Cup-shaped splash guard calibration tool

Abstract

The utility model discloses a calibration tool for a cup-shaped splash guard, which is used for calibrating the distance from the cup-shaped splash guard to a suction cup and comprises a mounting frame and a distance detection piece mounted on the mounting frame, and the mounting frame is provided with a contact part in contact with the suction cup; the device further comprises a placement base, the placement base is provided with a zeroing part and a supporting part, the upper surface of the supporting part makes contact with the contact part, the zeroing part is opposite to the distance detection piece, and the upper surface of the zeroing part and the upper surface of the supporting part are located in the same horizontal plane. According to the cup-shaped splash guard calibration tool provided by the utility model, zero setting is carried out on the distance detection piece through the placement base, the distance between the detection piece and the cup-shaped splash guard is detected through the distance after the mounting frame is placed on the suction cup, and the cup-shaped splash guard calibration tool is simple in structure, simple to operate and relatively high in detection precision.

Description

Technical Field

[0001] The utility model relates to the technical field of a device specially suitable for processing wafers in the manufacturing or processing process of semiconductor or electric solid devices or components, in particular to a cup-type splash shield calibration tool. Background Art

[0002] In the coating and developing machine, the rotating unit includes a suction cup and a cup (also called a cup-type splash guard). The suction cup is used to absorb the wafer and drive the wafer to rotate after absorption. Photoresist and developer are coated on the rotating wafer. Under the action of centrifugal force, the photoresist and developer are spun from the center of the wafer to the edge of the wafer and finally thrown out from the edge of the wafer. The cup-type splash guard can block the thrown chemical liquid and collect it. In the process of spin coating, the suction cup rotates to stir the air between the suction cup and the cup-type splash guard.

[0003] There are strict requirements on the relative position relationship between the suction cup and the cup-type splash guard. If the suction cup is too close to the cup-type splash guard, the chemical liquid will splash onto the inner wall of the cup-type splash guard and then splash back onto the wafer surface, affecting the coating quality of the wafer. In addition, when the position relationship between the suction cup and the cup-type splash guard does not meet the requirements, the air flow between the two will not meet the requirements, resulting in the wafer coating uniformity not being able to meet the requirements.

[0004] When installing the rotating unit in the prior art, the suction cup is first fixed, and then the cup-shaped splash guard is installed and fixed at a certain height relative to the suction cup. In the prior art, a ruler is used to determine the installation height. The suction cup and the inner wall of the cup-shaped splash guard are not in the same horizontal plane or the same vertical direction. When using a ruler for measurement, accurate measurement can only be made in the horizontal direction or the vertical direction. In the other direction, it is necessary to measure by visual inspection or find another ruler, and the measurement error is large. Utility Model Content

[0005] In order to solve the technical problems existing in the background technology, the utility model provides a cup-shaped splash guard calibration tool.

[0006] The utility model provides a cup-shaped splash guard calibration tool, which is used to calibrate the distance from the cup-shaped splash guard to the suction cup, and comprises a mounting frame and a distance detection member mounted on the mounting frame, wherein the mounting frame has a contact portion that contacts the suction cup;

[0007] It also includes a placement base, which has a zero adjustment portion and a support portion, the upper surface of the support portion contacts the contact portion, the zero adjustment portion is opposite to the distance detection member, and the upper surface of the zero adjustment portion and the upper surface of the support portion are in the same horizontal plane.

[0008] During the working process, the mounting frame is first placed on the placement base, and the supporting part is in contact with the contact part, then the distance detection part is zeroed with the upper surface of the zeroing part as the reference, and then the mounting frame is placed on the suction cup, the contact part is in contact with the suction cup, the distance detection part is opposite to the upper end surface of the cup-shaped splash guard, and the distance detection part is used to detect the distance from the upper end surface of the cup-shaped splash guard to the upper end surface of the suction cup. The method of use is simple, easy to operate and the detection accuracy is relatively high.

[0009] Preferably, an annular positioning extension is provided at the bottom of the mounting frame, the inner diameter of the annular positioning extension is equal to the outer diameter of the suction cup, and the contact portion is located inside the annular positioning extension. In order to further increase the detection accuracy, when the structure is placed, the annular positioning extension is stuck on the outside of the suction cup to facilitate the positioning of the interference portion and the suction cup.

[0010] Preferably, an annular placement groove is provided on the placement base, and the annular placement groove matches the annular positioning extension.

[0011] Preferably, the distance detecting component is a micrometer. Of course, the distance detecting component may also be a distance sensor or other component in the prior art that can realize distance measurement.

[0012] Preferably, it also includes a mounting block, which is laterally slidably mounted on the mounting frame, and the distance detecting member is mounted on the mounting block. The mounting block can be fixed to the mounting frame by fixing members such as fixing pins in the prior art, that is, the distance between the distance detecting member and the contact portion can be adjusted to adapt to cup-shaped splash guards of different sizes.

[0013] Preferably, the distance detecting member can be rotated vertically relative to the mounting frame, thereby facilitating the rotation of the distance detecting member so that the reading portion of the distance detecting member faces the relevant staff.

[0014] Preferably, at least two groups of distance detection members are provided, and at least two groups of distance detection members are circumferentially distributed outside the contact portion, so as to further increase the detection accuracy.

[0015] Preferably, the contact portion is in surface contact with the upper surface of the suction cup.

[0016] Preferably, the mounting frame comprises a positioning disc and a mounting plate, the mounting plate is detachably mounted on the positioning disc, the positioning disc is a contact portion, and the distance detecting member is mounted on the mounting plate.

[0017] Preferably, the mounting plate is provided with a handle.

[0018] In the utility model, the cup-type splash guard calibration tool proposed is to zero the distance detection part by placing the base, and after placing the mounting frame on the suction cup, the distance detection part and the cup-type splash guard are relatively detected by the distance detection part and the cup-type splash guard. The structure is simple, the operation is simple and the detection accuracy is relatively high.

[0019] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the structure of the utility model;

[0021] Figure 2 For this utility model Figure 1 Sectional view;

[0022] Figure 3 This is a schematic diagram of the base structure of the utility model;

[0023] Figure 4 This is a schematic diagram of the structure when the mounting bracket of the utility model is placed on the suction cup;

[0024] In the figure: 1. cup-shaped splash shield; 2. suction cup; 3. mounting frame; 30. positioning disc; 31. mounting plate; 300. contact part; 310. annular positioning extension; 4. distance detection part; 5. placement base; 50. zero adjustment part; 51. support part; 52. annular placement groove; 6. mounting block; 7. handle. DETAILED DESCRIPTION

[0025] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar symbols throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0026] like Figure 1-Figure 4 A cup-shaped splash guard calibration tool is shown, which is used to calibrate the distance between the cup-shaped splash guard 1 and the suction cup 2. As in the prior art, the cup-shaped splash guard 1 is arranged outside the suction cup 2, and the suction cup 2 is used to absorb the wafer. The position of the cup-shaped splash guard 1 in the vertical direction can be adjusted (the mechanism for driving the cup-shaped splash guard 1 to move vertically is not shown in the figure), and includes a mounting frame 3 and a distance detection member 4 mounted on the mounting frame 3. The mounting frame 3 has a contact portion 300 that contacts the suction cup 2.

[0027] The placing base 5 is also included, and the placing base 5 has a zero adjustment part 50 and a supporting part 51. The upper surface of the supporting part 51 contacts the contact part 300, and the zero adjustment part 50 is opposite to the distance detecting part 4. The upper surface of the zero adjustment part 50 and the upper surface of the supporting part 51 are in the same horizontal plane.

[0028] like Figure 1-2 In the working process, there are mainly two steps: zeroing and detection. The zeroing steps mainly include:

[0029] First, the mounting frame 3 is placed on the placement base 5, and the upper surface of the support portion 51 is in contact with the lower surface of the contact portion 300. Then, the distance detection member 4 is zeroed with the upper surface of the zeroing portion 50 as a reference. Since the upper surface of the support portion 51 and the upper surface of the zeroing portion 50 are on the same horizontal plane, the height difference between the distance detection member 4 and the lower surface of the contact portion 300 is 0.

[0030] The detection steps include:

[0031] like Figure 3 As shown, the mounting bracket 3 is placed on the suction cup 2, the lower surface of the contact portion 300 is in contact with the suction cup 2, and the distance detection component 4 is opposite to the upper end surface of the cup-shaped splash guard 1. The distance detection component 4 is used to detect the distance from the upper end surface of the cup-shaped splash guard 1 to the upper end surface of the suction cup 2. The method of use is simple, easy to operate and the detection accuracy is relatively high.

[0032] like Figure 2 As shown, preferably, an annular positioning extension 310 is provided at the bottom of the mounting frame 3, the inner diameter of the annular positioning extension 310 is equal to the outer diameter of the suction cup 2, and the contact portion 300 is located in the annular positioning extension 310. In order to further increase the detection accuracy, when the structure is placed, the annular positioning extension 310 is stuck on the outside of the suction cup 2, so as to facilitate the positioning of the interference portion and the suction cup 2.

[0033] like Figure 3 As shown, on the basis of the above technical solution, preferably, an annular placement groove 52 is opened on the placement base 5, and the annular placement groove 52 matches the annular positioning extension 310, thereby increasing the accuracy of zero adjustment.

[0034] like Figure 1 As shown, in some embodiments, optionally, the distance detection member 4 is a micrometer. During the zeroing process, the detection end of the micrometer is rotated to make it contact with the upper surface of the zeroing portion 50. During the detection process, the detection end of the micrometer is rotated to make it contact with the cup-shaped splash guard 1. The reading of the micrometer is the distance from the cup-shaped splash guard 1 to the suction cup 2.

[0035] like Figure 1As shown, preferably, it also includes a mounting block 6, which is laterally slidably mounted on the mounting frame 3, and the distance detection member 4 is mounted on the mounting block 6, and the mounting block 6 can be fixed to the mounting frame 3 by fixing members such as fixing pins in the prior art, that is, the distance between the distance detection member 4 and the contact portion 300 can be adjusted, thereby adapting to cup-shaped splash guards 1 of different sizes.

[0036] like Figure 1 As shown, preferably, the distance detection member 4 can be vertically rotated relative to the mounting frame 3. On the basis of the above technical solution, the micrometer is vertically rotatably mounted on the mounting block 6, thereby facilitating the rotation of the distance detection member 4 so that the reading part of the distance detection member 4 faces the relevant staff.

[0037] like Figure 1 As shown, preferably, at least two groups of distance detection members 4 are provided. In this embodiment, two groups of distance detection members 4 are provided and are arranged at opposite ends of the mounting frame 3. At least two groups of distance detection members 4 are circumferentially distributed on the outside of the contact portion 300 to further increase the detection accuracy.

[0038] Preferably, the contact portion 300 is in surface contact with the upper surface of the suction cup 2 .

[0039] like Figure 1 As shown, preferably, the mounting frame 3 includes a positioning disc 30 and a mounting plate 31, the mounting plate 31 is detachably mounted on the positioning disc 30, the positioning disc 30 is a contact portion 300, the distance detection member 4 is mounted on the mounting plate 31, a snap-in groove is provided on the lower surface of the mounting plate 31, the snap-in groove matches the positioning disc 30, and the width of the snap-in groove is smaller than the outer diameter of the positioning disc 30, the positioning disc 30 and the mounting plate 31 are detachably mounted by screws.

[0040] like Figure 1 As shown, in order to facilitate the movement of the mounting bracket 3 , preferably, a handle 7 is provided on the mounting plate 31 , and the mounting bracket 3 can be moved by the handle 7 .

[0041] It should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0042] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0043] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0044] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0045] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A cup-shaped splash guard calibration tool, used for calibrating the distance between a cup-shaped splash guard (1) and a suction cup (2), characterized in that: It comprises a mounting frame (3) and a distance detection member (4) mounted on the mounting frame (3), wherein the mounting frame (3) has a contact portion (300) that contacts the suction cup (2); The invention also comprises a placement base (5), wherein the placement base (5) comprises a zero adjustment portion (50) and a support portion (51), wherein the upper surface of the support portion (51) contacts the contact portion (300), the zero adjustment portion (50) is opposite to the distance detection member (4), and the upper surface of the zero adjustment portion (50) and the upper surface of the support portion (51) are in the same horizontal plane.

2. The cup-shaped splash guard calibration tool according to claim 1, characterized in that: An annular positioning extension (310) is provided at the bottom of the mounting frame (3), the inner diameter of the annular positioning extension (310) is equal to the outer diameter of the suction cup (2), and the contact portion (300) is located inside the annular positioning extension (310).

3. The cup-shaped splash guard calibration tool according to claim 2, characterized in that: The placement base (5) is provided with an annular placement groove (52), and the annular placement groove (52) matches the annular positioning extension (310).

4. The cup-shaped splash guard calibration tool according to claim 1, characterized in that: The distance detection member (4) is a micrometer.

5. The cup-shaped splash guard calibration tool according to claim 1, characterized in that: It also comprises a mounting block (6), wherein the mounting block (6) is mounted on the mounting frame (3) in a transversely sliding manner, and the distance detecting element (4) is mounted on the mounting block (6).

6. The cup-shaped splash guard calibration tool according to claim 1, characterized in that: The distance detecting member (4) can rotate vertically relative to the mounting frame (3).

7. The cup-shaped splash guard calibration tool according to claim 1, characterized in that: At least two groups of the distance detection members (4) are provided, and at least two groups of the distance detection members (4) are circumferentially distributed outside the contact portion (300).

8. The cup-shaped splash guard calibration tool according to claim 1, characterized in that: The contact portion (300) contacts the upper surface of the suction cup (2).

9. The cup-shaped splash guard calibration tool according to claim 1, characterized in that: The mounting frame (3) comprises a positioning disc (30) and a mounting plate (31); the mounting plate (31) is detachably mounted on the positioning disc (30); the positioning disc (30) is a contact portion (300); and the distance detection element (4) is mounted on the mounting plate (31).

10. The cup-shaped splash guard calibration tool according to claim 9, characterized in that: The mounting plate (31) is provided with a handle (7).

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