Diffusion furnace tail emission treatment system

Abstract

The utility model relates to a tail exhaust treatment system of a diffusion furnace, which is used for treating tail gas of the diffusion furnace and comprises a cooling bottle and a heat insulation plate, and the cooling bottle is communicated with a tail exhaust pipe of the diffusion furnace through a pipeline; the heat insulation plate is arranged between the diffusion furnace and the cooling bottle in a blocking mode so as to prevent heat on the diffusion furnace side from radiating towards the cooling bottle side. Wherein the bottom of the heat insulation plate is fixed to the ground, and an avoiding hole is formed in the heat insulation plate, so that a pipeline can penetrate through the avoiding hole. The heat insulation plate is arranged between the cooling bottle and the diffusion furnace, so that heat on the diffusion furnace side is prevented from being radiated to the cooling bottle side through the heat insulation plate, the environment temperature of the cooling bottle is reduced, the cooling effect of the cooling bottle is improved, and the influence of pipeline blockage is reduced. According to the diffusion furnace tail exhaust treatment system, the heat insulation plate is fixed to the ground so as to stably isolate heat radiation on the diffusion furnace side, the avoiding holes are formed in the heat insulation plate and used for avoiding pipelines, and therefore mutual connection and normal operation of the whole diffusion furnace tail exhaust treatment system are guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of diffusion furnace tail gas treatment, in particular to a diffusion furnace tail gas treatment system. Background Art

[0002] In order to increase the hourly output of a single machine, the photovoltaic industry has changed the original high-temperature diffusion, boron diffusion, and oxidation furnace insertion method from vertical to horizontal, and the single-tube wafer loading capacity has increased from 1,200 to 2,400. The increase in the number of wafers loaded has also increased the consumption of reaction gases in the process, which will increase the workload of the vacuum pump. The tail gas of the current boron diffusion process mainly includes residual BCl 3 , the remaining O 2 , leak detection and purging, etc. 2 、Intermediate product B 2 O 3 、Intermediate product Cl 2 And so on these 5 gases.

[0003] According to the industry's Topcon (tunneling oxide layer passivation contact) technology, the pipeline blockage in the tail exhaust system of the diffusion furnace is very serious, that is, a large amount of dust is deposited in the tail exhaust pipeline, which greatly reduces the life of the filter element, causing dust to appear in the pipeline from the filter to the vacuum pump, increasing the frequency of vacuum pump maintenance, and in severe cases, making the vacuum pump a consumable. Specifically, the tail exhaust system, that is, the exhaust gas flow unit, is composed of six units connected by connecting pipes, including the furnace pipe outlet, cooling bottle, filter, control valve, vacuum pump and main exhaust.

[0004] According to the analysis of dust in the pipeline, the main substance that is prone to blockage is B 2 O 3 . By measuring the temperature of the tail exhaust pipe with a temperature measuring gun, it was found that the temperature difference between the front side of the cooling bottle, that is, the furnace tube side, and the back side was quite large. The cooling bottle is a cooling device for high-temperature exhaust gas, and the temperature of the environment in which it is placed affects the cooling effect, and the cooling effect has a direct impact on the blockage of the pipeline. The temperature of the environment in which the cooling bottle is placed is mainly determined by the distance between the cooling bottle and the furnace tube outlet. If it is too close, it is easily affected by the high-temperature radiation of the furnace tube. If it is too far, although it can greatly reduce the impact of the high-temperature radiation of the furnace tube, it is easily limited by the length of the machine. Utility Model Content

[0005] Based on this, it is necessary to provide a diffusion furnace tail discharge treatment system to address the technical problem in the prior art that the cooling bottle is affected by the high temperature radiation at the tail of the furnace tube, resulting in poor cooling effect and easy blockage of the pipeline.

[0006] A diffusion furnace tail gas treatment system is used to treat tail gas from a diffusion furnace. The diffusion furnace tail gas treatment system comprises:

[0007] A cooling bottle is connected to the tail exhaust pipe of the diffusion furnace through a pipeline;

[0008] A heat insulation plate is disposed between the diffusion furnace and the cooling bottle to prevent the heat on the diffusion furnace from radiating to the cooling bottle;

[0009] The bottom of the heat insulation board is fixed to the ground, and a avoidance hole is arranged on the heat insulation board for the pipeline to pass through.

[0010] In one embodiment, the thermal insulation board comprises:

[0011] A first plate body, with a first notch disposed on one side edge;

[0012] A second plate body, with a second notch disposed on one side edge;

[0013] The first plate body and the second plate body are butted against each other, and the first notch and the second notch jointly define the avoidance hole.

[0014] In one embodiment, the first notch is provided at the upper edge of the first plate, the second notch is provided at the lower edge of the second plate, and the upper edge of the first plate is butted against the upper edge of the second plate.

[0015] In one embodiment, the thermal insulation board further comprises:

[0016] A plurality of first connecting members are arranged at intervals along the transverse direction of the first plate body, the first connecting member comprises a first end and a second end, the first end is connected to the first plate body and vertically spans the first plate body and is connected to the second plate body, and the second end is fixedly connected to the ground;

[0017] Wherein, the first end and the second end are arranged at an angle.

[0018] In one embodiment, the first notch is provided at a left edge of the first plate, the second notch is provided at a right edge of the second plate, and the left edge of the first plate is butted against the right edge of the second plate.

[0019] In one embodiment, the thermal insulation board further comprises:

[0020] A plurality of first connecting members, some of which are connected to the first plate body, and some of which are connected to the second plate body;

[0021] The first connecting member includes a first end and a second end, the first end is connected to the first plate body or the second plate body, and the second end is fixedly connected to the ground.

[0022] In one embodiment, the thermal insulation board further comprises:

[0023] A plurality of second connecting members are arranged at intervals along the vertical direction of the first plate body, and two ends of the second connecting members are respectively connected to the first plate body and the second plate body.

[0024] In one embodiment, the first plate and the second plate are arranged at an angle.

[0025] In one embodiment, the first plate body and the second plate body are both configured to be V-shaped.

[0026] In one embodiment, the first plate and the second plate are bent along both side edges of the transverse direction;

[0027] Alternatively, an edge of the first plate body on one side away from the second plate body is bent, and an edge of the second plate body on one side away from the first plate body is bent.

[0028] Beneficial effects of the utility model:

[0029] The utility model provides a diffusion furnace tail exhaust treatment system, which provides a heat insulation board between a cooling bottle and a diffusion furnace to block the heat on the diffusion furnace side from radiating to the cooling bottle side through the heat insulation board, thereby reducing the ambient temperature of the cooling bottle, improving the cooling effect of the cooling bottle, and further reducing the influence of pipeline blockage. The heat insulation board is fixed on the ground to ensure that the heat insulation board can stably isolate the heat radiation on the diffusion furnace side, and avoidance holes are provided on the heat insulation board to avoid pipelines, thereby ensuring the interconnection and normal operation of the entire diffusion furnace tail exhaust treatment system. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 A simple structural schematic diagram of a diffusion furnace tail gas treatment system provided by an embodiment of the utility model;

[0031] Figure 2 A schematic diagram of the structure of an upper and lower split heat insulation board provided in an embodiment of the utility model;

[0032] Figure 3 A front view of a heat insulation board with upper and lower parts provided in one embodiment of the utility model;

[0033] Figure 4 A top view of an upper and lower split heat insulation board provided in an embodiment of the utility model;

[0034] Figure 5 A schematic diagram of the structure of a left-right split heat insulation board provided in one embodiment of the utility model;

[0035] Figure 6A front view of a left-right split heat insulation board provided by an embodiment of the utility model;

[0036] Figure 7 A top view of a left-right split heat insulation board provided in one embodiment of the utility model;

[0037] Figure 8 A side view of a cooling bottle and a heat insulation board connected to each other according to an embodiment of the present utility model;

[0038] Fig. 9 A schematic diagram of the structure of a cooling bottle and a C-shaped heat insulation board connected to each other according to an embodiment of the utility model;

[0039] Fig.10 A schematic diagram of the structure of a cooling bottle and a V-shaped heat insulation board connected to each other according to an embodiment of the utility model;

[0040] Fig.11 A schematic structural diagram of a cooling bottle provided by an embodiment of the utility model after being connected to a W-shaped insulation board.

[0041] Reference numerals:

[0042] Diffusion furnace 100; cooling bottle 200; heat insulation board 300; first plate body 310; first notch 311; second plate body 320; second notch 321; first connecting member 330; first end 331; second end 332; second connecting member 340; filter 400; control valve 500; vacuum pump 600; main row 700. DETAILED DESCRIPTION

[0043] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0044] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0045] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0046] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0047] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0048] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0049] See also Figures 1 to 11 An embodiment of the utility model provides a diffusion furnace tail gas treatment system for treating the tail gas of the diffusion furnace 100. The diffusion furnace tail gas treatment system includes a cooling bottle 200 and a heat insulation board 300. The cooling bottle 200 is connected to the tail gas pipe of the diffusion furnace 100 through a pipeline; the heat insulation board 300 is arranged between the diffusion furnace 100 and the cooling bottle 200 to prevent the heat on the diffusion furnace 100 side from radiating to the cooling bottle 200 side; wherein, the bottom of the heat insulation board 300 is fixed to the ground, and an avoidance hole is provided on the heat insulation board 300 for the pipeline to pass through.

[0050] The utility model provides a diffusion furnace tail-drain treatment system, which blocks the heat on the diffusion furnace 100 side from radiating to the cooling bottle 200 side by means of the heat insulation board 300, thereby reducing the ambient temperature of the cooling bottle 200, improving the cooling effect of the cooling bottle 200, and further reducing the influence of pipeline blockage. The heat insulation board 300 is fixed on the ground to ensure that the heat insulation board 300 can stably isolate the heat radiation on the diffusion furnace 100 side, and an avoidance hole is provided on the heat insulation board 300 to avoid the pipeline, thereby ensuring the interconnection and normal operation of the entire diffusion furnace tail-drain treatment system.

[0051] It is understandable that the area of ​​the heat insulation board 300 provided in this embodiment should be at least larger than the cross-sectional area of ​​the cooling bottle 200, so as to ensure that the heat insulation board 300 insulates the heat radiation on the side of the diffusion furnace 100, so as to ensure that the cooling effect of the cooling bottle 200 meets expectations. It should be noted that the diffusion furnace tail row processing system provided by the utility model also includes a filter 400, a control valve 500, a vacuum pump 600 and a main row 700 connected in sequence. The filter 400 is connected to the cooling bottle 200 through a pipeline.

[0052] like Figure 2 and Figure 5As shown, in one embodiment, the heat insulation board 300 includes a first plate body 310 and a second plate body 320, and a first notch 311 is provided on one side edge of the first plate body 310; a second notch 321 is provided on one side edge of the second plate body 320; wherein the first plate body 310 and the second plate body 320 are butted against each other, and the first notch 311 and the second notch 321 jointly define an avoidance hole. The heat insulation board 300 is divided into two parts, and notches are provided on two pairs of edges of the two plate bodies to avoid the pipe during installation, so that the heat insulation board 300 is easy to install.

[0053] like Figures 2 to 4 As shown, in one embodiment, the first notch 311 is provided at the upper edge of the first plate body 310, the second notch 321 is provided at the lower edge of the second plate body 320, and the upper edge of the first plate body 310 is butted against the upper edge of the second plate body 320. In the present technical solution, the heat insulation board 300 adopts an upper and lower split structure, and the upper notch is respectively provided at the upper and lower side edges of the first plate body 310 and the second plate body 320 to achieve the avoidance of the pipeline. Specifically, the lower edge of the first plate body 310 is fixedly connected to the ground. When installing the first plate body 310 and the second plate body 320, the lower edge of the first plate body 310 is first fixed to the ground, the pipeline is placed in the first notch 311, and then the lower edge of the second plate body 320 is butted against the upper edge of the first plate body 310. It can be understood that the second notch 321 is just arranged opposite to the first notch 311.

[0054] like Figures 2 to 4 As shown, further, the insulation board 300 also includes a plurality of first connecting members 330, and the plurality of first connecting members 330 are arranged at intervals along the lateral direction of the first plate body 310, and the first connecting member 330 includes a first end 331 and a second end 332, the first end 331 is connected to the first plate body 310, and vertically spans the first plate body 310 and is connected to the second plate body 320, and the second end 332 is fixedly connected to the ground; wherein the first end 331 and the second end 332 are arranged at an angle.

[0055] A plurality of first connecting members 330 are arranged at intervals along the lateral direction of the first plate body 310 to enhance the stability of the first heat insulation board 300 fixed to the ground. The first end 331 is connected to the first plate body 310, and the first plate body 310 is vertically connected to the second plate body 320, so that the first plate body 310 and the second plate body 320 are connected through the first end 331 of the first connecting member 330. The second end 332 of the first connecting member 330 is fixedly connected to the ground to achieve the fixation of the first plate body 310 to the ground. In this embodiment, the first end 331 and the second plate are arranged perpendicular to each other.

[0056] Specifically, the first end 331 may be fixed to the first plate 310 and the second plate 320 by bolts, studs, or by riveting, welding, or gluing. The second end 332 may be fixed to the ground by bolts.

[0057] like Figures 5 to 7 As shown, in one embodiment, the first notch 311 is provided at the left edge of the first plate body 310, the second notch 321 is provided at the right edge of the second plate body 320, and the left edge of the first plate body 310 is butted against the right edge of the second plate body 320. By arranging the heat insulation board 300 into a left-right split type, and by arranging notches at the left and right edges of the first plate body 310 and the second plate body 320, the pipeline is avoided. By the above arrangement, the installation of the heat insulation board 300 is facilitated.

[0058] like Figures 5 to 7 As shown, further, the insulation board 300 also includes a plurality of first connecting members 330, some of the first connecting members 330 are connected to the first plate body 310, and some of the first connecting members 330 are connected to the second plate body 320; the first connecting member 330 includes a first end 331 and a second end 332, the first end 331 is connected to the first plate body 310 or the second plate body 320, and the second end 332 is fixedly connected to the ground.

[0059] The first plate 310 and the second plate 320 are connected to the ground by connecting the unsealed first connector 330 to the first plate 310 and part of the first connector 330 to the second plate 320. Specifically, the first connector 330 is connected to the ground by connecting the first end 331 of the first connector 330 to the first plate 310 and fixing the second end 332 to the ground; similarly, the first connector 330 is fixed to the ground by connecting the second end 332 of the first connector 330 to the second plate 320 and fixing the second end 332 to the ground, thereby installing the heat insulation board 300.

[0060] like Figures 5 to 7As shown, further, the heat insulation board 300 also includes a plurality of second connecting members 340, which are arranged at intervals along the vertical direction of the first plate body 310, and the two ends of the second connecting members 340 are respectively connected to the first plate body 310 and the second plate body 320. By arranging a plurality of second connecting members 340 at intervals along the vertical direction of the first plate body 310, and connecting the two ends of the second connecting member 340 to the first plate body 310 and the second plate body 320 respectively, the connection between the first plate body 310 and the second plate body 320 is realized, thereby improving the reliability of the first plate body 310 and the second plate body 320 after docking. Specifically, one end of the second connecting member 340 is fixedly connected to the right edge of the first plate body 310, and the other end of the second connecting member 340 is fixedly connected to the left edge of the second plate body 320. The second connecting member 340 and the first plate body 310 and the second plate body 320 can be fixed by bolts, studs, etc., or can be fixed by riveting, welding or gluing.

[0061] There is no limitation on the overall shape of the heat insulation board 300. Fig.10 and Fig.11 As shown, for the left and right split insulation board 300, the first plate body 310 and the second plate body 320 can be arranged at an angle. Specifically, the first plate body 310 and the second plate body 320 can form a V-shaped structure. Both the first plate body 310 and the second plate body 320 can be arranged as a flat plate structure. Of course, in other embodiments, the first plate body 310 and the second plate body 320 can be arranged in a V-shape, so that the insulation board 300 formed after the first plate body 310 and the second plate body 320 are spliced ​​is a "W" shape. This arrangement can increase the overall area of ​​the insulation board 300, improve the insulation effect of the insulation board 300, and also increase the contact area between the first plate body 310 and the second plate body 320 and the ground, thereby improving the stability of the first plate body 310 and the second plate body 320 after being fixed to the ground.

[0062] In one embodiment, if Figure 2 As shown in FIG. 1 , when the heat insulation board 300 is configured as an upper and lower split structure, the first plate body 310 and the second plate body 320 can be bent along the two side edges of the transverse direction. In this way, while improving the strength of the first plate body 310 and the second plate body 320, the contact area between the first plate body 310 and the ground can be increased, thereby improving the reliability and stability of the first plate body 310 after being fixed to the ground. Figure 5 and Fig. 9As shown in the figure, when the heat insulation board 300 is set as a left-right split structure, the edge of the first plate body 310 away from the second plate body 320 is bent, and the edge of the second plate body 320 away from the first plate body 310 is bent. While improving the strength of the first plate body 310 and the second plate body 320, the contact area between the first plate body 310 and the second plate body 320 and the ground can be increased, thereby improving the reliability and stability of the first plate body 310 and the second plate body 320 after being fixed to the ground.

[0063] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0064] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A diffusion furnace tail gas treatment system, used to treat the tail gas of a diffusion furnace, characterized in that: The diffusion furnace tail row processing system comprises: A cooling bottle is connected to the tail exhaust pipe of the diffusion furnace through a pipeline; A heat insulation plate is disposed between the diffusion furnace and the cooling bottle to prevent the heat on the diffusion furnace from radiating to the cooling bottle; The bottom of the heat insulation board is fixed to the ground, and a avoidance hole is arranged on the heat insulation board for the pipeline to pass through.

2. The diffusion furnace tail exhaust treatment system according to claim 1, characterized in that: The heat insulation board comprises: A first plate body, with a first notch disposed on one side edge; A second plate body, with a second notch disposed on one side edge; The first plate body and the second plate body are butted against each other, and the first notch and the second notch jointly define the avoidance hole.

3. The diffusion furnace tail exhaust treatment system according to claim 2, characterized in that: The first notch is arranged at the upper edge of the first plate body, the second notch is arranged at the lower edge of the second plate body, and the upper edge of the first plate body is butted against the upper edge of the second plate body.

4. The diffusion furnace tail exhaust treatment system according to claim 3, characterized in that: The heat insulation board also includes: A plurality of first connecting members are arranged at intervals along the transverse direction of the first plate body, the first connecting member comprises a first end and a second end, the first end is connected to the first plate body and vertically spans the first plate body and is connected to the second plate body, and the second end is fixedly connected to the ground; Wherein, the first end and the second end are arranged at an angle.

5. The diffusion furnace tail exhaust treatment system according to claim 2, characterized in that: The first notch is arranged at the left edge of the first plate body, the second notch is arranged at the right edge of the second plate body, and the left edge of the first plate body is butted against the right edge of the second plate body.

6. The diffusion furnace tail exhaust treatment system according to claim 5, characterized in that: The heat insulation board also includes: A plurality of first connecting members, some of which are connected to the first plate body, and some of which are connected to the second plate body; The first connecting member includes a first end and a second end, the first end is connected to the first plate body or the second plate body, and the second end is fixedly connected to the ground.

7. The diffusion furnace tail exhaust treatment system according to claim 6, characterized in that: The heat insulation board also includes: A plurality of second connecting members are arranged at intervals along the vertical direction of the first plate body, and two ends of the second connecting members are respectively connected to the first plate body and the second plate body.

8. The diffusion furnace tail exhaust treatment system according to claim 5, characterized in that: The first plate body and the second plate body are arranged at an angle.

9. The diffusion furnace tail exhaust treatment system according to claim 8, characterized in that: The first plate body and the second plate body are both configured to be V-shaped.

10. The diffusion furnace tail exhaust treatment system according to claim 2, characterized in that: The first plate body and the second plate body are bent along both side edges of the transverse direction; Alternatively, an edge of the first plate body on one side away from the second plate body is bent, and an edge of the second plate body on one side away from the first plate body is bent.

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