Mask cleaning rack
By designing a mask cleaning hanger with a frame assembly and a raised fixed structure, the problem of difficult cleaning and drying of the mask edges in the prior art is solved, and a more efficient cleaning and drying effect is achieved, and the yield rate of the exposure process is improved.
Patent Information
- Application Number
- CN202421388160.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-18
- Publication Date
- 2025-04-04
- Estimated Expiration
- 2034-06-18
AI Technical Summary
The existing mask cleaning hanger cannot effectively clean the edges of the mask, resulting in dirt residue and easy to remain in the drying process, affecting the yield rate of the exposure process.
A mask cleaning hanger including a frame assembly and a raised fixed structure is designed. The frame assembly forms an accommodating space through at least two frame structural members, and the protruding fixed structure protrudes from the frame and extends to the accommodating space, which can lock the mask plate into the accommodating space and be spaced from the frame to ensure maximum area exposure for cleaning and drying.
By cleaning the hanging tool of the mask plate, it is possible to effectively avoid dirt or cleaning liquid at the edge of the mask plate, optimize the cleaning and drying effect, and improve the yield rate of the exposure process.
Smart Images

Figure CN222710421U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of photovoltaic cell manufacturing equipment, in particular to a mask cleaning hanger. Background Art
[0002] In the process of photovoltaic cell manufacturing, the proximity exposure process is an important manufacturing step, which relies on the mask to filter the light and then realize the patterning of the cell. However, during the long-term use of the mask, dust is easily deposited on its surface, and there will be colloid residues during the patterning process, which may affect the accuracy of the patterning. Therefore, it is very important to clean the mask surface regularly.
[0003] In the current mask cleaning process, the mask cleaning hanger includes two "U"-shaped cover plates 01', which clamp and fix the edges of the mask from both sides of the mask, exposing the middle part 02' of the mask, and can clean the middle part 02' of the mask and the edge exposed from the "U"-shaped opening. The edge of the mask clamped by the "U"-shaped cover plates 01' cannot be cleaned and is prone to dirt. In addition, when drying after cleaning, the edge of the mask clamped by the "U"-shaped cover plates 01' is not easy to dry, and cleaning liquid is likely to remain.
[0004] Based on the above, a mask cleaning rack is urgently needed to solve the above technical problems. Utility Model Content
[0005] The utility model aims to provide a mask cleaning hanger, which can efficiently, safely and simply complete the mask cleaning operation.
[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical solutions:
[0007] A mask cleaning hanger comprises: a frame assembly, the frame assembly comprises at least two frame structures, at least two of the frame structures are detachably connected to enclose a storage space for accommodating the mask; at least three raised fixing structures, the at least three raised fixing structures are protrudingly arranged on at least two frames of the frame assembly and extend into the storage space; when in use, the raised fixing structures can clamp the mask within the storage space and keep the mask and the frame provided with the raised fixing structures spaced apart.
[0008] Preferably, the protruding fixing structure comprises a first abutting portion, a second abutting portion and a third abutting portion fixedly arranged on the frame and extending toward the accommodating space, the second abutting portion and the third abutting portion are arranged at intervals, and the first abutting portion is arranged in the interval between the second abutting portion and the third abutting portion;
[0009] When in use, the first abutting portion abuts between the frame and the mask, the second abutting portion abuts against one side of the mask along the thickness direction of the mask, and the third abutting portion abuts against the other side of the mask along the thickness direction of the mask.
[0010] Preferably, the dimensions of the second abutting portion and the third abutting portion protruding from the frame are both larger than the dimensions of the first abutting portion protruding from the frame, and the mask can be limitedly inserted between the second abutting portion and the third abutting portion.
[0011] Preferably, the protruding fixing structure is arranged on two opposite side frames of the frame assembly, and the protruding fixing structure includes a first abutting portion extending toward the accommodating space; when in use, the protruding fixing structure arranged on the two opposite side frames of the frame assembly abuts against the mask from both sides of the mask to clamp and fix the mask.
[0012] Preferably, at least two of the protruding fixing structures are provided on all the frame frames of the frame assembly; or, one of the protruding fixing structures is provided in the middle of each of the frame frames.
[0013] Preferably, a hollow groove is provided on the frame below the accommodating space, and the hollow groove is provided through the accommodating space in the up-down direction.
[0014] Preferably, the hollow grooves are arranged on both sides of the raised fixing structure.
[0015] Preferably, the frame assembly comprises a first frame structure and a second frame structure, the first frame structure is in a "U" shape, and the second frame structure is detachably connected to an opening of the "U" shape;
[0016] The second frame structure is in a straight line or a U shape.
[0017] Preferably, the frame structure members are detachably connected to each other via threaded fasteners; or, the frame structure members are connected to each other via snap fasteners.
[0018] Preferably, the mask cleaning hanger also includes a bracket, which is connected to the frame assembly; a limiting structure is provided on the bracket, and the limiting structure is a latch or a slot, which is used to cooperate with the slot or the latch on the cleaning device to limit and fix the mask cleaning hanger.
[0019] The beneficial effects of the utility model are as follows: through the mask cleaning hanger, a storage space can be defined by the frame assembly to accommodate the mask, and the mask can be fixed in the storage space by the protruding fixing structure to facilitate movement. At the same time, the protruding fixing structure can abut between the mask and the frame provided with the protruding fixing structure, so that the mask and the frame assembly are spaced apart, so that the mask can be cleaned and dried in a manner of maximum exposure without being blocked by the frame assembly, which can effectively avoid the phenomenon of residual dirt or cleaning liquid on the edge of the mask, optimize the cleaning and drying effects, and improve the yield rate of the exposure process. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1 It is a schematic diagram of the suspension of a battery cell in the prior art;
[0021] Figure 2 It is a three-dimensional diagram of the mask cleaning hanger in the first embodiment provided by the utility model;
[0022] Figure 3 It is a front view of the mask cleaning hanger in the first embodiment provided by the utility model;
[0023] Figure 4 yes Figure 2 A partial enlarged view of the middle A;
[0024] Figure 5 It is an assembly diagram of the mask cleaning hanger in the first embodiment provided by the utility model;
[0025] Figure 6 It is a front view of the mask cleaning hanger in the second embodiment provided by the utility model;
[0026] Figure 7 It is a front view of the mask cleaning hanger in the third embodiment provided by the utility model;
[0027] Figure 8 It is a front view of a mask cleaning hanger in a fourth embodiment provided by the utility model;
[0028] Fig. 9 It is a three-dimensional diagram of a mask cleaning hanger in a fifth embodiment provided by the utility model;
[0029] Fig.10 yes Fig. 9 A partial enlarged view of point B in the middle.
[0030] In the figure:
[0031] 01', "U" shaped cover; 02', middle part of the mask;
[0032] 100. Accommodation space;
[0033] 1. frame assembly; 11. first frame structure; 12. second frame structure; 121. hollow groove;
[0034] 2. protruding fixing structure; 21. first abutting portion; 22. second abutting portion; 23. third abutting portion;
[0035] 3. Threaded fasteners;
[0036] 4. Bracket; 41. Limiting structure. DETAILED DESCRIPTION
[0037] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.
[0038] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0039] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.
[0040] In the description of this embodiment, the terms "upper", "lower", "right", etc., are based on the directions or positions shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.
[0041] The following is based on the attached Figure 2 To Attachment Fig.10 The utility model introduces a mask cleaning hanger.
[0042] Specifically, Figure 2 , Figure 3 As shown, the mask cleaning rack mainly includes a frame assembly 1 and a protruding fixing structure 2. The frame assembly 1 includes at least two frame structures, which are detachably connected and enclose a receiving space 100 capable of receiving the mask after being connected.
[0043] The mask cleaning rack also includes at least three protruding fixing structures 2, which are protrudingly arranged on at least two frames of the frame structure and extend into the accommodation space 100. When in use, after the mask enters the accommodation space 100, the protruding fixing structures 2 can abut between the mask and the frame structure along at least one of the length direction and the width direction of the mask, so that the mask is clamped and limited in the accommodation space 100, and the mask is spaced apart from the frame provided with the protruding fixing structures 2.
[0044] The mask cleaning rack can define a receiving space 100 to receive the mask through the frame assembly 1, and can fix the mask in the receiving space 100 through the protruding fixing structure 2 for easy movement. At the same time, the protruding fixing structure 2 can abut between the mask and the frame provided with the protruding fixing structure, so that the mask and the frame assembly 1 are spaced apart, so that the mask can be cleaned and dried in a maximum exposure manner without being blocked by the frame assembly 1, which can effectively avoid the phenomenon of residual dirt or cleaning liquid on the edge of the mask, optimize the cleaning and drying effects, and improve the yield rate of the exposure process.
[0045] Specifically, Figure 2 , Figure 4 As shown, in this embodiment, the protruding fixing structure 2 includes a first abutting portion 21, a second abutting portion 22 and a third abutting portion 23, and the first abutting portion 21, the second abutting portion 22 and the third abutting portion 23 are fixedly arranged on the frame structure. The second abutting portion 22 and the third abutting portion 23 are arranged at intervals, and the first abutting portion 21 is arranged in the interval between the second abutting portion 22 and the third abutting portion 23. When the mask is limited in the accommodation space 100, the first abutting portion 21 abuts between the frame and the mask, thereby abutting the mask along the length direction or width direction of the mask, playing a role of supporting and positioning. The second abutting portion 22 abuts against one side of the mask along the thickness direction of the mask, and the third abutting portion 23 abuts against the other side of the mask along the thickness direction of the mask, thereby limiting the mask along the thickness direction of the mask, playing a role of limiting and enhancing fixation.
[0046] More specifically, if Figure 4 As shown, the dimensions of the second abutting portion 22 and the third abutting portion 23 protruding from the frame are both larger than the dimensions of the first abutting portion 21 protruding from the frame, and the first abutting portion 21, the second abutting portion 22 and the third abutting portion 23 are combined to form a groove-shaped structure, so that the mask can be limitedly inserted between the second abutting portion 22 and the third abutting portion 23, and supported and positioned by the first abutting portion 21.
[0047] Of course, in some embodiments, only the first abutting portion 21 may be provided, and the mask may be clamped and fixed between the protruding fixing structures 2 by abutting between the frame structure and the mask. Therefore, the specific shape and structure of the protruding fixing structure 2 are not specifically limited in the present invention, as long as the mask and the frame structure can be spaced apart and the mask can be limited in the accommodating space 100.
[0048] like Figure 5 As shown, in this embodiment, the frame assembly 1 includes a first frame structure 11 and a second frame structure 12. The first frame structure 11 is in a "U" shape, and the second frame structure 12 is in a "I" shape. The second frame structure 12 is detachably connected to the opening of the "U". When the first frame structure 11 and the second frame structure 12 are not connected, the mask can enter the middle area of the first frame structure 11 through the opening, and when the first frame structure 11 and the second frame structure 12 are connected, they can enclose to form the above-mentioned accommodation space 100.
[0049] When in use, first place the mask into the accommodating space 100 through the opening, and ensure that the raised fixing structure 2 firmly fixes the mask in the frame assembly 1. Next, the entire mask cleaning rack can be placed in the cleaning equipment for cleaning. Since the mask is firmly fixed, the uniformity and thoroughness of the cleaning can be ensured, while avoiding damage to the mask. After cleaning, take out the mask cleaning rack and the mask together and dry them. After drying, the mask can be easily removed by separating the first frame structure 11 and the second frame structure 12. Finally, perform simple cleaning and maintenance on the mask cleaning rack for next use.
[0050] Optionally, in some embodiments, the second frame structure 12 can also adopt a "U"-shaped structure. Of course, the first frame structure 11 can also adopt an "I"-shaped structure, or more frame structures can be combined to form a frame assembly 1. The utility model does not limit the specific number and structure of the frame structures, as long as the above-mentioned accommodating space 100 can be formed.
[0051] Continue to refer Figure 5As shown, in this embodiment, the mask cleaning rack also includes a threaded fastener 3, and the frame structures are detachably connected through the threaded fastener 3. Exemplarily, the second frame structure 12 is provided with two through holes, and the first frame structure 11 is provided with two threaded holes. The threaded fastener 3 is a bolt, and the bolt passes through the through hole and is threadedly connected to the threaded hole of the first frame structure 11 to detachably connect the first frame structure 11 and the second frame structure 12. Optionally, in some other embodiments, other methods such as snap-on connection can also be used to achieve detachable connection between frame structures, which is not specifically limited in the present utility model.
[0052] In this embodiment, if Figure 3 , Figure 5 As shown, two of the above-mentioned raised fixing structures 2 are arranged on each frame, and the four sides of the mask are respectively abutted against two raised fixing structures 2, so that the mask and each frame structure are spaced apart to avoid residual dirt and cleaning fluid.
[0053] Optionally, in some embodiments, the protruding fixing structure 2 is disposed on two opposite frames of the frame assembly 1, and the protruding fixing structure 2 includes a first abutting portion 21 extending toward the accommodating space 100. When in use, the protruding fixing structure 2 disposed on the two opposite frames of the frame assembly 1 abuts against the mask from both sides of the mask to clamp and fix the mask.
[0054] For example, refer to Figure 6 As shown, the mask is suspended for cleaning by the mask cleaning hanger, and at this time, the length direction and width direction of the mask are both located in the vertical plane. In this embodiment, the above-mentioned raised fixing structure 2 can be set only on the two frames located above and below the accommodating space 100, and each frame is provided with two raised fixing structures 2 to achieve the fixation of the mask. At this time, the frame structure members located on the left and right of the accommodating space 100 can be directly spaced from the mask, which can also achieve the effect of avoiding obstruction, and at the same time, it does not affect the clamping and fixing of the mask in the up and down directions. Of course, in some embodiments, only three raised fixing structures 2 can be set on the two frames to meet the needs of fixing the mask.
[0055] Alternatively, if Figure 7 As shown, in some embodiments, three of the above-mentioned raised fixing structures 2 are arranged on each frame, and the four sides of the mask are respectively abutted against three raised fixing structures 2, so that the mask and each frame structure are spaced apart to avoid residual dirt and cleaning fluid.
[0056] Of course, in some other embodiments, such as Figure 8As shown, each frame may be provided with a protruding fixing structure 2, and each of the four sides of the mask plate abuts against a protruding fixing structure 2, so that the mask plate and each frame structure can be spaced apart to avoid residual dirt and cleaning liquid. Preferably, a protruding fixing structure 2 is provided in the middle of each frame to achieve stable clamping and fixing.
[0057] Further optionally, if Figure 8 , Fig.10 As shown, in this embodiment, the two different structures of the above-mentioned protruding fixing structures 2 can be used at the same time. Exemplarily, the protruding fixing structure 2 located at the bottom frame includes a first abutting portion 21, a second abutting portion 22 and a third abutting portion 23, while the protruding fixing structure 2 located at the side frame only includes the first abutting portion 21.
[0058] Therefore, in the present invention, there is no limitation on the specific structure, position and number of the raised fixing structure 2, as long as it can achieve the effect of limiting fixation (or clamping fixation) and preventing obstruction.
[0059] Preferably, at least one protruding fixing structure 2 is provided on the frame structure below the accommodating space 100 to prevent the cleaning liquid that is easily accumulated on the frame structure from contacting the mask under the action of gravity, resulting in incomplete cleaning. Further preferably, in this embodiment, the mask cleaning hanger includes eight protruding fixing structures 2, and each side of the mask is abutted against at least two protruding fixing structures 2 to achieve uniform limiting fixation or uniform clamping fixation of the mask, which can not only improve the stability of fixation, but also avoid damage to the mask.
[0060] like Figure 4 , Fig.10 As shown, the frame structure member located below the accommodating space 100 is provided with a hollow groove 121, and the hollow groove 121 is arranged to penetrate along the up and down direction of the accommodating space 100. The hollow groove 121 can facilitate the dripping of the cleaning liquid and avoid the accumulation of a large amount of cleaning liquid on the frame structure member. At the same time, it is also helpful to reduce the weight of the entire mask cleaning hanger and facilitate the transfer of the mask. More preferably, the frame structure members are all provided with a hollow groove 121 to further reduce the weight of the mask cleaning hanger and to optimize the efficiency and effect of cleaning and drying. Optionally, the hollow groove 121 is provided on both sides of the protruding fixed structure 2 to avoid the accumulation and residual cleaning liquid on any side of the protruding fixed structure 2.
[0061] Preferably, in this embodiment, the mask cleaning rack further includes a bracket 4, which is connected to the frame assembly 1 by fixing screws. In addition, the bracket 4 is provided with a limiting structure 41, which is a convex or a groove, and is used to cooperate with the groove or convex on the cleaning device, so as to limit and fix the mask cleaning rack during cleaning and drying.
[0062] For example, Fig. 9 As shown, a limiting structure 41 is provided at each end of the bracket 4, and a cleaning device for cleaning the mask is provided with a slot. In the horizontal direction, the limiting structure 41 is a triangular convexity, and the inner contour of the slot is a V-shape. When the limiting structure 41 is inserted into the slot, the mask cleaning hanger can be fixed in position to prevent it from rotating, thereby improving the stability of the mask during cleaning and drying.
[0063] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.
Claims
1. A mask cleaning rack, characterized in that: include: A frame assembly (1), the frame assembly (1) comprising at least two frame structures, the at least two frame structures being detachably connected to enclose a receiving space (100) for receiving a mask; At least three protruding fixing structures (2), the at least three protruding fixing structures (2) are protrudingly arranged on at least two frames of the frame assembly (1) and extend into the accommodating space (100); when in use, the protruding fixing structures (2) can clamp the mask plate within the accommodating space (100) and keep the mask plate and the frame provided with the protruding fixing structures (2) spaced apart.
2. The mask cleaning rack according to claim 1, characterized in that: The protruding fixing structure (2) comprises a first abutting portion (21), a second abutting portion (22) and a third abutting portion (23) which are fixedly arranged on the frame and extend toward the accommodating space (100), the second abutting portion (22) and the third abutting portion (23) being arranged at intervals, and the first abutting portion (21) being arranged in the interval between the second abutting portion (22) and the third abutting portion (23); When in use, the first abutting portion (21) abuts between the frame and the mask, the second abutting portion (22) abuts against one side of the mask along the thickness direction of the mask, and the third abutting portion (23) abuts against the other side of the mask along the thickness direction of the mask.
3. The mask cleaning rack according to claim 2, characterized in that: The dimensions of the second abutting portion (22) and the third abutting portion (23) protruding from the frame are both greater than the dimensions of the first abutting portion (21) protruding from the frame, and the mask can be inserted between the second abutting portion (22) and the third abutting portion (23) in a limited position.
4. The mask cleaning rack according to claim 1, characterized in that: The protruding fixing structure (2) is arranged on two opposite frames of the frame assembly (1), and the protruding fixing structure (2) includes a first abutting portion (21) extending toward the accommodating space (100); when in use, the protruding fixing structure (2) arranged on the two opposite frames of the frame assembly (1) abuts against the mask from both sides of the mask to clamp and fix the mask.
5. The mask cleaning rack according to claim 1, characterized in that: At least two of the protruding fixing structures (2) are provided on all the frame frames of the frame assembly (1); or, one of the protruding fixing structures (2) is provided in the middle of each of the frame frames.
6. The mask cleaning rack according to claim 1, characterized in that: A hollow groove (121) is provided on the frame below the accommodating space (100), and the hollow groove (121) is provided through the accommodating space (100) in the up-down direction.
7. The mask cleaning rack according to claim 6, characterized in that: The hollow grooves (121) are arranged on both sides of the raised fixing structure (2).
8. The mask cleaning rack according to claim 1, characterized in that: The frame assembly (1) comprises a first frame structure (11) and a second frame structure (12), wherein the first frame structure (11) is in a "U" shape, and the second frame structure (12) is detachably connected to an opening of the "U" shape; The second frame structure (12) is in a straight line or a U shape.
9. The mask cleaning rack according to claim 1, characterized in that: The frame structure members are detachably connected to each other via threaded fasteners (3); or, the frame structure members are connected to each other via snap fasteners.
10. The mask cleaning rack according to claim 1, characterized in that: The mask cleaning hanger also includes a bracket (4), the bracket (4) being connected to the frame assembly (1); a limiting structure (41) is provided on the bracket (4), the limiting structure (41) being a latching protrusion or a latching groove, and being used to cooperate with a latching groove or a latching protrusion on a cleaning device to limit and fix the mask cleaning hanger.