Lead-out jig for embedded sorting machine of semiconductor equipment

Abstract

The utility model provides a lead-out jig for an embedded sorting machine of semiconductor equipment, which comprises an assembling and positioning assembly, a switching and tightening assembly, a guide bearing assembly, a matching and clamping assembly, a lateral auxiliary supporting assembly and a sliding limiting assembly, and is characterized in that a switching plate and an assembling seat plate are jointed by the lead-out jig and are fixed through tightening; the structure rigidity and stability of the whole jig are enhanced, vibration and deviation are reduced, the leading-out precision of the sorting machine is improved, the guiding sliding grooves of the guiding linear rails provide accurate guiding for movement of the matched clamping assembly, the stability and accuracy of the sorting machine in the moving process are guaranteed, and the sorting machine is convenient to use. Through cooperative use of the inner side supporting plate, the inner side foot plate, the outer side supporting plate and the outer side foot plate, the overall stability of the jig can be enhanced, auxiliary support is provided for the jig, and looseness or displacement of parts caused by vibration or external force is reduced, so that the downtime caused by maintenance and overhaul is shortened, the lead-out precision of the sorting machine is effectively improved, and the production efficiency is improved. And the maintenance and overhaul efficiency is obviously improved.

Description

Technical Field

[0001] The utility model relates to semiconductor production equipment, in particular to a semiconductor equipment embedded sorting machine lead-out fixture. Background Art

[0002] Wafer sorting equipment can realize the functions of wafer loading and unloading, pre-process batching, post-process merging, and inter-process wafer flipping. Through the cooperation of Loadport, robotic arm and pre-aligner, it can realize the sorting operation of wafers of different models, and improve the automation level of semiconductor manufacturing process while ensuring high cleanliness. The three-dimensional warehouse (Stocker) is an automatic storage device in semiconductor factories. It has multi-layer storage space and is designed for semiconductor wafer factories. Its function is to automatically store, extract and transmit wafer boxes of various specifications to realize the flow of wafers between different processes.

[0003] Normally, the wafer cassettes between the Sorter and the Stocker need to be transported by an overhead crane (OHT) or an automatic guided vehicle (AGV). In order to improve the efficiency of storage circulation, the embedded Sorter came into being. Due to the particularity of semiconductors, the production and manufacturing environment requires extremely high cleanliness requirements, not only during the production and manufacturing process, but also during equipment maintenance and overhaul. Therefore, the simple and easy-to-use Sorter lead-out fixture can not only improve the maintenance and overhaul efficiency of the Sorter, but also avoid the generation of particles that cause environmental pollution during the maintenance process.

[0004] For example Figure 1 , Figure 2 The lead-out fixture shown embeds the Loadport on the Sorter directly into the Stocker, and the wafer boxes are directly transported by the Stocker's stacker (Crane), eliminating the need for overhead cranes or automatic guided vehicles, thereby improving storage and circulation efficiency. At the same time, since the wafer boxes are circulated inside the Stocker, the probability of contamination of the wafer boxes is reduced, ensuring high cleanliness requirements. However, this lead-out fixture adopts a combined structure of a circulating chain A + a directional wheel B, which has poor accuracy and requires recalibration of the position after movement. It is also heavy, inconvenient to install, and has high production costs. Therefore, it is necessary to optimize the structure of this lead-out fixture to overcome the above-mentioned defects. Utility Model Content

[0005] The utility model aims to provide a semiconductor device embedded sorting machine lead-out jig to improve the operation accuracy.

[0006] The technical solution adopted by the utility model to solve its technical problems is:

[0007] A semiconductor device embedded sorting machine lead-out fixture, comprising:

[0008] An assembly positioning component, wherein at least one pair of assembly positioning components is provided, each assembly positioning component is respectively assembled on the installation table through a detachable connecting piece, and has a positioning space inside;

[0009] A transition and tightening assembly, wherein at least one pair of the transition and tightening assemblies is provided, and each of the transition and tightening assemblies is respectively engaged with the assembly and positioning assembly to tighten and fix the assembly and positioning assembly;

[0010] A guide bearing assembly, which is provided with at least one pair, each guide bearing assembly is respectively installed on the assembly positioning assembly through a detachable connecting piece, and has a bearing space inside, and the guide bearing assembly is positioned by the assembly positioning assembly;

[0011] A matching clamping assembly, which is provided with at least two groups, each group of matching clamping assemblies is respectively installed on the guide bearing assembly through a sliding structure, and can move on the guide bearing assembly, and the guide bearing assembly guides the movement process of the matching clamping assembly. The sorting machine can be installed on the matching clamping assembly to move with the matching clamping assembly;

[0012] A lateral auxiliary support assembly, wherein at least two groups of lateral auxiliary support assemblies are provided, each group of lateral auxiliary support assemblies is respectively engaged with the assembly positioning assembly and cooperates with the installation table, and the lateral auxiliary support assemblies provide auxiliary support to the assembly positioning assembly;

[0013] The sliding limit assembly is provided with at least two groups, each group of sliding limit assemblies is respectively installed on the assembly positioning assembly, corresponds to the position of the guide bearing assembly, and cooperates with the sorting machine to limit the movement range of the matching clamping assembly and the sorting machine.

[0014] Specifically, the assembly and positioning components include:

[0015] The assembly seat plates are provided with a pair, each assembly seat plate is in a long strip shape, arranged in the transverse direction, and fixed on the installation table by connecting bolts respectively, and the assembly seat plates are parallel to each other.

[0016] The adapter assembly includes:

[0017] A pair of transfer connecting plates are provided, each transfer connecting plate is in the shape of a long strip, arranged horizontally and perpendicular to the assembly seat plate, and its two ends are respectively connected to the inner edge of the assembly seat plate by connecting bolts, and the assembly seat plate is tightly fixed by the transfer connecting plate.

[0018] The guide bearing assembly includes:

[0019] A pair of guide rails are provided, each of which is in the shape of a long strip, parallel to each other, and fixed to the top of the assembly base plate by connecting bolts. The assembly base plate is used to position the guide rails, and a guide slot is provided on the side wall of each guide rail.

[0020] The mating card assembly includes:

[0021] The matching sliders are provided with two groups, each group of matching sliders is respectively engaged with the guide rails and cooperates with the guide slide grooves, and can move with the guide rails. The sorting machine can be installed on the matching sliders and move with the matching sliders.

[0022] The lateral auxiliary support assembly includes:

[0023] Inner support plates, which are provided with two groups, each group of inner support plates is respectively installed on the inner edge of the assembly seat plate through connecting bolts, and are arranged in sequence along the length direction of the assembly seat plate, and extend toward the inner side of the assembly seat plate;

[0024] The inner foot plates are provided with two groups, each group of inner foot plates is respectively located under the inner support plates, and are connected with the inner support plates through adjusting bolts, and are in contact with the mounting table surface, and the inner foot plates support the inner support plates, and the inner support plates provide auxiliary support for the inner edge of the assembly seat plate;

[0025] Outer support plates, which are provided with two groups, each group of outer support plates is respectively installed on the outer edge of the assembly seat plate through connecting bolts, and are arranged in sequence along the length direction of the assembly seat plate, and extend to the outside of the assembly seat plate;

[0026] The outer foot plates are provided with two groups, each group of outer foot plates is located under the outer support plates, connected with the outer support plates through adjusting bolts, and abutted against the installation table surface, the outer foot plates support the inner support plates, and the outer support plates provide auxiliary support to the outer edge of the assembly seat plate.

[0027] The slide limiter assembly includes:

[0028] The limit terminal is provided with two groups, each group of limit terminals is respectively installed at both ends of the assembly base plate and protrudes above the assembly base plate, corresponds to the position of the guide rail, and cooperates with the sorting machine. When the sorting machine moves with the matching slider, its movement range is limited by the limit terminal.

[0029] The advantages of the utility model are:

[0030] The lead-out jig joins the transfer connecting plate with the assembly base plate, and through tight fixation, the structural rigidity and stability of the entire jig are enhanced, which helps to reduce vibration and deviation, thereby improving the lead-out accuracy of the sorting machine. The guide slide of the guide rail provides precise guidance for the movement of the matching engaging components, ensuring the stability and accuracy of the sorting machine during movement. Through the coordinated use of the inner support plate, the inner foot plate, the outer support plate and the outer foot plate, not only the overall stability of the jig is enhanced, but also auxiliary support is provided for it, reducing the loosening or displacement of components caused by vibration or external force, thereby reducing the downtime caused by maintenance and overhaul. Through its precise positioning design, stable structural configuration and convenient maintenance and overhaul methods, the lead-out accuracy of the sorting machine is effectively improved, and the efficiency of maintenance and overhaul is significantly improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a structural schematic diagram of the existing lead-out fixture;

[0032] Figure 2 It is a schematic diagram of the use status of the existing lead-out fixture;

[0033] Figure 3 It is a structural schematic diagram of the lead-out fixture of the semiconductor device embedded sorting machine proposed by the utility model;

[0034] Figure 4 It is a schematic diagram of the use state of the lead-out fixture proposed by the utility model. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical scheme and advantages of the embodiment of the utility model clearer, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. The components of the embodiment of the utility model generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the utility model claimed for protection, but merely represents the selected embodiment of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the utility model.

[0036] like Figure 3 , Figure 4As shown, the semiconductor equipment embedded sorting machine lead-out fixture proposed by the utility model includes an assembly positioning component, a transfer and tightening component, a guide bearing component, a matching clamping component, a lateral auxiliary support component and a sliding limit component. The assembly positioning component is provided with at least one pair, and each assembly positioning component is respectively assembled on the installation table through a detachable connecting piece, and has a positioning space inside. The transfer and tightening component is provided with at least one pair, and each transfer and tightening component is respectively engaged with the assembly positioning component to tighten and fix the assembly positioning component. The guide bearing component is provided with at least one pair, and each guide bearing component is respectively mounted on the assembly positioning component through a detachable connecting piece, and has a bearing space inside. The guide bearing component is positioned by the assembly positioning component, and the matching clamping component is provided with at least one pair. At least two groups of connecting and locking components are provided, and each group of connecting and locking components is respectively installed on the guide bearing component through a sliding structure, and can move on the guide bearing component, and the guiding bearing component guides its movement process. The sorting machine can be installed on the connecting and locking components to move with the connecting and locking components. At least two groups of lateral auxiliary support components are provided, and each group of lateral auxiliary support components is respectively engaged with the assembly positioning component and cooperates with the installation table. The lateral auxiliary support components provide auxiliary support for the assembly positioning component. At least two groups of sliding limit components are provided, and each group of sliding limit components is respectively installed on the assembly positioning component, which corresponds to the position of the guide bearing component and cooperates with the sorting machine, and can limit the movement range of the connecting and locking components and the sorting machine.

[0037] In this embodiment, the assembly positioning component includes an assembly seat plate 100, and a pair of assembly seat plates are provided. Each assembly seat plate is in a long strip shape, arranged in the transverse direction, and fixed to the installation table by connecting bolts. The assembly seat plates are parallel to each other.

[0038] The adapter tightening assembly includes an adapter connecting plate 200, which is provided with a pair. Each adapter connecting plate is in the shape of a long strip, which is arranged in the horizontal direction and is perpendicular to the assembly base plate. Its two ends are respectively connected to the inner edge of the assembly base plate by connecting bolts, and the assembly base plate is tightened and fixed by the adapter connecting plate.

[0039] The guide bearing assembly includes a pair of guide rails 300, each of which is in the shape of a long strip and parallel to each other. The guide rails are fixed to the top of the assembly base plate by connecting bolts. The assembly base plate is used to position the guide rails, and a guide groove is provided on the side wall of each guide rail.

[0040] The matching clamping assembly includes a matching slider 400, and the matching slider is provided with two groups. Each group of matching sliders is respectively clamped on the guide rail and cooperates with the guide slide groove, and can move with the guide rail. The sorting machine can be installed on the matching slider and move with the matching slider.

[0041] The lateral auxiliary support assembly includes an inner support plate 510, an inner foot plate 520, an outer support plate 530 and an outer foot plate 540. The inner support plate is provided with two groups, each group of inner support plates is respectively installed on the inner edge of the assembly seat plate through connecting bolts, and is arranged in sequence along the length direction of the assembly seat plate, and extends to the inner side of the assembly seat plate. The inner foot plate is provided with two groups, each group of inner foot plates is respectively located below the inner support plate, and is connected to the inner support plate through adjusting bolts and abuts against the mounting table, and the inner foot plate supports the inner support plate. The inner edge of the assembly seat plate is supplemented with support by the inner support plate, and two groups of outer support plates are provided. Each group of outer support plates is installed on the outer edge of the assembly seat plate through connecting bolts, and is arranged sequentially along the length direction of the assembly seat plate, extending to the outside of the assembly seat plate. Two groups of outer foot plates are provided, and each group of outer foot plates is located under the outer support plates, which are engaged with the outer support plates through adjusting bolts and abut against the installation table. The inner support plates are supported by the outer foot plates, and the outer support plates provide supplementary support to the outer edge of the assembly seat plate.

[0042] The sliding limit assembly includes a limit end 600, and two groups of limit ends are provided. Each group of limit ends is respectively installed at both ends of the assembly base plate and protrudes above the assembly base plate. It corresponds to the position of the guide rail and cooperates with the sorting machine. When the sorting machine moves with the matching slider, its movement range is limited by the limit end.

[0043] In the description of the present utility model, it should be noted that when terms such as "upper", "lower", "inner", "outer", "left", "right" and the like indicating orientation or positional relationship appear, it should be understood that the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed when in use, or the orientation or positional relationship commonly understood by those skilled in the art, is only for the convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the equipment or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, when terms such as "first" and "second" appear, they are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. In the description of the present utility model, it should also be noted that, unless otherwise clearly specified and limited, terms such as "installation", "setting", and "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two elements. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

Claims

1. A semiconductor device embedded sorting machine lead-out fixture, characterized in that: include: An assembly positioning component, wherein at least one pair of assembly positioning components is provided, each assembly positioning component is respectively assembled on the installation table through a detachable connecting piece, and has a positioning space inside; A transition and tightening assembly, wherein at least one pair of the transition and tightening assemblies is provided, and each of the transition and tightening assemblies is respectively engaged with the assembly and positioning assembly to tighten and fix the assembly and positioning assembly; A guide bearing assembly, which is provided with at least one pair, each guide bearing assembly is respectively installed on the assembly positioning assembly through a detachable connecting piece, and has a bearing space inside, and the guide bearing assembly is positioned by the assembly positioning assembly; A matching clamping assembly, which is provided with at least two groups, each group of matching clamping assemblies is respectively installed on the guide bearing assembly through a sliding structure, and can move on the guide bearing assembly, and the guide bearing assembly guides the movement process of the matching clamping assembly. The sorting machine can be installed on the matching clamping assembly to move with the matching clamping assembly; A lateral auxiliary support assembly, wherein at least two groups of lateral auxiliary support assemblies are provided, each group of lateral auxiliary support assemblies is respectively engaged with the assembly positioning assembly and cooperates with the installation table, and the lateral auxiliary support assemblies provide auxiliary support to the assembly positioning assembly; The sliding limit assembly is provided with at least two groups, each group of sliding limit assemblies is respectively installed on the assembly positioning assembly, corresponds to the position of the guide bearing assembly, and cooperates with the sorting machine to limit the movement range of the matching clamping assembly and the sorting machine.

2. A semiconductor device embedded sorting machine lead-out jig according to claim 1, characterized in that: The assembly positioning components include: The assembly seat plates are provided with a pair, each assembly seat plate is in a long strip shape, arranged in the transverse direction, and fixed on the installation table by connecting bolts respectively, and the assembly seat plates are parallel to each other.

3. A semiconductor device embedded sorting machine lead-out jig according to claim 2, characterized in that: The adapter assembly includes: A pair of transfer connecting plates are provided, each transfer connecting plate is in the shape of a long strip, arranged in the transverse direction and perpendicular to the assembly seat plate, and its two ends are respectively connected to the inner edge of the assembly seat plate by connecting bolts.

4. A semiconductor device embedded sorting machine lead-out jig according to claim 2, characterized in that: The guide bearing assembly includes: A pair of guide rails are provided, each of which is in the shape of a long strip, parallel to each other, and fixed to the top of the assembly base plate by connecting bolts, and a guide slot is provided on the side wall of each guide rail.

5. A semiconductor device embedded sorting machine lead-out jig according to claim 4, characterized in that: The mating card assembly includes: The matching slide block is provided with two groups, and each group of matching slide blocks is respectively engaged with the guide rail and matched with the guide slide groove.

6. A semiconductor device embedded sorting machine lead-out jig according to claim 2, characterized in that: The lateral auxiliary support assembly includes: Inner support plates, which are provided with two groups, each group of inner support plates is respectively installed on the inner edge of the assembly seat plate through connecting bolts, and are arranged in sequence along the length direction of the assembly seat plate, and extend toward the inner side of the assembly seat plate; The inner foot plates are provided with two groups, each group of inner foot plates is respectively located under the inner support plate, and is connected with the inner support plate through adjusting bolts and abuts against the mounting table; Outer support plates, which are provided with two groups, each group of outer support plates is respectively installed on the outer edge of the assembly seat plate through connecting bolts, and are arranged in sequence along the length direction of the assembly seat plate, and extend to the outside of the assembly seat plate; The outer foot plates are provided with two groups, each group of the outer foot plates is located below the outer support plates, is connected with the outer support plates through adjusting bolts, and abuts against the installation table.

7. A semiconductor device embedded sorting machine lead-out jig according to claim 5, characterized in that: The slide limiter assembly includes: The limit end is provided with two groups, each group of limit end is respectively installed at both ends of the assembly base plate and protrudes above the assembly base plate, corresponds to the position of the guide rail, and cooperates with the sorting machine.

Images