Sapphire wafer storage device

Abstract

The utility model relates to the technical field of sapphire wafers, and discloses a sapphire wafer storage device which comprises a base, a front-back adjusting guide rail body and a left-right adjusting guide rail body, and further comprises supporting columns arranged at the four corners of the top of the base. When a controller is used for controlling, a front-back adjusting guide rail body and a left-right adjusting guide rail body are matched to adjust a movable seat to the front side of a placement frame, then a first electric telescopic rod drives an L-shaped plate to descend to a proper position, and then along with movement of the movable seat, an air pump is started to suck a suction cup and a wafer body through an air suction pipe; then a first electric telescopic rod retracts to enable the wafer body to be separated from the containing disc, a front-back adjusting guide rail body and a left-right adjusting guide rail body are matched to enable a movable base to move to the top of the containing disc, then a second telescopic rod retracts to enable a connecting frame to turn over, and then an air pump is closed to enable the wafer body to fall into the containing disc to be stored; therefore, manual operation of workers is not needed, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of sapphire wafers, in particular to a sapphire wafer returning device. Background Art

[0002] Sapphire wafers are round substrates made of sapphire material, which are usually used to manufacture semiconductor devices, optical devices and other high-tech applications. These wafers usually have a high degree of flatness and excellent chemical and physical properties. In semiconductor manufacturing and other high-tech fields, a large number of wafers usually need to be processed. The use of a return device can effectively organize and manage these wafers, keep them neatly arranged, and ensure that operators can easily access the required wafers.

[0003] Currently, sapphire wafers are generally returned to the tray manually by placing the sapphire wafers on the loading tray. However, manual return requires a lot of manpower input, especially when processing large quantities of wafers, which requires a lot of time and human resources. In addition, manual operations are affected by the skill level and attention of the operators, and there is a possibility of human error, resulting in inaccurate placement or damage of the wafers. In addition, the manual return speed is relatively slow, which cannot meet the production needs of high efficiency and high output. Utility Model Content

[0004] The utility model aims to provide a sapphire wafer returning device to a disk, so as to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a sapphire wafer return device, comprising a base, a front and rear adjustment guide rail body and a left and right adjustment guide rail body, and also comprising:

[0006] Support columns are arranged at the four corners of the top of the base, the front side of the support column is fixedly connected with a controller, the front and rear adjustment guide rail body is fixed to one side of the support column, the left and right adjustment guide rail body is fixed to one side of the front and rear adjustment guide rail body, and the left and right adjustment guide rail body includes a moving seat;

[0007] A disc taking assembly is fixed to the bottom of the movable seat, a fixed shell is fixedly connected to the rear side of the top of the base, a placement disc is arranged on the top of the base, a driving assembly for stacking placement discs is fixedly connected to the top of the fixed shell, a placement rack is arranged on one side of the top of the base, a wafer body is arranged in the inner cavity of the placement rack, and a limiting plate for limiting the placement disc is fixedly connected to the rear side of the top of the base.

[0008] Preferably, a limiting groove for use with the placement rack is opened on one side of the top of the base, and the limiting plates are two and symmetrically arranged.

[0009] Preferably, a limiting frame is provided on one side of the top of the base, a spring group is fixedly connected to one side of the top of the base, and a buffer plate is fixedly connected to the top of the spring group.

[0010] Preferably, the plate-removing assembly includes a first electric telescopic rod and an L-shaped plate, the first electric telescopic rod is fixed to the bottom of the movable seat, and the bottom of the first electric telescopic rod is fixedly connected to the L-shaped plate, one side of the L-shaped plate is fixedly connected to an extension plate, the top of the extension plate is fixedly connected to an air pump, the bottom of the extension plate is fixedly connected to a second telescopic rod, the bottom of the L-shaped plate is fixedly connected to a fixed block, the bottom of the fixed block is provided with a connecting frame via a rotating shaft, one side of the second telescopic rod is fixedly connected to the connecting frame via a rotating shaft, the output end of the air pump is connected to an air suction pipe, the end of the air suction pipe away from the air suction pump passes through one side of the connecting frame and is connected to a suction cup.

[0011] Preferably, a first fixing plate for limiting a maximum flip angle of the connecting frame is fixedly connected to the rear side of the fixing block, and a second fixing plate for limiting a maximum tilting angle of the connecting frame is fixedly connected to the front side of the fixing block.

[0012] Preferably, the driving assembly includes a DC motor and a cylinder, the DC motor is fixed to the top of the fixed shell, the output end of the DC motor passes through the inner cavity of the fixed shell and is fixedly connected to a screw, the surface of the screw is sleeved with a threaded block, the front side of the threaded block is fixedly connected to a lifting plate, the cylinder is fixed to one side of the limit plate, and the output end of the cylinder is fixedly connected to a push plate.

[0013] Preferably, three connecting plates are fixedly connected to one side of the top of the base, and an inclined plate for guiding the placement rack is fixedly connected to the top of the connecting plate.

[0014] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0015] When the utility model needs to return the wafer body to the plate, the front and rear adjusting guide rail body and the left and right adjusting guide rail body are coordinated under the control of the controller to adjust the moving seat to the front side of the placement rack, and then the first electric telescopic rod drives the L-shaped plate to descend to a suitable position, and then with the movement of the moving seat, the vacuum pump is turned on to adsorb the suction cup and the wafer body through the vacuum pipe, and then the first electric telescopic rod is retracted to make the wafer body separate from the placement plate, and the moving seat is moved to the top of the placement plate by the front and rear adjusting guide rail body and the left and right adjusting guide rail body, and then the second telescopic rod is retracted to flip the connecting frame, and then the vacuum pump is turned off to drop the wafer body into the placement plate and return it to the plate, thereby eliminating the need for manual operation by the staff and improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1This is a schematic diagram of the structure of the sapphire wafer returning device provided by the utility model;

[0017] Figure 2 A rear view structural schematic diagram provided by the utility model;

[0018] Figure 3 A schematic diagram of the structure of the tray taking assembly provided by the utility model;

[0019] Figure 4 This is a schematic diagram of the structure of the drive assembly provided by the utility model.

[0020] In the figure: 1, base; 101, controller; 2, front and rear adjustment guide rail body; 3, left and right adjustment guide rail body; 31, moving seat; 4, support column; 5, plate removal assembly; 501, first electric telescopic rod; 502, L-shaped plate; 503, extension plate; 504, vacuum pump; 505, second telescopic rod; 515, fixed block; 506, connecting frame; 507, vacuum pipe; 508, suction cup; 509, first fixed plate; 510, second fixed plate; 6, fixed shell; 7, placement plate; 8, drive assembly; 801, DC motor; 802, cylinder; 803, screw; 804, threaded block; 805, lifting plate; 806, push plate; 9, placement frame; 10, wafer body; 11, limit groove; 12, limit plate; 13, limit frame; 14, spring group; 15, buffer plate; 16, connecting plate; 17, inclined plate. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] See also Figure 1-4 As shown, a sapphire wafer return device includes a base 1, a front-rear adjustment guide rail body 2 and a left-right adjustment guide rail body 3, and also includes:

[0023] The support columns 4 are arranged at the four corners of the top of the base 1, and the front side of the support columns 4 is fixedly connected with a controller 101. The front and rear adjustment guide rail body 2 is fixed to one side of the support column 4, and the left and right adjustment guide rail body 3 is fixed to one side of the front and rear adjustment guide rail body 2. The left and right adjustment guide rail body 3 includes a moving seat 31. Through the front and rear adjustment guide rail body 2, its structure includes a motor, and the threaded rod can be rotated by the motor and then the connecting piece drives the left and right adjustment guide rail body 3 to move, and the motor in the left and right adjustment guide rail body 3 can make the threaded rod rotate to cooperate with the threaded sleeve to drive the moving seat 31 to adjust. This is the prior art, and this solution will not be repeated, and those skilled in the art can clearly understand the working principle;

[0024] A disc-taking assembly 5 is fixed to the bottom of the movable seat 31, a fixed shell 6 is fixedly connected to the rear side of the top of the base 1, a placement disc 7 is arranged on the top of the base 1, and the wafer body 10 is conveniently placed by the placement disc 7, and a driving assembly 8 for stacking the placement discs 7 is fixedly connected to the top of the fixed shell 6, a placement frame 9 is arranged on one side of the top of the base 1, a limiting frame 13 is arranged on one side of the top of the base 1, a spring group 14 is fixedly connected to one side of the top of the base 1, and the limiting frame 13 can prevent the placement disc 7 from exceeding the range of the base 1 when sliding, and at the same time, the buffer plate 15 cooperates with the spring group 14 to have a buffering effect on the placement disc 7 when it falls, and the top of the spring group 14 is fixedly connected with the buffer plate 15, and the top of the base 1 A limiting groove 11 for use with the placement rack 9 is provided on one side. Through the setting of the limiting groove 11, the position of the placement rack 9 can be limited so that the disk is taken at the same position each time. There are two limiting plates 12 and they are symmetrically arranged. Three connecting plates 16 are fixedly connected to one side of the top of the base 1. The top of the connecting plate 16 is fixedly connected to an inclined plate 17 for guiding the placement disk 7. The connecting plate 16 is used to facilitate support of the inclined plate 17, and the setting of the inclined plate 17 can be aligned with the placement disk 7 for stacking. A wafer body 10 is provided in the inner cavity of the placement rack 9. A limiting plate 12 for limiting the placement disk 7 is fixedly connected to the rear side of the top of the base 1. The limiting plate 12 can limit the rear side of the placement rack 9 to prevent it from slipping.

[0025] The tray taking assembly 5 includes a first electric telescopic rod 501 and an L-shaped plate 502. The first electric telescopic rod 501 is fixed to the bottom of the movable seat 31, and the bottom of the first electric telescopic rod 501 is fixedly connected to the L-shaped plate 502. An extension plate 503 is fixedly connected to one side of the L-shaped plate 502. An air pump 504 is fixedly connected to the top of the extension plate 503. A second telescopic rod 505 is fixedly connected to the bottom of the extension plate 503. A fixed block 515 is fixedly connected to the bottom of the L-shaped plate 502. A connecting frame 506 is provided at the bottom of the fixed block 515 via a rotating shaft. One side of the second telescopic rod 505 is fixedly connected to the connecting frame 506 via a rotating shaft. An output end of the air pump 504 is connected to an air suction pipe 507. An end of the air suction pipe 507 away from the air suction pump 504 passes through one side of the connecting frame 506 and is connected to a suction cup 508. The air suction pipe 507 at the rear side of the connecting frame 506 is a hard pipe. The movable L-shaped plate 502 is lowered to a suitable position, and then with the movement of the movable seat 31, the vacuum pump 504 is turned on to adsorb the suction cup 508 to the wafer body 10 through the vacuum pipe 507, and then the first electric telescopic rod 501 is retracted, and the movable seat 31 is moved to the top of the placement tray 7 by cooperating with the front and rear adjustment guide rail body 2 and the left and right adjustment guide rail body 3, and then the second telescopic rod 505 is retracted to flip the connecting frame 506, and then the vacuum pump 504 is turned off to drop the wafer body 10 into the placement tray 7 and return it to the tray. The rear side of the fixed block 515 is fixedly connected with a first fixed plate 509 for limiting the maximum flipping angle of the connecting frame 506, and the front side of the fixed block 515 is fixedly connected with a second fixed plate 510 for limiting the maximum tilting angle of the connecting frame 506. The arrangement of the first fixed plate 509 and the second fixed plate 510 can prevent the connecting frame 506 from exceeding the angle of the taken and placed tray, so that it can be guaranteed to be always flipped at 90°.

[0026] The driving assembly 8 includes a DC motor 801 and a cylinder 802. The DC motor 801 is fixed on the top of the fixed shell 6. The output end of the DC motor 801 passes through the inner cavity of the fixed shell 6 and is fixedly connected to a screw 803. A threaded block 804 is sleeved on the surface of the screw 803. Turning on the DC motor 801 can make the screw 803 rotate. At this time, the threaded block 804 will drive the lifting plate 805 to move. When the lifting plate 805 moves, the placement rack 9 will rise. When the wafer body 10 in the placement tray 7 is full, the cylinder 802 is started to make the push plate 806 push the placement tray 7 onto the inclined plate 17, and then flow to the surface of the buffer plate 15, which is elastically supported by the spring group 14. The front side of the threaded block 804 is fixedly connected to the lifting plate 805. The cylinder 802 is fixed to one side of the limit plate 12, and the output end of the cylinder 802 is fixedly connected to the push plate 806.

[0027] Working principle: when the wafer body 10 needs to be returned to the disk, the front and rear adjustment guide rail body 2 and the left and right adjustment guide rail body 3 are coordinated under the control of the controller 101 to adjust the movable seat 31 to the front side of the placement rack 9, and then the first electric telescopic rod 501 drives the L-shaped plate 502 to descend to a suitable position, and then as the movable seat 31 moves, the vacuum pump 504 is turned on to adsorb the suction cup 508 to the wafer body 10 through the vacuum pipe 507, and then the first electric telescopic rod 501 retracts, and the movable seat 31 is moved to the top of the placement tray 7 through the front and rear adjustment guide rail body 2 and the left and right adjustment guide rail body 3, and then the second telescopic rod 505 retracts to turn the connecting frame 506 over, and then the vacuum pump is turned off The pump 504 drops the wafer body 10 into the placement rack 9 and returns it to the tray, and the tray-taking assembly 5 and the front and rear adjustment guide rail body 2 and the left and right adjustment guide rail body 3 can be set with fixed movements, the moving paths for taking and discharging materials are fixed, and when a single placement tray 7 is full, turning on the DC motor 801 can make the screw 803 rotate, at this time the threaded block 804 will drive the lifting plate 805 to move, and when the lifting plate 805 moves, the placement tray 7 will rise, and then the cylinder 802 will be started to make the push plate 806 push the placement rack 9 onto the inclined plate 17, and then flow to the surface of the buffer plate 15, and elastically support it through the spring group 14, so as to facilitate the staff to take away the returned wafer body 10 at one time.

[0028] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0029] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A sapphire wafer return device, comprising a base (1), a front and rear adjustment guide rail body (2) and a left and right adjustment guide rail body (3), characterized in that: Also includes: Support columns (4) are arranged at the four corners of the top of the base (1), the front side of the support column (4) is fixedly connected to a controller (101), the front and rear adjustment guide rail body (2) is fixed to one side of the support column (4), the left and right adjustment guide rail body (3) is fixed to one side of the front and rear adjustment guide rail body (2), and the left and right adjustment guide rail body (3) includes a moving seat (31); A disc taking assembly (5) is fixed to the bottom of the movable seat (31); a fixed shell (6) is fixedly connected to the rear side of the top of the base (1); a placement disc (7) is arranged on the top of the base (1); a driving assembly (8) for stacking the placement discs (7) is fixedly connected to the top of the fixed shell (6); a placement rack (9) is arranged on one side of the top of the base (1); a wafer body (10) is arranged in the inner cavity of the placement rack (9); and a limiting plate (12) for limiting the placement disc (7) is fixedly connected to the rear side of the top of the base (1).

2. A sapphire wafer returning device according to claim 1, characterized in that: A limiting groove (11) for use with the placement rack (9) is provided on one side of the top of the base (1), and there are two limiting plates (12) which are symmetrically arranged.

3. The sapphire wafer returning device according to claim 1, characterized in that: A limiting frame (13) is provided on one side of the top of the base (1), a spring group (14) is fixedly connected to one side of the top of the base (1), and a buffer plate (15) is fixedly connected to the top of the spring group (14).

4. The sapphire wafer returning device according to claim 1, characterized in that: The tray-taking assembly (5) comprises a first electric telescopic rod (501) and an L-shaped plate (502), wherein the first electric telescopic rod (501) is fixed to the bottom of the movable seat (31), and the bottom of the first electric telescopic rod (501) is fixedly connected to the L-shaped plate (502), one side of the L-shaped plate (502) is fixedly connected to an extension plate (503), the top of the extension plate (503) is fixedly connected to an air pump (504), and the bottom of the extension plate (503) is fixedly connected to a second telescopic rod ( 505), the bottom of the L-shaped plate (502) is fixedly connected to a fixing block (515), the bottom of the fixing block (515) is provided with a connecting frame (506) via a rotating shaft, one side of the second telescopic rod (505) is fixedly connected to the connecting frame (506) via a rotating shaft, the output end of the vacuum pump (504) is connected to a vacuum pipe (507), and one end of the vacuum pipe (507) away from the vacuum pump (504) passes through one side of the connecting frame (506) and is connected to a suction cup (508).

5. The sapphire wafer returning device according to claim 4, characterized in that: A first fixing plate (509) for limiting the maximum tilting angle of the connecting frame (506) is fixedly connected to the rear side of the fixing block (515), and a second fixing plate (510) for limiting the maximum tilting angle of the connecting frame (506) is fixedly connected to the front side of the fixing block (515).

6. The sapphire wafer returning device according to claim 1, characterized in that: The driving assembly (8) comprises a DC motor (801) and a cylinder (802); the DC motor (801) is fixed to the top of the fixed shell (6); the output end of the DC motor (801) penetrates the inner cavity of the fixed shell (6) and is fixedly connected to a screw rod (803); a threaded block (804) is sleeved on the surface of the screw rod (803); a lifting plate (805) is fixedly connected to the front side of the threaded block (804); the cylinder (802) is fixed to one side of the limit plate (12); and the output end of the cylinder (802) is fixedly connected to a push plate (806).

7. The sapphire wafer returning device according to claim 1, characterized in that: Three connecting plates (16) are fixedly connected to one side of the top of the base (1), and an inclined plate (17) for guiding the placement rack (9) is fixedly connected to the top of the connecting plate (16).

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