Film-drawing and wafer-expanding equipment

Abstract

The utility model discloses film-drawing and wafer-expanding equipment. The film-drawing and wafer-expanding equipment comprises a workbench, a fixing device, a film-drawing device, a driving device and a visual detection device, wherein the workbench is provided with a mounting surface, the fixing device, the film pulling device and the driving device are all mounted on the mounting surface, the fixing device is used for fixing a film material, and the film pulling device is used for clamping and stretching the film material; the visual detection device is connected to the driving device, the driving device is used for driving the visual detection device to freely move above the mounting surface, the visual detection device is further electrically connected with the film drawing device, and the visual detection device is used for detecting the distance between chips on the film material in real time and sending distance information to the film drawing device; and the film drawing device controls the stretching strength of the stretching film material according to the distance information. Through the arrangement, the problem of low wafer expansion processing precision caused by the fact that the distance between the chips cannot be accurately detected in real time in the wafer expansion processing process is effectively solved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor industry, in particular to a film pulling and crystal expanding device. Background Art

[0002] In the process of wafer expansion, the film material is usually expanded by a lifting mechanism to expand the chip spacing. However, in the process of wafer expansion, due to limited manual operation, it is impossible to accurately determine the change in the spacing between chips in real time, and the wafer expansion spacing cannot be well controlled, resulting in low precision of wafer expansion. Utility Model Content

[0003] The utility model mainly provides a film pulling crystal expansion device to solve the problem of low crystal expansion processing accuracy caused by the inability to detect the chip spacing in real time and accurately during the crystal expansion process.

[0004] To achieve the above-mentioned purpose, the utility model proposes a film-drawing and crystal-expanding device, which includes a workbench, a fixing device, a film-drawing device, a driving device and a visual detection device; wherein,

[0005] The workbench has a mounting surface, the fixing device, the film-drawing device and the driving device are all mounted on the mounting surface, the fixing device is used to fix the film material, and the film-drawing device is used to clamp and stretch the film material;

[0006] The visual inspection device is connected to the driving device, and the driving device is used to drive the visual inspection device to move freely above the mounting surface. The visual inspection device is also electrically connected to the film-stretching device. The visual inspection device is used to detect the spacing between chips on the film material in real time and send spacing information to the film-stretching device. The film-stretching device controls the stretching force of the stretched film material according to the spacing information.

[0007] In some embodiments of the present invention, the visual inspection device includes a linear module, a mounting member, and a visual inspection component; wherein,

[0008] The linear module is connected to the driving device, the linear module has a sliding portion, the mounting member is mounted on the sliding portion, and the visual detection component is connected to the mounting member;

[0009] The linear module is used to drive the visual inspection component to reciprocate in the vertical direction through the mounting part. The visual inspection component is used to capture the expanded crystal image of the spacing between chips on the film material in real time. The visual inspection component generates the spacing information based on the expanded crystal image and sends the spacing information to the film pulling device.

[0010] In some embodiments of the present invention, the visual detection component includes a connecting member, a movable clamping member, and an image acquisition member; wherein,

[0011] The connecting member and the movable clamping member are both installed on the mounting member, one end of the image acquisition member is movably connected to the connecting member, the movable clamping member is used to clamp or release the other end of the image acquisition member, and the image acquisition member is electrically connected to the film drawing device.

[0012] In some embodiments of the present invention, the visual inspection device also includes a lifting member arranged between the mounting member and the movable clamping member, one side of the lifting member is connected to the mounting member, and the other side is connected to the movable clamping member, and the lifting member is used to drive the image acquisition member to move in the vertical direction.

[0013] In some embodiments of the present invention, the connecting member includes a connecting body and a guiding body, the connecting body is fixedly mounted on the mounting member, one side of the guiding body is movably connected to the connecting body, and the other side is connected to the image acquisition member, and the guiding body is used to guide and cooperate with the connecting body.

[0014] In some embodiments of the present invention, the image acquisition component is a 3D industrial camera; or, the image acquisition component is a 2D industrial camera.

[0015] In some embodiments of the present invention, the visual detection device includes a light source component, which is disposed below the image acquisition component and is used to provide a light source for the image acquisition component.

[0016] In some embodiments of the utility model, the light source component is connected to the mounting component, the optical axis of the light source component is coaxially arranged with the optical axis of the image acquisition component, and the light source component is provided with an avoidance through hole, and the avoidance through hole is used to avoid the optical axis of the image acquisition component.

[0017] In some embodiments of the present invention, there are multiple visual detection devices, and the multiple visual detection devices are all connected to the driving device.

[0018] In some embodiments of the utility model, the film pulling and crystal expanding equipment also includes a material transporting device and a cutting device, the material transporting device is arranged on the mounting surface, the cutting device is connected to the driving device, the material transporting device is used for loading or unloading film materials, and the cutting device is used for cutting the edges of film materials.

[0019] The beneficial effect of the present invention is as follows: different from the prior art, the film-pulling and crystal expansion equipment disclosed by the present invention uses a visual detection device to detect in real time the variables of the spacing between each chip on the film material when the film-pulling device stretches the film material to expand the spacing between each chip, and sends the detected spacing information to the film-pulling device, so that the film-pulling device can adjust the stretching force of the film material according to the spacing information to achieve the effect of controlling the spacing between each chip. This arrangement can realize real-time knowledge of the spacing between each chip after crystal expansion, which is beneficial for the film-pulling device to better adjust the film-pulling direction and force to better control the spacing between each chip, thereby improving the accuracy of the crystal expansion process to better meet the market demand for various chip spacings. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0021] Figure 1 This is a structural schematic diagram of an embodiment of the film-drawing and crystal-expanding device of the utility model;

[0022] Figure 2 This is a schematic structural diagram of an embodiment of the visual inspection device of the utility model;

[0023] Figure 3 It is a side view structural diagram of an embodiment of the visual inspection device of the utility model;

[0024] Figure 4 This is a schematic diagram of the explosion structure of an embodiment of the visual inspection device of the utility model.

[0025] Description of Figure Numbers:

[0026] 100. Film-drawing and crystal-expanding equipment; 101. Workbench; 102. Fixing device; 103. Film-drawing device; 104. Driving device; 105. Visual inspection device; 106. Material transport device; 107. Cutting device; 1. Linear module; 11. Sliding part; 2. Mounting part; 3. Visual inspection component; 31. Connecting part; 311. Connecting body; 312. Guide body; 32. Movable clamping part; 321. First clamping block; 322. Second clamping block; 33. Image acquisition part; 34. Lifting part; 35. Annular flexible pad; 4. Light source part; 41. Mounting sheet metal; 42. Light-emitting body.

[0027] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] In addition, in the present utility model, descriptions such as "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.

[0031] The utility model proposes a film-pulling and crystal-expanding device, referring to Figure 1 The film-drawing and crystal-expanding device 100 comprises a workbench 101, a fixing device 102, a film-drawing device 103, a driving device 104 and a visual inspection device 105. The workbench 101 has a mounting surface, the fixing device 102, the film-drawing device 103 and the driving device 104 are all mounted on the mounting surface, the fixing device 102 is used to fix the film material, and the film-drawing device 103 is used to clamp and stretch the film material.

[0032] The visual inspection device 105 is connected to the driving device 104, and the driving device 104 is used to drive the visual inspection device 105 to move freely above the installation surface. The visual inspection device 105 is also electrically connected to the film-stretching device 103. The visual inspection device 105 is used to detect the spacing of the chips on the film material in real time and send the spacing information to the film-stretching device 103. The film-stretching device 103 controls the stretching force of the stretched film material according to the spacing information.

[0033] Based on the above scheme, when the film-pulling device 103 stretches the film material to expand the spacing between each chip, the visual inspection device 105 detects the variables of the spacing between each chip on the film material in real time, and sends the detected spacing information to the film-pulling device 103, so that the film-pulling device 103 can adjust the stretching force of the film material according to the spacing information to achieve the effect of controlling the spacing between each chip. Such a setting can know the size of the spacing between each chip after crystal expansion in real time, which is beneficial for the film-pulling device 103 to better adjust the film-pulling direction and force to better control the spacing between each chip, thereby improving the accuracy of crystal expansion processing to better meet the market demand for various chip spacings.

[0034] The spacing information can be expressed as small spacing, large spacing or appropriate spacing, etc. The visual inspection device 105 interacts with the film drawing device 103 in real time, so that the film drawing device 103 can accurately expand the film, thereby improving the accuracy of expanding the spacing between each chip and improving the production accuracy.

[0035] Reference Figures 1 to 4 The film-pulling and crystal-expanding equipment 100 also includes a material transporting device 106 and a cutting device 107. The material transporting device 106 is arranged on the mounting surface, and the cutting device 107 is connected to the driving device 104. The material transporting device 106 is used for loading or unloading film materials, and the cutting device 107 is used for cutting the edge of the film material.

[0036] The fixing device 102 may be an adsorption fixture, which is used to adsorb and fix the film material so as to facilitate stretching of the film material. The adsorption fixture may be composed of a suction cup and a suction cylinder. Of course, the adsorption fixture may also be other structural parts with adsorption function, as long as it can achieve adsorption and fixation of the film material, which are not listed here one by one.

[0037] The film stretching device 103 may include a stretching module and a clamping claw, wherein the stretching module is mounted on the mounting surface, the clamping claw is connected to the stretching module, and the stretching module is used to drive the clamping claw to open or close so as to clamp or release the edge of the film material. The stretching module may be a servo motor and a lead screw slide assembly, a linear motor assembly, or other structural parts having the function of stretching the film material, which are not specifically limited here.

[0038] There are multiple stretching modules and multiple clamps, which are connected one-to-one and distributed around the fixing device 102 to achieve uniform stretching of the film material.

[0039] The driving device 104 can be a longitudinal moving module and a transverse moving module, the longitudinal moving module is installed on the mounting surface, and the transverse moving module is connected to the longitudinal moving module. In this way, the visual inspection device 105 and the cutting device 107 can be driven to move freely above the workbench 101. Both the longitudinal moving module and the transverse moving module can be structures such as a screw slide module or a linear motor module.

[0040] The material transport device 106 may include a loading robot and a material frame. The material frame is used to place the film materials to be processed and the processed film materials. The loading robot may be a four-axis robot or a six-axis robot.

[0041] The cutting device 107 may include a cutting drive module and an annular cutting knife, wherein the cutting drive module is mounted on the lateral moving module, the annular cutting knife is connected to the cutting drive module, and the cutting drive module is used to drive the annular cutting knife to cut the edge of the film material. It is understandable that the cutting device 107 may also be other structural parts with cutting functions, as long as it can achieve cutting of the film material, and will not be described in detail here.

[0042] In some embodiments, the number of visual detection devices 105 is multiple, and the multiple visual detection devices 105 are all connected to the driving device 104. For example, the number of visual detection devices 105 can be two, three, or four.

[0043] By using multiple visual inspection devices 105, the chips arranged on the film material can be fully inspected in full frame, so as to fully detect the spacing between each chip, improve the effect of detecting the chip spacing, and thus improve the production quality of the wafer expansion process.

[0044] Continue to refer to Figures 1 to 4 , the visual inspection device 105 includes a linear module 1, a mounting member 2 and a visual inspection component 3. Among them, the linear module 1 is connected to the driving device 104, the linear module 1 has a sliding portion 11, the mounting member 2 is mounted on the sliding portion 11, and the visual inspection component 3 is connected to the mounting member 2. The linear module 1 is used to drive the visual inspection component 3 to reciprocate in the vertical direction through the mounting member 2, and the visual inspection component 3 is used to capture the expanded crystal image of the spacing between each chip on the film material in real time. The visual inspection component 3 generates spacing information based on the expanded crystal image and sends the spacing information to the film drawing device 103, that is, to the stretching module.

[0045] The linear module 1 can be a screw slide module or a linear motor assembly. The linear module 1 can also be other structural components with linear motion function. As long as it can drive the visual detection component 3 to move back and forth in the vertical direction, no specific limitation is made here.

[0046] The mounting member 2 may be a mounting plate or a mounting bracket or other structures.

[0047] The visual inspection component 3 includes a connecting member 31, a movable clamping member 32 and an image acquisition member 33, wherein the connecting member 31 and the movable clamping member 32 are both installed on the mounting member 2, one end of the image acquisition member 33 is movably connected to the connecting member 31, and the movable clamping member 32 is used to clamp or release the other end of the image acquisition member 33, and the image acquisition member 33 is electrically connected to the film pulling device 103.

[0048] With such an arrangement, the image acquisition component 33 can perform real-time data exchange and feedback with the film-pulling device 103, so that the film-pulling and crystal expansion equipment 100 can monitor the expansion size of the spacing between each chip in real time during the process of stretching and crystal expansion. Compared with the manual observation method with the naked eye, it not only has high detection accuracy, but also high detection efficiency, and can perform real-time data exchange with the film-pulling device 103, with high production rhythm continuity, so as to better stretch the film material, thereby improving production efficiency.

[0049] The visual inspection device 105 also includes a lifting member 34 disposed between the mounting member 2 and the movable clamping member 32. One side of the lifting member 34 is connected to the mounting member 2, and the other side is connected to the movable clamping member 32. The lifting member 34 is used to drive the image acquisition member 33 to move in the vertical direction.

[0050] The lifting member 34 can be used to micro-adjust the image acquisition member 33 so as to micro-adjust the height position of the image acquisition member 33 according to the on-site processing environment, so as to capture the chip expansion image at a suitable height position. This is not only conducive to improving the imaging quality of the expanded crystal image, but also conducive to improving the accuracy of detecting the chip spacing.

[0051] The lifting member 34 may be a manual slide, or a lifting cylinder, which is electrically connected to an external control system, and the external control system controls the lifting cylinder to work, thereby realizing intelligent control of the movement of the image acquisition member 33. The lifting member 34 may also be other structural members with lifting functions, as long as they can drive the image acquisition member 33 to move, and no specific limitation is made here.

[0052] The movable clamping member 32 may include a first clamping block 321 and a second clamping block 322. The first clamping block 321 is connected to the lifting member 34, and the second clamping block 322 is detachably connected to the first clamping block 321. The first clamping block 321 and the second clamping block 322 are both provided with clamping recesses facing opposite sides. The image acquisition member 33 can be stably clamped by the first clamping block 321 and the second clamping block 322, effectively preventing the image acquisition member 33 from shaking, so as to ensure the detection precision of the image acquisition member 33.

[0053] The movable clamping member 32 also includes an annular flexible pad 35, which is arranged between the two clamping recesses. The annular flexible pad 35 is used to protect the image acquisition member 33 to reduce the pressure loss of the first clamping block 321 and the second clamping block 322 on the image acquisition member 33, avoid damage to the image acquisition member 33, and extend the service life of the image acquisition member 33.

[0054] The annular flexible pad 35 can be a silicone pad or a rubber pad.

[0055] The connecting member 31 includes a connecting body 311 and a guiding body 312. The connecting body 311 is fixedly mounted on the mounting member 2. One side of the guiding body 312 is movably connected to the connecting body 311, and the other side is connected to the image acquisition member 33. The guiding body 312 is used to guide and cooperate with the connecting body 311. This arrangement ensures the moving stability of the image acquisition member 33, improves the anti-shake performance of the image acquisition member 33, and thereby improves the performance of the visual inspection device 105.

[0056] In some embodiments, the image acquisition component 33 may be a 3D industrial camera, such as a binocular or multi-eye stereoscopic 3D camera, a panoramic 3D camera, etc. The 3D industrial camera can obtain high-depth and high-definition expanded wafer images, so as to accurately detect the size of the spacing between the expanded chips.

[0057] In other embodiments, the image acquisition component 33 may be a 2D industrial camera, or other electronic components with image acquisition and data analysis functions, as long as it can detect the spacing between chips on the film material in real time, without specific limitation.

[0058] Continue to refer to Figures 1 to 4 The visual inspection device 105 includes a light source 4, which is disposed below the image acquisition component 33 and is used to provide light for the image acquisition component 33. The light source 4 can provide light for the image acquisition component 33 to ensure the illumination intensity of the on-site processing environment, thereby improving the signal-to-noise ratio, facilitating image processing, improving the imaging clarity of the image acquisition component 33, and improving the accuracy of detecting the spacing between each chip.

[0059] The light source 4 can be arranged on the fixing device 102 to illuminate the bottom of the film material to highlight the outline of each chip, so that the image acquisition component 33 can capture the expanded crystal image of the chip to detect the spacing between each chip.

[0060] The light source component 4 is connected to the mounting component 2, and the optical axis of the light source component 4 is coaxially arranged with the optical axis of the image acquisition component 33. The light source component 4 is provided with an avoidance through hole, and the avoidance through hole is used to avoid the optical axis of the image acquisition component 33. Such an arrangement enables the light source component 4 to vertically illuminate the film material, with a large illumination area and good illumination uniformity, so that the shadow caused by the uneven surface of the object can be eliminated, so as to reduce the interference of external factors and improve the imaging clarity of the expanded crystal image.

[0061] The light source component 4 includes a mounting sheet metal 41 and a light emitting body 42. The mounting sheet metal 41 is fixedly mounted on the mounting component 2, and the light emitting body 42 is mounted on the mounting sheet metal 41. The light emitting body 42 is arranged in a ring shape so as to emit annular light, thereby reducing reflections, so that the image acquisition component 33 can obtain a high-definition expanded crystal image.

[0062] The light-emitting body 42 may be a fluorescent lamp, an LED lamp, a xenon lamp or a halogen lamp, etc., and the light source component 4 may also be other electronic components with a light-emitting function, as long as it can provide a light source for the image acquisition component 33, and no specific limitation is made here.

[0063] The light source emitted by the light source component 4 can be a white light source, a red light source or an infrared light source.

[0064] The above description is only an optional embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A film-drawing and crystal-expanding device, characterized in that: The film-drawing and crystal-expanding equipment comprises a workbench, a fixing device, a film-drawing device, a driving device and a visual detection device; wherein, The workbench has a mounting surface, the fixing device, the film-drawing device and the driving device are all mounted on the mounting surface, the fixing device is used to fix the film material, and the film-drawing device is used to clamp and stretch the film material; The visual inspection device is connected to the driving device, and the driving device is used to drive the visual inspection device to move freely above the mounting surface. The visual inspection device is also electrically connected to the film-stretching device. The visual inspection device is used to detect the spacing between chips on the film material in real time and send spacing information to the film-stretching device. The film-stretching device controls the stretching force of the stretched film material according to the spacing information.

2. The film-drawing and crystal-expanding device according to claim 1, characterized in that: The visual inspection device includes a linear module, a mounting part and a visual inspection component; wherein, The linear module is connected to the driving device, the linear module has a sliding portion, the mounting member is mounted on the sliding portion, and the visual detection component is connected to the mounting member; The linear module is used to drive the visual inspection component to reciprocate in the vertical direction through the mounting part. The visual inspection component is used to capture the expanded crystal image of the spacing between chips on the film material in real time. The visual inspection component generates the spacing information based on the expanded crystal image and sends the spacing information to the film pulling device.

3. The film-drawing and crystal-expanding device according to claim 2, characterized in that: The visual detection component includes a connecting piece, a movable clamping piece and an image acquisition piece; wherein, The connecting member and the movable clamping member are both installed on the mounting member, one end of the image acquisition member is movably connected to the connecting member, the movable clamping member is used to clamp or release the other end of the image acquisition member, and the image acquisition member is electrically connected to the film drawing device.

4. The film-drawing and crystal-expanding device according to claim 3, characterized in that: The visual inspection device also includes a lifting member arranged between the mounting member and the movable clamping member, one side of the lifting member is connected to the mounting member, and the other side is connected to the movable clamping member, and the lifting member is used to drive the image acquisition member to move in the vertical direction.

5. The film-drawing and crystal-expanding device according to claim 4, characterized in that: The connecting member includes a connecting body and a guiding body. The connecting body is fixedly mounted on the mounting member. One side of the guiding body is movably connected to the connecting body, and the other side is connected to the image acquisition member. The guiding body is used for guiding and cooperating with the connecting body.

6. The film-drawing and crystal-expanding equipment according to claim 3, characterized in that: The image acquisition component is a 3D industrial camera; or, the image acquisition component is a 2D industrial camera.

7. The film-drawing and crystal-expanding device according to claim 3, characterized in that: The visual detection device comprises a light source component, which is arranged below the image acquisition component and is used to provide light source for the image acquisition component.

8. The film-drawing and crystal-expanding device according to claim 7, characterized in that: The light source component is connected to the mounting component, the optical axis of the light source component is coaxially arranged with the optical axis of the image acquisition component, and the light source component is provided with an avoidance through hole, and the avoidance through hole is used to avoid the optical axis of the image acquisition component.

9. The film-drawing and crystal-expanding device according to claim 7, characterized in that: There are multiple visual detection devices, and each of the multiple visual detection devices is connected to the driving device.

10. The film-drawing and crystal-expanding equipment according to claim 1, characterized in that: The film pulling and crystal expanding equipment also includes a material transporting device and a cutting device. The material transporting device is arranged on the mounting surface, and the cutting device is connected to the driving device. The material transporting device is used for loading or unloading film materials, and the cutting device is used for cutting the edge of the film material.

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