Flower basket for bearing silicon wafers

Abstract

The utility model discloses a flower basket for bearing silicon wafers, which belongs to the field of photovoltaic technology, and comprises a first side plate and a second side plate which are oppositely arranged, and a plurality of limiting rods are arranged between the first side plate and the second side plate; one ends of the plurality of limiting rods are respectively fixed with four corners of the first side plate, and the other ends of the plurality of limiting rods are respectively fixed with four corners of the second side plate; the plurality of limiting rods at least comprise two first limiting rods positioned at the bottom of the flower basket and two second limiting rods positioned at the top of the flower basket; at least two bearing rods are arranged between the two first limiting rods, and the two bearing rods are arranged at intervals; the flower basket bottom further comprises at least two buffer rods which are located on the sides, facing the flower basket top, of the bearing rods. A gap is formed between the buffering rod and the bearing rod. According to the utility model, the silicon wafer can be effectively prevented from being damaged when entering the basket, and the processing quality and the product yield can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaics, and more specifically, to a flower basket for carrying silicon wafers. Background Art

[0002] As the main raw material of solar cells, crystalline silicon plays a vital role in promoting the development of the photovoltaic industry. Therefore, improving the yield of crystalline silicon in each processing step is a key step to reduce the cost of solar cells. Generally, after the silicon material is cut to form silicon wafers in the processing step, impurities such as water, silicon powder, and cutting fluid are mixed on the silicon wafers or between adjacent silicon wafers, which need to be cleaned and sorted. With the rapid development and rapid updates of the photovoltaic industry, in the silicon wafer manufacturing process, the cleaning and drying of single wafers (such as single crystal silicon wafers, etc.) are generally operated by the fixture that carries the single wafer, which is generally called a wafer box or flower basket in the industry.

[0003] However, in the prior art, when cleaning silicon wafers, the wafer inserting and cleaning integrated machine uses a belt to convey the silicon wafers into the basket. When the belt drives the silicon wafers to be inserted into the basket for cleaning by inertia, the silicon wafers are prone to hard collision with the bottom of the basket. The silicon wafers are brittle and the large impact force can easily cause damage to the silicon wafers, thereby increasing the probability of defects such as chipping and hidden cracks on the silicon wafers, affecting the processing quality and product yield.

[0004] Therefore, there is an urgent need for a flower basket that can effectively prevent silicon wafers from being damaged when entering the basket, which is beneficial to improving processing quality and product yield. Utility Model Content

[0005] In view of this, the utility model provides a flower basket for carrying silicon wafers, so as to solve the problem in the prior art that when the silicon wafer is inserted into the flower basket, the silicon wafer is easily hard-collided with the bottom of the flower basket, causing damage to the silicon wafer and affecting the processing quality and product yield.

[0006] The utility model provides a flower basket for carrying silicon wafers, comprising a first side plate and a second side plate arranged opposite to each other, wherein a plurality of limiting rods are provided between the first side plate and the second side plate; one end of the plurality of limiting rods is respectively fixed to the four corners of the first side plate, and the other end of the plurality of limiting rods is respectively fixed to the four corners of the second side plate;

[0007] The plurality of limiting rods at least include two first limiting rods located at the bottom of the flower basket and two second limiting rods located at the top of the flower basket;

[0008] At least two load-bearing rods are included between the two first limit rods, and the two load-bearing rods are arranged at intervals;

[0009] The bottom of the flower basket also includes at least two buffer rods, which are located on the side of the load-bearing rod facing the top of the flower basket;

[0010] A gap is included between the buffer rod and the load-bearing rod.

[0011] Optionally, the buffer rod is located directly above the load-bearing rod in a direction pointing from the bottom of the flower basket to the top of the flower basket.

[0012] Further optionally, the distance between the buffer rod and the load-bearing rod is less than or equal to 3 mm.

[0013] Further optionally, the distances between different load-bearing rods and the first limiting rod are equal, and the distances between different buffer rods and the first limiting rod are equal.

[0014] Optionally, the buffer bar comprises a rubber strip.

[0015] Optionally, the buffer rod and the load-bearing rod are both cylindrical, and the outer diameter of the buffer rod is equal to the outer diameter of the load-bearing rod.

[0016] Optionally, the first side plate includes a first slot, the second side plate includes a second slot, one end of the buffer rod is fixed to the first side plate via the first slot, and the other end of the buffer rod is fixed to the second side plate via the second slot.

[0017] Optionally, a plurality of weight-reducing holes are provided on the first side panel and the second side panel.

[0018] Further optionally, the weight-reducing hole includes any one of a circular hole or a bar-shaped hole.

[0019] Optionally, at least one positioning groove is respectively formed on an edge of the first side plate and an edge of the second side plate.

[0020] Compared with the prior art, the flower basket for carrying silicon wafers provided by the utility model achieves at least the following beneficial effects:

[0021] The flower basket provided by the utility model can be used as a tool for carrying silicon wafers in the process of silicon wafer production. The flower basket can include a first side plate and a second side plate arranged oppositely, and a plurality of limiting rods between the first side plate and the second side plate. The plurality of limiting rods are fixedly arranged between the first side plate and the second side plate arranged oppositely, thereby forming an overall frame structure of the flower basket. The plurality of limiting rods are used to limit the silicon wafers to prevent the silicon wafers from sliding out of the flower basket after entering the basket. At least two load-bearing rods are included between the two first limiting rods at the bottom of the flower basket, and the two load-bearing rods are arranged at intervals to evenly distribute the weight of the silicon wafers. The bottom of the flower basket also includes at least two buffer rods, which are located on the side of the load-bearing rods facing the top of the flower basket, and can play a buffering role when loading silicon wafers, converting the hard collision between the silicon wafer and the load-bearing rod in the prior art into an elastic collision. After the silicon wafer enters the basket, it contacts the buffer rod, which can reduce the impact force when the silicon wafer contacts the load-bearing rod at the bottom of the flower basket, thereby preventing the silicon wafer from being broken due to a hard collision with the load-bearing rod and the edge of the silicon wafer from being damaged, which is beneficial to improving the processing quality and product yield in the process of silicon wafer manufacturing. There is a gap between the buffer rod and the load-bearing rod, that is, the buffer rod and the load-bearing rod are not set closely. When the silicon wafer is inserted into the flower basket for cleaning, the gap between the buffer rod and the load-bearing rod is convenient for the outflow of the cleaning solution, which is beneficial to reduce the dirt on the load-bearing rod at the bottom of the flower basket. After the silicon wafer enters the basket, it contacts the buffer rod, so it can avoid direct contact between the silicon wafer and the load-bearing rod at the bottom of the flower basket, thereby reducing the risk of silicon wafer contamination.

[0022] Of course, any product implementing the present utility model does not necessarily need to achieve all of the above-mentioned technical effects at the same time.

[0023] Other features and advantages of the present invention will become apparent from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the present invention and, together with the description, serve to explain the principles of the present invention.

[0025] Figure 1 This is a structural schematic diagram of a flower basket for carrying silicon wafers provided by the utility model;

[0026] Figure 2 yes Figure 1 A schematic diagram of a top view structure;

[0027] Figure 3 yes Figure 1 A left-view structural schematic diagram of ;

[0028] Figure 4 yes Figure 1 Another schematic diagram of a top view structure;

[0029] Figure 5 yes Figure 1 Another schematic diagram of a top view structure;

[0030] Figure 6 This is another structural schematic diagram of a flower basket for carrying silicon wafers provided by the utility model;

[0031] Figure 7 yes Figure 6 A left-view structural schematic diagram of ;

[0032] Figure 8 This is another structural schematic diagram of a flower basket for carrying silicon wafers provided by the utility model;

[0033] Fig. 9 yes Figure 8 A left-view structural schematic diagram of ;

[0034] Fig.10 This is another structural schematic diagram of a flower basket for carrying silicon wafers provided by the utility model;

[0035] Fig.11 This is another structural schematic diagram of a flower basket for carrying silicon wafers provided by the utility model. DETAILED DESCRIPTION

[0036] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention.

[0037] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the present invention, its application, or uses.

[0038] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.

[0039] In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0040] It should be noted that like reference numerals and letters refer to similar items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0041] Please refer to Figure 1-Figure 3 , Figure 1This is a structural schematic diagram of a flower basket for carrying silicon wafers provided by the utility model. Figure 2 yes Figure 1 A schematic diagram of a top view structure, Figure 3 yes Figure 1 A left-side structural schematic diagram of a flower basket 000 for carrying silicon wafers provided in this embodiment includes a first side plate 101 and a second side plate 102 arranged opposite to each other, and a plurality of limiting rods 20 are provided between the first side plate 101 and the second side plate 102; one end of the plurality of limiting rods 20 is respectively fixed to the four corners of the first side plate 101, and the other end of the plurality of limiting rods 20 is respectively fixed to the four corners of the second side plate 102;

[0042] The plurality of limiting rods 20 at least include two first limiting rods 201 located at the bottom 000A of the flower basket and two second limiting rods 202 located at the top 000B of the flower basket;

[0043] At least two load-bearing rods 30 are included between the two first limiting rods 201, and the two load-bearing rods 30 are arranged at intervals;

[0044] The bottom 000A of the flower basket further includes at least two buffer rods 40, which are located on the side of the load-bearing rod 30 facing the top 000B of the flower basket (it can be understood that due to Figure 1 is a three-dimensional structure diagram, so Figure 1 Only one load-bearing rod and one buffer rod are shown in the figure. Figure 2 schematic diagram for understanding);

[0045] A gap 00K is included between the buffer rod 40 and the load-bearing rod 30 .

[0046] Specifically, the flower basket provided in this embodiment can be used as a tool for carrying silicon wafers in the silicon wafer production process. The specific structure of the flower basket 000 may include a first side plate 101 and a second side plate 102 that are relatively arranged. Optionally, the first side plate 101 and the second side plate 102 may be relatively arranged along a first direction X. The first direction X may be understood as the direction in which the first side plate 101 and the second side plate 102 are arranged. It can be understood that this embodiment does not limit the specific shapes of the first side plate 101 and the second side plate 102. During specific implementation, they can be set according to the specific shape of the silicon wafer to be carried. Figure 1 The first side plate 101 and the second side plate 102 are square plate structures as an example for illustration. Optionally, the first side plate 101 and the second side plate 102 are provided with U-shaped notches 10K, which is beneficial to avoid the first side plate 101 and the second side plate 102 from blocking too large an area, and can facilitate the staff to observe the situation of silicon wafers entering the basket at all times through the U-shaped notches 10K.

[0047] In this embodiment, a plurality of limiting rods 20 are provided between the first side plate 101 and the second side plate 102. Optionally, four limiting rods 20 may be provided between the first side plate 101 and the second side plate 102. The four limiting rods 20 may be fixed at the four corners of the first side plate 101 and the second side plate 102, respectively. Figure 1 As shown, one end of the four limiting rods 20 is respectively fixed to the four corners of the first side plate 101 (the four corners of the first side plate 101 are respectively distinguished by 101A, 101B, 101C, and 101D), and the other end of the four limiting rods 20 is respectively fixed to the four corners of the second side plate 102 (the four corners of the second side plate 102 are respectively distinguished by 102A, 102B, 102C, and 102D). In this embodiment, the limiting rods 20 are fixedly arranged between the first side plate 101 and the second side plate 102 which are arranged oppositely. The length extension direction of the limiting rods 20 can be the first direction X, thereby forming an overall frame structure of the flower basket 000. The multiple limiting rods 20 are used to limit the silicon wafers to prevent the silicon wafers from sliding out of the flower basket 000 after entering the basket.

[0048] The plurality of limiting rods 20 of this embodiment at least include two first limiting rods 201 located at the bottom 000A of the flower basket and two second limiting rods 202 located at the top 000B of the flower basket, wherein the bottom 000A of the flower basket can be understood as the part of the flower basket 000 that contacts the plane when the flower basket 000 is placed on the plane, and the top 000B of the flower basket can be understood as the part of the flower basket 000 that is opposite to the bottom 000A of the flower basket when the flower basket 000 is placed on the plane. This embodiment only distinguishes the limiting rods 20 located at different positions of the flower basket 000 by the first limiting rods 201 and the second limiting rods 202, and does not indicate the difference in structure between the first limiting rods 201 and the second limiting rods 202. Optionally, the first limiting rods 201 and the second limiting rods 202 can both be cylindrical rod-shaped structures to minimize the contact area between the silicon wafer and the limiting rods 20 after the silicon wafer is placed in the basket.

[0049] The flower basket structure of the present embodiment includes at least two load-bearing rods 30 between the two first limit rods 201 of the bottom 000A of the flower basket, and the two load-bearing rods 30 are arranged at intervals. Optionally, the two ends of the same load-bearing rod 30 can be overlapped or fixed to the first side plate 101 and the second side plate 102 respectively, and the length extension direction of the load-bearing rod 30 can be the first direction X, that is, the length extension direction of the load-bearing rod 30 is the same as the length extension direction of the limit rod 20. The load-bearing rod 30 is used to support the silicon wafer after the silicon wafer is put into the basket. Therefore, at least two load-bearing rods 30 are required between the two first limit rods 201 of the bottom 000A of the flower basket, and the two load-bearing rods 30 are arranged at intervals to evenly distribute the weight of the silicon wafer.

[0050] It is understandable that the present embodiment does not specifically limit the spacing between the two load-bearing rods 30, and in specific implementation, it can be set according to the size of the silicon wafer. The present embodiment does not specifically limit the number of load-bearing rods 30 between the two first limit rods 201, and in specific implementation, the number of load-bearing rods 30 can be adjusted according to the size of the flower basket and the size of the silicon wafer.

[0051] The bottom 000A of the flower basket in this embodiment also includes at least two buffer rods 40, which are located on the side of the load-bearing rods 30 facing the top 000B of the flower basket, that is, compared with the load-bearing rods 30, the buffer rods 40 are closer to the top 000B of the flower basket. Optionally, the buffer rods 40 and the load-bearing rods 30 are arranged correspondingly, that is, the number of buffer rods 40 may be consistent with the number of load-bearing rods 30 or may not be consistent. This embodiment is illustrated by taking the example that the number of buffer rods 40 can be consistent with the number of load-bearing rods 30, and the buffer rods 40 can be as close to the bottom 000A of the flower basket as possible. In the present embodiment, a buffer rod 40 is arranged in the flower basket 000 near the bottom 000A of the flower basket, and the buffer rod 40 is located on the side of the load-bearing rod 30 facing the top 000B of the flower basket. Since the buffer rod 40 is generally made of soft or elastic material, the buffer rod 40 can be arranged to play a buffering role when loading silicon wafers, and convert the hard collision between the silicon wafer and the load-bearing rod 30 in the prior art into an elastic collision. After the silicon wafer enters the basket, it contacts the buffer rod 40, which can reduce the impact force when the silicon wafer contacts the load-bearing rod 30 at the bottom 000A of the flower basket, thereby avoiding the silicon wafer from being broken due to a hard collision with the load-bearing rod 30 and the edge damage of the silicon wafer, which is beneficial to improving the processing quality and product yield in the silicon wafer manufacturing process.

[0052] The buffer rod 40 of this embodiment is located on the side of the load-bearing rod 30 facing the top 000B of the flower basket, and when the buffer rod 40 can be as close to the bottom 000A of the flower basket as possible, there is a gap 00K between the buffer rod 40 and the load-bearing rod 30, that is, the buffer rod 40 and the load-bearing rod 30 are not arranged closely, and the gap 00K is reserved between the buffer rod 40 and the load-bearing rod 30. When the silicon wafer is inserted into the flower basket for cleaning, the gap 00K between the buffer rod 40 and the load-bearing rod 30 facilitates the outflow of the cleaning solution, which is beneficial to reducing the dirt on the load-bearing rod 30 at the bottom 000A of the flower basket, and the silicon wafer contacts the buffer rod 40 after entering the basket, so it can avoid direct contact between the silicon wafer and the load-bearing rod 30 at the bottom 000A of the flower basket, thereby reducing the risk of silicon wafer contamination.

[0053] The flower basket for carrying silicon wafers provided in this embodiment can prevent the silicon wafers from breaking and the edge of the silicon wafers from being damaged when entering the basket by adding a buffer rod 40 above the load-bearing rod 30 at the bottom 000A of the flower basket, thereby improving the processing quality and product yield during the silicon wafer manufacturing process.

[0054] In the existing design, the side of the flower basket is generally provided with a side baffle plate or a side baffle rod to block the silicon wafer, but the failure rate of the silicon wafer blocking structure is relatively high. In the overall frame structure of the flower basket provided in this embodiment, no other baffle rods or baffle plate structures are included between the multiple limit rods 20 located at the four corners of the first side plate 101 and the four corners of the second side plate 102, that is, the periphery of the flower basket 000 is only provided with limit rods 20 at the four corners, which can avoid reducing the failure rate of silicon wafers inserted into the flower basket, and the overall weight of the flower basket can be relatively reduced.

[0055] In the existing flower basket design, the bottom rod at the bottom of the flower basket used to support silicon wafers is easily rusted due to being soaked in chemicals for a long time. After the silicon wafers are put into the basket, direct contact with the bottom of the silicon wafers is prone to produce contaminants. The flower basket 000 provided in this embodiment has a buffer rod 40 added above the load-bearing rod 30 of the bottom 000A of the flower basket. The silicon wafers do not directly contact the load-bearing rod 30 of the bottom 000A of the flower basket, which can avoid contaminants and reduce the risk of silicon wafer contamination, thereby improving product yield.

[0056] In the existing flower basket design, the bottom rod of the flower basket used to support silicon wafers is easily rusted after being soaked in chemicals for a long time. Sometimes a leather cover is installed outside the bottom rod to protect the bottom rod, but the leather cover outside the bottom rod needs to be replaced frequently (such as once a month). In the flower basket 000 provided in this embodiment, the probability of contamination of the buffer rod 40 is relatively small, and it can be replaced less frequently (such as once a quarter). Therefore, the replacement frequency of the flower basket parts can be greatly reduced, which is beneficial to saving costs and improving production efficiency.

[0057] It should be noted that, in this embodiment Figure 1-Figure 3 The structure of the flower basket 000 is only drawn for example. In specific implementation, the structure of the flower basket 000 includes but is not limited to this, and may also include other structures, such as opening some through holes or positioning holes on the side panels of the flower basket, etc. This embodiment is not described in detail here, and the details can be understood by referring to the description of the subsequent embodiments.

[0058] Optionally, the buffer rod 40 added above the load-bearing rod 30 of the bottom 000A of the flower basket in this embodiment may include a rubber strip, that is, the buffer rod 40 may be a rubber strip structure, such as a strip structure made of natural rubber, styrene-butadiene rubber or silicone, etc., to meet the requirements of high temperature resistance and corrosion resistance of the buffer rod 40. This embodiment does not limit the specific manufacturing material of the buffer rod 40, and it is only required that the buffer rod 40 is made of a material with a certain elasticity, a buffering effect and a relatively soft material.

[0059] In some optional embodiments, please refer to Figure 1-Figure 3 and Figure 4 , Figure 4 yes Figure 1Another schematic diagram of the top view of the structure, in this embodiment, along the direction Z pointing from the bottom 000A of the flower basket to the top 000B of the flower basket, the buffer rod 40 is located directly above the load-bearing rod 30.

[0060] This embodiment explains that when a buffer rod 40 is added above the load-bearing rod 30 at the bottom 000A of the flower basket, the buffer rod 40 can be located directly above the load-bearing rod 30. Specifically, the length extension direction of the buffer rod 40 and the length extension direction of the load-bearing rod 30 can both be the first direction X, and in the direction Z from the bottom 000A of the flower basket to the top 000B of the flower basket, the orthographic projection of the buffer rod 40 on the plane where the load-bearing rod 30 is located can overlap or coincide with a part of the load-bearing rod 30 (it can be understood that Figure 2 Take the example that the orthographic projection of the buffer rod 40 on the plane where the load-bearing rod 30 is located overlaps with part of the load-bearing rod 30. Figure 4 Take the example that the positive projection of the buffer rod 40 on the plane where the load-bearing rod 30 is located coincides with the load-bearing rod 30. Figure 4 The structure of the middle load-bearing rod 30 and the buffer rod 40, Figure 4 Transparency is filled in). Since the silicon wafers are loaded vertically on the buffer rods 40 during the process of inserting the silicon wafers into the flower basket, in order to avoid the silicon wafers from hitting the load-bearing rods 30 or to avoid the possibility of the silicon wafers contacting the load-bearing rods 30, the present embodiment sets a direction Z from the bottom 000A of the flower basket to the top 000B of the flower basket, and the buffer rods 40 are located directly above the load-bearing rods 30, which can better ensure that the buffer rods 40 have a good buffering capacity for the silicon wafers, effectively avoid the phenomenon of the silicon wafers being broken due to contact with the load-bearing rods 30 and the edge of the silicon wafers being damaged, and ensure the processing quality and product yield in the silicon wafer manufacturing process.

[0061] Optional, please continue to combine reference Figure 1-Figure 4 In this embodiment, along the direction Z pointing from the bottom 000A of the flower basket to the top 000B of the flower basket, the distance H1 between the buffer rod 40 and the load-bearing rod 30 is less than or equal to 3 mm.

[0062] This embodiment explains that the buffer rod 40 is located on the side of the load-bearing rod 30 facing the top 000B of the flower basket, and when there is a gap 00K between the buffer rod 40 and the load-bearing rod 30, the gap 00K does not need to be too large. Specifically, along the direction Z from the bottom 000A of the flower basket to the top 000B of the flower basket, the spacing H1 between the buffer rod 40 and the load-bearing rod 30 is less than or equal to 3mm. Since the buffer rod 40 is generally made of soft or elastic materials to play a buffering role, if the gap 00K between the buffer rod 40 and the load-bearing rod 30 is too large, pressure is formed on the buffer rod 40 after the silicon wafer enters the basket, which easily causes the buffer rod 40 to collapse, resulting in unstable bearing on the silicon wafer. Therefore, this embodiment is set in the direction Z from the bottom 000A of the flower basket to the top 000B of the flower basket, and the spacing H1 between the buffer rod 40 and the load-bearing rod 30 is less than or equal to 3mm, so that it can play a buffering effect on the silicon wafer, avoid damage to the silicon wafer, and improve the bearing stability of the buffer rod 40 on the silicon wafer.

[0063] Optional, please continue to combine reference Figure 1-Figure 4 In this embodiment, along the direction Z pointing from the bottom 000A of the flower basket to the top 000B of the flower basket, the distances H2 between different load-bearing rods 30 and the first limiting rod 201 are equal, and the distances H3 between different buffer rods 40 and the first limiting rod 201 are equal.

[0064] This embodiment explains that when the flower basket 000 includes at least two buffer rods 40, they need to be arranged in the direction Z from the bottom 000A of the flower basket to the top 000B of the flower basket, and the distances H3 between different buffer rods 40 and the first limit rod 201 are equal, that is, the vertical distances between different buffer rods 40 and the first limit rod 201 in the figure are equal, so that the planes where different buffer rods 40 are located are guaranteed to be the same horizontal plane, avoiding the unevenness when the silicon wafers contact the buffer rods 40 after entering the basket, and thus providing a better support effect for the silicon wafers after entering the basket. When the flower basket 000 includes at least two load-bearing rods 30, along the direction Z from the bottom 000A of the flower basket to the top 000B of the flower basket, the distances H2 between different load-bearing rods 30 and the first limit rod 201 are equal, that is, the vertical distances between different load-bearing rods 30 and the first limit rod 201 in the figure are equal, so that the planes where different load-bearing rods 30 are located are guaranteed to be the same horizontal plane, which is conducive to ensuring the flatness and stability of the bottom 000A of the flower basket.

[0065] In some optional embodiments, please refer to Figure 1 and Figure 5 , Figure 5 yes Figure 1 Another schematic diagram of the top view of the structure, in this embodiment, the buffer rod 40 and the load-bearing rod 30 are both cylindrical, and the outer diameter L1 of the buffer rod 40 is equal to the outer diameter L2 of the load-bearing rod 30.

[0066] This embodiment explains that the shape of the buffer rod 40 in the basket 000 can be cylindrical. When the cylindrical buffer rod 40 carries a silicon wafer, when the silicon wafer contacts the buffer rod 40, the contact area between the silicon wafer and the buffer rod 40 can be reduced as much as possible, which is conducive to further reducing the probability of damage to the silicon wafer. In addition, in this embodiment, the buffer rod 40 and the load-bearing rod 30 are both designed to be cylindrical, and the outer diameter L1 of the buffer rod 40 is equal to the outer diameter L2 of the load-bearing rod 30 (it can be understood that in order to clearly illustrate Figure 5 The structure of the middle load-bearing rod 30 and the buffer rod 40, Figure 5 Transparency is filled in the middle), that is, the outer diameter L1 of the buffer rod 40 is as consistent as possible with the outer diameter L2 of the load-bearing rod 30, and the silicon wafer is in contact with the buffer rod 40. Even if a part of the buffer rod 40 is likely to sink and come into contact with the load-bearing rod 30, the contact area between the silicon wafer and the load-bearing rod 30 can be reduced, thereby better ensuring the yield of the silicon wafer processing process.

[0067] In some alternative embodiments, please refer to Figure 6 and Figure 7 , Figure 6 This is another structural schematic diagram of a flower basket for carrying silicon wafers provided by the utility model. Figure 7 yes Figure 6 A left-view structural schematic diagram, in this embodiment, the first side plate 101 includes a first card slot 101K1, the second side plate 102 includes a second card slot 102K1, one end of the buffer rod 40 is fixed to the first side plate 101 through the first card slot 101K1, and the other end of the buffer rod 40 is fixed to the second side plate 102 through the second card slot 102K1.

[0068] This embodiment explains that the buffer rod 40 added above the load-bearing rod 30 of the bottom 000A of the flower basket can be fixed by adding slots on the first side plate 101 and the second side plate 102, that is, the buffer rod 40 and the first side plate 101 and the second side plate 102 are not an integral fixed structure, and a first slot 101K1 is opened at a required position of the first side plate 101, and a second slot 102K1 is opened at a required position of the second side plate 102, and the two ends of the buffer rod 40 are respectively embedded and fixed in the first slot 101K1 and the second slot 102K1, so that the buffer rod 40 can be easily replaced after being used for a period of time.

[0069] Optional, such as Figure 7As shown, the two ends of the buffer rod 40 in this embodiment can be fixed by riveting the first stainless steel sheet 50 to the first slot 101K1 and the second slot 102K1 respectively, so that the buffer rod 40 can be easily replaced. For example, when the buffer rod 40 needs to be replaced, it is only necessary to peel off the first stainless steel sheets 50 at both ends of the buffer rod 40, and then take the first stainless steel sheets 50 at both ends of the buffer rod 40 out of the first slot 101K1 and the second slot 102K1 respectively, and then take them away from the buffer rod 40 to replace the buffer rod 40.

[0070] Optional, please refer to Figure 8 and Fig. 9 , Figure 8 This is another structural schematic diagram of a flower basket for carrying silicon wafers provided by the utility model. Fig. 9 yes Figure 8 A left-view structural schematic diagram, in this embodiment, the first side plate 101 is provided with a third slot 101K2, and the second side plate 102 is provided with a fourth slot 102K2. Further optionally, the load-bearing rod 30 can be surface-injected by stainless steel material, and the third slot 101K2 provided on the first side plate 101 and the fourth slot 102K2 provided on the second side plate 102 can be respectively formed together with the injection molded part on the surface of the load-bearing rod 30 (the same filling is used in the figure). The pattern indicates that the third card slot 101K2 and the fourth card slot 102K2 are molded together with the injection molded parts on the surface of the load-bearing rod 30, so that the third card slot 101K2 after injection molding is located on the first side panel 101, and the fourth card slot 102K2 after injection molding is located on the second side panel 102, and then one end of the load-bearing rod 30 is fixed to the first side panel 101 through the third card slot 101K2, and the other end of the load-bearing rod 30 is fixed to the second side panel 102 through the fourth card slot 102K2.

[0071] The third card slot 101K2 and the fourth card slot 102K2 can be set at the positions corresponding to the buffer rod 40 and the load-bearing rod 30, and one end of the buffer rod 40 and the corresponding load-bearing rod 30 can be fixed to the first side plate 101 through the same third card slot 101K2, and the other end of the buffer rod 40 and the corresponding load-bearing rod 30 can be fixed to the second side plate 102 through the same fourth card slot 102K2.

[0072] This embodiment explains that the load-bearing rod 30 and the corresponding buffer rod 40 in the flower basket 000 can be installed as a whole. Specifically, the number of the load-bearing rod 30 and the buffer rod 40 in the flower basket 000 can be the same. The buffer rod 40 is located directly above the load-bearing rod 30. A third card slot 101K2 is provided on the first side plate 101, and a fourth card slot 102K2 is provided on the second side plate 102. One end of the buffer rod 40 and the corresponding load-bearing rod 30 can be fixed to the first side plate 101 through the same third card slot 101K2, and the other end of the buffer rod 40 and the corresponding load-bearing rod 30 can be fixed to the second side plate 102 through the same fourth card slot 102K2. Further, optionally, a second stainless steel sheet 60 can also be provided in the third card slot 101K2 and the fourth card slot 102K2, respectively. By riveting the two second stainless steel sheets 60 to the third card slot 101K2 and the fourth card slot 102K2, respectively, a stable effect of the integrated installation of the buffer rod 40 and the load-bearing rod 30 is achieved.

[0073] The load-bearing rod 30 in the present embodiment can be made of stainless steel surface injection molding, and a buffer rod 40 is arranged directly above it. Since the buffer rod 40 is soft and difficult to fix, the load-bearing rod 30 and its corresponding buffer rod 40 are installed as a whole in the present embodiment, which can facilitate the installation and replacement of the buffer rod 40 and help to ensure the buffering effect of the buffer rod 40 on the silicon wafer when it enters the basket.

[0074] In some alternative embodiments, please refer to Fig.10 , Fig.10 1 is another structural schematic diagram of a flower basket for carrying silicon wafers provided by the utility model. In this embodiment, a plurality of weight-reducing holes 10KL are provided on the first side plate 101 and the second side plate 102 .

[0075] This embodiment explains that a plurality of weight-reducing holes 10KL are provided on the first side plate 101 and the second side plate 102. The weight-reducing holes 10KL can penetrate the thickness of the first side plate 101, and the weight-reducing holes 10KL can penetrate the thickness of the second side plate 102. By providing the weight-reducing holes 10KL, the material used to make the flower basket can be reduced, and the weight of the flower basket 000 can be reduced as a whole, which makes it easier to pull and carry the flower basket and helps reduce the burden of silicon wafer cleaning.

[0076] Optional, such as Fig.10As shown, in this embodiment, the shape of the weight-reducing holes 10KL opened on the first side panel 101 and the second side panel 102 may include any one of a circular hole or a strip hole. Since the limit rod 20, the load-bearing rod 30, the buffer rod 40 and other structures need to be set at different positions between the first side panel 101 and the second side panel 102, weight-reducing holes 10KL with different shapes can be opened in different areas of the first side panel 101 and the second side panel 102. For example, if the space on the first side panel 101 and the second side panel 102 is large, a larger circular hole or strip hole can be designed; if the space on the first side panel 101 and the second side panel 102 is small, a smaller circular hole can be designed, and so on. The surplus space of the first side panel 101 and the second side panel 102 can be utilized as much as possible to open the weight-reducing holes 10KL, so as to ensure that the overall weight of the flower basket 000 is effectively reduced, so as to facilitate the pulling and carrying of the flower basket.

[0077] In some alternative embodiments, please refer to Fig.11 , Fig.11 1 is another structural schematic diagram of a flower basket for carrying silicon wafers provided by the utility model. In this embodiment, at least one positioning groove 10D is respectively formed on the edge of the first side plate 101 and the edge of the second side plate 102 .

[0078] This embodiment explains that the flower basket structure can be provided with positioning grooves 10D at the edge of the first side plate 101 and the edge of the second side plate 102, respectively. This embodiment does not limit the number of positioning grooves 10D, and can be set according to actual use requirements during specific implementation. In this embodiment, the positioning grooves 10D provided at the edge of the first side plate 101 and the edge of the second side plate 102 are used to carry silicon wafers in the flower basket. When the flower basket is placed in the cleaning liquid to process the silicon wafers, the positioning mechanism on the flower basket and the cleaning device can be positioned through the positioning grooves 10D to position and fix the flower basket 000 at the position where it needs to be located, so as to prevent the flower basket 000 from floating in the cleaning liquid and affecting the process of the silicon wafers carried by it. Optionally, in this embodiment, multiple positioning grooves 10D of different sizes can be provided at different positions on the edge of the first side plate 101 and the edge of the second side plate 102, so that different positions of the flower basket can be positioned and adjusted according to different silicon wafer specifications, so as to be suitable for the process of silicon wafers of different specifications.

[0079] It can be seen from the above embodiments that the flower basket for carrying silicon wafers provided by the utility model achieves at least the following beneficial effects:

[0080] The flower basket provided by the utility model can be used as a tool for carrying silicon wafers in the process of silicon wafer production. The flower basket can include a first side plate and a second side plate arranged oppositely, and a plurality of limiting rods between the first side plate and the second side plate. The plurality of limiting rods are fixedly arranged between the first side plate and the second side plate arranged oppositely, thereby forming an overall frame structure of the flower basket. The plurality of limiting rods are used to limit the silicon wafers to prevent the silicon wafers from sliding out of the flower basket after entering the basket. At least two load-bearing rods are included between the two first limiting rods at the bottom of the flower basket, and the two load-bearing rods are arranged at intervals to evenly distribute the weight of the silicon wafers. The bottom of the flower basket also includes at least two buffer rods, which are located on the side of the load-bearing rods facing the top of the flower basket, and can play a buffering role when loading silicon wafers, converting the hard collision between the silicon wafer and the load-bearing rod in the prior art into an elastic collision. After the silicon wafer enters the basket, it contacts the buffer rod, which can reduce the impact force when the silicon wafer contacts the load-bearing rod at the bottom of the flower basket, thereby preventing the silicon wafer from being broken due to a hard collision with the load-bearing rod and the edge of the silicon wafer from being damaged, which is beneficial to improving the processing quality and product yield in the process of silicon wafer manufacturing. There is a gap between the buffer rod and the load-bearing rod, that is, the buffer rod and the load-bearing rod are not set closely. When the silicon wafer is inserted into the flower basket for cleaning, the gap between the buffer rod and the load-bearing rod is convenient for the outflow of the cleaning solution, which is beneficial to reduce the dirt on the load-bearing rod at the bottom of the flower basket. After the silicon wafer enters the basket, it contacts the buffer rod, so it can avoid direct contact between the silicon wafer and the load-bearing rod at the bottom of the flower basket, thereby reducing the risk of silicon wafer contamination.

[0081] Although some specific embodiments of the present invention have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present invention. It should be understood by those skilled in the art that the above embodiments may be modified without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A flower basket for carrying silicon wafers, characterized in that: It comprises a first side plate and a second side plate which are arranged opposite to each other, and a plurality of limit rods are provided between the first side plate and the second side plate; one end of the plurality of limit rods is respectively fixed to the four corners of the first side plate, and the other end of the plurality of limit rods is respectively fixed to the four corners of the second side plate; The plurality of limiting rods at least include two first limiting rods located at the bottom of the flower basket and two second limiting rods located at the top of the flower basket; At least two load-bearing rods are included between the two first limit rods, and the two load-bearing rods are arranged at intervals; The bottom of the flower basket further comprises at least two buffer rods, and the buffer rods are located on one side of the load-bearing rod facing the top of the flower basket; A gap is included between the buffer rod and the load-bearing rod.

2. The flower basket for carrying silicon wafers according to claim 1, characterized in that: Along the direction from the bottom of the flower basket to the top of the flower basket, the buffer rod is located directly above the load-bearing rod.

3. The flower basket for carrying silicon wafers according to claim 2, characterized in that: The distance between the buffer rod and the load-bearing rod is less than or equal to 3 mm.

4. The flower basket for carrying silicon wafers according to claim 2, characterized in that: The distances between the different load-bearing rods and the first limiting rod are equal, and the distances between the different buffer rods and the first limiting rod are equal.

5. The flower basket for carrying silicon wafers according to claim 1, characterized in that: The buffer rod includes a rubber strip.

6. The flower basket for carrying silicon wafers according to claim 1, characterized in that: The buffer rod and the load-bearing rod are both cylindrical, and the outer diameter of the buffer rod is equal to the outer diameter of the load-bearing rod.

7. The flower basket for carrying silicon wafers according to claim 1, characterized in that: The first side plate includes a first card slot, the second side plate includes a second card slot, one end of the buffer rod is fixed to the first side plate through the first card slot, and the other end of the buffer rod is fixed to the second side plate through the second card slot.

8. The flower basket for carrying silicon wafers according to claim 1, characterized in that: A plurality of weight-reducing holes are formed on the first side plate and the second side plate.

9. The flower basket for carrying silicon wafers according to claim 8, characterized in that: The lightening hole includes any one of a circular hole or a bar-shaped hole.

10. The flower basket for carrying silicon wafers according to claim 1, characterized in that: At least one positioning groove is respectively formed at an edge of the first side plate and an edge of the second side plate.

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