A monitoring device for the growth diameter of cylindrical quartz ingot

Abstract

The utility model provides a monitoring device for the growth diameter of a columnar quartz ingot, and belongs to the technical field of quartz glass preparation. The monitoring device comprises a weighing component, a height measuring component, a PLC controller and a display. The weighing component is arranged on a base rod for carrying the quartz ingot in a deposition furnace. The height measuring component is arranged near the base rod for carrying the quartz ingot in the deposition furnace. The PLC controller receives the real-time weight of the quartz ingot measured by the weighing component and the real-time weight of the quartz ingot measured by the height measuring component, and calculates the real-time growth diameter of the quartz ingot. The display is used to display the real-time weight of the quartz ingot measured by the weighing component, the real-time weight of the quartz ingot measured by the height measuring component, and the real-time growth diameter of the quartz ingot calculated by the PLC controller. In the utility model, since an indirect measurement method is adopted, the high temperature environment in the deposition furnace is avoided, and the operation is easy to implement.

Description

Technical Field

[0001] The utility model belongs to the technical field of quartz glass preparation, and in particular relates to a monitoring device for the growth diameter of a columnar quartz ingot. Background Art

[0002] Quartz glass has excellent physical and chemical properties and is known as the "King of Glass". It is an irreplaceable basic raw material in the development of national strategic industries and pillar industries. For example, it is used as an important photomask substrate and quartz wafer in the production process of IC chips and flat panel displays in the electronic information and semiconductor industries.

[0003] The existing quartz glass preparation process is mostly completed in equipment such as deposition furnaces. For example, a Chinese utility model patent (name: "A manufacturing device for quartz ingot", publication number: CN216513461U, publication date: 2022-05-13) discloses a manufacturing device for quartz ingot, including: a furnace, a target holder, a bottom rod, a fixed bracket, and a driving mechanism; wherein a burner is installed on the top of the furnace for melting quartz raw materials to form quartz material; the target holder is cylindrical in shape and fixedly installed on the top of the bottom rod, where the quartz material is accumulated to form a quartz ingot; the upper part of the fixed bracket fixes the furnace, and the lower part is fixedly installed on the ground; a mechanical arm that can move up and down is installed on one side of the fixed bracket; the bottom rod is installed on the mechanical arm; the driving mechanism is used to drive the bottom rod to rotate the target holder and / or drive the mechanical arm to move the target holder.

[0004] However, due to the high temperature environment in the deposition furnace, it is difficult to directly monitor the growth diameter of the cylindrical quartz ingot. Utility Model Content

[0005] The utility model solves the problem that the high temperature environment in the furnace makes it difficult to monitor the growth diameter of the columnar quartz ingot, and provides a monitoring device for the growth diameter of the columnar quartz ingot. The real-time weight and real-time height of the quartz ingot are obtained by the cooperation of the weighing component and the height measuring component, and then the real-time growth diameter of the quartz ingot is calculated by the PLC controller, and it is used as one of the control parameters for the preparation of the quartz ingot. In the utility model, the high temperature environment in the deposition furnace is avoided because of the indirect measurement method, and the operation is easy to implement.

[0006] The technical solution adopted by the utility model is:

[0007] A monitoring device for the growth diameter of a cylindrical quartz ingot.

[0008] A weighing assembly, wherein the weighing assembly is arranged on a base rod in the deposition furnace for carrying the quartz ingot, and the weighing assembly moves up and down along the axial length direction with the base rod, but does not rotate along the axial direction with the base rod;

[0009] A height measuring assembly, wherein the height measuring assembly is arranged in the deposition furnace near a base rod for carrying a quartz ingot, and a part of the height measuring assembly moves up and down along the axial length direction with the base rod, but does not rotate along the axial direction with the base rod;

[0010] A PLC controller, wherein the PLC controller receives the real-time weight of the quartz ingot material measured by the weighing component and the real-time weight of the quartz ingot material measured by the height measuring component, and calculates the real-time growth diameter of the quartz ingot material;

[0011] A display, wherein the display is used to display the real-time weight of the quartz ingot measured by the weighing component, the real-time weight of the quartz ingot measured by the height measuring component, and the real-time growth diameter of the quartz ingot calculated by the PLC controller.

[0012] Furthermore, the weighing assembly comprises:

[0013] Upper support plate;

[0014] A lower support plate, wherein the lower support plate is parallel to the upper support plate;

[0015] A weighing sensor is disposed between the upper support plate and the lower support plate.

[0016] Furthermore, two or more weighing sensors are provided; the two or more weighing sensors are evenly arranged in a circular manner, and the geometric center of the arrangement coincides with the axial center of the base rod.

[0017] Furthermore, the weighing assembly also includes a groove-type support seat; the groove length direction of the groove-type support seat is perpendicular to the upper surface of the lower support plate; the lower end of the groove-type support seat is connected to the lower support plate; a groove is provided on the lower surface of the upper support plate corresponding to the upper end of the groove-type support seat; the upper end of the groove-type support seat is inserted into the groove, and its outer wall is in sliding contact with the inner wall of the groove; there is a gap between the upper end face of the groove-type support seat and the bottom wall of the groove; the weighing sensor is located in the inner area of ​​the groove of the groove-type support seat, and its upper and lower ends are respectively connected to the bottom wall of the groove and the upper surface of the lower support plate.

[0018] Furthermore, the weighing assembly also includes a groove-type support seat; the groove length direction of the groove-type support seat is perpendicular to the lower surface of the upper support plate; the upper end of the groove-type support seat is connected to the upper support plate; a groove is provided on the upper surface of the lower support plate corresponding to the lower end of the groove-type support seat; the lower end of the groove-type support seat is inserted into the groove, and its outer wall is in sliding contact with the inner wall of the groove; there is a gap between the lower end face of the groove-type support seat and the bottom wall of the groove; the weighing sensor is located in the inner area of ​​the groove of the groove-type support seat, and its upper and lower ends are respectively connected to the lower surface of the upper support plate and the bottom wall of the groove.

[0019] Furthermore, the groove-shaped support seat has an interlayer or a serpentine flow channel; a liquid medium circulates in the interlayer or the serpentine flow channel.

[0020] Furthermore, the height measurement component comprises:

[0021] Mirror mount;

[0022] A reflector, wherein the reflector is arranged on the mirror seat;

[0023] Interferometer;

[0024] A laser interferometer, wherein the optical path of the laser interferometer, the center of the interferometer mirror and the center of the reflector are on the same straight line.

[0025] The beneficial effects of the utility model are:

[0026] The utility model designs a monitoring device for the growth diameter of a columnar quartz ingot. The real-time weight and height of the quartz ingot are obtained by the cooperation of a weighing component and a height measuring component. Then, the real-time growth diameter of the quartz ingot is calculated by a PLC controller and used as one of the control parameters for the preparation of the quartz ingot. The utility model adopts an indirect measurement method, avoiding the high temperature environment in the deposition furnace, and is easy to operate. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 Schematic diagram of the logical connection structure of the monitoring device in this embodiment.

[0029] Figure 2 A front view of a weighing assembly in an embodiment

[0030] Figure 3 Schematic diagram of the three-dimensional structure of the weighing component in the embodiment.

[0031] Figure 4 Schematic diagram of the structure of the height measurement component in the embodiment.

[0032] The accompanying drawings are marked as follows:

[0033] 100-PLC controller, 200-weighing component, 300-height measurement component, 400-display;

[0034] 210 upper support plate, 211- groove, 220- lower support plate, 230- weighing sensor, 240- groove support seat;

[0035] 310-laser interferometer, 320-interferometer, 330-reflector, 340-mirror base. DETAILED DESCRIPTION

[0036] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0037] The disclosure below provides many different embodiments or examples to implement different structures of the present invention. In order to simplify the disclosure of the present invention, the components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit the present invention.

[0038] The embodiments of the utility model are described in detail below with reference to the accompanying drawings.

[0039] In this embodiment, a monitoring device for the growth diameter of a columnar quartz ingot is provided, which aims to monitor the change of the growth diameter of the quartz ingot indirectly to overcome the defect that the high temperature in the furnace makes it impossible to directly monitor the growth diameter of the quartz ingot, thereby facilitating the production monitoring of the quartz ingot.

[0040] Attached Figure 1 The logical connection structure diagram of the monitoring device in this embodiment is shown in FIG. Figure 1As shown in , the monitoring device includes a PLC controller 100, a weighing assembly 200, a height measuring assembly 300 and a display 400. Among them, the weighing assembly 200 is installed on a base rod 1' (similar to the bottom rod mentioned in the background technology) for carrying the quartz ingot in the deposition furnace, and the weighing assembly 200 does not affect the axial rotation movement and the up and down lifting movement in the axial direction of the base rod 1'. Specifically, the weighing assembly 200 can move up and down in the axial direction with the base rod, but does not move in the axial direction with the base rod. The weighing assembly is mainly used to obtain the real-time weight of the quartz ingot. When weighing, the weight of the base rod 1' and the like needs to be deducted. The height measuring assembly 300 is arranged near the base rod 1', and a part of the height measuring assembly 300 can move up and down in the axial direction with the base rod 1', but does not move in the axial direction with the base rod 1'. The height measuring assembly 300 is mainly used to obtain the real-time growth height of the quartz ingot.

[0041] Assuming that the quartz ingot in the deposition furnace forms a standard cylinder on the base rod 1', the following formula is used:

[0042] Weight m = density ρ * volume V (1);

[0043] Volume V = base area S * height H (2);

[0044] Base area S = π*r 2 (3);

[0045] r = d / 2 (4);

[0046] Wherein, the weight m is measured by a weighing component;

[0047] The density of quartz ingot is ρ=2650kg / m 3 ;

[0048] The height H is measured by a height measuring assembly.

[0049] In this embodiment, by combining the above formulas (1) to (4), the real-time growth diameter of the quartz ingot can be finally calculated by the PLC controller 100. The real-time weight measured by the weighing component 200, the real-time height measured by the height measuring component 300, and the calculation result of the PLC controller are all displayed on the display 400.

[0050] In this embodiment, the real-time weight and height of the quartz ingot are obtained by the cooperation of the weighing component and the height measuring component, and then the real-time growth diameter of the quartz ingot is calculated by the PLC controller, and it is used as one of the control parameters for the preparation of the quartz ingot. In this embodiment, since an indirect measurement method is adopted, the high temperature environment in the deposition furnace is avoided, and the operation is easy to implement.

[0051] In this embodiment, the weighing assembly 200 includes an upper support plate 210, a lower support plate 220 and a weighing sensor 230. Figure 2 and attached Figure 3 As shown in . Among them, the upper support plate 210 and the lower support plate 220 are arranged roughly in parallel, and the weighing sensor 230 is arranged between the upper support plate 210 and the lower support plate 220. In this embodiment, the weighing sensor 230 directly adopts the existing commercially available or publicly available pressure sensor or pressure weighing sensor, and its internal structure is not improved. As the quartz mass on the base rod 1' gradually grows, the pressure on the upper support plate 210 will gradually increase. The distance between the upper support plate 210 and the lower support plate 220 will also produce slight changes. The weighing sensor 230 is based on the pressure transmitted by the upper support plate 210 and outputs a changing voltage value, which constitutes a measurement signal and is ultimately converted into a weight m.

[0052] In this embodiment, in order to improve the accuracy of the weight m measurement result, two or more weighing sensors 230 can be provided. Figure 2 and attached Figure 3 As shown in , the upper support plate 210 and the lower support plate 220 are both roughly in the shape of circular plates, and the upper support plate 210 is connected to a driving part (such as a motor) that provides axial rotation power for the base rod 1', and the lower support plate 220 is connected to a driving part (such as the mechanical arm mentioned in the background technology) that provides up and down lifting and lowering movement in the axial length direction of the base rod 1'. Four weighing sensors 230 are arranged between the upper support plate 210 and the lower support plate 220. The four weighing sensors 230 are evenly arranged in a circular manner, and the geometric center of their arrangement coincides with the axial center of the base rod 1'. In this embodiment, a plurality of weighing sensors are provided. On the one hand, they can serve as backup for each other to avoid the inability to continue measuring after only one weighing sensor fails. On the other hand, the accuracy of the monitoring results of the growth diameter of the quartz ingot can be improved by taking the weighted average of multiple measurement results as the final weight m.

[0053] In this embodiment, a slot-type support seat 240 is arranged near each weighing sensor 230. The slot length direction of the slot-type support seat 240 is roughly perpendicular to the upper surface of the lower support plate 220. The lower end of the slot-type support seat 240 is connected to the lower support plate 220. A groove 211 is provided on the lower surface of the upper support plate 210 corresponding to the upper end of the slot-type support seat 240. The upper end of the slot-type support seat 240 is inserted into the groove 211, and its outer wall is in sliding contact with the inner wall of the groove 211. There is a certain gap between the upper end surface of the slot-type support seat 240 and the bottom wall of the groove 211, and the gap can be the moving space of the upper support plate 210. The weighing sensor 230 is located in the inner area of ​​the slot of the slot-type support seat 240, and its upper and lower ends are respectively connected to the bottom wall of the groove 211 and the upper surface of the lower support plate 220. In this embodiment, the groove-shaped support seat is used to limit the relative movement between the upper support plate and the lower support plate, and plays a role in preventing the components installed above the upper support plate from tipping over.

[0054] It should be noted that, in this embodiment, the upper end of the groove-shaped support seat 240 can also be connected to the upper support plate 210 , and a matching groove 211 can be provided on the corresponding lower support plate 220 .

[0055] In this embodiment, in order to reduce the influence of temperature fluctuation on the measurement result of the weighing sensor, the slot-type support seat 240 is designed with an interlayer or a serpentine flow channel (not shown in the figure), and then the liquid medium (such as heat transfer oil) is continuously supplied and circulated into the interlayer or serpentine flow channel of the slot-type support seat 240. By monitoring the temperature of the liquid medium flowing in and out of the interlayer or serpentine flow channel and the inner area of ​​the slot of the slot-type support seat, and then controlling the flow rate of the liquid medium, the temperature of the inner area of ​​the slot of the slot-type support seat can be made relatively stable, thereby the working atmosphere temperature of the weighing sensor installed in the inner area of ​​the slot of the slot-type support seat is relatively stable, and the reliability of the measurement result is better.

[0056] Normally, the position of the deposition point of the quartz ingot in the deposition furnace usually remains relatively fixed, and the growing cylindrical quartz ingot gradually descends along the axial length direction of the base rod 1'. In this process, the distance that the base rod 1' descends is roughly equal to the height H of the quartz ingot growth. Therefore, the real-time height H of the quartz ingot can be measured by measuring the real-time axial length movement distance of the base rod 1'. Figure 4As shown in the figure, the height measurement assembly 300 in this embodiment includes a laser interferometer 310, an interferometer 320, a reflector 330 and a mirror seat 340. The mirror seat 340 is arranged on a driving part (such as the mechanical arm mentioned in the background technology) that provides the up and down lifting movement of the basic rod 1' in the axial length direction, so that when the basic rod 1' moves up and down in the axial length direction, the mirror seat 340 synchronously moves up and down in the axial length direction, but does not rotate with the axial direction of the basic rod 1'. The reflector 330 is arranged on the mirror seat 340. The laser interferometer 310 is fixedly arranged below the basic rod 1'. The interferometer 320 is arranged between the laser interferometer 310 and the reflector 330. The laser interferometer 310 is electrically connected to the PLC controller. After adjustment, it is ensured that the optical path of the laser interferometer 310, the center of the interferometer 320 and the center of the reflector 330 are on the same straight line to achieve optical path unification. In this embodiment, the displacement value is read by the optical path formed by the laser interferometer 310 reflected by the reflector 330, so that the moving distance of the basic rod 1' in the axial length direction can be obtained, and the real-time growth height H of the quartz ingot can be obtained. In addition, the laser interferometer 310 is set at a position far away from the hearth of the deposition furnace to reduce the influence of high temperature on the laser interferometer as much as possible and extend its service life.

Claims

1. A device for monitoring the growth diameter of a cylindrical quartz ingot, characterized in that: A weighing assembly, wherein the weighing assembly is arranged on a base rod in the deposition furnace for carrying the quartz ingot, and the weighing assembly moves up and down along the axial length direction with the base rod, but does not rotate along the axial direction with the base rod; A height measuring assembly, wherein the height measuring assembly is arranged in the deposition furnace near a base rod for carrying a quartz ingot, and a part of the height measuring assembly moves up and down along the axial length direction with the base rod, but does not rotate along the axial direction with the base rod; A PLC controller, wherein the PLC controller receives the real-time weight of the quartz ingot material measured by the weighing component and the real-time weight of the quartz ingot material measured by the height measuring component, and calculates the real-time growth diameter of the quartz ingot material; A display, wherein the display is used to display the real-time weight of the quartz ingot measured by the weighing component, the real-time weight of the quartz ingot measured by the height measuring component, and the real-time growth diameter of the quartz ingot calculated by the PLC controller.

2. The device for monitoring the growth diameter of a cylindrical quartz ingot according to claim 1, characterized in that: The weighing assembly comprises: Upper support plate; A lower support plate, wherein the lower support plate is parallel to the upper support plate; A weighing sensor is disposed between the upper support plate and the lower support plate.

3. The device for monitoring the growth diameter of a cylindrical quartz ingot according to claim 2, characterized in that: There are two or more weighing sensors; the two or more weighing sensors are evenly arranged in a circular manner, and the geometric center of their arrangement coincides with the axial center of the base rod.

4. The device for monitoring the growth diameter of a cylindrical quartz ingot according to claim 3, characterized in that: The weighing assembly also includes a slot-shaped support seat; the slot length direction of the slot-shaped support seat is perpendicular to the upper surface of the lower support plate; the lower end of the slot-shaped support seat is connected to the lower support plate; a groove is provided on the lower surface of the upper support plate corresponding to the upper end of the slot-shaped support seat; the upper end of the slot-shaped support seat is inserted into the groove, and its outer wall is in sliding contact with the inner wall of the groove; there is a gap between the upper end face of the slot-shaped support seat and the bottom wall of the groove; the weighing sensor is located in the inner area of ​​the slot of the slot-shaped support seat, and its upper and lower ends are respectively connected to the bottom wall of the groove and the upper surface of the lower support plate.

5. The device for monitoring the growth diameter of a cylindrical quartz ingot according to claim 3, characterized in that: The weighing assembly also includes a groove-type support seat; the groove length direction of the groove-type support seat is perpendicular to the lower surface of the upper support plate; the upper end of the groove-type support seat is connected to the upper support plate; a groove is provided on the upper surface of the lower support plate corresponding to the lower end of the groove-type support seat; the lower end of the groove-type support seat is inserted into the groove, and its outer wall is in sliding contact with the inner wall of the groove; there is a gap between the lower end face of the groove-type support seat and the bottom wall of the groove; the weighing sensor is located in the inner area of ​​the groove of the groove-type support seat, and its upper and lower ends are respectively connected to the lower surface of the upper support plate and the bottom wall of the groove.

6. The device for monitoring the growth diameter of a cylindrical quartz ingot according to claim 4 or 5, characterized in that: The groove-shaped support seat has an interlayer or a serpentine flow channel; a liquid medium circulates in the interlayer or the serpentine flow channel.

7. The device for monitoring the growth diameter of a cylindrical quartz ingot according to any one of claims 1 to 5, characterized in that: The height measurement component comprises: Mirror mount; A reflector, wherein the reflector is arranged on the mirror seat; Interferometer; A laser interferometer, wherein the optical path of the laser interferometer, the center of the interferometer mirror and the center of the reflector are on the same straight line.

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