Exhaust pipe and temperature control equipment

Abstract

The utility model discloses an exhaust pipe and temperature control equipment, the exhaust pipe is used for process temperature regulation of display product production, the exhaust pipe comprises a first gas guide pipe and a second gas guide pipe, the first gas guide pipe is sleeved in the second gas guide pipe, so that a first space with at least one closed end is formed between the first gas guide pipe and the second gas guide pipe; the first end of the first air guide pipe is communicated with an external air source, and the first space is closed at the end where the first end is located; in the extending direction of the second gas guide pipe, a plurality of first exhaust holes are evenly distributed in the pipe wall of the second gas guide pipe, and the length of the movement path of gas of the external gas source from entering the first end to being exhausted from the first exhaust hole exhausted first is at least larger than the length of the first gas guide pipe.

Description

Technical Field

[0001] The utility model relates to the technical field of electroluminescence, in particular to an exhaust pipe and a temperature control device. Background Art

[0002] In the production process of an organic light-emitting diode (OLED) display panel, a temperature control device is usually required to control the temperature during the process.

[0003] In the prior art, an exhaust pipe is usually provided inside the temperature control device, such as Figure 1 There are multiple exhaust holes distributed on the wall of the exhaust pipe shown. After cold air is introduced into the air inlet end of the exhaust hole, the cold air enters the exhaust pipe, and the gas is directly ejected from the exhaust holes. Since the temperature of the gas ejected from the exhaust holes close to the air inlet end is lower, the defects of the OLED display panel are concentrated near the exhaust holes close to the air inlet end, affecting the product yield. Utility Model Content

[0004] The embodiment of the utility model provides an exhaust pipe and a temperature control device, which are used to solve the technical problem in the prior art that the exhaust pipe temperature control effect is poor and the product yield is affected.

[0005] In the first aspect, in order to solve the above technical problems, the embodiment of the utility model provides an exhaust pipe, which is used for process temperature adjustment in the production of display products, including:

[0006] a first air duct and a second air duct, wherein the first air duct is sleeved in the second air duct, so that a first space with at least one end being closed is formed between the first air duct and the second air duct;

[0007] The first end of the first air guide tube is in communication with an external air source, and the first space is closed at the end where the first end is located;

[0008] In the extension direction of the second air duct, a plurality of first exhaust holes are evenly distributed on the tube wall of the second air duct, and the length of the movement path that the gas from the external air source travels from entering the first end to being discharged from the first exhaust hole is at least greater than the length of the first air duct.

[0009] In a possible implementation manner, a second end of the first air duct opposite to the first end is opened, and the opening of the second end discharges the gas in the first air duct into the first space;

[0010] Alternatively, the second end is closed, and a tube wall of the first air duct close to the second end has a plurality of second exhaust holes, and the plurality of second exhaust holes exhaust the gas in the first air duct into the first space.

[0011] In a possible implementation manner, the first airway includes:

[0012] A plurality of sub-air ducts sleeved with each other, wherein two adjacent sub-air ducts of the plurality of sub-air ducts include a first sub-air duct and a second sub-air duct, the first sub-air duct is sleeved in the second sub-air duct, so that a second space with at least one end closed is formed between the first sub-air duct and the second sub-air duct, and the closed end of the second space is close to the first end;

[0013] The air inlet position and the air outlet position of the first sub-air duct and the second sub-air duct are respectively located at different ends of the first air duct.

[0014] In some embodiments, a ratio of a cross-sectional area of ​​the second airway tube for accommodating gas to a cross-sectional area of ​​the first airway tube for accommodating gas is greater than 2.

[0015] In a possible implementation manner, an air inlet position of the first sub-air duct is close to the first end, and an air outlet position of the first sub-air duct is close to the second end; wherein the second end is the other end of the first air duct opposite to the first end;

[0016] The second sub-air guide pipe is closed at the end where the second end is located, and has a plurality of third exhaust holes on the pipe wall close to the first end.

[0017] In a possible implementation manner, the first sub-air duct is closed at the end where the second end is located;

[0018] The first sub-air guide tube has a plurality of fourth exhaust holes on the tube wall close to the second end.

[0019] In a possible implementation manner, the first sub-air duct is opened at the end where the second end is located.

[0020] In a possible implementation manner, the air inlet position of the first sub-air duct is close to the second end, and the first sub-air duct is closed at the end where the second end is located, and the air outlet position of the first sub-air duct is close to the first end; wherein the second end is the other end of the first air duct opposite to the first end;

[0021] The first sub-air guide tube has a plurality of fifth exhaust holes on the tube wall close to the first end.

[0022] In a possible implementation manner, the second sub-air duct is opened at the end where the second end is located.

[0023] In a possible implementation manner, the second sub-air duct is closed at the end where the second end is located;

[0024] The second sub-air guide tube has a plurality of sixth exhaust holes on the tube wall close to the second end.

[0025] In a possible implementation manner, the first exhaust hole intersects with an opening direction of an exhaust hole in the first air guide pipe.

[0026] In a possible implementation manner, the exhaust pipe further includes:

[0027] A plurality of support columns are located between the walls of two adjacent layers of the air guide tubes.

[0028] In a possible implementation manner, the exhaust pipe is made of at least one of glass, metal, ceramic, and plastic.

[0029] In a possible implementation manner, the thickness of the portion of the first air duct enclosing the first space is smaller than the wall thickness of the first air duct.

[0030] In a possible implementation manner, the exhaust pipe is made of the metal or the plastic, and a welding seam is provided at a welding position of the first air guide pipe and the second air guide pipe.

[0031] In a second aspect, an embodiment of the present utility model provides a temperature control device, comprising:

[0032] Close the cavity;

[0033] The exhaust pipe as described in the first aspect is located in the closed cavity;

[0034] The external air source is located outside the closed cavity and is communicated with the exhaust pipe. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 is a schematic diagram of an exhaust pipe;

[0036] Figure 2 A schematic diagram of the structure of an exhaust pipe provided by an embodiment of the utility model;

[0037] Figure 3 A schematic diagram of the structure of another exhaust pipe provided in an embodiment of the utility model;

[0038] Figure 4 A three-dimensional perspective view of an exhaust pipe provided in an embodiment of the utility model;

[0039] Figure 5 A schematic diagram of the structure of another first air guide tube provided in an embodiment of the utility model;

[0040] Figure 6 A schematic diagram of the structure of another exhaust pipe provided in an embodiment of the utility model;

[0041] Figure 7 A schematic diagram of the structure of another first air guide tube provided in an embodiment of the utility model;

[0042] Figure 8 A schematic diagram of the structure of another exhaust pipe provided in an embodiment of the utility model;

[0043] Fig. 9 A schematic diagram of the structure of another first air guide tube provided in an embodiment of the utility model;

[0044] Fig.10 A schematic diagram of the structure of another exhaust pipe provided in an embodiment of the utility model;

[0045] Fig.11 A schematic diagram of the structure of another first air guide tube provided in an embodiment of the utility model;

[0046] Fig.12 A three-dimensional perspective view of another exhaust pipe provided by an embodiment of the utility model;

[0047] Fig.13 A three-dimensional perspective view of another exhaust pipe provided by an embodiment of the utility model;

[0048] Fig.14 Another exhaust pipe cross-sectional view provided for an embodiment of the utility model;

[0049] Fig.15 A schematic diagram of the structure of an exhaust pipe provided by an embodiment of the utility model;

[0050] Fig.16 A schematic diagram of a first air guide tube before welding provided in an embodiment of the utility model;

[0051] Fig.17 A schematic diagram of the structure of another exhaust pipe provided in an embodiment of the utility model;

[0052] Fig.18 A schematic structural diagram of a temperature control device provided in an embodiment of the utility model.

[0053] Reference numerals:

[0054] First air duct 1, second air duct 2, first space A, first end 1a, second end 1b, first exhaust hole H1, second exhaust hole H2, sub-air duct 11, first sub-air duct 11a, second sub-air duct 11b, second space B, third exhaust hole H3, fourth exhaust hole H4, fifth exhaust hole H5, sixth exhaust hole H6, support column 3;

[0055] The closed cavity 100 , the exhaust pipe 200 , and the external gas source 300 . DETAILED DESCRIPTION

[0056] The embodiment of the utility model provides an exhaust pipe and a temperature control device, which are used to solve the technical problem in the prior art that the exhaust pipe temperature control effect is poor and the product yield is affected.

[0057] It should be understood that the specific structural and functional details disclosed in the embodiments of the present invention are merely representative and are for the purpose of describing exemplary embodiments of the present invention. However, the present invention can be specifically implemented in many alternative forms and should not be interpreted as being limited to the embodiments described herein.

[0058] In the description of the present utility model, it should be understood that the terms "center", "lateral", "up", "down", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more. In addition, the term "including" and any variation thereof are intended to cover non-exclusive inclusions.

[0059] The terms used in the present invention are only for describing specific embodiments and are not intended to limit exemplary embodiments. Unless the context clearly indicates otherwise, the singular forms "one", "one" and "item" used herein are also intended to include the plural. It should also be understood that the terms "include" and / or "comprise" used herein specify the existence of stated features, integers, steps, operations, units and / or components, without excluding the existence or addition of one or more other features, integers, steps, operations, units, components and / or combinations thereof.

[0060] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the utility model will be further described in conjunction with the drawings and examples below. However, the example embodiments can be implemented in various forms and should not be understood as being limited to the embodiments described herein; on the contrary, these embodiments are provided to make the utility model more comprehensive and complete, and to fully convey the concepts of the example embodiments to those skilled in the art. The same figure marks in the figures represent the same or similar structures, and their repeated descriptions will be omitted. The words expressing position and direction described in the utility model are all explained with the drawings as examples, but changes can be made as needed, and the changes made are all included in the scope of protection of the utility model. The drawings of the utility model are only used to illustrate the relative position relationship and do not represent the true proportion.

[0061] It should be noted that specific details are described in the following description to facilitate a full understanding of the present invention. However, the present invention can be implemented in a variety of other ways different from those described herein, and those skilled in the art can make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific implementation methods disclosed below. The subsequent description of the specification is a preferred implementation method for implementing the present invention, but the description is for the purpose of illustrating the general principles of the present invention and is not intended to limit the scope of the present invention. The scope of protection of the present invention shall be determined by the definition of the attached claims.

[0062] In the following, in conjunction with the accompanying drawings, an exhaust pipe and a manufacturing method thereof, and a temperature control device provided by an embodiment of the utility model are specifically described.

[0063] See also Figure 2 The present invention provides a schematic diagram of the structure of an exhaust pipe, which is used for process temperature adjustment in the production of display products. The exhaust pipe includes:

[0064] A first airway tube 1 and a second airway tube 2, wherein the first airway tube 1 is sleeved in the second airway tube 2, so that a first space A with at least one end being closed is formed between the first airway tube 1 and the second airway tube 2;

[0065] The first end 1a of the first air duct 1 is in communication with an external air source (not shown), and the first space A is closed at the end where the first end 1a is located;

[0066] In the extension direction X of the second air duct 2, a plurality of first exhaust holes H1 are evenly distributed on the tube wall of the second air duct 2, and the length of the movement path that the gas from the external gas source travels from entering the first end 1a to being discharged from the first exhaust hole H1 is at least greater than the length of the first air duct 1.

[0067] The same layer of a display product usually includes multiple film layers, and the film layers need to be formed within a specific temperature range. After the corresponding film layers complete the reaction, the display product needs to be cooled, which makes the manufacturing process of the display product in a high temperature-low temperature-high temperature cycle. The temperature of this process is mainly controlled by the temperature control device that accommodates the display product. The stage in which the film layer reacts at a specific temperature is the process stage of the corresponding film layer in the utility model. In the process stage, the temperature control device controls the heat source to heat the chamber of the temperature control device, so that the chamber of the temperature control device is a high temperature thermal environment.

[0068] Some film layers in the display panel not only need to be within a specific temperature range (i.e., the temperature range required for the process stage), but also require protective gas to be filled into the chamber of the temperature control equipment to protect the corresponding film layers when the film layers react. This gas filled into the chamber of the temperature control equipment during the film layer reaction is called process gas. Taking the display product as a display panel as an example, the display panel includes a photosensitive layer. The material of the photosensitive layer can be polyimide (PI). The transmittance of the photosensitive layer needs to reach a preset value. The process of making the transmittance of the photosensitive layer reach the preset value is called the process stage of the photosensitive layer. In the process stage of the photosensitive layer, nitrogen needs to be filled into the chamber of the temperature control equipment to make the photosensitive layer in a low-oxygen and high-temperature environment. The nitrogen filled into the chamber during the process stage of the photosensitive layer is the process gas corresponding to the photosensitive layer. For example, in the process of forming the active layer in the display panel, it is necessary to remove hydrogen in the active layer under a high temperature environment. This dehydrogenation process can be called the process stage of the active layer. Nitrogen is also needed to protect the active layer during the dehydrogenation process of the active layer. The nitrogen used in the dehydrogenation process of the active layer is the process gas corresponding to the active layer.

[0069] During the process stage, the process gas discharged into the chamber of the temperature control equipment will affect the temperature range required by the film layer in the display product. In order to reduce the impact of the process gas on the temperature in the chamber of the temperature control equipment, it is usually used Figure 1 The exhaust pipe shown is preheated in the chamber of the temperature control device and then discharged into the chamber of the temperature control device. Figure 1 The exhaust pipe in the Figure 1 The temperature of the process gas discharged from the exhaust hole closer to the air inlet end of the exhaust pipe is closer to the temperature of the air inlet end of the exhaust pipe, resulting in the chamber of the temperature control device being closer to the air inlet end of the exhaust pipe. Figure 1 The exhaust hole at the air inlet end of the exhaust pipe has a greater impact on the surrounding temperature, which makes the film layer to be formed in the display product not within the required temperature range, and finally leads to the closer Figure 1 The closer the air intake end of the exhaust pipe is to the center, the lower the yield of the product will be.

[0070] During the process stage, the heat absorbed by the process gas per unit time is recorded as Q 艺 :

[0071] Q 艺 =C 气 ×M 艺 ×△t 艺 (1);

[0072] Among them, C 气 is the specific heat capacity of the process gas, M 艺 is the mass of (process) gas entering the exhaust pipe per unit time, △t 艺 The temperature increase of the process gas in the exhaust pipe per unit time.

[0073] When the display product is cooled after the process is completed, the exhaust pipe used in the process is still used, and the size and radiation coefficient of the first air duct 1 and the second air duct 2 in the exhaust pipe have not changed. Therefore, the heat absorbed per unit time during cooling (represented as Q 冷 ) and the heat absorbed during the process (Q 艺 )same:

[0074] Q 冷 =Q 艺 =C 气 ×M 冷 ×△t 冷 (2);

[0075] Among them, C 气 is the specific heat capacity of the (cooling) gas, M 冷 is the mass of (cooling) gas entering the exhaust pipe per unit time, △t 冷 It is the temperature range of the cooling gas in the exhaust pipe per unit time. Since the process gas and the cooling gas are the same gas, their specific heat capacities are expressed in C 气 express.

[0076] Assuming that the ratio of the intake volume of cooling gas to process gas per unit time is 40:1, their mass ratio is: M 冷 :M 艺 =40:1. According to formula (1) and formula (2), the ratio of the temperature increase of the process gas to the cooling gas per unit time is △t 艺 :△t 冷 =40:1. Therefore, even if the temperature of the process gas is increased by 100℃~200℃ through the exhaust pipe provided by the utility model, the exhaust pipe provided by the utility model can only increase the temperature of the cooling gas by 2.5℃~5℃. Therefore, when the cooling gas is used to cool the display product, the exhaust pipe provided by the utility model has a very limited effect on the temperature of the cooling gas, which can be ignored. In other words: using the exhaust pipe provided by the utility model can greatly increase the temperature of the process gas in the process stage, and will not affect the cooling effect in the cooling stage.

[0077] It should be noted that the above-mentioned process gas and cooling gas can be the same gas, such as nitrogen.

[0078] Assumptions Figure 1 The length of the exhaust pipe is similar to that of the present invention. Figure 2 The length of the second air duct 2 (denoted as L) is the same as that of Figure 1 The number and position of the exhaust holes arranged on the exhaust pipe are similar to those of the present invention. Figure 2 The number and position of the first exhaust holes H1 provided on the second air guide pipe 2 are exactly the same. Figure 1 The distance from the exhaust hole closest to the air inlet end to the air inlet end and the utility model Figure 2 The distance from the first exhaust hole H1 closest to the first end 1a (i.e., the air inlet end) of the first air guide pipe 1 to the first end 1a is the same, which is recorded as △L, where L=11△L; assuming that the temperature range required for the process stage is T±△t', where T is the temperature required for the process stage, △t' is the error value of the temperature required for the process stage, the temperature of the process gas before entering the exhaust pipe is T', and the process gas from Figure 1 After entering the intake end of the middle exhaust pipe, the temperature of the exhaust port closest to the intake end increases by △t. Figure 1 The exhaust hole closest to the gas inlet is the first exhaust hole to discharge process gas. Figure 1 The process gas discharged from the first exhaust port is heated for the shortest time and thus has the least temperature rise, which makes the process gas discharged from Figure 1 The greater the difference (T-(T'+△t)) between the process gas discharged from the first exhaust hole for discharging process gas and the temperature T required for the process stage, the greater the Figure 1 The greater the influence of the temperature of the environment near the exhaust hole closest to the air inlet end; Figure 2 The process gas entering from the first end 1a of the first air duct 1 needs to pass through a tube length (denoted as L'=10△L) of the first air duct 1 and then be discharged from the first exhaust hole H1 closest to the second end 1b. The preheating time is greatly increased, so that the temperature is increased by at least 10△t. Figure 2 The temperature of the first exhaust hole H1 closest to the first end 1a rises the least. Figure 1 Compared with the difference between the exhaust gas from the first exhaust hole and the temperature T required in the process stage (T-(T'+△t)), Figure 2The difference (T-(T'+10△t)) between the exhaust gas from the first exhaust hole H1 that first exhausts gas and the temperature T required in the process stage is smaller and closer to the temperature T required in the process stage, so the yield of the display product can be greatly improved. It can be seen that the temperature increase of the exhaust gas from the first exhaust hole H1 that first exhausts gas is greatly improved by adopting the above-mentioned technical solution provided by the utility model, and the temperature increase of the exhaust gas from the other first exhaust holes H1 is even greater, and they are all within the temperature range required in the process stage. Therefore, the technical solution provided by the utility model can effectively increase the temperature rise, thereby improving the yield of the display product.

[0079] The utility model arranges the above-mentioned exhaust pipe in the temperature control equipment, and in the process stage, the external gas source is controlled to output low-volume and low-pressure process gas to the exhaust pipe. Since the process gas has low volume and low pressure, the flow rate is slow, and the process gas will be fully preheated in the exhaust pipe before being discharged, so that the display product is within the required high temperature range during the process stage. After the process stage is completed, the external gas source can be controlled to output high-volume and high-pressure cooling gas to the exhaust pipe. Since the cooling gas has a large volume and high pressure, the flow rate of the cooling gas is fast, and the cooling gas without obvious temperature rise will be quickly discharged through the exhaust pipe, thereby achieving the purpose of quickly cooling the display product.

[0080] The first air guide tube 1 also has a second end 1b opposite to the first end 1a. Figure 2 The second end 1b is open, and the first end 1a of the first air duct 1 is connected to an external gas source (not shown) as the air inlet end of the exhaust pipe. The gas enters from the first end 1a of the first air duct 1, and is discharged from the second end 1b of the first air duct to the first space A formed between the first air duct 1 and the second air duct 2, and then is discharged from the multiple first exhaust holes H1 of the second air duct 2. The process gas enters from the first end 1a to the first exhaust hole H1 ( Figure 2 The length of the moving path of the process gas is at least greater than the length of the first gas duct 1, so that even if the process gas is discharged from the first exhaust hole H1, there is enough time for the process gas to heat up to Figure 1 The temperature range of the exhaust port for the last exhaust of process gas in the scheme shown can prevent Figure 1 It can effectively improve product yield by eliminating the display products with poor quality that are produced in the process.

[0081] Please continue to see Figure 2 The second end 1b of the first air duct 1 opposite to the first end 1a is opened, and the opening of the second end 1b discharges the gas in the first air duct 1 into the first space A.

[0082] In the embodiment provided by the present invention, by setting the second end 1b of the first air duct 1 to be open so that the first end 1a is connected to the second end 1b, the gas in the first air duct 1 can be quickly discharged into the first space A between the first air duct 1 and the second air duct 2, and then discharged through the multiple first exhaust holes H1 on the second air duct 2.

[0083] See also Figure 3 This is a schematic diagram of the structure of another exhaust pipe provided by an embodiment of the utility model. The first air guide pipe 1 in the exhaust pipe can also be Figure 3 In the structure shown in , the second end 1b of the first air duct 1 is closed, and a plurality of second exhaust holes H2 are provided on the tube wall of the first air duct 1 near the second end 1b, and the plurality of second exhaust holes H2 exhaust the gas in the first air duct 1 into the first space A. The opening direction of the second exhaust holes H2 intersects with the opening direction of the first exhaust holes H1, such as the opening direction of the second exhaust holes H2 and the first exhaust holes H1 can be perpendicular, such as Figure 4 The 3D perspective view of an exhaust pipe provided by the embodiment of the utility model is shown. The opening direction of the first exhaust hole H1 is the extension direction of the center line of the first exhaust hole H1, and the opening direction of the second exhaust hole H2 is the extension direction of the center line of the second exhaust hole H2.

[0084] In the embodiment provided by the utility model, by closing the second end 1b of the first air duct 1 relative to the first end 1a, and providing a plurality of second exhaust holes H2 on the tube wall of the first air duct 1 close to the second end 1b, the gas in the first air duct 1 is discharged into the first space A through the plurality of second air duct holes, so that the flow rate of the gas entering the first space A can be reduced, so that it can be fully preheated in the exhaust pipe, thereby further improving the temperature of the preheated gas in the exhaust pipe.

[0085] See also Figure 5 A schematic diagram of the structure of another first air duct provided in an embodiment of the utility model. The first air duct 1 in the exhaust pipe comprises:

[0086] A plurality of sub-air ducts 11 are sleeved with each other, wherein two adjacent sub-air ducts 11 of the plurality of sub-air ducts 11 include a first sub-air duct 11a and a second sub-air duct 11b, wherein the first sub-air duct 11a is sleeved in the second sub-air duct 11b, so that a second space B with at least one end being closed is formed between the first sub-air duct 11a and the second sub-air duct 11b, and the closed end of the second space B is close to the first end 1a;

[0087] The air inlet position and the air outlet position of the first sub-air duct 11 a and the second sub-air duct 11 b are respectively close to different ends of the first air duct 1 .

[0088] like Figure 5As shown, the first air duct 1 includes two sub-air ducts 11 that are sleeved with each other, the inner layer is the first sub-air duct 11a, and the second sub-air duct 11b is sleeved outside the first sub-air duct 11a. The air inlet position of the first sub-air duct 11a is located at the first end 1a, and the air outlet position of the first sub-air duct 11a is located at the second end 1b; the air inlet position of the second sub-air duct 11b (that is, the air outlet position of the first sub-air duct 11a) is located at the second end 1b, and the air outlet position of the second sub-air duct 11b is located at the first end 1a. Figure 5 The structural diagram of the exhaust pipe is as follows: Figure 6 shown.

[0089] In the embodiment provided by the utility model, the first air duct 1 is configured as a plurality of sub-air ducts 11 which are sleeved with each other, two adjacent sub-air ducts 11 among the plurality of sub-air ducts 11 include a first sub-air duct 11a and a second sub-air duct 11b, and the first sub-air duct 11a is sleeved in the second sub-air duct 11b, so that a second space B with at least one end closed is formed between the first sub-air duct 11a and the second sub-air duct 11b, and the closed end of the second space B is close to the first end 1a; and the air inlet position and the air outlet position of the first sub-air duct 11a and the second sub-air duct 11b are arranged at different ends, so that the length of the movement path of the gas in the first air duct 1 can be increased, thereby increasing the temperature of the gas.

[0090] Please continue to see Figure 5 , the air inlet position of the first sub-air duct 11a is close to the first end 1a, and the air outlet position of the first sub-air duct 11a is close to the second end 1b; wherein the second end 1b is the other end of the first air duct 1 opposite to the first end 1a;

[0091] The second sub-air guide pipe 11b is closed at the end where the second end 1b is located, and has a plurality of third exhaust holes H3 on the pipe wall close to the first end 1a.

[0092] like Figure 5 As shown, the first sub-air duct 11a is opened at the end where the second end 1b is located, so that the gas in the first sub-air duct 11a can be quickly discharged into the second space B between the first sub-air duct 11a and the second sub-air duct 11b.

[0093] See also Figure 7 Schematic diagram of another structure of the first air duct provided by the embodiment of the utility model. The structure of the second sub-air duct 11b is similar to Figure 5 The structure of the second sub-air duct 11b is the same, and the first sub-air duct 11a is opened at the end where the second end 1b is located, which can reduce the flow rate of the gas entering the second space B between the first sub-air duct 11a and the second sub-air duct 11b, thereby further increasing the gas temperature. Figure 7 The structural diagram of the exhaust pipe is as follows: Figure 8shown.

[0094] See also Fig. 9 A schematic structural diagram of another first air duct provided in an embodiment of the utility model.

[0095] The air inlet position of the first sub-air duct 11a is close to the second end 1b, and the first sub-air duct 11a is closed at the end where the second end 1b is located, and the air outlet position of the first sub-air duct 11a is close to the first end 1a; wherein the second end 1b is the other end of the first air duct 1 opposite to the first end 1a;

[0096] The first sub-air guide tube 11a has a plurality of fifth exhaust holes H5 on the tube wall near the first end 1a.

[0097] like Fig. 9 As shown, the second sub-air duct 11b is closed at the end where the second end 1b is located; the second sub-air duct 11b has a plurality of sixth exhaust holes H6 on the tube wall close to the second end 1b.

[0098] A plurality of fifth exhaust holes H5 are provided on the tube wall of the first sub-air duct 11a near the first end 1a. The gas in the first sub-air duct 11a is discharged into the second space B between the first sub-air duct 11a and the second sub-air duct 11b through the fifth exhaust holes H5, so that the gas flow rate entering the second space B can be reduced, thereby increasing the gas temperature.

[0099] See also Fig.10 A schematic diagram of another exhaust pipe provided by an embodiment of the utility model. In the exhaust pipe, the second sub-air duct 11b is opened at the end where the second end 1b is located, so that the gas in the second sub-air duct 11b (i.e. the gas in the second space B) can be quickly discharged into the first space A.

[0100] See also Fig.11 A schematic structural diagram of another first air duct provided for an embodiment of the utility model, wherein the first air duct 1 includes four sub-air ducts 11, the innermost sub-air duct 11 is a first-layer sub-air duct 11, and the outermost sub-air duct 11 is a fourth-layer sub-air duct 11. When the first sub-air duct 11a includes an even number of sub-air ducts 11, the odd-numbered sub-air ducts 11 at the end where the second end 1b is located can be set to an open setting, and the even-numbered sub-air ducts 11 at the second end 1b can be set to a closed setting. The exhaust holes on the even-numbered sub-air ducts 11 are set according to the principle of setting the air outlet positions at different ends from those of adjacent sub-air ducts 11, which will not be repeated here.

[0101] In some embodiments, the first exhaust hole H1 intersects with the opening direction of the exhaust holes in the first air duct 1. Preferably, the first exhaust hole H1 is perpendicular to the opening direction of the exhaust holes in the first air duct 1. Fig.12A three-dimensional perspective view of another exhaust pipe provided by an embodiment of the utility model, Fig.12 The opening direction of the first exhaust hole H1 is the Y direction, and the opening direction of the second exhaust hole H2 is the Z direction, and the Y direction is perpendicular to the Z direction.

[0102] If the first air duct 1 includes a plurality of sub-air ducts 11, the exhaust holes on any sub-air duct 11 are exhaust holes on the first air duct 1. Figure 7 The fourth exhaust hole H4 on the first sub-air duct 11a and the third exhaust hole H3 on the second sub-air duct 11b are both exhaust holes on the first air duct 1. Fig. 9 The fifth exhaust hole H5 on the first sub-air duct 11a and the sixth exhaust hole H6 on the second sub-air duct 11b are both exhaust holes on the first air duct 1, and the opening direction of the exhaust holes on the sub-air duct 11 intersects with the opening direction of the first exhaust hole H1. The opening directions of the exhaust holes on two adjacent sub-air ducts 11 in the first air duct 1 can be the same or different, and there is no specific limitation.

[0103] See also Fig.13 A three-dimensional perspective view of another exhaust pipe provided by an embodiment of the utility model. The exhaust pipe further comprises: a plurality of support columns 3, which are located between the pipe walls of two adjacent layers of the air guide pipe.

[0104] Fig.13 The first air duct 1 is equivalent to having only one sub-air duct 11, and a plurality of support columns 3 are arranged between the tube walls of the first air duct 1 and the second air duct 2. When the first air duct 1 includes a plurality of sub-air ducts 11, the space between two adjacent layers of sub-air ducts 11 (which can also be regarded as two adjacent layers of air ducts) can also be as follows Fig.13 As in the above, multiple support columns 3 are arranged.

[0105] In the embodiment provided by the utility model, by arranging a plurality of support columns 3 between two adjacent layers of air ducts, the pipe wall of the air duct can be fixedly supported, the vibration of the air duct when the gas flows in the exhaust pipe can be reduced, and the stability of the exhaust pipe can be improved.

[0106] See also Fig.14 This is a cross-sectional view of another exhaust pipe provided in an embodiment of the utility model, in which the ratio of the cross-sectional area S2 of the second air duct 2 for accommodating gas to the cross-sectional area S1 of the first air duct 1 for accommodating gas is in the range of 0.31 to 24.5.

[0107] In some embodiments, the ratio of the cross-sectional area S2 of the second air duct 2 for accommodating gas to the cross-sectional area S1 of the first air duct 1 for accommodating gas is greater than 2.

[0108] In some embodiments, the inner diameter of the first airway tube 1 is greater than or equal to 4 mm and smaller than the inner diameter of the second airway tube 2 ; the inner diameter of the second airway tube 2 is less than or equal to 25 mm.

[0109] set up Fig.15 The cross-sectional area of ​​the first air duct 1 for accommodating gas is S1, and the cross-sectional area of ​​the second air duct 2 for accommodating gas is S2, that is, the cross-sectional area of ​​the first space A between the second air duct 2 and the first air duct 1 for accommodating gas. When the area S1 is increased (that is, the diameter of the first air duct 1 is increased), the air flow velocity in the first air duct 1 will decrease under the same process gas volume, the time for the process gas to pass through the first air duct 1 will become longer, and the preheating time will also increase accordingly, so that the temperature of the process gas discharged from the second air duct 2 is higher.

[0110] Assume that the cross-sectional area of ​​the gas contained in the first gas duct 1 is S1, the cross-sectional area of ​​the gas contained in the first space A between the second gas duct 2 and the first gas duct 1 is S2, and the preheating time is T1. At this time, the temperature increase of the preheated process gas is △t1;

[0111] When S1 is increased, assuming it is increased by n times (n>1), the cross-sectional area of ​​the first air duct 1 for accommodating gas becomes S1'=n×S1, and the corresponding cross-sectional area of ​​the first space A between the second air duct 2 and the first air duct 1 for accommodating gas becomes S2'=S-(n-1)S1, wherein S is the cross-sectional area of ​​the second air duct 2. At this time, under the same flow rate of process gas, the heating time of the process gas is T2=n×T1, (n>1), and the temperature rise after preheating is △t2=n×△t1, that is, the temperature rise increases to n times of the original (ignoring the change in the heating rate).

[0112] In general design, the gas supply capacity of the external gas source is very large, so S2'=S-(n-1)S1 can be set very small, and S1'=n×S1 (n>1) can be very large, that is, the range of multiples of n is very large, and the temperature rise is also large.

[0113] Therefore, during the design, if the temperature of the gas discharged from the first air duct 1 in the initially designed exhaust pipe does not reach the temperature range required in the process stage, the ratio of the cross-sectional area S2 of the second air duct 2 for accommodating gas to the cross-sectional area S1 of the first air duct 1 for accommodating gas can be set to be greater than 2, so as to increase the cross-sectional area S1 of the first air duct 1 for accommodating gas, thereby increasing the temperature of the gas discharged from the exhaust pipe.

[0114] In the embodiment provided by the utility model, by setting the ratio of the cross-sectional area S2 of the second air duct 1 to the cross-sectional area S1 of the first air duct to be greater than 2, not only the amplitude of the temperature increase of the process gas can be increased, but also the number of sub-air ducts 11 included in the first air duct 1 does not need to be increased, and there is no need to change the structure of the external gas source, add complex switching pipelines and preheating structures, and no additional gas power investment is required, and there is no risk of wear caused by pipeline switching.

[0115] In some embodiments, the material of the exhaust pipe includes at least one of glass, metal, ceramic, and plastic.

[0116] For example, the first air guide tube 1 and the second air guide tube 2 can both be made of a glass tube, a metal tube, a ceramic tube, or a plastic tube. The metal tube and the plastic tube can be formed by 3D printing.

[0117] The first air guide tube 1 and the second air guide tube 2 may be made of different materials with similar thermal properties (eg, the difference in expansion coefficient is less than a preset range).

[0118] The first air duct 1 and the second air duct 2 can be made of the same material, so that the first air duct 1 and the second air duct 2 have the same thermal characteristics, thereby improving the stability of the exhaust pipe and preventing the first air duct 1 and the second air duct 2 from breaking at the junction.

[0119] The first air duct 1 and the second air duct 2 can be made of a glass tube. Since the glass tube has a small expansion coefficient and is clean and easy to clean, making the first air duct 1 and the second air duct 2 of glass can prevent damage caused by thermal shock and reduce the risk of cleanliness.

[0120] In the case of a small temperature difference, the first air duct 1 and the second air duct 2 can also be made of metal tubes, and an expansion release method can be set for the metal tubes to reduce the impact of the expansion of the metal tubes; in the case of a large temperature difference, the first air duct 1 and the second air duct 2 can also be made of metal tubes with a small expansion coefficient (such as Invar), and the first air duct 1 can be used as a structural form including multiple layers of sub-air ducts 11 to achieve a longer heating channel and reach a higher temperature. Since the metal tube has strong machinability, the first air duct 1 and the second air duct 2 are made of metal tubes, which facilitates processing to form an exhaust pipe.

[0121] In addition, the first air guide tube 1 and the second air guide tube 2 may also be some polymer thin tubes or some composite material tubes that can be processed by injection molding and welding processes, such as PI heat-resistant plastic tubes, where PI is polyimide.

[0122] See also Fig.15 This is a schematic structural diagram of an exhaust pipe provided in an embodiment of the utility model, in which the thickness of the portion of the first air duct 1 enclosing the first space A is smaller than the wall thickness of the first air duct 1 .

[0123] If the first air guide tube 1 and the second air guide tube 2 are both made of glass, the first end 1a of the first air guide tube 1 can be made into Fig.16 The funnel-shaped first end 1a of the funnel is then folded toward the second air guide tube and welded to form Fig.15As shown in the figure, since glass will melt at high temperature, after high temperature annealing treatment, the first air guide pipe and the second air guide pipe are integrated without any welding marks.

[0124] See also Fig.17 This is a schematic diagram of the structure of another exhaust pipe provided in an embodiment of the utility model. If the first air duct 1 and the second air duct 2 are composed of metal tubes or plastic tubes, there is also a welding seam at the position where the first air duct 1 and the second air duct 2 are welded.

[0125] Based on the same utility model concept, the utility model embodiment provides a temperature control device, see Fig.18 A schematic diagram of the structure of a temperature control device provided in an embodiment of the utility model, the temperature control device comprises:

[0126] A closed cavity 100;

[0127] The exhaust pipe 200 as described above is located in the closed cavity 100;

[0128] The external gas source 300 is located outside the closed cavity 100 , and the external gas source 300 is communicated with the exhaust pipe 200 .

[0129] The display product is placed in the closed cavity 100. If the exhaust pipe 200 discharges the preheated process gas into the closed cavity during the process stage; if the display product needs to be cooled after completing a process stage, the external gas source 300 can provide cooling gas, and the exhaust pipe 200 can quickly discharge the cooling gas to cool the display product.

[0130] The external gas source 300 may include a process gas source and a cooling gas source, and different gas sources are sent to the exhaust pipe 200 through a gas exchange valve at different stages;

[0131] If the external gas source 300 can also provide only one gas source, a heat exchanger can be set between the external gas source 300 and the exhaust pipe 200. The heater is turned on in the process stage to heat the gas source provided by the external gas source 300 to the temperature required by the process gas source; the heat exchanger is turned off in the cooling stage, and the gas source provided by the external gas source 300 is sent to the exhaust pipe 200 without heating.

[0132] The above-mentioned display products can be OLED products, such as OLED devices, OLED display panels; the display products can also be liquid crystal display products, such as liquid crystal display panels, micro LED (Micro Light Emitting Diode Display, MLED) display products, virtual reality (Virtual Reality, VR) display products, augmented reality (Augmented Reality, AR) display products, etc.

[0133] Although the preferred embodiments of the present invention have been described, those skilled in the art may make other changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications falling within the scope of the present invention.

[0134] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. An exhaust pipe, which is used for process temperature control in the production of display products, wherein: include: a first air duct and a second air duct, wherein the first air duct is sleeved in the second air duct, so that a first space with at least one end being closed is formed between the first air duct and the second air duct; The first end of the first air guide tube is in communication with an external air source, and the first space is closed at the end where the first end is located; In the extension direction of the second air duct, a plurality of first exhaust holes are evenly distributed on the tube wall of the second air duct, and the length of the movement path that the gas from the external air source travels from entering the first end to being discharged from the first exhaust hole is at least greater than the length of the first air duct.

2. The exhaust pipe according to claim 1, wherein: The second end of the first air duct opposite to the first end is opened, and the opening of the second end discharges the gas in the first air duct into the first space; Alternatively, the second end is closed, and a tube wall of the first air duct close to the second end has a plurality of second exhaust holes, and the plurality of second exhaust holes exhaust the gas in the first air duct into the first space.

3. The exhaust pipe according to claim 1, wherein: The first airway comprises: A plurality of sub-air ducts sleeved with each other, wherein two adjacent sub-air ducts of the plurality of sub-air ducts include a first sub-air duct and a second sub-air duct, the first sub-air duct is sleeved in the second sub-air duct, so that a second space with at least one end closed is formed between the first sub-air duct and the second sub-air duct, and the closed end of the second space is close to the first end; The air inlet position and the air outlet position of the first sub-air duct and the second sub-air duct are respectively located at different ends of the first air duct.

4. The exhaust pipe according to claim 1 or 2, wherein: The ratio of the cross-sectional area of ​​the second air duct accommodating gas to the cross-sectional area of ​​the first air duct accommodating gas is greater than 2.

5. The exhaust pipe according to claim 3, wherein: The air inlet position of the first sub-air duct is close to the first end, and the air outlet position of the first sub-air duct is close to the second end; wherein the second end is the other end of the first air duct opposite to the first end; The second sub-air guide pipe is closed at the end where the second end is located, and has a plurality of third exhaust holes on the pipe wall close to the first end.

6. The exhaust pipe according to claim 5, wherein: The first sub-air guide tube is closed and arranged at the end where the second end is located; The first sub-air guide tube has a plurality of fourth exhaust holes on the tube wall close to the second end.

7. The exhaust pipe according to claim 5, wherein: The first sub-air duct is opened at the end where the second end is located.

8. The exhaust pipe according to claim 3, wherein: The air inlet position of the first sub-air duct is close to the second end, and the first sub-air duct is closed at the end where the second end is located, and the air outlet position of the first sub-air duct is close to the first end; wherein the second end is the other end of the first air duct opposite to the first end; The first sub-air guide tube has a plurality of fifth exhaust holes on a tube wall close to the first end.

9. The exhaust pipe according to claim 8, wherein: The second sub-air guide tube is opened at the end where the second end is located.

10. The exhaust pipe according to claim 7, wherein: The second sub-air guide tube is closed at the end where the second end is located; The second sub-air guide tube has a plurality of sixth exhaust holes on the tube wall close to the second end.

11. The exhaust pipe according to any one of claims 2 and 5 to 10, wherein: The first exhaust hole intersects with an opening direction of an exhaust hole in the first air guide pipe.

12. The exhaust pipe according to any one of claims 1 to 3 and 5 to 10, wherein: Also includes: A plurality of support columns are located between the walls of two adjacent layers of the air guide tubes.

13. The exhaust pipe according to any one of claims 1 to 3 and 5 to 10, wherein: The materials of the exhaust pipe include: At least one of glass, metal, ceramic, and plastic.

14. The exhaust pipe according to claim 13, wherein: The thickness of the portion of the first air duct enclosing the first space is smaller than the wall thickness of the first air duct.

15. The exhaust pipe according to claim 14, wherein: The exhaust pipe is made of the metal or the plastic, and a welding seam is provided at the welding position of the first air guide pipe and the second air guide pipe.

16. A temperature control device, wherein: include: Close the cavity; The exhaust pipe according to any one of claims 1 to 15, located in the closed cavity; The external air source is located outside the closed cavity and is communicated with the exhaust pipe.

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