Baking device for semiconductor production

Abstract

The utility model discloses a baking device for semiconductor production, which relates to the technical field of semiconductors and comprises a baking box shell and mounting frames mounted at four corners in the shell, a bearing plate is mounted at the bottoms of the mounting frames together, sliding wheels are symmetrically mounted on two sides of the upper part of the bearing plate, and a tray is arranged at the upper parts of the two sliding wheels together. A mounting plate is mounted on the inner side wall of the shell, an adjusting assembly is arranged between the mounting plate and the tray, the adjusting assembly is used for fastening the position of the tray in the vertical direction, and a fastening clamp is arranged in the tray. According to the baking device, the trays are arranged on the upper portions of the two sliding wheels, the trays can be easily pushed into the baking cavity through a cart, the flexibility of the trays in the baking box is improved when the trays are placed, the adjusting assemblies drive the multiple trays to move upwards at equal intervals when the fastening clamps are baked through the arranged adjusting assemblies, and therefore the baking efficiency is improved. And therefore, the multiple trays are separated, and the baking effect of the fastening clamp is further improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a baking device for semiconductor production. Background Art

[0002] Semiconductors refer to materials with electrical conductivity between conductors and insulators at room temperature. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields. For example, diodes are devices made of semiconductors. Whether from the perspective of science and technology or economic development, the importance of semiconductors is enormous. Semiconductor chips need to be cleaned and cooled after wiring. After cleaning, there is a lot of water on the semiconductor plate, so the semiconductor sheet needs to be baked.

[0003] According to the Chinese patent announcement number: CN220818284U, a uniformly heated oven is disclosed, including an oven, a door is rotatably installed on the front side of the oven, a temperature control switch and a timer switch are installed on the left side of the oven, a first motor and a second motor are fixedly installed on both sides of the oven, a transmission mechanism is arranged between the first motor and the second motor, and a plurality of placement mechanisms are installed on the transmission mechanism. Through the transmission mechanism, the multi-directional simultaneous rotation function of the placement box is realized. Compared with the traditional single-axis steering, the oven is heated more evenly when drying the items and the drying rate is higher. However, when using the above device, it is inconvenient to put the tray with the fastening clip into the oven. The process of putting the tray into the oven is relatively laborious, and it is also inconvenient to lift and lower multiple stacked trays during use, so that the tray at the bottom is heated unevenly, affecting the heating effect of the fastening clip inside the tray.

[0004] Therefore, when using the above device, it is inconvenient to put the tray with the fastening clip into the oven and it is inconvenient to lift and lower a plurality of stacked trays, thereby affecting the heating effect of the fastening clip inside the tray during use. Utility Model Content

[0005] In order to achieve the above object, the utility model is implemented through the following technical solutions:

[0006] A baking device for semiconductor production comprises a baking box shell and a mounting frame installed at the four corners inside the shell, a bearing plate is commonly installed at the bottom of the mounting frame, sliding wheels are symmetrically installed on both sides of the upper part of the bearing plate, a tray is commonly arranged on the upper part of the two sliding wheels, a mounting plate is installed on the inner side wall of the shell, an adjustment component is arranged between the mounting plate and the tray, the adjustment component is used to fasten the tray in the vertical direction, and a fastening clamp is arranged inside the tray.

[0007] More preferably, the adjustment component comprises:

[0008] There are multiple electric cylinders, which are symmetrically fixed at both ends of the upper and lower sides of the mounting plate at equal intervals.

[0009] The movable plate is fixedly connected to the power output ends of a plurality of electric cylinders close to the upper part of the mounting plate.

[0010] The driving motor is fixedly connected to the middle position of the bottom of the movable plate.

[0011] The lead screw is symmetrically rotatably installed at the two ends of the bottom of the movable plate, and the power output end of the driving motor is connected with the two lead screw belts.

[0012] Further preferably, the upper parts of the two screw rods and the power output end of the drive motor are both provided with a slot adapted to the belt.

[0013] More preferably, the adjustment component further comprises:

[0014] There are multiple sliding blocks, which are slidably installed on the screw rod at equal intervals.

[0015] The fastening plate is fixedly connected to two sliding blocks at the same level, and the fastening plate is clamped on the tray.

[0016] Further preferably, threads are provided on the screw rod near the sliding block, and the pitches of the multiple threads are the same.

[0017] Compared with the prior art, the utility model has the following advantages: by arranging a tray on the upper part of the two sliding wheels, it is convenient to push the tray into the baking chamber easily by a cart, thereby improving the flexibility of the tray in the baking box when placing it; by arranging an adjustment component, when the fastening clip is baked, the adjustment component drives multiple trays to move up at equal intervals, thereby separating the multiple trays, and further improving the baking effect of the fastening clip. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of this embodiment;

[0019] Figure 2 Schematic diagram of the structure of the regulating component of this embodiment.

[0020] Figure numerals: 1. Mounting frame; 2. Mounting plate; 3. Adjustment assembly; 31. Electric cylinder; 32. Movable plate; 33. Driving motor; 34. Screw rod; 35. Sliding block; 36. Fastening plate; 4. Loading plate; 5. Sliding wheel; 6. Tray. DETAILED DESCRIPTION

[0021] A uniformly heated oven disclosed in the prior art comprises an oven, a door is rotatably installed on the front side of the oven, a temperature control switch and a timer switch are installed on the left side of the oven, a first motor and a second motor are fixedly installed on both sides of the oven, a transmission mechanism is arranged between the first motor and the second motor, and a plurality of placement mechanisms are installed on the transmission mechanism. The transmission mechanism is arranged to realize the multi-directional simultaneous rotation function of the placement box, and compared with the traditional single-axis steering, the oven is heated more evenly when drying items, and the drying rate is higher. However, when using the above device, it is inconvenient to put the tray with the fastening clip into the oven, and the process of putting the tray into the oven is relatively laborious, and it is also inconvenient to lift and lower multiple stacked trays during use, so that the tray at the bottom is heated unevenly, affecting the heating effect of the fastening clip inside the tray.

[0022] Therefore, when using the above device, it is inconvenient to put the tray with the fastening clip into the oven and it is inconvenient to lift and lower a plurality of stacked trays, thereby affecting the heating effect of the fastening clip inside the tray during use.

[0023] In response to the above technical problems, this application has made the following designs and ideas: In order to solve the problems existing in the prior art, it is envisaged that a certain auxiliary mechanism and a lifting and lowering adjustment mechanism can have a better effect of adjusting the lifting and lowering of the tray than the transmission mechanism in the prior art, so as to achieve the purpose of baking the fastening clips in the bottom tray.

[0024] A baking device for semiconductor production, such as Figure 1 As shown, it includes a baking oven shell (not shown in the figure) and a mounting frame 1 installed at the four corners inside the shell, a supporting plate 4 is commonly installed at the bottom of the mounting frame 1, sliding wheels 5 are symmetrically installed on both sides of the upper part of the supporting plate 4, and a tray 6 is commonly arranged on the upper part of the two sliding wheels 5, a mounting plate 2 is installed on the inner side wall of the shell, an adjusting component 3 is arranged between the mounting plate 2 and the tray 6, and the adjusting component 3 is used to fasten the tray 6 in the vertical direction, and a fastening clamp 7 is arranged in the tray 6.

[0025] By arranging the tray 6 on the upper part of the two sliding wheels 5, it is convenient to push the tray 6 into the baking chamber easily by a cart, thereby improving the flexibility of the tray 6 in the baking box when it is placed; by the arranged adjustment component 3, when the fastening clamp 7 is baked, the adjustment component 3 drives the multiple trays 6 to move upward at equal intervals, thereby separating the multiple trays 6, further improving the baking effect of the fastening clamp 7.

[0026] Specifically, Figure 1 and Figure 2 As shown, the adjustment component 3 includes:

[0027] There are multiple electric cylinders 31 , which are symmetrically fixed at both ends of the upper and lower sides of the mounting plate 2 at equal intervals.

[0028] The movable plate 32 is fixedly connected to the power output ends of a plurality of electric cylinders 31 near the upper portion of the mounting plate 2 . Furthermore, the electric cylinders 31 drive the movable plate 32 to move.

[0029] The driving motor 33 is fixedly connected to the middle position of the bottom of the movable plate 32 . Furthermore, the driving motor 33 is externally connected to a power source, and a protective shell is installed on the mounting plate 2 near the driving motor 33 .

[0030] The screw rods 34 are symmetrically rotatably mounted at the two ends of the bottom of the movable plate 32 , and the power output end of the driving motor 33 is connected to the two screw rods 34 with belts.

[0031] Furthermore, when the electric cylinder 31 drives the driving motor 33 and the screw rod 34 to move to a suitable position through the movable plate 32 , the driving motor 33 is started, and the driving motor 33 drives the two screw rods 34 to rotate.

[0032] Specifically, the upper parts of the two screw rods 34 and the power output end of the drive motor 33 are both provided with slots adapted to the belt, thereby improving the stability of the belt connection between the drive motor 33 and the two screw rods 34 .

[0033] Specifically, Figure 1 and Figure 2 As shown, the adjustment component 3 also includes:

[0034] There are multiple sliding blocks 35, which are slidably mounted on the screw rod 34 at equal intervals. Furthermore, the screw rod 34 is provided with threads, and the inner side wall of the sliding block 35 is provided with reverse threads that match the threads.

[0035] The fastening plate 36 is fixedly connected to two sliding blocks 35 at the same level, and the fastening plate 36 is clamped on the tray 6. Specifically, the tray 6 is provided with openings around it, and the fastening plate 36 is clamped in the openings.

[0036] Specifically, Figure 2 As shown, threads are provided on the screw rod 34 near the sliding block 35, and the pitches of the multiple threads are the same. When the two screw rods 34 rotate in the same direction, the multiple sliding blocks 35 move the same distance on the screw rod 34, further improving the stability of the fastening plate 36 driving the tray 6 to move.

[0037] How it works

[0038] When in use, the trays 6 equipped with the fastening clips 7 are stacked in the installation frame 1 in sequence, and the bottom tray 6 is placed on the upper part of the two sliding wheels 5. At this time, the electric cylinders 31 on both sides can drive the driving motor 33 and the screw rod 34 to move relative to each other through the movable plate 32, and then the fastening plates 36 on both sides are clamped on the tray 6. At this time, the oven is started, and the driving motor 33 is started at the same time. The driving motor 33 drives the two screw rods 34 to rotate in the same direction, and multiple sliding blocks 35 move on the screw rod 34, and then multiple sliding blocks 35 drive the tray 6 to move up through the fastening plate 36.

[0039] This specific embodiment is merely an explanation of the utility model, and it is not a limitation of the utility model. After reading this specification, those skilled in the art can make non-creative modifications to the embodiment as needed, but as long as it is within the protection scope of the utility model, it is protected by the patent law.

Claims

1. A baking device for semiconductor production, comprising a baking oven shell and a mounting frame (1) mounted at four corners of the shell, characterized in that: A bearing plate (4) is commonly installed at the bottom of the mounting frame (1), sliding wheels (5) are symmetrically installed on both sides of the upper part of the bearing plate (4), and a tray (6) is commonly arranged on the upper part of the two sliding wheels (5). A mounting plate (2) is installed on the inner side wall of the shell, and an adjustment component (3) is arranged between the mounting plate (2) and the tray (6). The adjustment component (3) is used to fasten the tray (6) in a vertical position, and a fastening clamp (7) is arranged inside the tray (6).

2. The semiconductor production baking device according to claim 1, characterized in that: The regulating component (3) comprises: There are multiple electric cylinders (31) which are symmetrically fixed at both ends of the upper and lower sides of the mounting plate (2) at equal intervals; A movable plate (32) fixedly connected to the power output ends of the plurality of electric cylinders (31) near the upper portion of the mounting plate (2); A driving motor (33) is fixedly connected to the middle position of the bottom of the movable plate (32); The screw rod (34) is symmetrically rotatably mounted at the two ends of the bottom of the movable plate (32), and the power output end of the driving motor (33) is connected to the two screw rods (34) by belts.

3. The semiconductor production baking device according to claim 2, characterized in that: The upper parts of the two screw rods (34) and the power output end of the drive motor (33) are both provided with a slot adapted to the belt.

4. The semiconductor production baking device according to claim 2, characterized in that: The regulating component (3) further comprises: A plurality of sliding blocks (35) are slidably mounted on the screw rod (34) at equal intervals; The fastening plate (36) is fixedly connected to two sliding blocks (35) at the same level, and the fastening plate (36) is clamped on the tray (6).

5. The baking device for semiconductor production according to claim 4, characterized in that: The screw rod (34) is provided with threads at positions close to the sliding block (35), and the pitches of the multiple threads are the same.

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