Vacuum valve and vacuum device

Abstract

The utility model provides a vacuum valve, which is used to be arranged between a vacuum pump and a vacuum chamber, and the vacuum valve includes: a body, in which a chamber is arranged; an air inlet pipe, a first end of which is connected to the chamber, and a second end of which is connected to the vacuum chamber; a fast exhaust pipe, a first end of which is connected to the chamber, and a second end of which is connected to the vacuum pump; a slow exhaust pipe, a first end of which is connected to the chamber, and a second end of which is connected to the wall of the fast exhaust pipe and connected to the fast exhaust pipe; and a fast exhaust valve, which is used to disconnect the first end of the fast exhaust pipe from the chamber. For the vacuum valve of the utility model, the speed of extracting vacuum can be adjusted more conveniently.

Description

Technical Field

[0001] The utility model relates to the technical field of valves, in particular to a vacuum valve and a vacuum device. Background Art

[0002] In the prior art, in the processing of some workpieces, it is necessary to carry out in a vacuum environment, especially in the photovoltaic industry, the coating process of solar cells is carried out in a vacuum environment, so it is necessary to use a vacuum pipeline system to extract vacuum from the reaction chamber to obtain a reaction chamber that can provide a vacuum processing environment, that is, a vacuum chamber. When the reaction chamber is vacuumed, it is necessary to first use a slow pumping pipeline to vacuum the reaction chamber at a slower speed to avoid the pressure in the reaction chamber from decreasing too quickly. When the gas pressure in the reaction chamber drops too quickly, it will cause damage to the mechanical equipment and various instruments in the reaction chamber. Moreover, when a graphite boat is placed in the reaction chamber, the speed at which the pressure in the reaction chamber drops too quickly will cause the graphite boat to have a boat frame print phenomenon. After the slow pumping pipeline enables the reaction chamber to establish a preliminary vacuum environment, the fast pumping pipeline is used to extract the reaction chamber to facilitate the faster discharge of the remaining gas in the reaction chamber. Therefore, in the process of vacuuming the reaction chamber, two valves, a fast pumping valve and a slow pumping valve, need to be installed, which not only increases the installation space and the number of intermediate connecting ports, but also increases the installation cost and the difficulty of use. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a vacuum valve, which can more conveniently adjust the speed of vacuum extraction.

[0004] The utility model also provides a vacuum device comprising the vacuum valve.

[0005] According to the vacuum valve of the first aspect of the utility model, the vacuum valve is used to be arranged between a vacuum pump and a vacuum chamber, and the vacuum valve includes: a main body, a chamber is arranged in the main body; an air inlet pipe, a first end of the air inlet pipe is connected to the chamber, and a second end of the air inlet pipe is connected to the vacuum chamber; a fast exhaust pipe, a first end of the fast exhaust pipe is connected to the chamber, and a second end of the fast exhaust pipe is connected to the vacuum pump; a slow exhaust pipe, a first end of the slow exhaust pipe is connected to the chamber, and a second end of the slow exhaust pipe is connected to the wall of the fast exhaust pipe and connected to the fast exhaust pipe; a quick exhaust valve, the quick exhaust valve is used to disconnect the first end of the fast exhaust pipe from the chamber.

[0006] The vacuum valve according to the embodiment of the first aspect of the utility model has at least the following beneficial effects: by controlling the switch of the quick-pump valve, the quick-pump valve is closed when the vacuum pumping speed needs to be reduced, so that air can only be pumped out from the slow-pump air outlet pipe, thereby reducing the speed at which the pressure in the vacuum wall drops; when the vacuum pumping speed needs to be increased, the quick-pump valve is opened, so that air can be pumped out from the fast-pump air outlet pipe and the slow-pump air outlet pipe at the same time, thereby speeding up the air exhaust speed.

[0007] According to some embodiments of the present invention, a slow-extraction valve is further included, and the slow-extraction air outlet pipeline is used to disconnect the connection between the first end of the slow-extraction air outlet pipeline and the chamber.

[0008] According to some embodiments of the present utility model, the chamber includes a first cavity and a second cavity, the first cavity and the second cavity are connected, the first end of the fast-exhaust air pipe is connected to the first cavity, the first end of the slow-exhaust air pipe is connected to the second cavity, the fast-exhaust valve is arranged in the first cavity, the slow-exhaust valve is arranged in the second cavity, and the first end of the air inlet pipe is connected to the first cavity.

[0009] According to some embodiments of the present invention, a manual regulating valve is further provided on the second cavity, and the manual regulating valve is used to adjust the size of the caliber of the communication between the slow extraction gas pipeline and the second cavity.

[0010] According to some embodiments of the utility model, the manual regulating valve includes a first baffle, a first connecting rod and a knob, the knob is arranged outside the main body, the first baffle is arranged inside the second cavity, and the first connecting rod is threadedly connected to the main body; the first end of the first connecting rod is connected to the first baffle, and the second end of the first connecting rod is connected to the knob.

[0011] According to some embodiments of the utility model, the slow-pump valve includes a second baffle, a second connecting rod and a first driving device, the second connecting rod is threadedly connected to the body, the first driving device is arranged outside the body and is used to drive the second connecting rod to rotate, and the second baffle is arranged in the second cavity and connected to the second connecting rod.

[0012] According to some embodiments of the utility model, the quick-pull valve includes a third baffle, a third connecting rod and a second driving device, the third connecting rod is threadedly connected to the body, the second driving device is arranged outside the body and is used to drive the third connecting rod to rotate, and the third baffle is arranged in the first cavity and connected to the third connecting rod.

[0013] According to some embodiments of the utility model, the quick-pull valve also includes a sealing sleeve, which is sleeved on the third connecting rod, and the sealing sleeve is elastic in the axial direction of the third connecting rod, one end of the sealing sleeve is sealed connected to the third baffle, and the other end of the sealing sleeve is sealed connected to the inner wall of the first cavity.

[0014] According to some embodiments of the present invention, a negative pressure valve is further included, wherein the negative pressure valve is used to disconnect the second end of the quick-exhaust air pipeline from the vacuum pump, or the negative pressure valve is used to disconnect the air intake pipeline from the chamber.

[0015] According to the vacuum device of the second aspect embodiment of the utility model, it includes the vacuum valve of the first aspect embodiment, the vacuum chamber is connected to the second end of the air inlet pipe, and the vacuum pump is connected to the second end of the quick exhaust pipe.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the structure of the vacuum valve in some embodiments of the utility model;

[0018] Figure 2 It is a cross-sectional schematic diagram of a vacuum valve closing quick-draw valve in some embodiments of the utility model;

[0019] Figure 3 It is a cross-sectional schematic diagram of a vacuum valve opening a quick-draw valve in some embodiments of the utility model;

[0020] Figure 4 It is a cross-sectional schematic diagram of a vacuum valve in some embodiments of the present invention, in which both the fast-pumping valve and the slow-pumping valve are opened.

[0021] Figure Number:

[0022] 1. Main body; 11. Chamber; 111. First cavity; 112. Second cavity; 2. Air inlet pipe; 3. Fast-exhaust pipe; 4. Slow-exhaust pipe; 5. Fast-exhaust valve; 51. Third baffle; 52. Third connecting rod; 53. Second driving device; 54. Sealing sleeve; 6. Slow-exhaust valve; 61. Second baffle; 62. Second connecting rod; 63. First driving device; 7. Manual regulating valve; 71. First baffle; 72. First connecting rod; 73. Knob; 8. Vacuum chamber. DETAILED DESCRIPTION

[0023] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0024] In the description of the present invention, it should be understood that the descriptions involving orientation, such as the orientation or positional relationship indicated as up, down, etc., are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0025] In the description of the present utility model, "a plurality" means more than two. If there is a description of "first" or "second", it is only for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0026] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0027] In the prior art, in order to adjust the speed of vacuum extraction, a small-caliber pneumatic quick-closing valve and a large-caliber pneumatic quick-closing valve are mainly used as the slow-extraction valve and the quick-extraction valve in the vacuum system respectively, and the two pneumatic quick-closing valves are connected in parallel. When connected in parallel, the small-caliber start-up quick-closing valve also needs to be connected through a corrugated pipe, and the corrugations are also easily damaged. In order to adjust the exhaust speed in the slow-extraction valve pipeline, it is necessary to add a manual regulating valve with manually adjustable opening size in the slow-extraction valve pipeline, and a bellows is needed to connect the slow-extraction valve in the bypass and the main pipeline. The need to use multiple valves and bellows not only increases the installation space and the number of intermediate connection interfaces, but also increases the cost.

[0028] The vacuum valve in the first embodiment of the utility model is used to be arranged between the vacuum pump and the vacuum chamber 8, referring to Figure 1 , Figure 2 , Figure 3 and Figure 4, wherein the arrow indicates the exhaust path of the gas when the vacuum is extracted. The vacuum valve includes: a main body 1, an air inlet pipe 2, a fast exhaust pipe 3, a slow exhaust pipe 4 and a fast exhaust valve 5, wherein the main body 1, the air inlet pipe 2, the slow exhaust pipe 4 and the fast exhaust pipe 3 can be manufactured by an integrated molding process or can be fixedly connected by threaded connection. If the manufacturing process is an integrated molding process, the manufacturing cost of the vacuum valve can be lowered, and the vacuum valve can also have better sealing performance. When the main body 1, the air inlet pipe 2, the slow exhaust pipe 4 and the fast exhaust pipe 3 are connected by threaded connection, it can be more convenient to disassemble and repair the vacuum valve in the later stage. The body 1 is provided with a chamber 11; the first end of the air inlet pipe 2 is connected to the chamber 11, and the second end of the air inlet pipe 2 is connected to the vacuum chamber 8; the first end of the fast exhaust pipe 3 is connected to the chamber 11, and the second end of the fast exhaust pipe 3 is connected to the vacuum pump; the first end of the slow exhaust pipe 4 is connected to the chamber 11, and the second end of the slow exhaust pipe 4 is connected to the wall of the fast exhaust pipe 3 and connected to the fast exhaust pipe 3; the fast exhaust valve 5 is used to disconnect the connection between the first end of the fast exhaust pipe 3 and the chamber 11. When the vacuum is extracted, the vacuum is first extracted at a slower speed, and the fast exhaust valve 5 is closed at this time, and the gas in the vacuum chamber 8 is extracted out of the vacuum chamber 8 through the air inlet pipe 2. After the vacuum chamber 8 enters the chamber 11 through the air inlet pipe 2, the gas can be extracted by the vacuum pump through the slow exhaust pipe. The vacuum pump indirectly extracts the gas in the vacuum chamber 8 by generating negative pressure, so that a vacuum reaction environment is formed in the vacuum chamber 8. After the gas in the vacuum chamber 8 is extracted at a relatively slow speed, a vacuum environment is initially formed in the vacuum chamber 8. After the vacuum environment is formed, the quick extraction valve 5 is opened. At this time, the gas is divided into two paths, one path of gas continues to be discharged along the slow extraction gas pipe 4, and the other path of gas is discharged from the opened quick extraction gas pipe 3, which greatly improves the speed of gas discharge from the vacuum chamber 8. It allows the vacuum chamber 8 to form a vacuum processing environment that meets the workpiece processing requirements more quickly. Furthermore, the slow extraction gas pipe 4 uses a pipe with a smaller diameter, and the quick extraction gas pipe 3 uses a pipe with a larger diameter, thereby further improving the speed of forming a vacuum processing environment that meets the workpiece processing requirements in the vacuum chamber 8.

[0029] According to some embodiments of the utility model, the vacuum valve also includes a slow pumping valve 6, and the slow pumping outlet pipe 4 is used to disconnect the first end of the slow pumping outlet pipe 4 from the connection with the chamber 11. Specifically, the slow pumping valve 6 blocks the connection port between the slow pumping outlet pipe 4 and the chamber 11, thereby disconnecting the first end of the slow pumping outlet pipe 4 from the connection with the chamber 11. In the initial stage of the vacuum pump extracting vacuum from the vacuum chamber 8, the slow pumping valve 6 is opened and the fast pumping valve 5 is closed. At this time, the gas can only be discharged along the slow pumping outlet pipe 4 at a slower speed. After the initial vacuum environment is formed in the vacuum chamber 8, the fast pumping valve 5 is opened, and the slow pumping valve 6 can be opened or closed, so that the gas in the vacuum chamber 8 can be discharged in two ways or only discharged along the fast pumping outlet pipe 3. After a vacuum processing environment that meets the workpiece processing requirements is formed in the vacuum chamber 8, both the fast pumping valve 5 and the slow pumping valve 6 are closed, so that the vacuum chamber 8 maintains a better sealing environment.

[0030] According to some embodiments of the utility model, the chamber 11 includes a first cavity 111 and a second cavity 112, the first cavity 111 and the second cavity 112 are connected, the first end of the fast-exhaust gas pipeline 3 is connected to the first cavity 111, the first end of the slow-exhaust gas pipeline 4 is connected to the second cavity 112, the fast-exhaust valve 5 is arranged in the first cavity 111, the slow-exhaust valve 6 is arranged in the second cavity 112, and the first end of the air intake pipeline 2 is connected to the first cavity 111. By dividing the chamber 11 into the first cavity 111 and the second cavity 112, the air intake pipeline 2 allows the gas in the vacuum chamber 8 to enter the first cavity 111 first. At this time, if the fast-exhaust valve 5 is in an open state, the gas can be discharged along the fast-exhaust gas pipeline 3. When the slow pumping valve 6 needs to be closed, the slow pumping valve 6 can choose to close the connection between the second cavity 112 and the slow pumping outlet pipe 4, or choose to close the connection between the first cavity 111 and the second cavity 112. Preferably, the connection between the first cavity 111 and the second cavity 112 is closed by the slow pumping valve 6. In order to avoid interference with the fast pumping valve 5 when the slow pumping valve 6 is set in the first cavity 111, the slow pumping valve 6 is set in the second cavity 112.

[0031] According to some embodiments of the utility model, a manual regulating valve 7 is further provided on the second cavity 112, and the manual regulating valve 7 is used to adjust the size of the caliber of the connection between the slow extraction air pipe 4 and the second cavity 112. Since air can only be extracted at a relatively low speed in the initial stage of vacuum extraction of the vacuum chamber 8, and when only the slow extraction air pipe 4 is used, it is still possible to extract air at a relatively fast speed, so that the pressure in the vacuum chamber 8 drops relatively quickly, thereby causing damage to the mechanical equipment and instruments in the vacuum chamber 8. Therefore, the manual regulating valve 7 is provided, and when the fast extraction valve 5 is closed and only the slow extraction air pipe 4 is used to extract air, the speed of extracting air from the vacuum chamber 8 is controlled by adjusting the manual regulating valve 7, so as to achieve the purpose of a slower pressure drop in the vacuum chamber 8.

[0032] According to some embodiments of the utility model, the manual regulating valve 7 includes a first baffle 71, a first connecting rod 72 and a knob 73, the knob 73 is arranged outside the body 1, the first baffle 71 is arranged inside the second cavity 112, and the first connecting rod 72 is threadedly connected to the body 1; the first end of the first connecting rod 72 is connected to the first baffle 71, and the second end of the first connecting rod 72 is connected to the knob 73. When the speed of the pressure drop in the vacuum chamber 8 is adjusted by the manual regulating valve 7. The knob 73 is manually selected and the first connecting rod is driven to rotate. Since the first connecting rod is threadedly connected to the body 1, when the first connecting rod rotates, it will not only drive the first baffle 71 to rotate, but also drive the first baffle 71 away from or close to the connection port connected between the slow exhaust gas pipeline 4 and the second cavity 112, thereby affecting the speed of the gas passing through the connection port connected between the slow exhaust gas pipeline 4 and the second cavity 112, and thereby adjusting the speed of the pressure drop in the vacuum chamber 8. At the same time, there are many other ways to adjust the size of the connection port connected between the slow exhaust gas pipeline 4 and the second cavity 112. On the other hand, the purpose of adjusting the pressure drop speed in the vacuum chamber 8 can also be achieved by adjusting the size of the connection port between the first cavity 111 and the second cavity 112 .

[0033] According to some embodiments of the utility model, the slow-pumping valve 6 includes a second baffle 61, a second connecting rod 62 and a first drive device 63, the second connecting rod 62 is threadedly connected to the body 1, the first drive device 63 is arranged outside the body 1 and is used to drive the second connecting rod 62 to rotate, and the second baffle 61 is arranged in the second cavity 112 and connected to the second connecting rod 62. When the slow-pumping valve 6 is opened, the second connecting rod 62 is driven to rotate by the first drive device 63, and the second baffle 61 is driven away from the connection between the second chamber 11 and the slow-pumping air outlet pipe 4 so that gas can pass through. When the slow-pumping valve 6 is closed, the second baffle 61 is driven to approach the connection between the slow-pumping air outlet pipe 4 in the same way, so that the second baffle 61 covers the connection between the slow-pumping air outlet pipe 4, and a certain pressure is applied to ensure sealing. The quick-extraction valve 5 includes a third baffle 51, a third connecting rod 52, and a second driving device 53. The third connecting rod 52 is threadedly connected to the body 1. The second driving device 53 is arranged outside the body 1 and is used to drive the third connecting rod 52 to rotate. The third baffle 51 is arranged in the first cavity 111 and is connected to the third connecting rod 52. That is, the quick-extraction valve 5 and the slow-extraction valve 6 can adopt similar structures, but because the opening of the quick-extraction air outlet pipe 3 will be larger than the opening of the slow-extraction air outlet pipe 4, the third baffle 51 with a larger coverage area should be adopted relative to the second baffle 61. The first driving device 63 and the second driving device 53 can be driven by a driving motor or a hydraulic drive or other driving methods.

[0034] According to some embodiments of the utility model, the quick-draw valve 5 also includes a sealing sleeve 54, which is sleeved on the third connecting rod 52, and the sealing sleeve 54 is elastic in the axial direction of the third connecting rod 52. One end of the sealing sleeve 54 is sealed and connected to the third baffle 51, and the other end of the sealing sleeve 54 is sealed and connected to the wall surface inside the first cavity 111. In order to ensure the sealing performance of the third connecting rod 52 and the body 1, the sealing sleeve 54 is sleeved on the outer side of the third connecting rod to avoid the loss of sealing performance between the third connecting rod and the body 1. The loss of sealing performance between the third connecting rod and the body 1 is caused by a variety of reasons, among which, the wear between the third connecting rod and the body 1 after the third connecting rod rotates for a long time is one of the reasons for the loss of sealing performance between the third connecting rod and the body 1. The elasticity of the sealing sleeve 54 in the axial direction of the third connecting rod 52 means that the sealing sleeve 54 can be extended and shortened in the axial direction of the third connecting rod 52. When the third connecting rod 52 presses the third baffle 51 against the inner wall of the chamber 11, the connection port on the chamber 11 connected to the quick-exhaust air pipe 3 is covered and blocked by the third baffle 51. At this time, the sealing sleeve 54 is stretched to the longest state by the third connecting rod 52, and when the third connecting rod 52 drives the third baffle 51 to open the connection port on the chamber 11 connected to the quick-exhaust air pipe 3 and leave the inner wall of the chamber 11, the sealing sleeve 54 shortens following the third connecting rod 52.

[0035] According to some embodiments of the utility model, a negative pressure valve is further included, and the negative pressure valve is used to disconnect the second end of the quick exhaust pipe 3 from the vacuum pump, or the negative pressure valve is used to disconnect the intake pipe 2 from the chamber 11. Before a vacuum environment that meets the requirements is formed in the vacuum chamber 8, the negative pressure valve is opened. After a vacuum environment that meets the requirements is formed in the vacuum chamber 8, the negative pressure valve is closed. The sealing of the vacuum chamber 8 can be better ensured, so that the vacuum chamber 8 can better maintain a vacuum environment that meets the requirements.

[0036] According to the vacuum device of the second embodiment of the utility model, the vacuum valve of the first embodiment is included, the vacuum chamber 8 is connected to the second end of the air inlet pipe 2, and the vacuum pump is connected to the second end of the quick exhaust pipe 3.

[0037] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A vacuum valve, characterized in that: Used to be arranged between a vacuum pump and a vacuum chamber, the vacuum valve comprises: A body, wherein a chamber is disposed in the body; An air intake pipe, wherein a first end of the air intake pipe is in communication with the chamber, and a second end of the air intake pipe is in communication with the vacuum chamber; A quick-exhaust gas pipeline, wherein a first end of the quick-exhaust gas pipeline is connected to the chamber, and a second end of the quick-exhaust gas pipeline is connected to the vacuum pump; A slow air outlet pipe, wherein a first end of the slow air outlet pipe is connected to the chamber, and a second end of the slow air outlet pipe is connected to a wall surface of the fast air outlet pipe and is connected to the fast air outlet pipe; A quick-draw valve is used to disconnect the first end of the quick-draw air outlet pipeline from the chamber.

2. The vacuum valve according to claim 1, characterized in that: A slow-extraction valve is also included, and the slow-extraction air outlet pipeline is used to disconnect the communication between the first end of the slow-extraction air outlet pipeline and the chamber.

3. The vacuum valve according to claim 2, characterized in that: The chamber includes a first cavity and a second cavity, the first cavity and the second cavity are connected, the first end of the fast-exhaust air pipeline is connected to the first cavity, the first end of the slow-exhaust air pipeline is connected to the second cavity, the fast-exhaust valve is arranged in the first cavity, the slow-exhaust valve is arranged in the second cavity, and the first end of the air inlet pipeline is connected to the first cavity.

4. The vacuum valve according to claim 3, characterized in that: The second cavity is also provided with a manual regulating valve, and the manual regulating valve is used to adjust the size of the caliber of the communication between the slow extraction gas pipeline and the second cavity.

5. The vacuum valve according to claim 4, characterized in that: The manual regulating valve includes a first baffle, a first connecting rod and a knob, wherein the knob is arranged outside the body, the first baffle is arranged inside the second cavity, and the first connecting rod is threadedly connected to the body; the first end of the first connecting rod is connected to the first baffle, and the second end of the first connecting rod is connected to the knob.

6. The vacuum valve according to claim 3, characterized in that: The slow-pump valve includes a second baffle, a second connecting rod and a first driving device, wherein the second connecting rod is threadedly connected to the body, the first driving device is arranged outside the body and is used to drive the second connecting rod to rotate, and the second baffle is arranged in the second cavity and connected to the second connecting rod.

7. The vacuum valve according to claim 3, characterized in that: The quick-pull valve includes a third baffle, a third connecting rod and a second driving device, wherein the third connecting rod is threadedly connected to the body, the second driving device is arranged outside the body and is used to drive the third connecting rod to rotate, and the third baffle is arranged in the first cavity and connected to the third connecting rod.

8. The vacuum valve according to claim 7, characterized in that: The quick-pull valve also includes a sealing sleeve, which is sleeved on the third connecting rod. The sealing sleeve is elastic in the axial direction of the third connecting rod. One end of the sealing sleeve is sealed and connected to the third baffle plate, and the other end of the sealing sleeve is sealed and connected to the inner wall of the first cavity.

9. The vacuum valve according to claim 1, characterized in that: It also includes a negative pressure valve, which is used to disconnect the second end of the quick-exhaust gas pipeline from the vacuum pump, or the negative pressure valve is used to disconnect the air inlet pipeline from the chamber.

10. A vacuum device, characterized in that It comprises the vacuum valve according to any one of claims 1 to 9, wherein the vacuum chamber is connected to the second end of the air inlet pipe, and the vacuum pump is connected to the second end of the fast exhaust pipe.

Images