Wafer full-automatic pressure drying oven

Abstract

The utility model belongs to the technical field of semiconductor processing, and relates to a wafer full-automatic pressure oven, which comprises a transfer unit, a pressure control unit and a pressure control unit, the transferring unit is used for placing the picked wafers into the baking unit, and the baking unit is used for baking the wafers; the baking unit comprises a baking supporting part and a bin body, and the bin body is connected to the baking supporting part; a wafer shelf for placing wafers is arranged in the bin body, and a heating unit and a cooling unit are arranged in the bin body; a pressurizing device is arranged on the baking supporting part; the airflow output end of the supercharging device is communicated with the accommodating space of the bin body; the oven further comprises a bin door which is movably connected to the baking supporting part, and the bin door is matched with the open end of the bin body. After the structure is adopted, the beneficial effects of the utility model are that the wafer robot transfer and heating operation mode is adopted, and the pressurization and baking operation is carried out through accurate temperature control, so that the wafer is enhanced and cured.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor processing equipment, in particular to a fully automatic pressure oven for wafers. Background Art

[0002] Silicon is refined from quartz sand. Wafers are purified silicon elements, and these pure silicon are made into silicon crystal rods, which become the material of quartz semiconductors for manufacturing integrated circuits. In the process of wafer production, the wafers often need to be baked. By baking at an appropriate temperature, the photoresist on the wafer will undergo physical or chemical transformation, such as thermal curing.

[0003] Wafer Level Packaging (WLP), which has developed rapidly in recent years, is an advanced packaging technology. Due to its advantages such as small size, excellent electrical performance, good heat dissipation and low cost, it is necessary to develop a fully automatic wafer pressure oven equipment to adapt to this packaging technology. Utility Model Content

[0004] In order to solve the above problems in the prior art, the utility model provides a fully automatic pressure oven for wafers, which uses a wafer robot to transfer and heat the wafers and performs pressurized baking operations through precise temperature control, so that the wafers can be enhanced and solidified.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] As one aspect of the present invention, a fully automatic wafer pressure oven is provided, which comprises:

[0007] The transfer unit picks up the wafer;

[0008] A baking unit, wherein the transfer unit places the picked-up wafer into the baking unit, and the baking unit bakes the wafer;

[0009] The baking unit comprises a baking support and a chamber body, wherein the chamber body is connected to the baking support; one end of the chamber body is an open end, and the other end of the chamber body is a closed end; the chamber body has a storage space, and the storage space is communicated with the open end; a wafer shelf for placing wafers is provided in the chamber body, and a heating unit is provided in the storage space of the chamber body; a cooling unit is provided in the storage space of the chamber body;

[0010] The baking support portion is provided with a pressurizing device; the airflow output end of the pressurizing device is connected to the accommodating space of the bin body;

[0011] It also includes a warehouse door, which is movably connected to the baking support part. The warehouse door cooperates with the opening end of the warehouse body, and the warehouse door is used to open or close the opening end of the warehouse body.

[0012] Optionally, the baking support portion is provided with a rotating power unit, the output end of the rotating power unit is connected to an impeller, and the impeller is located in the accommodating space of the bin body; the impeller is located behind the cooling unit; the heating unit is located behind the wafer rack, and the cooling unit is located behind the heating unit.

[0013] Optionally, a filtering unit is further included, wherein the filtering unit is arranged in the accommodating space of the warehouse body, and the filtering unit is located between the heating unit and the wafer rack.

[0014] Optionally, an automatic locking unit is further included, and the door is locked or released between the automatic locking unit and the opening end of the bin body;

[0015] The automatic locking unit includes a locking ring rotatably connected to the end of the bin body near the opening and a driving unit connected to the bin body, the output end of the driving unit is connected to an active part, and the locking ring is provided with a driven part that matches the active part;

[0016] It also includes a lifting unit connected to the baking support part, the lifting unit is connected to a transverse movement unit, and the warehouse door is connected to the transverse movement unit; after the warehouse door is moved to a preset position by the lifting unit, the warehouse door is connected to the opening end of the warehouse body by the transverse movement unit, and then the driving unit works to drive the active part to rotate, the driven part rotates with the active part, and the locking ring rotates on the warehouse body to cooperate with the warehouse door to achieve locking between the warehouse door and the warehouse body.

[0017] Optionally, a plurality of protrusions are provided at intervals on the edge of the warehouse door, a plurality of grooves are provided at intervals on the top of the inner ring of the locking ring and the protrusions cooperate with the protrusions, a limiting portion is formed between two adjacent grooves, and a matching space for the protrusions to cooperate is provided between the limiting portion and the opening end, and the limiting portion limits the warehouse door to achieve locking of the warehouse body; when the warehouse door is in a loosened state, the protrusions and the grooves are on the same projection plane; when the warehouse door is in a locked state, the protrusions are located between the limiting portion and the opening end.

[0018] Optionally, a roller is rotatably connected to the baking support portion.

[0019] Optionally, the lifting unit includes a lifting power unit connected to the barbecue support part and a screw rod rotatably connected to the baking support part, the output end of the lifting power unit is connected to one end of the screw rod; a screw rod connecting block is threadedly connected to the screw rod, a fixing seat is connected to the screw rod connecting block, a shaft sleeve is connected to the fixing seat, and the shaft sleeve is slidably connected to a guide shaft provided on the baking support part;

[0020] The transverse movement unit includes a transverse movement driving part connected to a fixed seat, a warehouse door connecting plate is connected to the output end of the transverse movement driving part, and the warehouse door is connected to the warehouse door connecting plate; through the operation of the transverse movement driving part, the warehouse door is driven to move closer to or away from the opening end of the warehouse body.

[0021] Optionally, the transfer unit comprises a transfer housing, the transfer housing is provided with at least one loading area, the loading area has a bearing portion,

[0022] A transfer robot arm is slidably connected in the transfer shell; the transfer robot arm moves in the transfer shell; and a suction cup picking portion is provided at the end of the transfer robot arm.

[0023] Optionally, a connecting slider is connected to the bottom of the transfer robot arm, and the connecting slider is slidably connected to a linear guide rail provided on the transfer shell; a power unit is provided on the transfer shell, and a movable end of the power unit is connected to the transfer robot arm.

[0024] Optionally, a spinner is also included, and the spinner is arranged in the transfer shell; the wafer adjusted by the spinner is moved onto the wafer shelf through the cooperation of the transfer robot arm and the suction cup picking part.

[0025] The beneficial effects of the fully automatic wafer pressure oven of the utility model are specifically embodied in the following aspects: 1. The wafer robot is used for transferring and heating operations, and precise temperature control is used to perform pressurized baking operations, so that the wafers can be enhanced and solidified; 2. The impeller design makes the temperature control in the bin more stable; 3. The automatic locking unit design realizes automatic locking or loosening of the bin door, avoiding unnecessary dangers caused by manual opening and closing of the bin door, such as burns; 4. The edge rotation machine design ensures the uniformity of the wafers on the wafer rack, so that the wafers are heated evenly. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The drawings in the specification, which constitute a part of the present application, are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention.

[0027] Figure 1 This is a schematic diagram of the structure of the fully automatic wafer pressure oven of the utility model;

[0028] Figure 2 It is a top view of the structure of the transfer unit of the utility model;

[0029] Figure 3 It is a structural schematic diagram of the transfer robot arm of the utility model;

[0030] Figure 4 It is a structural stereogram of the baking unit of the utility model;

[0031] Figure 5 This is a first structural schematic diagram of the baking unit of the utility model after the bin body is removed;

[0032] Figure 6 for Figure 5 Schematic diagram of the local structure at A in the middle;

[0033] Figure 7 This is a second structural schematic diagram of the baking unit of the utility model after the bin body is removed. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in combination with the specific embodiments of the utility model and the corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0035] A fully automatic wafer pressure oven according to an embodiment of the present application, such as Figure 1 As shown, it comprises: a transfer unit 1 for picking up a wafer 3;

[0036] The baking unit 2 , the transfer unit 1 places the picked-up wafer 3 in the baking unit 2 , and the baking unit 2 bakes the wafer 3 .

[0037] The above solution uses the transfer unit 1 to feed materials, thereby improving work efficiency and reducing the cleanliness problem caused by human factors.

[0038] As a further illustration, in this embodiment, Figure 1-Figure 3 As shown, the transfer unit 1 includes a transfer shell 11, and at least one loading area 12 is provided on the transfer shell 11. The loading area 12 has a bearing portion 13, and the bearing portion 13 is used for placing wafers. The wafers 3 to be baked are placed on the bearing portion 13. As an example, the bearing portion 13 is a bearing table; a transfer window 14 is provided on the transfer shell 11, and the transfer window 14 is communicated with the loading area 12; a scanner for counting is provided on the transfer window 14, which is a common technical means in the field and will not be repeated;

[0039] The transfer housing 11 is slidably connected with a transfer robot 15; the transfer robot 15 is a prior art, and its structure is not described in detail; the transfer robot 15 moves in the transfer housing 11; the end of the transfer robot 15 has a suction cup pickup part 16, and the suction cup pickup part 16 picks up the wafer 3 on the carrier part 13; initially, the wafer 3 is installed in the wafer material box, and the suction cup pickup part 16 takes the material from the wafer material box; it should be noted that the transfer robot 15 performs corresponding operations as needed. The corresponding action drives the suction cup picking part 16 to pick up the wafer 3 or put down the wafer 3. The corresponding actions here include but are not limited to: picking up the wafer 3 from the carrying part 13 and then placing it in the baking unit 2; in addition, the suction cup picking part 16 is a vacuum suction cup, which picks up the wafer 3 by vacuum adsorption. The vacuum suction cup is connected to the vacuum generator. This is the prior art and will not be repeated here. There is at least one transfer robot arm 15. In this embodiment, there are two transfer robot arms 15 to further improve the transfer work efficiency.

[0040] As a further illustration, in this embodiment, Figure 3 As shown, a connecting slider is connected to the bottom of the transfer robot arm 15, and the connecting slider is slidably connected to a linear guide rail 17 provided on the transfer shell 11; a power unit is provided on the transfer shell 11, and a movable end of the power unit is connected to the transfer robot arm 15. When the power unit works, it drives the transfer robot arm 15 to move to a preset position on the linear guide rail 17 and move back and forth between the load-bearing part 13 and the baking unit 2. It should be noted that the power unit includes but is not limited to a device or structure that provides power such as a motor or a cylinder.

[0041] As a specific description, in this embodiment, Figure 2 As shown, it also includes a spinner 4, which is arranged in the transfer shell 11; the spinner 4 is a purchased part, which is a prior art and will not be described in detail; the function of the spinner 4 is to find the center of the wafer 3, so that when the suction cup picking part 16 picks up the wafer 3 and puts it into the baking unit 2, the center of the wafer 3 is in a preset position, so that the baking effect is better; because the center of the wafer 3 on the supporting part 13 deviates from the placement center of the wafer 3 in the baking unit 2, the spinner 4 is used to adjust the center of the wafer 3; the transfer robot arm 15 and the suction cup picking part 16 cooperate to move the wafer 3 adjusted by the spinner 4 to the baking unit 2.

[0042] As a further illustration, in this embodiment, Figure 4-Figure 7 As shown, the baking unit 2 includes a baking support portion 21, which plays a supporting role;

[0043] The warehouse body 22 has a circular cross-sectional shape; the warehouse body 22 is connected to the baking support part 21; one end of the warehouse body 22 is an open end, and the other end of the warehouse body 22 is a closed end; as an example, the warehouse body 22 is arranged horizontally; the warehouse body 22 has a storage space, and the storage space is communicated with the open end; a wafer shelf 23 for placing wafers 3 is provided in the warehouse body 22, and a heating unit 24 is provided in the storage space of the warehouse body 22. It should be noted that the heating unit 24 is an electric heating tube but not limited to an electric heating tube, and the heating unit 24 is electrically connected to the control box; the control box is connected to a power supply; the heating unit 24 is located at At the rear of the wafer shelf 23, the wafer 3 adjusted by the hemming machine 4 is moved onto the wafer shelf 23 through the cooperation of the transfer robot 15 and the suction cup pick-up unit 16. The cooperation between the transfer robot 15 and the suction cup pick-up unit 16 includes but is not limited to: the transfer robot 15 moves to a preset position, and then the suction cup pick-up unit 16 picks up the wafer 3. This is a common technical means in the art and will not be repeated. It should be noted that the rear refers to the side away from the opening end, and vice versa, it is the front. It should be noted that the arrangement or layout of the electric heating tubes of the heating unit 24 is arranged according to the actual warehouse body 22. This is a common technical means for those skilled in the art and will not be repeated.

[0044] A cooling unit 25 is provided in the accommodating space of the warehouse body 22, and the cooling unit 25 is located behind the heating unit 24. As an example, the cooling unit 25 is a water-cooling coil, which is connected to a liquid medium holding device. A cooling liquid such as water is passed through the water-cooling coil for heat exchange between cold and hot, so that the temperature in the warehouse body 22 is reduced. This cooling structure is a common technical means in the field, and the structure is not repeated. In this embodiment, the temperature of the warehouse body 22 is reduced to a preset temperature, so that the temperature in the warehouse body 22 reaches a relatively balanced state. It should be noted that the arrangement or layout of the water-cooling coil of the cooling unit 25 is arranged according to the actual warehouse body 22. This is a common technical means for those skilled in the art, and it is not repeated.

[0045] The door 26 is movably connected to the baking support 21. The door 26 cooperates with the open end of the bin body 22. The door 26 is used to open or close the open end of the bin body 22. For example, when the door is opened, the bin body 22 is in a non-baking state, and when the door is closed, the bin body 22 is in a grilling state.

[0046] The baking support 21 is provided with a rotating power unit 27, which is a rotating motor, which is a prior art and will not be described in detail; the output end of the rotating power unit 27 is connected to an impeller through a coupling (not shown in the figure), and the impeller is located in the accommodating space of the warehouse body 22, and the impeller is located behind the cooling unit 25. Through the operation of the impeller, the cooling group of the cooling unit 25 and the heating group of the heating unit 24 are closely combined, so that the warehouse body 22 is in a relatively constant heat preservation state; it should be noted that the heating unit 24 is heated to the highest temperature, and then the cooling unit 25 starts to work; in this embodiment, the heating unit 24 is heated to 200 degrees, the heating time is 30 minutes, and then the cooling unit 25 starts to work, so that the temperature in the warehouse body 22 reaches 175 degrees, which is at a relatively balanced temperature and maintained for 2-4 hours. It should be noted that the heating time and cooling time are adjusted accordingly for different types of wafers, which is a common technical means in this field;

[0047] like Figure 4 As shown, the baking support 21 is provided with a booster device 28, which is installed in an installation box 281, and the installation box 281 is connected to the baking support 21; the booster device 28 is a pneumatic booster pump, which is a prior art, and the structure is not repeated; the airflow output end of the booster device 28 is connected to the accommodating space of the warehouse body 22, and the purpose of pressurizing in the warehouse body 22 is to remove bubbles, and remove bubbles generated by the water cooling coil, so as not to affect the wafer;

[0048] When the door 26 is sealed from the opening, the booster 28 increases the storage space of the warehouse 22, so that the warehouse 22 is under a certain pressure. For example, the booster 28 increases the pressure value in the warehouse 22 from 0 to 10 kg, and the pressurization time is 8 minutes, and then the pressure is maintained at 8 kg for 2-4 hours. It should be noted that the pressure value and pressurization time are adjusted accordingly for different types of wafers, which is a common technical means in this field. It should be noted that the airflow output end of the booster 28 is connected to the storage space of the warehouse 22 through a pressure pipeline, which is a prior art and will not be described in detail.

[0049] It should be noted that the warehouse body 22 is provided with a temperature display unit such as a thermometer for displaying the temperature value inside the warehouse body 22; the boosting device 28 is provided with a pressure gauge for knowing the pressure changes of the boosting device 28. At the same time, the warehouse body 22 is provided with a pressure display unit such as a pressure gauge for displaying the pressure value inside the warehouse body 22. This is a commonly used technical means in this field and will not be repeated here.

[0050] In this embodiment, when the wafer shelves 23 in the warehouse body 22 are full, the warehouse door 26 and the opening end are sealed; then the boosting device 28 works to make the pressure in the warehouse body 22 reach a preset pressure, the heating unit 24 works, and after the heating unit 24 is heated to the highest temperature, the cooling unit 25 starts working, and then the boosting device 28, the heating unit 24 and the cooling unit 25 continue to work, so that the warehouse body 22 is in a preset heat preservation and pressure maintenance state.

[0051] As a further illustration, in this embodiment, Figure 5 As shown, it also includes a filtering unit 29, which is arranged in the accommodating space of the warehouse body 22. The filtering unit 29 is a filter net, which is located between the heating unit 24 and the wafer rack 23 and is used to remove impurities generated during the heating process to avoid the influence of impurities on the wafer.

[0052] As a specific description, in this embodiment, Figure 4 and Figure 6 As shown, it also includes an automatic locking unit 5, and the door 26 is locked or released between the automatic locking unit 5 and the open end of the warehouse body 22, so that the door 26 is automatically locked or released.

[0053] As a further illustration, in this embodiment, Figure 4 and Figure 6 As shown, the automatic locking unit 5 includes a locking ring 51 rotatably connected to the bin body 22 near the opening end. It should be noted that the locking ring 51 and the opening end are also in a sealed fit during the rotation process; in order to make the locking ring 51 move more smoothly, a roller 221 is rotatably connected to the baking support 21, and the roller 221 rolls with the outer wall of the locking ring 51;

[0054] It also includes a driving unit 52 connected to the warehouse body 22. The driving unit 52 is a rotating motor, but is not limited to a rotating motor. Any mechanism that can achieve torque output is acceptable. The output end of the driving unit 52 is connected to an active part 53. The locking ring 51 is provided with a driven part 54 that matches the active part 53. As an example, the active part 53 is a driving gear, and the driven part 54 is a driven gear meshing with the driving gear. It should be noted that the active part 53 and the driven part 54 are not limited to the gear matching structure. When the driving unit 52 works, it drives the active part 53 to rotate, and the driven part 54 rotates following the active part 53, thereby realizing the rotation of the locking ring 51 on the warehouse body 22.

[0055] like Figure 7As shown, it also includes a lifting unit 55 connected to the baking support part 21, and the lifting unit 55 is connected to a transverse movement unit 56, and the warehouse door 26 is connected to the transverse movement unit 56; after the warehouse door 26 is moved to a preset position by the lifting unit 55, the warehouse door 26 is connected to the open end of the warehouse body 22 by the transverse movement unit 56, and then the driving unit 52 works to drive the active part 53 to rotate, and the driven part 54 rotates with the active part 53, and the locking ring 51 rotates on the warehouse body 22 to cooperate with the warehouse door 26, so as to realize the locking between the warehouse door 26 and the warehouse body 22, and the opening process of the warehouse door 26 is reversed.

[0056] As a further illustration, in this embodiment, Figure 6 As shown, a plurality of protrusions 261 are provided at intervals on the edge of the door 26, a plurality of grooves 511 matching with the protrusions 261 are provided at intervals on the top of the inner ring of the locking ring 51, a limiting portion 512 is formed between two adjacent grooves 511, and a matching space for the protrusions 261 to match is provided between the limiting portion 512 and the opening end. The limiting portion 512 limits the door 26 so that the door 26 matches with the opening end to achieve locking of the warehouse body 22; when the door 26 is in a loosened state, the protrusions 261 and the grooves 511 are on the same projection plane; when the door 26 is in a locked state, the protrusions 261 are located between the limiting portion 512 and the opening end.

[0057] As a further illustration, in this embodiment, Figure 7As shown, the lifting unit 55 includes a lifting power unit 551 connected to the barbecue support part 21 and a screw rod 552 rotatably connected to the baking support part 21, the lifting power unit 551 is a lifting motor or a lifting cylinder, but is not limited to the lifting motor or the lifting cylinder; the output end of the lifting power unit 551 is connected to one end of the screw rod 552; in order to facilitate installation and speed regulation, it also includes a reducer 553, the reducer 553 is connected to the barbecue support part 21, the output end of the lifting power unit 551 is connected to the input end of the reducer 553, and the output end of the reducer 553 is connected to one end of the screw rod 552; it should be noted that the reducer 553 is a prior art and will not be repeated; the screw rod 55 2 is threadedly connected with a screw connecting block, and the screw connecting block is connected with a fixed seat 555; it should be noted that in order to make the warehouse door 26 run smoothly, the screw rods 552 are divided into two groups, and the two groups of screw rods 552 are symmetrically arranged, each screw rod 552 is connected with a screw connecting block, and each screw connecting block is connected with a fixed seat 555, and the two screw rods 552 are linked by a screw lifter, which is a common technical means in this field and will not be repeated; in order to make the fixed seat 555 run more smoothly, the fixed seat 555 is connected with a shaft sleeve 556, and the shaft sleeve 556 is slidably connected to a guide shaft 557 provided on the baking support part 21, and the cooperation between the shaft sleeve 556 and the guide shaft 557 makes the fixed seat 555 run more stably.

[0058] As a further illustration, in this embodiment, Figure 7 As shown, the transverse movement unit 56 includes a transverse movement driving part 561 connected to the fixed seat 555, and the transverse movement driving part 561 is a cylinder or a motor, but is not limited to a cylinder or a motor, and a mechanism that can generate torque will suffice; a warehouse door connecting plate 562 is connected to the output end of the transverse movement driving part 561, and the warehouse door 26 is connected to the warehouse door connecting plate 562; through the operation of the transverse movement driving part 561, the warehouse door 26 is driven to move closer to or away from the opening end of the warehouse body 22; it should be noted that in order to ensure the stability of the warehouse door 26, each fixed seat 555 is respectively connected to a transverse movement driving part 561, and a warehouse door connecting plate 562 is connected between the output ends of the two transverse movement driving parts 561; in order to make the warehouse door connecting plate 562 run smoothly, the fixed seat 555 and the warehouse door connecting plate 562 are connected through a slide rail and a slider assembly.

[0059] It should be noted that the barbecue support part 21 is also provided with an alarm warning light and / or an emergency stop switch, the alarm warning light is connected to the control box, and / or the emergency stop switch is connected to the control box for emergency use, which is a commonly used technical means in this field and will not be repeated here.

[0060] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0061] Unless otherwise specifically stated, the relative arrangement, numerical expressions and numerical values ​​of the parts and steps set forth in these embodiments do not limit the scope of the present application. Meanwhile, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, methods and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but in appropriate cases, the technology, methods and equipment should be considered as a part of the specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, and therefore, once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0062] In the description of the present application, it should be understood that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction, and therefore cannot be understood as limiting the scope of protection of the present application; the directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0063] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" may include both "above" and "below". The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0064] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of this application.

[0065] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0066] The above description is only a preferred embodiment of the present invention. All equivalent changes and modifications made according to the scope of the patent application of the present invention should fall within the scope of the present invention.

Claims

1. A fully automatic wafer pressure oven, characterized in that: It includes: The transfer unit picks up the wafer; A baking unit, wherein the transfer unit places the picked-up wafer into the baking unit, and the baking unit bakes the wafer; The baking unit comprises a baking support and a chamber body, wherein the chamber body is connected to the baking support; one end of the chamber body is an open end, and the other end of the chamber body is a closed end; the chamber body has a storage space, and the storage space is communicated with the open end; a wafer shelf for placing wafers is provided in the chamber body, and a heating unit is provided in the storage space of the chamber body; a cooling unit is provided in the storage space of the chamber body; The baking support portion is provided with a pressurizing device; the airflow output end of the pressurizing device is connected to the accommodating space of the bin body; It also includes a warehouse door, which is movably connected to the baking support part, and the warehouse door is matched with the opening end of the warehouse body.

2. The fully automatic wafer pressure oven according to claim 1, characterized in that: The baking support part is provided with a rotating power unit, the output end of the rotating power unit is connected to an impeller, and the impeller is located in the accommodating space of the warehouse body; the impeller is located behind the cooling unit; the heating unit is located behind the wafer rack, and the cooling unit is located behind the heating unit.

3. The fully automatic wafer pressure oven according to claim 1, characterized in that: It also includes a filtering unit, which is arranged in the accommodating space of the warehouse body and located between the heating unit and the wafer rack.

4. The fully automatic wafer pressure oven according to claim 1, characterized in that: It also includes an automatic locking unit, and the door is locked or released between the automatic locking unit and the open end of the bin body; The automatic locking unit includes a locking ring rotatably connected to the end of the bin body near the opening and a driving unit connected to the bin body, the output end of the driving unit is connected to an active part, and the locking ring is provided with a driven part that matches the active part; It also includes a lifting unit connected to the baking support part, the lifting unit is connected to a transverse movement unit, and the warehouse door is connected to the transverse movement unit; after the warehouse door is moved to a preset position by the lifting unit, the warehouse door is connected to the open end of the warehouse body by the transverse movement unit.

5. The fully automatic wafer pressure oven according to claim 4, characterized in that: A plurality of protrusions are provided at intervals on the edge of the door, a plurality of grooves are provided at intervals on the top of the inner ring of the locking ring to match the protrusions, a limiting portion is formed between two adjacent grooves, a matching space for the protrusions to match is provided between the limiting portion and the opening end, the limiting portion limits the door to achieve locking of the warehouse body; when the door is in a loosened state, the protrusions and the grooves are on the same projection plane; when the door is in a locked state, the protrusions are located between the limiting portion and the opening end.

6. The fully automatic wafer pressure oven according to claim 4, characterized in that: The baking support part is rotatably connected with a roller.

7. The fully automatic wafer pressure oven according to claim 4, characterized in that: The lifting unit comprises a lifting power part connected to the barbecue support part and a screw rod rotatably connected to the baking support part, wherein the output end of the lifting power part is connected to one end of the screw rod; a screw rod connecting block is threadedly connected to the screw rod, a fixing seat is connected to the screw rod connecting block, a shaft sleeve is connected to the fixing seat, and the shaft sleeve is slidably connected to the guide shaft arranged on the baking support part; The transverse movement unit includes a transverse movement driving part connected to a fixed seat, an output end of the transverse movement driving part is connected to a warehouse door connecting plate, and the warehouse door is connected to the warehouse door connecting plate.

8. The fully automatic wafer pressure oven according to any one of claims 1 to 7, characterized in that: The transfer unit comprises a transfer housing, the transfer housing is provided with at least one loading area, and the loading area has a bearing portion. A transfer robot arm is slidably connected in the transfer shell; the transfer robot arm moves in the transfer shell; and a suction cup picking portion is provided at the end of the transfer robot arm.

9. The fully automatic wafer pressure oven according to claim 8, characterized in that: The bottom of the transfer robot arm is connected with a connecting slide block, and the connecting slide block is slidably connected with a linear guide rail arranged on the transfer shell; the transfer shell is provided with a power unit, and the movable end of the power unit is connected with the transfer robot arm.

10. The fully automatic wafer pressure oven according to claim 8, characterized in that: It also includes a hemming machine, which is arranged in the transfer shell.

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