Capacitor film coating thickness measuring device

Abstract

The utility model discloses a capacitor film coating thickness measuring device, which comprises a linear transmission device and a high-frequency measuring probe driven by the linear transmission device, the high-frequency measuring probe is arranged towards a film to be measured, and the capacitor film coating thickness measuring device further comprises a moving block driven by the linear transmission device to move along the horizontal direction; the lifting assembly is arranged on the moving block; the rotating assembly is arranged on the lifting assembly, driven to move in the vertical direction and used for driving the high-frequency measuring probe to rotate along a horizontal rotating shaft, and the rotating shaft is parallel to the moving direction of the moving block. The rotating assembly and the lifting assembly are arranged, the rotating assembly expands the detection range as much as possible, the lifting assembly can guarantee accurate adjustment of the detection position, and due to lifting adjustment, the angle between the high-frequency measuring probe and the thin film is fixed; the measuring error caused by the angle difference between the high-frequency measuring probe and the thin film due to the fact that the detection position is adjusted through the rotating assembly is avoided as much as possible, and the accuracy of measuring the resistance of the metal coating is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of thin film coating measurement, in particular to a capacitance thin film coating thickness measuring device. Background Art

[0002] Vacuum evaporation coating is a surface coating technology carried out in a vacuum environment, which is used to prepare thin films or coating materials to form a thin and uniform coating on the surface of the substrate. The evaporated film can be used as a capacitor film, which can ensure the stability of the capacitor performance.

[0003] During the evaporation process of the film, a metal layer of specified thickness needs to be deposited on the film. Therefore, the average thickness of the evaporated layer needs to be measured and the measured value needs to be fed back to the control center to adjust the speed of the evaporation drum to adjust the thickness of the metal coating.

[0004] Since the processing is not suitable for contact measurement, the resistance value of the coating surface is generally measured by thermal infrared camera shooting, laser detection, etc., and then the thickness of the coating is calculated based on the resistance value. The probe of the common measuring device is currently installed on the driving mechanism to detect the surface of the metal coating and obtain the average value. However, due to cost and space considerations, the driving mechanism generally drives the probe to move in a relatively single path, generally in a straight line. However, when the film to be measured is in a flat state, the measured values ​​of the resistance at different positions in the horizontal and vertical directions may vary greatly. Therefore, there may be large errors in measuring the resistance value using a probe with a single active path, which affects the accuracy of the film thickness measurement. Utility Model Content

[0005] In view of the shortcomings of the prior art, the utility model aims to provide a capacitance film coating thickness measuring device to solve the problem that the capacitance film coating thickness measuring device in the prior art has a single probe detection path when measuring the coating thickness, resulting in a large error in the measurement result. The specific technical solution is as follows:

[0006] A device for measuring the thickness of a capacitor film coating comprises a linear transmission device and a high-frequency measurement probe driven by the linear transmission device, wherein the high-frequency measurement probe is arranged toward a film to be measured, and further comprises:

[0007] Moving block: driven by the linear transmission device to move in the horizontal direction;

[0008] Lifting assembly: arranged on the moving block;

[0009] Rotating assembly: arranged on the lifting assembly, driven by the lifting assembly to move in the vertical direction, used to drive the high-frequency measuring probe to rotate along the horizontal rotating shaft, and the rotating shaft is arranged parallel to the movement direction of the moving block.

[0010] As a preferred implementation manner: the rotating assembly includes a motor frame arranged on the lifting assembly and a first motor installed in the motor frame, and the output shaft of the first motor is fixedly connected to the rotating shaft.

[0011] As a preferred embodiment: the lifting assembly includes a lifting drive member arranged on the moving block and a plurality of vertically arranged limit rods, the bottom of the limit rod is fixedly installed on the moving block, and the top of the limit rod passes upward through the limit hole opened in the motor frame.

[0012] As a preferred implementation manner: the lifting drive member is a cylinder or a screw motor lifter.

[0013] As a preferred implementation manner: the high-frequency measuring probe is detachably fixedly mounted on the rotating shaft.

[0014] As a preferred implementation manner: the rotating shaft is provided with an external thread, the high-frequency measuring probe is provided with a mounting hole with an internal thread, and is threadedly connected to the rotating shaft.

[0015] As a preferred embodiment: the linear transmission device includes a slide rail and a screw rod arranged parallel to the slide rail, and the screw rod is driven to rotate by a second motor;

[0016] The moving block is slidably arranged on the slide rail and is threadedly connected to the screw rod.

[0017] As a preferred implementation manner: the high-frequency measuring probe is electrically connected to a controller, and the controller is electrically connected to the lifting assembly and the rotating assembly respectively to drive the lifting assembly and the rotating assembly to operate;

[0018] The controller is fixedly mounted on the rotating assembly.

[0019] Compared with the prior art, the beneficial effects of the utility model are:

[0020] The utility model controls the high-frequency measuring probe to remotely measure the resistance of the metal coating of the film by arranging a rotating component and a lifting component. The rotating device has a large adjustment range for the detection position of the high-frequency measuring probe, and the lifting device has a small adjustment range for the detection position of the high-frequency measuring probe. The two are used in combination to flexibly adjust the detection position, control the high-frequency measuring probe to measure the resistance of different positions of the metal coating, and thus more accurately calculate the average thickness. The rotating component is arranged to expand the detection range as much as possible, and the lifting component is arranged to ensure that the adjustment of the detection position is more accurate on the one hand, and on the other hand, because the angle between the high-frequency measuring probe and the capacitor film is certain through the lifting adjustment, so that the detection position can be avoided as much as possible by adjusting the detection position through the rotating component, and the angle difference between the high-frequency measuring probe and the capacitor film during measurement can be ensured to be small as much as possible, so as to avoid the measurement result error caused by the detection angle difference, and improve the accuracy of the average resistance measurement of the metal coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a plan view of the overall structure of the capacitance thin film coating thickness measuring device disclosed in the utility model;

[0022] Figure 2 It is a structural schematic diagram of a moving block and its upper components in a capacitance thin film coating thickness measuring device disclosed in the utility model;

[0023] Figure 3 The utility model discloses a schematic diagram of the structure of a linear transmission device in a capacitance film coating thickness measuring device.

[0024] In the figure, 1, linear transmission device; 10, slide rail; 11, screw; 12, second motor; 2, high-frequency measuring probe; 20, rotating shaft; 3, moving block; 30, roller; 4, lifting assembly; 40, lifting drive member; 41, limit rod; 5, rotating assembly; 50, motor frame; 51, first motor; 52, coupling; 6, controller. DETAILED DESCRIPTION

[0025] The embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.

[0026] The following describes the embodiments of the present disclosure through specific examples, and those skilled in the art can easily understand other advantages and effects of the present disclosure from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all of the embodiments. The present disclosure can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present disclosure. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present disclosure.

[0027] like Figure 1 and Figure 3 As shown, a device for measuring the thickness of a capacitor film coating comprises a linear transmission device 1 and a high-frequency measuring probe 2, wherein the linear transmission device drives the high-frequency measuring probe 2 to reciprocate in the horizontal direction. The linear transmission device may be a common driving member such as a gear, a rack transmission, a cylinder transmission, etc. In this embodiment, the linear transmission device 1 comprises a second motor 12, a screw 11 driven to rotate by the second motor 12, and a slide rail 10 arranged parallel to the screw 11, a moving block 3 is slidably arranged on the slide rail 10, specifically, a plurality of rollers 30 are arranged on the moving block 3 to be in sliding contact with the slide rail 10, the cross section of the slide rail 10 is rectangular, and the plurality of rollers 30 are slidably arranged on the four surfaces of the slide rail 10 respectively; the other end of the moving block 3 is threadedly connected to the screw 11, so that the screw 11 drives the moving block 3 to move horizontally when it rotates.

[0028] The top of the moving block 3 is horizontally arranged, and a lifting assembly 4 is arranged thereon. The lifting assembly 4 includes a lifting drive 40 and a limit rod 41 fixedly installed on the top of the moving block 3. The number of limit rods 41 is not limited, and preferably at least 4, to ensure the lifting stability and stroke accuracy of the lifting assembly 4. The lifting drive 40 can be a common gear rack climbing mechanism, a cylinder or a motor-driven Maza-type lifting member. In this embodiment, considering the control of the lifting accuracy, it is preferred to use a motor-driven screw lifting structure to drive the rotating assembly 5 to lift.

[0029] The rotating assembly 5 includes a motor frame 50 and a first motor 51 installed in the motor frame 50. A plurality of limiting holes are provided in the motor frame 50 for the limiting rod 41 to pass through. The first motor 51 is fixedly installed in the motor frame 50. The first motor 51 is arranged horizontally, and its output shaft is fixedly connected to the rotating shaft 20 through a coupling 52, so as to drive the rotating shaft 20 to rotate. The high-frequency measuring probe 2 is fixedly installed on the rotating shaft 20. Specifically: a threaded hole with an internal thread is provided on the high-frequency measuring probe 2, and an external thread is provided on the rotating shaft 20. The high-frequency measuring probe 2 is tightened to the outside of the rotating shaft 20 until it cannot be twisted. At this time, the high-frequency measuring probe 2 is fixed on the rotating shaft 20.

[0030] The rotating shaft 20 is arranged horizontally and parallel to the movement direction of the moving block 3 driven by the linear transmission device 1. The high-frequency measuring probe 2 can use an infrared or laser detector to measure the resistance value of the metal coating layer. By measuring the resistance value of the metal coating at different positions, the average resistance value is calculated, and thus the average thickness is calculated accordingly.

[0031] In this embodiment, the control of the detection position of the high-frequency measuring probe 2 is controlled by the controller 6. Specifically, the controller 6 is fixedly mounted on the motor frame 50, so that the controller 6 and the high-frequency measuring probe 2 rise or fall together to prevent the high-frequency measuring probe 2 from interfering with the wires between the controller 6 when the high-frequency measuring probe 2 rises and falls, affecting the accuracy of the movement of the high-frequency measuring probe 2 and causing errors in the measurement of the resistance of the metal plating layer. The controller 6 is electrically connected to the first motor 51 and the lifting drive 40 respectively, and is used to control the detection direction and detection position of the high-frequency measuring probe 2. The specific measurement process is as follows:

[0032] The linear transmission device 1 drives the moving block 3 to move in a straight line in the horizontal direction. During the movement, the high-frequency measuring probe 2 measures the resistance of multiple detection points on the path, so that the average resistance value of each detection point on the path line can be calculated; then the controller 6 controls the lifting component 4 and the rotating component 5 to operate, drives the high-frequency measuring probe 2 to rise or fall or rotate, adjusts the detection position to another detection path line, and measures the resistance of each detection point on the detection path line. In this process, the angle of the high-frequency measuring probe 2 is rotated as little as possible, and the lifting component 4 is used to adjust the detection position as much as possible to ensure that the angle difference between the high-frequency measuring probe 2 and the capacitor film to be measured is as small as possible, so as to avoid the measurement result error caused by the angle change as much as possible. Repeat the above process, after the high-frequency measuring probe 2 measures the resistance of each detection point on multiple paths, the average resistance value is calculated, and the average thickness of the metal coating on the film is calculated according to the average organization. Compared with measuring each detection point on only one path line, its measurement accuracy is greatly improved, and a more accurate average thickness value can be measured for the uneven thickness of the metal coating on the film, which is suitable for promotion and use.

[0033] In the description of the present invention, it should be understood that the terms "middle", "length", "up", "down", "front", "back", "vertical", "horizontal", "inside", "outside", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0034] In the present invention, unless otherwise clearly specified and limited, the first feature "on" the second feature may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. "Multiple" means at least two, such as two, three, etc., unless otherwise clearly and specifically limited.

[0035] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] The above is only for explaining the implementation mode of the utility model and is not used to limit the utility model. For those skilled in the art, any modification, equivalent substitution, improvement, etc. made within the spirit and principle of the utility model without creative work should be included in the protection scope of the utility model.

Claims

1. A device for measuring the thickness of a capacitive thin film coating, comprising a linear actuator (1) and a high-frequency measuring probe (2) driven by the linear actuator (1), wherein the high-frequency measuring probe (2) is arranged toward a thin film to be measured, and characterized in that: Also includes: Moving block (3): driven by the linear transmission device (1) to move in a horizontal direction; Lifting assembly (4): arranged on the moving block (3); A rotating assembly (5) is arranged on the lifting assembly (4), driven by the lifting assembly (4) to move in a vertical direction, and is used to drive the high-frequency measuring probe (2) to rotate along a horizontal rotating shaft (20), wherein the rotating shaft (20) is arranged parallel to the movement direction of the moving block (3).

2. The device for measuring the thickness of a capacitor thin film coating according to claim 1, characterized in that: The rotating assembly (5) comprises a motor frame (50) arranged on the lifting assembly (4) and a first motor (51) installed in the motor frame (50); an output shaft of the first motor (51) is fixedly connected to the rotating shaft (20).

3. The device for measuring the thickness of a capacitor thin film coating as claimed in claim 2, characterized in that: The lifting assembly (4) comprises a lifting drive member (40) arranged on the moving block (3) and a plurality of vertically arranged limit rods (41), wherein the bottom of the limit rod (41) is fixedly mounted on the moving block (3) and the top of the limit rod (41) passes upward through a limit hole provided in the motor frame (50).

4. The device for measuring the thickness of a capacitor thin film coating as claimed in claim 3, characterized in that: The lifting drive component (40) is a cylinder or a screw motor lifter.

5. The device for measuring the thickness of a capacitor thin film coating according to claim 1, characterized in that: The high-frequency measuring probe (2) is detachably fixedly mounted on the rotating shaft (20).

6. The device for measuring the thickness of a capacitor thin film coating as claimed in claim 5, characterized in that: The rotating shaft (20) is provided with an external thread, and the high-frequency measuring probe (2) is provided with a mounting hole with an internal thread, and is threadedly connected to the rotating shaft (20).

7. The device for measuring the thickness of a capacitor thin film coating as claimed in claim 1, characterized in that: The linear transmission device (1) comprises a slide rail (10) and a screw rod (11) arranged parallel to the slide rail (10), wherein the screw rod (11) is driven to rotate by a second motor (12); The moving block (3) is slidably disposed on the slide rail (10) and is threadedly connected to the screw rod (11).

8. The device for measuring the thickness of a capacitor thin film coating according to any one of claims 1 to 7, characterized in that: The high-frequency measuring probe (2) is electrically connected to a controller (6), and the controller (6) is electrically connected to the lifting assembly (4) and the rotating assembly (5) respectively for driving the lifting assembly (4) and the rotating assembly (5) to operate; The controller (6) is fixedly mounted on the rotating assembly (5).

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