A high voltage electrode flange for vacuum equipment

Abstract

The utility model relates to the technical field of vacuum equipment, and discloses a high-voltage electrode flange of vacuum equipment, including a vacuum equipment body and a high-voltage electrode flange body installed on the left side of the vacuum equipment body, an electrode rod body is installed inside the high-voltage electrode flange body, an insulating ring is installed on the left side of the surface of the electrode rod body, a connection hole is opened in the inner cavity of the insulating ring, and sealing rubber rings are fixedly connected on both sides of the insulating ring. The high-voltage electrode flange of the vacuum equipment adopts radiation-resistant EPDM material through the sealing rubber ring, which has the characteristics of excellent aging resistance and radiation resistance, chemical resistance and oil resistance, oxygen-free copper TU is adopted through the electrode rod body, which has the characteristics of high purity and good conductivity, and polyetheretherketone is adopted through the insulating ring, which has the characteristics of high temperature resistance, radiation resistance, corrosion resistance, and aging resistance, and at the same time, high temperature, high frequency and high voltage electrical performance conditions are good.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum equipment, in particular to a high-voltage electrode flange for vacuum equipment. Background Art

[0002] Vacuum equipment is a device that generates, improves and maintains vacuum, including vacuum application equipment and vacuum acquisition equipment.

[0003] In high-voltage vacuum equipment, vacuum internal workpieces need to be achieved through high-voltage connections that penetrate inside and outside. This high-voltage electrode flange structure, under vacuum conditions, connects high voltage through electrode rods, which improves the insulation performance of the equipment and ensures the reliability and safety of the equipment. However, the high-voltage electrode flanges of vacuum equipment in the prior art have complex structural designs, strict requirements on the distance between the electrode rods and the electrode flanges, and poor insulation and sealing properties.

[0004] Therefore, those skilled in the art provide a high-voltage electrode flange for vacuum equipment to solve the problems raised in the above background technology. Utility Model Content

[0005] The utility model aims to provide a high-voltage electrode flange for vacuum equipment to solve the problems raised in the above-mentioned background technology.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A high-voltage electrode flange for vacuum equipment comprises a vacuum equipment body and a high-voltage electrode flange body installed on the left side of the vacuum equipment body, an electrode rod body is installed inside the high-voltage electrode flange body, an insulating ring is installed on the left side of the surface of the electrode rod body, a connecting hole is provided in the inner cavity of the insulating ring, sealing rubber rings are fixedly connected on both sides of the insulating ring, a support plate is fixedly connected on the left side of the surface of the electrode rod body, and an electrode rod clamping ring is fixedly connected on the surface of the support plate.

[0008] As a further solution of the utility model: the inner cavity of the high-voltage electrode flange body is provided with four through holes, the interior of the through holes is movably connected to the surface of the electrode rod body, and the left side of the inner cavity of the electrode rod body is provided with an insertion hole.

[0009] As a further solution of the utility model: a fixing hole is opened in the inner cavity of the high-voltage electrode flange body, a connecting bolt is installed on the left side of the high-voltage electrode flange body, and the right side of the connecting bolt passes through the high-voltage electrode flange body and is connected to the left side of the vacuum equipment body.

[0010] As a further solution of the utility model: a retaining ring is installed on the right side of the high-voltage electrode flange body, the inner cavity of the retaining ring is threadedly connected with a screw spacer ring, the high-voltage electrode flange body and the retaining ring are connected via a screw spacer ring, and a protective baffle is fixedly connected to the inside of the retaining ring.

[0011] As a further solution of the utility model: the material of the electrode rod body is oxygen-free copper TU1, the material of the high-voltage electrode flange body is stainless steel 304, and the material of the insulating ring is polyetheretherketone.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] The utility model adopts radiation-resistant EPDM material through the sealing rubber ring, and has the characteristics of excellent aging resistance, radiation resistance, chemical resistance and oil resistance. The electrode rod body adopts oxygen-free copper TU, and has the characteristics of high purity and good conductivity. The insulating ring adopts polyetheretherketone, and has the characteristics of high temperature resistance, radiation resistance, corrosion resistance and aging resistance. At the same time, the high temperature, high frequency and high voltage electrical performance conditions are good. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural schematic diagram of a high-voltage electrode flange of a vacuum equipment;

[0015] Figure 2 A schematic diagram of the connection of a high-voltage electrode flange body structure in a high-voltage electrode flange of a vacuum device;

[0016] Figure 3 A schematic diagram of the connection of an electrode rod body structure in a high-voltage electrode flange of a vacuum device;

[0017] Figure 4 A cross-sectional view of a high-voltage electrode flange body structure in a high-voltage electrode flange of a vacuum device;

[0018] Figure 5 The figure is a schematic diagram of the connection of the protective baffle structure in the high-voltage electrode flange of a vacuum equipment.

[0019] In the figure: 1. Vacuum equipment body; 2. High-voltage electrode flange body; 3. Electrode rod clamping ring; 4. Insulating ring; 5. Connecting bolt; 6. Electrode rod body; 7. Connecting hole; 8. Insertion hole; 9. Protective baffle; 10. Sealing rubber ring; 11. Fixing hole; 12. Screw spacer ring; 13. Through hole; 14. Retaining ring; 15. Support plate. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] See also Figure 1-5 A high-voltage electrode flange for vacuum equipment comprises a vacuum equipment body 1 and a high-voltage electrode flange body 2 installed on the left side of the vacuum equipment body 1, an electrode rod body 6 is installed inside the high-voltage electrode flange body 2, an insulating ring 4 is installed on the left side of the surface of the electrode rod body 6, a connecting hole 7 is opened in the inner cavity of the insulating ring 4, and sealing rubber rings 10 are fixedly connected on both sides of the insulating ring 4. The sealing rubber ring 10 is made of radiation-resistant EPDM material, which has the characteristics of excellent aging resistance and radiation resistance, chemical resistance and oil resistance. A support plate 15 is fixedly connected to the left side of the surface of the electrode rod body 6, and an electrode rod clamping ring 3 is fixedly connected to the surface of the support plate 15.

[0022] Specifically, the inner cavity of the high-voltage electrode flange body 2 is provided with through holes 13, and the number of through holes 13 is four. The inside of the through holes 13 is movably connected to the surface of the electrode rod body 6, and the left side of the inner cavity of the electrode rod body 6 is provided with an insertion hole 8. Through the above technical scheme, through the setting of the through holes 13, the electrode rod body 6 can be conveniently installed in the interior of the high-voltage electrode flange body 2. At the same time, the setting of the insertion hole 8 facilitates the connection of the electrode rod body 6 with an external high-voltage cable.

[0023] Specifically, a fixing hole 11 is opened in the inner cavity of the high-voltage electrode flange body 2, and a connecting bolt 5 is installed on the left side of the high-voltage electrode flange body 2. The right side of the connecting bolt 5 passes through the high-voltage electrode flange body 2 and is connected to the left side of the vacuum equipment body 1. Through the above technical scheme, through the setting of the fixing hole 11, the connecting bolt 5 can smoothly pass through the high-voltage electrode flange body 2. At the same time, the setting of the connecting bolt 5 can conveniently fix the high-voltage electrode flange body 2 to the left side of the vacuum equipment body 1, thereby achieving the effect of connection and fixing.

[0024] Specifically, a retaining ring 14 is installed on the right side of the high-voltage electrode flange body 2, and the inner cavity of the retaining ring 14 is threadedly connected to a screw spacer ring 12. The high-voltage electrode flange body 2 and the retaining ring 14 are connected via the screw spacer ring 12, and the interior of the retaining ring 14 is fixedly connected to a protective baffle 9. Through the above technical scheme, the retaining ring 14 is conveniently installed on the right side of the high-voltage electrode flange body 2 through the setting of the screw spacer ring 12. At the same time, the setting of the protective baffle 9 prevents the damage to the insulating material caused by internal vacuum contamination, so that the insulating material can be used for a longer period of time.

[0025] Specifically, the material of the electrode rod body 6 is oxygen-free copper TU1, the material of the high-voltage electrode flange body 2 is stainless steel 304, and the material of the insulating ring 4 is polyetheretherketone. Through the above technical scheme, the electrode rod body 6 adopts oxygen-free copper TU1, which has the characteristics of high purity and good conductivity, and the insulating ring 4 adopts polyetheretherketone, which has the characteristics of high temperature resistance, radiation resistance, corrosion resistance, and aging resistance, and at the same time, the high temperature, high frequency and high voltage electrical performance conditions are good.

[0026] The working principle of the utility model is: first, the retaining ring 14 is installed on the right side of the high-voltage electrode flange body 2 through the screw spacer ring 12, and the retaining ring 14 drives the protective baffle 9 to be fixed on the right side of the high-voltage electrode flange body 2, and then the high-voltage electrode flange body 2 is fitted to the left side of the vacuum equipment body 1, and then the high-voltage electrode flange body 2 is fixed to one side of the vacuum equipment body 1 through the connecting bolts 5. At this time, the electrode rod body 6 extends into the interior of the vacuum equipment body 1, and the high-voltage electrode flange body 2 is sealed by the insulating ring 4 and the sealing rubber ring 10, and is fixed on the plane flange with a gland structure, so that the insulation and sealing performance of the electrode rod body 6 and the high-voltage electrode flange body 2 are achieved. The end of the electrode rod body 6 is designed with an insertion hole 8 to achieve the effect of connecting high-voltage wires. A protective baffle 9 is designed on the vacuum end face of the high-voltage electrode flange body 2, and is fixed and locked with a screw spacer ring 12 to prevent the damage of the insulating material to the insulating material caused by the internal pollution of the vacuum, so that the insulating material can be used for a longer time.

[0027] The above are only preferred specific implementation methods of the utility model, but the protection scope of the utility model is not limited to this. Any technician familiar with the technical field within the technical scope disclosed by the utility model, who makes equivalent replacements or changes based on the technical scheme and utility model concept of the utility model, should be covered by the protection scope of the utility model.

Claims

1. A high-voltage electrode flange for vacuum equipment, comprising a vacuum equipment body (1) and a high-voltage electrode flange body (2) installed on the left side of the vacuum equipment body (1), characterized in that: An electrode rod body (6) is installed inside the high-voltage electrode flange body (2); an insulating ring (4) is installed on the left side of the surface of the electrode rod body (6); a connecting hole (7) is opened in the inner cavity of the insulating ring (4); sealing rubber rings (10) are fixedly connected on both sides of the insulating ring (4); a support plate (15) is fixedly connected on the left side of the surface of the electrode rod body (6); and an electrode rod clamping ring (3) is fixedly connected on the surface of the support plate (15).

2. A high-voltage electrode flange for vacuum equipment according to claim 1, characterized in that: The inner cavity of the high-voltage electrode flange body (2) is provided with through holes (13), the number of the through holes (13) is four, the interior of the through holes (13) is movably connected to the surface of the electrode rod body (6), and the left side of the inner cavity of the electrode rod body (6) is provided with an insertion hole (8).

3. The high-voltage electrode flange of a vacuum equipment according to claim 1, characterized in that: The inner cavity of the high-voltage electrode flange body (2) is provided with a fixing hole (11), the left side of the high-voltage electrode flange body (2) is installed with a connecting bolt (5), and the right side of the connecting bolt (5) passes through the high-voltage electrode flange body (2) and is connected to the left side of the vacuum equipment body (1).

4. The high-voltage electrode flange of a vacuum equipment according to claim 1, characterized in that: A retaining ring (14) is installed on the right side of the high-voltage electrode flange body (2), and the inner cavity of the retaining ring (14) is threadedly connected to a screw spacer ring (12). The high-voltage electrode flange body (2) and the retaining ring (14) are connected via the screw spacer ring (12), and a protective baffle (9) is fixedly connected to the inside of the retaining ring (14).

5. The high-voltage electrode flange of a vacuum equipment according to claim 1, characterized in that: The material of the electrode rod body (6) is oxygen-free copper TU1, the material of the high-voltage electrode flange body (2) is stainless steel 304, and the material of the insulating ring (4) is polyetheretherketone.

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