Automatic feeding device for photoresist production line

Abstract

The utility model proposes an automatic feeding device for a photoresist production line, which relates to the technical field of photoresist production and processing, and includes a mixing tank and a circular base fixedly installed on the outer bottom of the mixing tank, wherein the outer top of the mixing tank is fixedly connected to a sealing cover through a mounting block, a feeding box is fixedly installed at the middle position of the outer top of the sealing cover, and a mixing assembly for premixing raw materials is arranged inside the feeding box. The utility model can transport various photoresist raw materials into the feeding box through the first and second feeding boxes, and flow from top to bottom along the spiral guide channel, and are respectively transported to the inside of the mixing tank through pipelines, and the raw materials inside the feeding box are continuously heated by a heating pipe, thereby maintaining the fluidity of the raw materials, and promoting the premixing of various raw materials, thereby meeting the production and feeding needs of multiple photoresists.

Description

Technical Field

[0001] The utility model relates to the technical field of photoresist production and processing, in particular to an automatic feeding device for a photoresist production line. Background Art

[0002] Photoresist, also known as photoresist, refers to a thin film material that changes its solubility when exposed to ultraviolet light, electron beam, ion beam, X-ray, etc. In the photoresist process, after the coating is exposed and developed, the exposed part is dissolved and the unexposed part remains. The coating material is a positive photoresist. If the exposed part is retained and the unexposed part is dissolved, the coating material is a negative photoresist. Photoresist needs to be fed during the production process.

[0003] At present, the general automatic feeding device usually adopts the long axis to drive the blade to carry out circumferential rotation stirring after feeding. For example, the Chinese patent publication number CN220592096U discloses an automatic feeding device for positive photoresist production, including a stirring and mixing box, and a side conveying pipeline is fixedly connected to one side of the upper part of the stirring and mixing box. In the above-mentioned public document, a cavity is provided inside the horizontal conveying box on one side of the lower part of the device, so that the colloid is conveniently transported to the inside of the cavity, and the rotating rod is driven to move at the same time, and a double-layer conveying pipeline is installed inside, so that the efficiency of the device is increased and when the internal single conveying pipeline has problems, the pipeline on the other side can continue to convey, so as to increase the practicality and convenience of the device when it is used. However, when the patent is used, it is not conducive to feeding and producing multiple photoresists at the same time, and when cleaning and maintenance are performed, it is necessary to stop and wait, which easily causes the subsequent processing time to be long, so that the processing efficiency is low. For this reason, those skilled in the art provide an automatic feeding device for photoresist production line to solve the problems raised in the above-mentioned background technology. Summary of the invention

[0004] In view of the deficiencies in the prior art, the utility model provides an automatic feeding device for a photoresist production line, which can effectively solve the problems in the background technology that it is not conducive to feeding and producing multiple photoresists at the same time, and that the machine needs to be stopped and waited for cleaning and maintenance, which easily causes the subsequent processing time to be long, thereby making the processing efficiency low.

[0005] To achieve the above purpose, the utility model is implemented by the following technical scheme: an automatic feeding device for a photoresist production line, comprising a mixing tank and a round base fixedly installed on the outer bottom of the mixing tank, the outer top of the mixing tank is fixedly connected to a sealing cover through a mounting block, a feeding box is fixedly installed at the middle position of the outer top of the sealing cover, and a mixing component for premixing raw materials is arranged inside the feeding box;

[0006] The mixing tank is provided with a first chamber and a second chamber respectively, and the inner bottom surfaces of the first chamber and the second chamber are provided with uniform components for linkage mixing of the raw materials;

[0007] The bottom discharge end of the feeding box is connected to the first feeding pipe and the second feeding pipe respectively, and the first feeding pipe and the second feeding pipe both pass through the sealing cover and are connected to the first chamber and the second chamber respectively, the bottom of the inner side walls of the first chamber and the second chamber are respectively connected to the first discharge pipe and the second discharge pipe, and the first discharge pipe and the second discharge pipe extend to the outside of the mixing tank respectively.

[0008] As a further technical solution of the utility model, the mixing assembly includes a spiral plate arranged inside a feeding box, and a spiral guide channel is formed between the spiral plate and the feeding box, the discharge end of the spiral guide channel is respectively connected to the first feeding pipe and the second feeding pipe, and the two ends of the outer top of the feeding box are respectively connected to the first distribution box and the second distribution box, and a heating pipe is wound inside the feeding box, and the outer wall of the heating pipe is also connected to a protective shell.

[0009] As a further technical solution of the utility model, the uniformizing component includes a rotating shaft and a rotating shaft which are rotatably connected to the center positions of the inner bottom surfaces of the first chamber and the second chamber respectively, one end of the rotating shaft and the rotating shaft passes through the mixing tank and extends to the inner side of the circular base, wherein the rotating shaft is rotatably connected to the inner bottom surface of the circular base, and the rotating shaft is fixedly connected to the output end of the driving motor fixedly mounted on the inner bottom surface of the circular base.

[0010] As a further technical solution of the utility model, a first pulley and a second pulley are fixedly installed on the inner side of the circular base and on the outer circumferential surface of the rotating shaft and the rotating shaft, and the first pulley and the second pulley are connected to each other through a transmission belt.

[0011] As a further technical solution of the utility model, a first stirring blade and a second stirring blade are symmetrically installed on the outer circumferential surface of the other end of the rotating shaft and the rotating shaft through a connecting sleeve, and a first U-shaped frame and a second U-shaped frame are fixedly installed on the outer walls of both sides of the first stirring blade and the second stirring blade and on the bottom of the outer circumferential surface of the rotating shaft and the rotating shaft.

[0012] As a further technical solution of the utility model, a first storage box and a second storage box are connected to the outer side walls at both ends of the circular base, and the first storage box and the second storage box are respectively connected to the first discharge pipe and the second discharge pipe.

[0013] The utility model provides an automatic feeding device for a photoresist production line, which has the following beneficial effects compared with the prior art:

[0014] 1. An automatic feeding device for a photoresist production line. During production, photoresist raw materials can be synchronously transported to a feeding box through a first feeding box and a second feeding box, and flow from top to bottom along a spiral guide channel. In the process of transporting the raw materials through the spiral guide channel, the raw materials are pre-mixed. In addition, the heating of a heating tube can be used to improve the mixing efficiency and ensure the fluidity of the raw material mixture. After pre-mixing, the raw materials are transported to the inside of a first chamber and a second chamber for secondary mixing and proportioning, thereby improving the feeding efficiency during mixing and stirring of the photoresist.

[0015] 2. An automatic feeding device for a photoresist production line, which utilizes a driving motor as a power source and, under the cooperation of a first pulley, a second pulley and a transmission belt, enables a rotating shaft and a rotating shaft to rotate synchronously, thereby allowing a first stirring blade and a second stirring blade to mix and stir the photoresist raw materials in a first chamber and a second chamber respectively, thereby being able to meet the processing requirements for the production of multiple photoresists, while also avoiding the problem of long subsequent processing time and low processing efficiency due to downtime waiting for cleaning and maintenance, thereby helping to improve the work efficiency of processing and production.

[0016] 3. An automatic feeding device for a photoresist production line can scrape and clean the inner wall and inner bottom surface of a first chamber and a second chamber by setting a first U-shaped frame and a second U-shaped frame, so as to avoid long-term adhesion of photoresist raw materials resulting in poor efficiency of subsequent mixing processing, thereby further improving the applicability of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a three-dimensional structural schematic diagram of an automatic feeding device for a photoresist production line;

[0018] Figure 2 It is a cross-sectional three-dimensional structural schematic diagram of an automatic feeding device for a photoresist production line;

[0019] Figure 3 A schematic diagram of the structure decomposition of a mixing component of an automatic feeding device for a photoresist production line;

[0020] Figure 4 A schematic diagram of the three-dimensional structure of uniform components of an automatic feeding device for a photoresist production line

[0021] In the figure: 1. mixing tank; 2. round base; 3. mounting block; 4. sealing cover; 5. first chamber; 6. second chamber; 7. feeding box; 8. first feeding pipe; 9. first discharging pipe; 10. second discharging pipe; 11. rotating shaft; 12. rotating shaft; 13. driving motor; 14. first pulley; 15. second pulley; 16. transmission belt; 17. connecting sleeve; 18. first stirring blade; 19. second stirring blade; 20. first U-shaped frame; 21. second U-shaped frame; 22. second feeding pipe; 23. first distribution box; 24. second distribution box; 25. first storage box; 26. second storage box; 27. spiral guide channel; 28. heating tube; 29. ​​protective shell. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0023] See also Figure 1-4 As shown, an automatic feeding device for a photoresist production line comprises a mixing tank 1 and a circular base 2 fixedly mounted on the outer bottom of the mixing tank 1, the outer top of the mixing tank 1 is fixedly connected to a sealing cover 4 through a mounting block 3, a feeding box 7 is fixedly mounted at the middle position of the outer top of the sealing cover 4, and a mixing assembly for premixing raw materials is arranged inside the feeding box 7, the mixing assembly comprises a spiral plate arranged inside the feeding box 7, and a spiral guide channel 27 is formed between the spiral plate and the feeding box 7, the discharge end of the spiral guide channel 27 is respectively connected to a first feeding pipe 8 and a second feeding pipe 22, the two ends of the outer top of the feeding box 7 are respectively connected to a first distribution box 23 and a second distribution box 24, and a heating tube 28 is wound inside the feeding box 7, In addition, the outer wall of the heating tube 28 is also connected to a protective shell 29. During production, the raw materials are first transported to the first distribution box 23 and the second distribution box 24, and then transported to the feeding box 7 at the same time, and flow from top to bottom along the spiral guide channel 27, and then transported to the interior of the mixing tank 1 through the first feeding pipe 8 and the second feeding pipe 22. When the raw materials flow from top to bottom in the spiral guide channel 27 inside the feeding box 7, the raw materials will be pre-mixed under the action of the spiral guide channel 27. In addition, starting the heating tube 28 can heat the feeding box 7 to ensure the temperature inside the feeding box 7, so as to maintain the fluidity of the raw materials when passing through the spiral guide channel 27, thereby further improving the efficiency of mixing in photoresist production and the efficiency of feeding during mixing.

[0024] The mixing tank 1 is provided with a first chamber 5 and a second chamber 6, respectively, and a uniform component for linkage mixing of raw materials is provided on the inner bottom surface of the first chamber 5 and the second chamber 6, and the uniform component includes a rotating shaft 11 and a rotating shaft 12 which are respectively rotatably connected to the center position of the inner bottom surface of the first chamber 5 and the second chamber 6, and one end of the rotating shaft 11 and the rotating shaft 12 passes through the mixing tank 1 and extends to the inner side of the round-shaped base 2, wherein the rotating shaft 11 is rotatably connected to the inner bottom surface of the round-shaped base 2, and the rotating shaft 12 is fixedly connected to the output end of the driving motor 13 fixedly installed on the inner bottom surface of the round-shaped base 2 A first pulley 14 and a second pulley 15 are fixedly installed on the inner side of the circular base 2 and on the outer circumferential surfaces of the rotating shaft 11 and the rotating shaft 12, and the first pulley 14 and the second pulley 15 are connected to each other through a transmission belt 16. A first stirring blade 18 and a second stirring blade 19 are symmetrically installed on the outer circumferential surfaces of the other ends of the rotating shaft 11 and the rotating shaft 12 through a connecting sleeve 17. A first U-shaped frame 20 and a second U-shaped frame 21 are fixedly installed on the outer walls of both sides of the first stirring blade 18 and the second stirring blade 19 and on the bottom of the outer circumferential surfaces of the rotating shaft 11 and the rotating shaft 12. By starting the driving motor 13 to drive the rotating shaft 12 to rotate, and through the transmission belt 16 to drive the first pulley 14 and the second pulley 15 to be linked, the rotating shaft 12 drives the rotating shaft 11 to be linked synchronously, so that the first stirring blade 18, the second stirring blade 19 and the first U-shaped frame 20 and the second U-shaped frame 21 can fully mix and stir the photoresist raw materials in the first chamber 5 and the second chamber 6 respectively, so as to meet the processing requirements of producing multiple photoresists at the same time, and also avoid the problem of long subsequent processing time and low processing efficiency due to downtime waiting for cleaning and maintenance, which is beneficial to improving the work efficiency of processing and production.

[0025] The bottom discharge end of the feeding box 7 is respectively connected with the first feeding pipe 8 and the second feeding pipe 22, and the first feeding pipe 8 and the second feeding pipe 22 both pass through the sealing cover 4 and are respectively connected with the first chamber 5 and the second chamber 6, the bottom of the inner side walls of the first chamber 5 and the second chamber 6 are respectively connected with the first discharge pipe 9 and the second discharge pipe 10, and the first discharge pipe 9 and the second discharge pipe 10 extend to the outside of the mixing tank 1 respectively, and the first storage box 25 and the second storage box 26 are connected to the outer side walls of the two ends of the circular base 2, and the first storage box 25 and the second storage box 26 are respectively connected with the first discharge pipe 9 and the second discharge pipe 10. After the raw materials are transported and pre-mixed through the feeding box 7, they are transported to the first chamber 5 and the second chamber 6 through the first feeding pipe 8 and the second feeding pipe 22 for secondary mixing. After the photoresists inside the first chamber 5 and the second chamber 6 are fully mixed and reacted, the valves on the first discharge pipe 9 and the second discharge pipe 10 are opened to discharge the mixed photoresists into the first storage box 25 and the second storage box 26 for classified storage, so as to meet the requirements for producing different types of photoresists and help improve production efficiency.

[0026] The working principle of the utility model is as follows: when in use, different photoresist raw materials are first synchronously conveyed from the first distribution box 23 and the second distribution box 24 to the feed box 7, and flow from top to bottom along the spiral guide channel 27. The spiral characteristics of the spiral guide channel 27 are used to preliminarily premix the raw materials. In addition, starting the heating tube 28 can heat the feed box 7 to ensure the temperature inside the feed box 7, so as to maintain the fluidity of the raw materials when passing through the spiral guide channel 27, further improving the efficiency of photoresist production mixing. At the same time, the premixed raw materials in the feed box 7 are respectively conveyed to the first chamber 5 and the second chamber 6 inside the mixing tank 1 through the first feeding pipe 8 and the second feeding pipe 22.

[0027] At the same time, the driving motor 13 is started to drive the rotating shaft 12 to rotate, and the first pulley 14 and the second pulley 15 are driven to rotate through the transmission belt 16, so that the rotating shaft 12 drives the rotating shaft 11 to rotate synchronously, so that the first stirring blade 18, the second stirring blade 19 and the first U-shaped frame 20 and the second U-shaped frame 21 can respectively perform secondary mixing and stirring on the photoresist raw materials in the first chamber 5 and the second chamber 6.

[0028] At the same time, after the sufficient mixing reaction is completed, the valves on the first discharge pipe 9 and the second discharge pipe 10 are opened, and the mixed photoresist is discharged into the first storage box 25 and the second storage box 26 along the first discharge pipe 9 and the second discharge pipe 10 for classified storage, so as to meet the requirements for producing different types of photoresists, which is conducive to improving production efficiency.

[0029] The above is only a preferred embodiment of the present invention. It should be noted that, for ordinary technicians in the technical field, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be regarded as the protection scope of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to the conventional means in the field unless otherwise specified and limited.

Claims

1. An automatic feeding device for a photoresist production line, characterized in that: It comprises a mixing tank (1) and a circular base (2) fixedly mounted on the outer bottom of the mixing tank (1); the outer top of the mixing tank (1) is fixedly connected to a sealing cover (4) via a mounting block (3); a feeding box (7) is fixedly mounted at the middle position of the outer top of the sealing cover (4); and a mixing assembly for premixing raw materials is arranged inside the feeding box (7); The mixing tank (1) is provided with a first chamber (5) and a second chamber (6) respectively, and a uniform component for linkage mixing of raw materials is provided on the inner bottom surfaces of the first chamber (5) and the second chamber (6); The bottom discharge end of the feeding box (7) is connected to the first feeding pipe (8) and the second feeding pipe (22), and the first feeding pipe (8) and the second feeding pipe (22) pass through the sealing cover (4) and are connected to the first chamber (5) and the second chamber (6), respectively. The bottom of the inner side wall of the first chamber (5) and the second chamber (6) is connected to the first discharge pipe (9) and the second discharge pipe (10), respectively, and the first discharge pipe (9) and the second discharge pipe (10) extend to the outside of the mixing tank (1) on both sides.

2. The automatic feeding device for a photoresist production line according to claim 1, characterized in that: The mixing assembly comprises a spiral plate arranged inside a feeding box (7), and a spiral guide channel (27) is formed between the spiral plate and the feeding box (7), the discharge end of the spiral guide channel (27) is respectively connected to the first feeding pipe (8) and the second feeding pipe (22), and the two ends of the outer top of the feeding box (7) are respectively connected to the first distribution box (23) and the second distribution box (24), and a heating pipe (28) is wound inside the feeding box (7), and the outer side wall of the heating pipe (28) is also connected to a protective shell (29).

3. The automatic feeding device for a photoresist production line according to claim 1, characterized in that: The uniform component comprises a rotating shaft (11) and a rotating shaft (12) which are rotatably connected to the center positions of the inner bottom surfaces of the first chamber (5) and the second chamber (6), respectively. One end of the rotating shaft (11) and the rotating shaft (12) penetrates the mixing tank (1) and extends to the inner side of the circular base (2), wherein the rotating shaft (11) is rotatably connected to the inner bottom surface of the circular base (2), and the rotating shaft (12) is fixedly connected to the output end of a driving motor (13) fixedly mounted on the inner bottom surface of the circular base (2).

4. The automatic feeding device for a photoresist production line according to claim 3, characterized in that: A first belt pulley (14) and a second belt pulley (15) are respectively fixedly mounted on the inner side of the circular base (2) and on the outer peripheral surfaces of the rotating shaft (11) and the rotating shaft (12), and the first belt pulley (14) and the second belt pulley (15) are connected to each other via a transmission belt (16).

5. The automatic feeding device for a photoresist production line according to claim 3, characterized in that: A first stirring blade (18) and a second stirring blade (19) are symmetrically mounted on the outer peripheral surfaces of the other ends of the rotating shaft (11) and the rotating shaft (12) via a connecting sleeve (17); a first U-shaped frame (20) and a second U-shaped frame (21) are fixedly mounted on the outer walls of both sides of the first stirring blade (18) and the second stirring blade (19) and located at the bottom of the outer peripheral surfaces of the rotating shaft (11) and the rotating shaft (12).

6. The automatic feeding device for a photoresist production line according to claim 1, characterized in that: A first storage box (25) and a second storage box (26) are connected to the outer side walls at both ends of the circular base (2), and the first storage box (25) and the second storage box (26) are respectively connected to the first discharge pipe (9) and the second discharge pipe (10).

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