300 further includes: a fixing rod 390, the fixing rod 390 passes through the first boat piece 140 and the first cushion block 350, and passes through the second boat piece 150 and the second cushion block 360; a third nut is screwed to the first end of the fixing rod 390, and a fourth nut is screwed to the second end of the fixing rod 390. Through this structure, the first boat piece 140 and the first cushion block 350, and the second boat piece 150 and the second cushion block 360 can be firmly connected, thereby improving the stability of the structure.

[0056] Figure 6 Shown is a schematic structural diagram of a coating device provided by an exemplary embodiment of the present application.

[0057] Based on the same concept, the embodiment of the present application also provides a coating device 400, including: a cavity 410, having a vacuum chamber; a boat structure 300 as described in the above embodiment, which can be placed in the vacuum chamber and is configured to carry a sheet material 200; a vacuum pump 420, which is connected to the vacuum chamber and is configured to evacuate the vacuum chamber to a vacuum state.

[0058] In actual application, the transport device first transports the boat structure 300 into the vacuum chamber, then the vacuum pump 420 evacuates the vacuum chamber to a vacuum state, and finally the air intake structure inputs process gas into the vacuum chamber to start coating the sheet material 200 .

[0059] In some embodiments, the cavity 410 has multiple air inlet holes, which connect the vacuum chamber and the vacuum pump 420; wherein the multiple air inlet holes are arranged on the upper side and / or the lower side of the cavity 410; wherein the distances between adjacent air inlet holes are equal.

[0060] Specifically, when the vacuum pump 420 is pumping air, the lift of the airflow on the sheet material 200 may cause the sheet material 200 to be displaced. If the air inlet holes are evenly distributed, such as setting a circle of air inlet holes at equal intervals above the cavity 410, the effect of the airflow on the sheet material 200 can be reduced, preventing the sheet material 200 from being displaced.

[0061] In addition, by reducing the power of the vacuum pump 420 and the vacuum speed during vacuuming, displacement of the sheet material 200 can also be prevented.

[0062] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0063] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.

[0064] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0065] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0066] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A boat sheet, characterized in that: Applied to coating equipment, wherein the boat comprises: Sheet body, horizontal setting; an anti-slip film, disposed on the upper surface of the sheet body and configured to carry the sheet material; wherein the friction force between the upper surface of the anti-slip film and the sheet material is greater than the friction force between the upper surface of the sheet body and the sheet material; wherein, when the anti-slip film carries the sheet material, the friction force between the anti-slip film and the sheet material is used to limit the movement of the sheet material relative to the anti-slip film.

2. The boat piece according to claim 1, characterized in that: The material of the anti-slip film is carbon fiber or silicon carbide.

3. The boat piece according to claim 1 or 2, characterized in that: Also includes: The conductive adhesive is disposed between the sheet body and the anti-slip film and is configured to increase the adhesion between the sheet body and the anti-slip film.

4. The boat piece according to claim 3, characterized in that: The conductive glue is made of any one of graphite glue, carbon black glue, metal glue and conductive silicone glue.

5. The boat sheet according to claim 1 or 2, characterized in that: The sheet body has a threaded hole, and the anti-slip film has a first through hole; Wherein, the boat piece further comprises: A screw passes through the first through hole and is threadedly connected with the threaded hole.

6. The boat according to claim 1 or 2, characterized in that: The upper surface of the sheet body has a plurality of bearing areas, the anti-skid film comprises a plurality of sub-anti-skid films, and the plurality of sub-anti-skid films are respectively arranged in the plurality of bearing areas.

7. A boat structure, characterized in that: include: A plurality of boats according to any one of claims 1 to 6; A connecting rod connects the plurality of boat pieces, and the plurality of boat pieces are arranged at intervals along the extending direction of the connecting rod.

8. The boat structure according to claim 7, characterized in that: The anti-slip film has a second through hole, the sheet body has a third through hole, and the connecting rod passes through the second through hole and the third through hole; Wherein, the boat structure further comprises: a first nut, threadedly connected to the first end of the connecting rod; The second nut is threadedly connected to the second end of the connecting rod.

9. A coating device, characterized in that: include: a chamber having a vacuum chamber; The boat structure according to claim 7 or 8, which can be placed in the vacuum chamber and is configured to carry a sheet material; The vacuum pump is connected to the vacuum chamber and is configured to evacuate the vacuum chamber to a vacuum state.

10. The coating device according to claim 9, characterized in that: The cavity has a plurality of air inlet holes, and the plurality of air inlet holes communicate with the vacuum chamber and the vacuum pump; Wherein, the plurality of air inlet holes are arranged on the upper side and / or the lower side of the cavity; Wherein, the distances between adjacent air inlet holes are equal.

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