Trimming type wafer secondary alignment device

Abstract

The utility model provides an edge cutting type wafer secondary alignment device, which comprises a supporting and assembling component, a transfer bearing component, a wafer limiting component, a transfer bracket component, an edge knocking alignment component and an edge knocking driving component, and is characterized in that the position of the alignment device needs to be calibrated in advance before the alignment device is used, so that the alignment center of the alignment device coincides with the center of an edge cutting detection device; when the supporting base is turned over, the whole alignment device can be carried to be in butt joint with the trimming detection device, at the moment, the eccentric guide wheel drives the edge knocking base arm and the edge knocking cantilever to be away from the trimming type wafer, the trimming part of the trimming type wafer abuts against the trimming catch wheel, and the arc edge part of the trimming type wafer abuts against the arc edge catch wheel; after the eccentric guide wheel continues to rotate, the edge knocking seat arm and the edge knocking cantilever can be pulled by the reset tension spring to be close to the edge cutting type wafer, the edge knocking catch wheel knocks the arc edge portion of the edge cutting type wafer, the circle center of the wafer can be determined, the edge cutting direction is also determined, and a foundation is laid for subsequent wafer detection. And the flatness and warpage detection precision of the wafer is greatly improved.

Description

Technical Field

[0001] The utility model relates to semiconductor production equipment, in particular to a trimming type wafer secondary alignment device. Background Art

[0002] Patent document CN116169078A discloses a trimmed wafer centering and positioning mechanism, which includes two groups of baffle rod assemblies, the baffle rod assemblies include two baffle rods and the spacing between the two baffle rods is greater than the side length of the trimmed edge of the trimmed wafer, the four baffle rods of the two groups of baffle rod assemblies are located at the four corner points of a rectangle, the driving assembly includes two driving ends, which are respectively connected to the two groups of baffle rod assemblies, and the driving assembly is used to drive the two groups of baffle rod assemblies to perform linear motion in opposite directions at the same speed. When the baffle rods reach the positioning position, the driving assembly stops driving, and at least three baffle rods are against the circumferential edge of the trimmed wafer to perform centering and positioning of the trimmed wafer. By setting two groups of baffle rod assemblies and limiting the spacing between the two baffle rods of the baffle rod assemblies to be greater than the side length of the trimmed edge of the trimmed wafer, centering and positioning can be achieved through the linear motion of the two groups of baffle rod assemblies in opposite directions at the same speed. The overall structure is simple and easy to operate. However, this centering and positioning mechanism cannot directly cooperate with the trimming detection device, and a conveying device is required to convey the wafer in the trimming detection device to the centering and positioning mechanism, which makes the equipment cost high and the detection efficiency low. Therefore, it is necessary to optimize its structure to overcome the above defects. Utility Model Content

[0003] The utility model aims to provide a trimming type wafer secondary alignment device to improve.

[0004] The technical solution adopted by the utility model to solve its technical problems is:

[0005] A trimming type wafer secondary alignment device, comprising:

[0006] A support assembly component, which is installed in the wafer detection device through a rotating structure and connected to a flipping drive mechanism, and the flipping drive mechanism drives the support assembly component to flip in the wafer detection device so that it is close to or away from the trimming detection device;

[0007] A transfer bearing assembly, which is mounted on the supporting assembly assembly through an adjustable connection structure, can adjust the mounting position on the supporting assembly assembly, and can be turned over together with the supporting assembly assembly, and has a bearing space inside;

[0008] A wafer limiting assembly, which is installed on the transfer bearing assembly through an adjustable connection structure, can adjust the installation position on the transfer bearing assembly, and can be turned over together with the transfer bearing assembly, which is adapted to the shape of the trimmed wafer and can limit the trimmed wafer in the trimming detection device;

[0009] The transfer support assembly is installed on the support assembly through an adjustable structure and corresponds to the position of the transfer bearing assembly. The transfer support assembly can adjust the installation position on the support assembly and can be turned over together with the support assembly, and has a support space inside;

[0010] The edge knocking alignment component is installed on the transfer support component through a rotating structure and corresponds to the position of the wafer limit component. The edge knocking alignment component can be turned over with the transfer support component and can be deflected on the transfer support component to knock the edge of the trimmed wafer in the trimming detection device so that its center is aligned with the center of the trimming detection device;

[0011] The knocking edge driving assembly is installed on the transfer support assembly and is connected with the knocking edge alignment assembly through a transmission structure. The knocking edge driving assembly drives the knocking edge alignment assembly to operate.

[0012] Specifically, the support assembly includes:

[0013] The support base has a top that is installed in the wafer detection device through a rotating shaft and is connected to a flip motor, and the flip motor drives the support base to flip in the wafer detection device.

[0014] The transfer bearing assembly includes:

[0015] A transfer end plate, which is located below the supporting base, and has an inner connecting section with a longitudinal long hole, which is provided with at least one pair, each of which penetrates through the upper and lower ends of the transfer end plate and extends in the longitudinal direction, and the transfer end plate can be connected to the supporting base by connecting bolts adapted thereto, so that the installation position of the transfer end plate on the supporting base can be adjusted in the longitudinal direction, and the transfer end plate can be turned over together with the supporting base, and an outer connecting section of the transfer end plate extends to the outside of the supporting base, and has a transverse long hole in its interior, which is provided with at least one pair, each of which penetrates through the upper and lower ends of the transfer end plate and extends in the transverse direction;

[0016] The load-bearing suspension plate is located below the adapter end plate, and its inner section is connected to the adapter end plate through connecting bolts adapted to the transverse long holes, so that the installation position of the load-bearing suspension plate on the adapter end plate can be adjusted laterally and can be flipped together with the adapter end plate, and the outer section of the load-bearing suspension plate extends to the outside of the adapter end plate.

[0017] Wafer stop components include:

[0018] A pair of trimming stoppers are provided, each of which is installed on the top of the external section of the supporting suspension plate and extends above the supporting suspension plate. The trimming stoppers can be turned over together with the supporting suspension plate, and the distance between the trimming stoppers is adapted to the trimming length of the trimming wafer;

[0019] A pair of trimming stop wheels are provided, each of which is mounted on the top of a trimming stop column and can rotate on the trimming stop column to block the trimming portion of the trimming wafer;

[0020] The arc edge retaining column is installed on the top of the external connection section of the load-bearing suspension plate and extends above the load-bearing suspension plate. The arc edge retaining column and the cutting edge retaining column are arranged to form a triangular structure;

[0021] The arc edge stop wheel is installed on the top of the arc edge stop column and can rotate on the arc edge stop column. The arc edge stop wheel blocks the arc edge of the trimmed wafer, and the trimmed wafer is limited by the trimmed stop wheel and the arc edge stop wheel together.

[0022] In one embodiment of the utility model, the trimming stopper wheel and the arc edge stopper wheel are respectively implemented by roller bearings.

[0023] The transfer bracket assembly includes:

[0024] The transfer pad is located below the support base and is arranged at both ends of the support base together with the transfer end plates, and is fixedly connected to the support base by connecting bolts;

[0025] A supporting hanging plate, which is located below the transfer pad, and has a transverse waist hole in its inner section. A group of transverse waist holes are provided, and each transverse waist hole passes through the upper and lower ends of the supporting hanging plate and extends in the transverse direction. The supporting hanging plate can be connected to the transfer pad by connecting bolts adapted thereto, so that the supporting hanging plate can be adjusted in the transverse direction along the transfer pad to adjust the distance between the supporting hanging plate and the load-bearing hanging plate. The outer section of the supporting hanging plate extends outward from the transfer pad and corresponds to the position of the outer section of the load-bearing hanging plate;

[0026] The support seat body is located below the support suspension plate and is fixedly connected to the support suspension plate by connecting bolts.

[0027] The knock edge alignment kit includes:

[0028] The knocking seat arm, the middle part of which is installed in the support seat body through a rotating shaft, can be deflected in the support seat body, and its inner end extends toward the inner side of the support seat body to form a transmission end rod, which can be deflected together with the knocking seat arm, and its outer end extends toward the outer side of the support seat body and deflects toward the direction of the bearing suspension plate to form a transfer end rod, which can be deflected together with the knocking seat arm to move away from or close to the support seat body, and an angle is formed between the transfer end rod and the transmission end rod;

[0029] The knocking edge cantilever is located outside the support seat body and extends along the length direction of the transfer end rod. A transfer long hole is provided inside the knocking edge cantilever, and the transfer long hole extends along the length direction of the knocking edge cantilever. A group of transfer holes are provided in the transfer end rod, and the transfer holes are arranged in sequence along the length direction of the transfer end rod and correspond to the position of the transfer long hole. The knocking edge cantilever can be connected to the transfer end rod by matching the connecting bolts adapted thereto with the transfer long hole. The installation position can be adjusted on the transfer end rod, and the cantilever can be deflected together with the transfer end rod.

[0030] The knocking side stop column is installed at the end of the knocking side cantilever and extends above the knocking side cantilever, and can be deflected together with the knocking side cantilever;

[0031] The knocking stop wheel is installed on the top of the knocking stop column. It can deflect with the knocking stop column and rotate on the knocking stop column. When the knocking stop column is close to the support seat, the knocking stop wheel knocks the arc edge of the trimmed wafer to align its center with the center of the trimming detection device.

[0032] In one embodiment of the utility model, the knocking wheel is performed by a roller bearing.

[0033] The knocking edge drive assembly includes:

[0034] A driving wheel disc is installed in the support seat body through a rotating shaft, corresponds to the position of the transmission end rod, is connected to the driving motor, and can rotate in the support seat body;

[0035] The eccentric guide wheel is installed on the edge of the driving wheel disc through a bearing, can rotate with the driving wheel disc, and can rotate on the driving wheel disc, and its outer wall is in contact with the transmission end rod. When the driving wheel disc drives the eccentric guide wheel to approach the transmission end rod, the eccentric guide wheel applies pressure to the transmission end rod, driving the transfer end rod and the edge knocking cantilever to deflect, so that the edge knocking stop column and the edge knocking stop wheel are away from the arc edge of the trimmed wafer;

[0036] A reset tension spring, one end of which is engaged with the edge knocking seat arm, and the other end is engaged with the support seat body. When the driving wheel drives the eccentric guide wheel away from the transmission end rod, the reset spring drives the transfer end rod and the edge knocking cantilever to deflect, so that the edge knocking stop column is close to the arc edge of the trimmed wafer, and the edge knocking stop wheel knocks it so that its center is aligned with the center of the trimming detection device.

[0037] The advantages of the utility model are:

[0038] The alignment device needs to be calibrated in advance before use so that its alignment center coincides with the center of the trimming detection device. When the supporting base is flipped, the entire alignment device can be carried to dock with the trimming detection device. At this time, the eccentric guide wheel drives the edge knocking seat arm and the edge knocking cantilever away from the trimming wafer, so that the trimming portion of the trimming wafer abuts against the trimming stop wheel, and its arc edge portion abuts against the arc edge stop wheel. After the eccentric guide wheel continues to rotate, the edge knocking seat arm and the edge knocking cantilever can be pulled close to the trimming wafer under the pull of the reset tension spring, so that the edge knocking stop wheel knocks on its arc edge portion, so that its center is aligned with the center of the trimming detection device, so that the center of the wafer can be determined, and the trimming direction is also determined, which lays the foundation for further wafer detection in the future and greatly improves the flatness and warping detection accuracy of the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 This is one of the structural schematic diagrams of the trimmed wafer secondary alignment device proposed by the utility model;

[0040] Figure 2 This is the second structural schematic diagram of the alignment device;

[0041] Figure 3 It is a schematic diagram of the structure of the edge knocking alignment component and the edge knocking drive component. DETAILED DESCRIPTION

[0042] In order to make the purpose, technical scheme and advantages of the embodiment of the utility model clearer, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. The components of the embodiment of the utility model generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the utility model claimed for protection, but merely represents the selected embodiment of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the utility model.

[0043] like Figure 1 to Figure 3As shown, the trimming type wafer secondary alignment device proposed by the utility model comprises a supporting assembly component, a transfer bearing component, a wafer limiting component, a transfer support component, a knocking edge alignment component and a knocking edge drive component. The supporting assembly component is installed in the wafer detection equipment through a rotating structure and connected with a flipping drive mechanism. The flipping drive mechanism drives the supporting assembly component to flip in the wafer detection equipment to make it close to or away from the trimming edge detection device. The transfer bearing component is installed on the supporting assembly component through an adjustable connecting structure, the installation position can be adjusted on the supporting assembly component, and it can be flipped together with the supporting assembly component, and a bearing space is provided inside. The wafer limiting component is installed on the transfer bearing component through an adjustable connecting structure, the installation position can be adjusted on the transfer bearing component, and it can be flipped together with the transfer bearing component. It is adapted to the shape of the trimmed wafer and can limit the trimmed wafer in the trimming detection device. The transfer support component is installed on the supporting assembly component through an adjustable structure and corresponds to the position of the transfer bearing component. It can adjust the installation position on the supporting assembly component and can be turned over with the supporting assembly component. It has a supporting space inside. The edge knocking alignment component is installed on the transfer support component through a rotating structure and corresponds to the position of the wafer limiting component. It can be turned over with the transfer support component and can be deflected on the transfer support component to knock the edge of the trimmed wafer in the trimming detection device so that its center is aligned with the center of the trimming detection device. The edge knocking drive component is installed on the transfer support component and is connected with the edge knocking alignment component through a transmission structure. The edge knocking drive component drives the edge knocking alignment component to operate.

[0044] In this embodiment, the support assembly component includes a support base 100, the top of the support base is installed in the wafer detection equipment through a rotating shaft and connected to a flip motor, and the flip motor drives the support base to flip in the wafer detection equipment.

[0045] The transfer bearing assembly includes a transfer end plate 210 and a bearing suspension plate 220. The transfer end plate is located below the supporting base, and its inner section is provided with a longitudinal long hole 211, which is provided with at least one pair of longitudinal long holes, each of which passes through the upper and lower ends of the transfer end plate respectively and extends in the longitudinal direction. The transfer end plate can be connected to the supporting base by connecting bolts adapted thereto, so that the installation position of the transfer end plate can be adjusted longitudinally on the supporting base, and the transfer end plate can be flipped together with the supporting base plate. The outer section of the transfer end plate extends to the outside of the supporting base, and a transverse long hole 212 is provided inside thereof, and the transverse long hole is provided with at least one pair of transverse long holes, each of which passes through the upper and lower ends of the transfer end plate respectively and extends in the transverse direction. The bearing suspension plate is located below the transfer end plate, and its inner section is connected to the transfer end plate by connecting bolts adapted thereto, so that the installation position of the bearing suspension plate can be adjusted transversely on the transfer end plate, and can be flipped together with the transfer end plate, and the outer section of the bearing suspension plate extends to the outside of the transfer end plate.

[0046] The wafer limiting assembly includes a trimming stop column 310, a trimming stop wheel 320, an arc edge stop column 340 and an arc edge stop wheel 350. A pair of trimming stop columns are provided, each of which is respectively installed at the top of the external section of the supporting suspension plate and extends above the supporting suspension plate and can be turned over with the supporting suspension plate. The distance between the trimming stop columns is adapted to the length of the trimming portion of the trimming type wafer. A pair of trimming stop wheels are provided, each of which is respectively installed at the top of the trimming stop column and can be rotated on the trimming stop column. The trimming portion of the trimming type wafer is blocked by the trimming stop wheel. The arc edge stop column is installed at the top of the external section of the supporting suspension plate and extends above the supporting suspension plate. It and the trimming stop column are arranged to form a triangular structure. The arc edge stop wheel is installed at the top of the arc edge stop column and can be rotated on the arc edge stop column. The arc edge stop wheel blocks the arc edge of the trimming type wafer, and the trimming stop wheel and the arc edge stop wheel jointly limit the trimming type wafer.

[0047] In this embodiment, the trimming stopper wheel and the arc edge stopper wheel are respectively implemented by roller bearings.

[0048] The adapter support assembly includes an adapter pad 410, a support suspension plate 420 and a support seat body 430. The adapter pad is located below the support base and is arranged at both ends of the support base with the adapter end plates. It is fixedly connected to the support base by connecting bolts. The support suspension plate is located below the adapter pad, and its inner section is provided with a transverse waist hole. The transverse waist hole is provided in a group. Each transverse waist hole passes through the upper and lower ends of the support suspension plate respectively and extends laterally. The support suspension plate can be connected to the adapter pad by connecting bolts adapted thereto, so that the support suspension plate can be adjusted in the transverse direction on the adapter pad to adjust the distance between the support suspension plate and the load-bearing suspension plate. The outer section of the support suspension plate extends outward from the adapter pad and corresponds to the position of the outer section of the load-bearing suspension plate. The support seat body is located below the support suspension plate and is fixedly connected to the support suspension plate by connecting bolts.

[0049] The knocking alignment assembly includes a knocking seat arm 510, a knocking cantilever arm 520, a knocking stop column 530 and a knocking stop wheel 540. The middle part of the knocking seat arm is installed in the support seat body through a rotating shaft, and can be deflected in the support seat body. Its inner end extends toward the inner side of the support seat body to form a transmission end rod 511, which can be deflected together with the knocking seat arm, and its outer end extends toward the outer side of the support seat body and deflects toward the direction of the bearing suspension plate to form a transfer end rod 512, which can be deflected together with the knocking seat arm to move away from or close to the support seat body, and an angle is formed between the transfer end rod and the transmission end rod. The knocking cantilever arm is located outside the support seat body and extends along the length direction of the transfer end rod. A transfer long hole 521 is opened inside the transfer end rod, and the transfer long hole extends along the length direction of the knocking cantilever arm. A group of transfer holes 513 are provided in the transfer end rod, and the transfer holes are arranged in sequence along the length direction of the transfer end rod and correspond to the position of the transfer long hole. The edge knocking cantilever can be connected to the transfer end rod by matching the connecting bolts with the transfer long hole. The installation position can be adjusted on the transfer end rod, and it can be deflected with the transfer end rod. The edge knocking stop column is installed at the end of the edge knocking cantilever and extends upward from the edge knocking cantilever and can be deflected with the edge knocking cantilever. The edge knocking stop wheel is installed at the top of the edge knocking stop column and can be deflected with the edge knocking stop column and can be rotated on the edge knocking stop column. When the edge knocking stop column is close to the support seat, the edge knocking stop wheel knocks on the arc edge of the trimmed wafer to align its center with the center of the trimming detection device.

[0050] In this embodiment, the knocking wheel is performed by a roller bearing.

[0051] The knocking edge drive assembly includes a driving wheel disc 610, an eccentric guide wheel 620 and a reset tension spring (not shown in the figure). The driving wheel disc is installed in the support seat body through a rotating shaft, which corresponds to the position of the transmission end rod and is connected to the driving motor. It can rotate in the support seat body. The eccentric guide wheel is installed on the edge of the driving wheel disc through a bearing, and can rotate with the driving wheel disc and on the driving wheel disc. Its outer wall is in contact with the transmission end rod. When the driving wheel disc drives the eccentric guide wheel to approach the transmission end rod, the eccentric guide wheel is The guide wheel applies pressure to the transmission end rod, driving the transfer end rod and the knocking cantilever to deflect, so that the knocking stop column and the knocking stop wheel are away from the arc edge of the trimmed wafer, one end of the reset tension spring is engaged with the knocking seat arm, and the other end is engaged with the support seat body. When the driving wheel drives the eccentric guide wheel away from the transmission end rod, the reset spring drives the transfer end rod and the knocking cantilever to deflect, so that the knocking stop column is close to the arc edge of the trimmed wafer, and the knocking stop wheel knocks it so that its center is aligned with the center of the trimming detection device.

[0052] In the description of the present utility model, it should be noted that when terms such as "upper", "lower", "inner", "outer", "left", "right" and the like indicating orientation or positional relationship appear, it should be understood that the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed when in use, or the orientation or positional relationship commonly understood by those skilled in the art, is only for the convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the equipment or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, when terms such as "first" and "second" appear, they are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. In the description of the present utility model, it should also be noted that, unless otherwise clearly specified and limited, terms such as "installation", "setting", and "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two elements. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

Claims

1. A trimmed wafer secondary alignment device, characterized in that: include: A support assembly component, which is installed in the wafer detection device through a rotating structure and connected to a flipping drive mechanism, and the flipping drive mechanism drives the support assembly component to flip in the wafer detection device so that it is close to or away from the trimming detection device; A transfer bearing assembly, which is mounted on the supporting assembly assembly through an adjustable connection structure, can adjust the mounting position on the supporting assembly assembly, and can be turned over together with the supporting assembly assembly, and has a bearing space inside; A wafer limiting assembly, which is installed on the transfer bearing assembly through an adjustable connection structure, can adjust the installation position on the transfer bearing assembly, and can be turned over together with the transfer bearing assembly, which is adapted to the shape of the trimmed wafer and can limit the trimmed wafer in the trimming detection device; The transfer support assembly is installed on the support assembly through an adjustable structure and corresponds to the position of the transfer bearing assembly. The transfer support assembly can adjust the installation position on the support assembly and can be turned over together with the support assembly, and has a support space inside; The edge knocking alignment component is installed on the transfer support component through a rotating structure and corresponds to the position of the wafer limit component. The edge knocking alignment component can be turned over with the transfer support component and can be deflected on the transfer support component to knock the edge of the trimmed wafer in the trimming detection device so that its center is aligned with the center of the trimming detection device; The knocking edge driving assembly is installed on the transfer support assembly and is connected with the knocking edge alignment assembly through a transmission structure. The knocking edge driving assembly drives the knocking edge alignment assembly to operate.

2. The trimmed wafer secondary alignment device according to claim 1, characterized in that: The support assembly includes: A supporting base, the top of which is installed in the wafer detection equipment through a rotating shaft and connected to the flip motor.

3. The trimmed wafer secondary alignment device according to claim 2, characterized in that: The transfer bearing assembly includes: The adapter end plate is located below the supporting base, and its inner section is provided with a longitudinal long hole, and the longitudinal long hole is provided with at least one pair, and each longitudinal long hole passes through the upper and lower ends of the adapter end plate respectively and extends in the longitudinal direction; the outer section of the adapter end plate extends to the outside of the supporting base, and a transverse long hole is provided inside thereof, and the transverse long hole is provided with at least one pair, and each transverse long hole passes through the upper and lower ends of the adapter end plate respectively and extends in the transverse direction; The load-bearing suspension plate is located below the transfer end plate, and its inner connecting section is connected to the transfer end plate through connecting bolts adapted to the transverse long holes, and its outer connecting section extends to the outside of the transfer end plate.

4. The trimmed wafer secondary alignment device according to claim 3, characterized in that: Wafer stop components include: A pair of trimming stoppers are provided, each of which is mounted on the top of the external section of the supporting suspension plate and extends upward from the supporting suspension plate, and the distance between the trimming stoppers is adapted to the trimming length of the trimming wafer; A pair of trimming stop wheels are provided, each of which is mounted on the top of a trimming stop column; The arc edge retaining column is installed on the top of the external connection section of the load-bearing suspension plate and extends above the load-bearing suspension plate. The arc edge retaining column and the cutting edge retaining column are arranged to form a triangular structure; The arc edge stop wheel is installed on the top of the arc edge stop column. The arc edge stop wheel is used to block the arc edge of the trimmed wafer. The trimmed wafer is limited by the trimmed stop wheel and the arc edge stop wheel together.

5. The trimmed wafer secondary alignment device according to claim 4, characterized in that: The transfer bracket assembly includes: The transfer pad is located below the support base and is arranged at both ends of the support base together with the transfer end plates, and is fixedly connected to the support base by connecting bolts; A supporting hanging plate, which is located below the transfer pad, has an inner section with a transverse waist hole, and a group of transverse waist holes are provided, each of which passes through the upper and lower ends of the supporting hanging plate and extends in the transverse direction, and the supporting hanging plate can be connected to the transfer pad by connecting bolts adapted thereto, and the outer section of the supporting hanging plate extends outward from the transfer pad and corresponds to the position of the outer section of the load-bearing hanging plate; The support seat body is located below the support suspension plate and is fixedly connected to the support suspension plate by connecting bolts.

6. The trimmed wafer secondary alignment device according to claim 5, characterized in that: The knock edge alignment kit includes: The knocking seat arm, the middle part of which is installed in the support seat body through a rotating shaft, can be deflected in the support seat body, the inner end of which extends toward the inner side of the support seat body to form a transmission end rod, and the outer end of which extends toward the outer side of the support seat body and deflects toward the direction of the bearing suspension plate to form a transfer end rod, and an angle is formed between the transfer end rod and the transmission end rod; The knocking edge cantilever is located outside the support seat body and extends along the length direction of the transfer end rod. A transfer long hole is opened inside the knocking edge cantilever, and the transfer long hole extends along the length direction of the knocking edge cantilever. A group of transfer holes are opened in the transfer end rod. The transfer holes are arranged in sequence along the length direction of the transfer end rod and correspond to the position of the transfer long hole. The knocking edge cantilever can be connected to the transfer end rod by matching the connecting bolts with the transfer long hole; The knocking side stop column is installed at the end of the knocking side cantilever and extends above the knocking side cantilever, and can be deflected together with the knocking side cantilever; The knocking side stop wheel is installed on the top of the knocking side stop column, can be deflected along with the knocking side stop column, and can be rotated on the knocking side stop column.

7. The trimmed wafer secondary alignment device according to claim 6, characterized in that: The knocking edge drive assembly includes: A driving wheel disc is installed in the support seat body through a rotating shaft, corresponds to the position of the transmission end rod, is connected to the driving motor, and can rotate in the support seat body; An eccentric guide wheel is mounted on the edge of the driving wheel disc through a bearing, can rotate with the driving wheel disc and can rotate on the driving wheel disc, and its outer wall abuts against the transmission end rod; A reset tension spring, one end of which is engaged with the knocking seat arm, and the other end is engaged with the support seat body. When the driving wheel disc drives the eccentric guide wheel away from the transmission end rod, the reset spring drives the transfer end rod and the knocking cantilever to deflect.

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