Liquid supply system and coating equipment

Abstract

The utility model discloses a liquid supply system and coating equipment. The liquid supply system comprises a liquid supply pipeline, a nozzle device and a temperature control device, wherein the nozzle device is connected to the liquid supply pipeline; the temperature control device is matched with the liquid supply pipeline; the temperature control device comprises a heat preservation cavity allowing the liquid supply pipeline to penetrate through and a mounting part, and the mounting part is configured to be matched with external movable equipment so that the temperature control device can move.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, in particular to a liquid supply system and coating equipment. Background Art

[0002] In the coating process of semiconductor manufacturing, the coating equipment usually includes a liquid supply system and a nozzle device connected to the liquid supply system, and the nozzle device is used to coat the wafer with photoresist. In actual coating, there are requirements for the temperature of the photoresist. Therefore, the liquid supply system is equipped with a temperature control device to control the temperature of the photoresist in the liquid supply pipeline so that the liquid has a predetermined temperature when it is supplied to the nozzle device, which can meet the coating requirements of the wafer.

[0003] In the prior art, the temperature control device is generally mounted on a section of the pipeline of the liquid supply system close to the nozzle device. The position of the temperature control device is fixed, the application scenario is single, and it cannot adapt to new coating equipment. Utility Model Content

[0004] One of the purposes of the utility model is to provide a liquid supply system to solve the technical problem of single application scenario of the temperature control device in the prior art.

[0005] One of the purposes of the utility model is to provide a coating device.

[0006] In order to achieve one of the purposes of the above-mentioned utility model, one embodiment of the utility model provides a liquid supply system including: a liquid supply pipeline, a nozzle device connected to the liquid supply pipeline, and a temperature control device arranged in cooperation with the liquid supply pipeline; the temperature control device includes an insulation cavity for the liquid supply pipeline to pass through and an installation part, and the installation part is configured to cooperate with an external movable device.

[0007] As a further improvement of one embodiment of the utility model, each insulation cavity includes two end walls located at both ends thereof, an insulation channel located between the two end walls, and a mounting portion arranged on the end walls; the two insulation channels are independent of each other, and each liquid supply pipeline passes through a corresponding insulation channel; the mounting portions of at least two insulation cavities located at the same end are connected to each other.

[0008] As a further improvement of an embodiment of the utility model, at least two of the heat preservation cavities are assembled in parallel or formed in one piece.

[0009] As a further improvement of one embodiment of the utility model, the insulation channel is a square channel, and the side of the insulation channel includes a first wall, a second wall, a third wall and a fourth wall connected in sequence, the mounting portion is in the shape of a horizontal wall and is perpendicular to the end wall, the first wall and the third wall are parallel to the mounting portion, the first wall is close to the mounting portion relative to the third wall, and the mounting portion is spaced apart from the first wall.

[0010] As a further improvement of an embodiment of the utility model, the temperature control device includes an insulation liquid inlet and an insulation liquid outlet arranged at two ends of the third wall.

[0011] As a further improvement of one embodiment of the utility model, it includes a first pipeline connected to the insulation liquid inlet, the first pipeline includes a first section and a second section which are connected in sequence and perpendicular to each other, the first section is perpendicular to the third wall and connected to the insulation cavity, and the second section is parallel to the first wall.

[0012] As a further improvement of an embodiment of the utility model, it includes a temperature sensing detection device arranged in the heat preservation cavity, and the temperature sensing detection device is parallel to the liquid supply pipeline.

[0013] As a further improvement of one embodiment of the utility model, the liquid supply pipeline is used to transport high-viscosity photoresist, and the liquid supply system includes a first back-suction device arranged between the temperature control device and the nozzle device, the first back-suction device includes a back-suction valve, and the length of the pipeline between the back-suction valve and the nozzle device is between 5mm-10mm.

[0014] As a further improvement of an embodiment of the utility model, the liquid supply pipeline is used to transmit the wetting liquid, and the liquid supply system includes a second back-suction device arranged between the temperature control device and the nozzle device, and the second back-suction device includes a vacuum back-suction valve and an on-off valve.

[0015] To achieve one of the purposes of the utility model, an embodiment of the utility model provides a coating device, including the liquid supply system described in any of the above technical solutions and a movable device for cooperating with the mounting portion.

[0016] Compared with the prior art, the utility model provides a liquid supply system having a temperature control device that cooperates with a liquid supply pipeline. The temperature control device includes a temperature control cavity and a mounting portion. The mounting portion is used to be installed on an external movable device. The external movable device drives the temperature control device to move together, thereby adapting to more application scenarios and more new types of coating equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of a liquid supply system in one embodiment of the utility model.

[0018] Figure 2 It is a schematic diagram of a liquid supply system from another angle in one embodiment of the utility model.

[0019] Figure 3 It is a front view of a liquid supply system in one embodiment of the utility model.

[0020] Figure 4It is a top view of a liquid supply system in one embodiment of the utility model.

[0021] Figure 5 It is a cross-sectional view of a liquid supply system in one embodiment of the utility model.

[0022] Figure 6 It is a schematic diagram of the exploded structure of part of the liquid supply system in one embodiment of the utility model.

[0023] Figure 7 It is a schematic diagram of a liquid supply pipeline in another embodiment of the utility model. DETAILED DESCRIPTION

[0024] The present invention will be described in detail below in conjunction with the specific embodiments shown in the accompanying drawings. However, these embodiments do not limit the present invention, and any structural, methodological, or functional changes made by a person skilled in the art based on these embodiments are all within the scope of protection of the present invention.

[0025] It should be noted that the term "comprises" or any other variation thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device that includes a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In addition, the terms "first", "second", "third", "fourth", etc. are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0026] The terms "connected", "connected to" or any other variants are intended to cover various relative positions in a connection relationship, so as to include direct connection or indirect connection. Among them, the direct connection can be formed by a gas pipeline, the indirect connection can be a connection relationship established by a device such as a valve body, a sensor, etc., can be a connection relationship established by a gas circuit component such as a brake control unit, or can be a connection relationship established by any other medium such as air.

[0027] See also Figure 1 , is a schematic structural diagram of a liquid supply system 100 provided in one embodiment of the utility model, which is used to provide the required photoresist for wafer coating.

[0028] The liquid supply system 100 includes a liquid supply pipeline 10, a nozzle device connected to the liquid supply pipeline 10, and a temperature control device 30 arranged in cooperation with the liquid supply pipeline 10; the temperature control device 30 includes a heat preservation cavity 31 for the liquid supply pipeline 10 to pass through and a mounting portion 34, and the mounting portion 34 is configured to cooperate with an external movable device.

[0029] The photoresist is supplied in the liquid supply pipe 10, and the heat preservation cavity 31 wraps the liquid supply pipe 10. The photoresist at the required temperature is obtained by adjusting the temperature in the heat preservation cavity 31. The mounting portion 34 of the temperature control device 30 can be installed on an external movable device, such as a robot arm, so that the mounting portion 34 can move with the movable device, drive the temperature control device and at least part of the liquid supply pipe 10 to move together, and adapt to various application scenarios.

[0030] In the prior art, due to the installation restrictions of the temperature control device 30, the liquid supply pipeline 10 at the corresponding temperature control device 30 is usually set to be multi-section and connected by an adapter, which is easy to generate adapter bubbles and cause coating abnormalities.

[0031] In a preferred embodiment, the liquid supply pipe 10 at the temperature control device 30 of this case is an integrated design, which passes through the insulation cavity 31 as a whole, without a switching joint, and has a good temperature control effect without generating additional bubbles.

[0032] Combination Figure 2-4 As shown, the temperature control device 30 includes at least two adjacently arranged heat preservation cavities 31 , each heat preservation cavity 31 includes two end walls 32 at both ends thereof, a heat preservation channel 33 between the two end walls 32 , and a mounting portion 34 disposed on the end walls 33 .

[0033] In this way, mounting portions 34 are provided at both ends of each heat preservation cavity 31 , so that the mounting between the heat preservation cavity 31 and the movable device is more firmly secured, and the temperature control device 30 can move more stably following the movable device.

[0034] At least two of the heat preservation cavities 31 are assembled in parallel to form the temperature control device 30, or are integrally formed to form a plurality of heat preservation cavities 31. The key point is that at least two of the heat preservation channels 33 are independent of each other, and each of the liquid supply pipelines 10 passes through a corresponding heat preservation channel 33. In other words, each heat preservation cavity 31 controls the temperature of a liquid supply pipeline 10, and different liquid supply pipelines 10 can control the temperatures of multiple liquid supply pipelines 10 respectively, and are applicable to multiple liquid supply pipelines 10.

[0035] Combination Figure 5-6 As shown, the mounting parts 34 of at least two of the insulation cavities 31 located at the same end are fixedly connected by snaps, screws or other means and then mounted together to an external movable device; or two adjacent mounting parts 34 can be mounted together on a mounting plate 35, and then connected to the external movable device through the mounting plate 35; in this way, the modularization of the temperature control device 30 is achieved, which is beneficial for the temperature control device 30 to move as a whole following the external movable device; or at least two insulation cavities 31 themselves are integrally formed, and multiple end walls 32, insulation channels 33, and mounting parts 34 themselves are integrally formed, which is also beneficial for the temperature control device 30 to move as a whole following the movable device.

[0036] The heat preservation channel 33 is a square channel, and the side of the heat preservation channel 33 includes a first wall 331, a second wall 332, a third wall 333 and a fourth wall 334 connected in sequence. The mounting portion 34 is in the shape of a horizontal wall and is perpendicular to the end wall 32. The first wall 331 and the third wall 333 are parallel to the mounting portion 34. The first wall 331 is close to the mounting portion 34 relative to the third wall 333, and the mounting portion 34 is spaced apart from the first wall 331.

[0037] In actual application scenarios, the mounting portion 34 is located at the bottom of the temperature control device 30, the first wall 331 is the bottom wall, the third wall 333 is the top wall, and the temperature control device 30 is installed on an external movable device along a vertical direction. The mounting portion 34 is located below the first wall 331 and is separated from the insulation channel 33 to prevent the temperature in the insulation channel 33 from being transmitted to the external movable device through the mounting portion 34.

[0038] Combination Figure 5 As shown, the temperature control device 30 includes an insulation liquid inlet 301 and an insulation liquid outlet 302 disposed at both ends of the third wall 333. The temperature control device 30 uses a water bath to control the temperature, and the insulation liquid inlet 301 and the insulation liquid outlet 302 are respectively connected to the insulation channel 33, and the insulation channel 33 is filled with liquid, thereby completely wrapping the liquid supply pipe 10 in the insulation channel 33, so as to maintain a preset temperature for the photoresist or other liquid in the liquid supply pipe 10.

[0039] Since the first wall 331 of the temperature control device 30 is provided with a mounting portion 34 and is used to be mounted on an external movable device, in order not to affect the installation of the temperature control device 30 and the movable device, the pipeline for water bath insulation is arranged on the third wall 333 opposite to the first wall 331. Furthermore, the dimension of the insulation cavity 31 in the height direction should not be too high, and the pipeline for water bath insulation cannot be arranged through the end wall 32. Therefore, due to space limitations, the insulation liquid inlet 301 and the insulation liquid outlet 302 can only be arranged at the first wall 331 at the top.

[0040] In one embodiment, the liquid supply system 100 includes a first pipeline 40 connected to the insulation liquid inlet 301, and the first pipeline 40 includes a first section 41 and a second section 42 that are connected in sequence and perpendicular to each other, the first section 41 is perpendicular to the third wall 333 and connected to the insulation cavity 31, and the second section 42 is parallel to the first wall 331 and connected to an external device for controlling the temperature of the insulation liquid.

[0041] Since the first pipeline 40 is arranged on the top wall, if the first pipeline 40 is completely vertical, when the insulation liquid enters the insulation cavity 31 in the vertical direction, the impact force is relatively large, and the stress on the internal liquid supply pipeline 10 is relatively large; and the temperature control device 30 is a mobile design, and water is taken in while moving, which has a greater impact on the liquid supply pipeline 10; due to the limitation of the installation space, the first pipeline 40 cannot be designed to directly enter the insulation cavity 31 in the horizontal direction from the end wall 32; therefore, the first pipeline 40 in this case adopts an L-shaped pipeline, the front section adopts the horizontal type first, and the rear section adopts the vertical type when entering the insulation channel 33.

[0042] In one embodiment, the liquid supply system 100 includes a second pipeline 50 connected to the insulation liquid discharge port 302. The second pipeline 50 is of the same L-shaped design as the first pipeline 40, but the installation position is different from the first pipeline 40. The first pipeline 40 and the second pipeline 50 are symmetrically located at both ends of the insulation cavity 31 to achieve insulation liquid inlet at one end and insulation liquid outlet at the other end. The first pipeline 40 and the second pipeline 50 are both connected to an external device for controlling the temperature of the insulation liquid to achieve cyclic temperature control.

[0043] In one embodiment, the liquid supply system 100 includes a temperature sensing device 60 disposed in the heat preservation cavity 31, and the temperature sensing device 60 is parallel to the liquid supply pipe. Since the temperature control device 30 is a movable design as a whole, the liquid and other structures inside may affect the liquid supply pipe 10, shortening its life. For example, in the prior art, the temperature sensing device 60 is vertically disposed with the liquid supply pipe 10. If it is directly applied in this case, the temperature sensing device 60 exerts a greater force on the liquid supply pipe 10, affecting its service life.

[0044] As mentioned above, each liquid supply pipeline 10 passes through a heat preservation cavity 31 to achieve separate temperature control of multiple liquid supply pipelines without affecting each other. In one embodiment, the liquid supply pipeline 10 is used to transport high-viscosity photoresist, and different liquid supply pipelines 10 can transport photoresists of different compositions.

[0045] The liquid supply system 100 includes a first back-sucking device disposed between the temperature control device 30 and the nozzle device, the first back-sucking device includes a back-sucking valve 71, and the length of the pipeline between the back-sucking valve 71 and the nozzle device is between 5mm and 10mm. After coating, when closing the nozzle device, the back-sucking valve is first opened to suck back a height of about 1mm, and the nozzle device is concave. At this time, the photoresist tension is at least greater than the gravity of 10mm photoresist, and the photoresist in the pipeline will not drip down, and there is no need to further set an on-off valve.

[0046] In other embodiments, combined Figure 7As shown, the liquid supply pipeline 10 can also be used to transmit the wetting liquid. The liquid supply system 100 includes a second back-sucking device arranged between the temperature control device 30 and the nozzle device, and the second back-sucking device includes a vacuum back-sucking valve 81 and an on-off valve 82. The wetting liquid is a completely liquid device with no viscosity and high fluidity. After the vacuum back-sucking valve 81 back-sucks for a period of time, it needs to be immediately closed by the on-off valve 82, otherwise liquid will drip.

[0047] The utility model includes a coating device, including a liquid supply system 100 of any of the above technical solutions and a movable device for cooperating with the mounting portion 34. Specifically, the movable device is a robotic arm and can be used to simultaneously control the movement of the temperature control device 30 and the nozzle device.

[0048] The beneficial effects of the utility model are as follows: the mounting portion 34 of the temperature control device 30 is used to be mounted on an external movable device, and the temperature control device 30 can move together with the nozzle device to adapt to more new coating equipment; the multiple insulation cavities 31 are integrated or modularly designed, which is conducive to the overall stable movement of the temperature control device 30; the mounting portion 34 and the insulation channel 33 are spaced apart to prevent the temperature from affecting the external movable device; the insulation liquid inlet 301 and the insulation liquid outlet 302 are installed on the side wall opposite to the mounting portion 34, which does not affect the installation of the temperature control device 30 and the movable device.

[0049] It can be formed by referring to any of the technical solutions provided above, and will not be described in detail here.

[0050] It should be understood that although this specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each implementation mode may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

[0051] The series of detailed descriptions listed above are only specific descriptions of feasible implementation methods of the utility model. They are not intended to limit the protection scope of the utility model. Any equivalent implementation methods or changes that do not deviate from the technical spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A liquid supply system, characterized in that: include: A liquid supply pipeline, a nozzle device connected to the liquid supply pipeline, and a temperature control device arranged in cooperation with the liquid supply pipeline; the temperature control device includes a heat preservation cavity for the liquid supply pipeline to pass through and a mounting portion, and the mounting portion is configured to cooperate with an external movable device.

2. The liquid supply system according to claim 1, characterized in that: Each heat preservation cavity comprises two end walls at both ends thereof, a heat preservation channel between the two end walls, and a mounting portion arranged on the end walls; the two heat preservation channels are independent of each other, and each liquid supply pipeline passes through a corresponding heat preservation channel; The mounting parts of at least two of the heat preservation cavities located at the same end are connected to each other.

3. The liquid supply system according to claim 2, characterized in that: At least two of the heat preservation cavities are assembled in parallel or formed in one piece.

4. The liquid supply system according to claim 2, characterized in that: The insulation channel is a square channel, and the side of the insulation channel includes a first wall, a second wall, a third wall and a fourth wall connected in sequence. The mounting portion is in the shape of a horizontal wall and is perpendicular to the end wall. The first wall and the third wall are parallel to the mounting portion, the first wall is close to the mounting portion relative to the third wall, and the mounting portion is spaced apart from the first wall.

5. The liquid supply system according to claim 4, characterized in that: The temperature control device comprises a heat preservation liquid inlet and a heat preservation liquid outlet arranged at two ends of the third wall.

6. The liquid supply system according to claim 5, characterized in that: It includes a first pipeline connected to the insulation liquid inlet, the first pipeline includes a first section and a second section which are connected in sequence and perpendicular to each other, the first section is perpendicular to the third wall and connected to the insulation cavity, and the second section is parallel to the first wall.

7. The liquid supply system according to claim 1, characterized in that: It comprises a temperature sensing detection device arranged in the heat preservation cavity, and the temperature sensing detection device is parallel to the liquid supply pipeline.

8. The liquid supply system according to claim 1, characterized in that: The liquid supply pipeline is used to transport high-viscosity photoresist. The liquid supply system includes a first sucking back device arranged between the temperature control device and the nozzle device. The first sucking back device includes a sucking back valve. The length of the pipeline between the sucking back valve and the nozzle device is between 5mm and 10mm.

9. The liquid supply system according to claim 1, characterized in that: The liquid supply pipeline is used to transmit the wetting liquid. The liquid supply system includes a second back-suction device arranged between the temperature control device and the nozzle device. The second back-suction device includes a vacuum back-suction valve and an on-off valve.

10. A coating device, characterized in that: It comprises the liquid supply system according to any one of claims 1 to 8 and a movable device for cooperating with the mounting portion.

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